摘要:
A steering apparatus support structure includes a steering support member extending transversely in a vehicle body and secured to rigid side components of the vehicle body which are likely free from deformation during a frontal end collision and a support bracket device secured to and supported by the steering support member for supporting forward and rearward portions of the steering column. The support bracket device is releasably linked to a vehicle body part which can be deformed backward during a frontal end collision, and the vehicle body part is allowed to be disconnected from the support bracket device when backward deformation is caused in the vehicle body part.
摘要:
A semiconductor light emitting device includes a semiconductor structure, a transparent electrically-conducting layer, a dielectric film, and a metal reflecting layer. The semiconductor structure includes an active region. The transparent electrically-conducting layer is formed on the upper surface of the semiconductor structure. The dielectric film is formed on the upper surface of the transparent electrically-conducting layer. The metal reflecting layer is formed on the upper surface of the dielectric film. The dielectric film has at least one opening whereby partially exposing the transparent electrically-conducting layer. The transparent electrically-conducting layer is electrically connected to the metal reflecting layer through the opening. A barrier layer is partially formed and covers the opening so that the barrier layer is interposed between the transparent electrically-conducting layer and the metal reflecting layer.
摘要:
An electric vacuum cleaner comprises a vertical type cleaner body provided with a dust collection chamber a handle protrusively provided on an upper portion of the cleaner body, a suction nozzle provided on an lower portion of the cleaner body in such a manner as to communicate with the dust collection chamber being rotatable back and forth with respect to the cleaner body, and being contactable with a surface to be cleaned, an electric fan provided in the suction nozzle, and a rotary brush which is rotated by the electric fan and is built in the suction nozzle. A clutch mechanism which transmits and interrupts power to the rotary brush is provided between the rotary brush and the electric fan. The suction nozzle is rotatably provided on the cleaner body via a hinge mechanism. The clutch mechanism is coupled to the hinge mechanism by a link mechanism.
摘要:
A method of manufacturing a semiconductor device includes forming a first insulating layer on a major surface of a semiconductor substrate. The first insulating layer has an opening located at a predetermined position on and reaching the major surface of the substrate. A first conductive layer is formed in the opening and in contact with the surface of the first insulating layer. A second insulating layer is formed on a predetermined region of the first conductive layer. A second conductive layer is formed to cover at least the second insulating layer. The second conductive layer is removed from at least an upper surface of the second insulating layer to expose the upper surface thereof. The exposed upper surface of the second insulating layer is etched to partially remove a predetermined thickness of the second insulating layer. The second conductive layer is sputter-etched with inert gas to substantially round the tip and flatten a side surface thereof. A capacitor insulating layer is formed to cover the second conductive layer after removing the residual second insulating layer. A third conductive layer is formed to cover the capacitor insulating layer. The sputter-etching of the second conductive layer results in a side surface roughness of the second conductive layer of no more than 200 .ANG..
摘要:
In a method of manufacturing a stacked-type semiconductor device, firstly, a first semiconductor substrate having a first device formed thereon is covered with an interlayer insulating layer and a planarized polycrystalline silicon layer is formed on the interlayer insulating layer. The first semiconductor substrate and a second semiconductor substrate are joined together by putting the surface of the polycrystalline silicon layer in close contact with the surface of a refractory metal layer formed on the second semiconductor substrate, applying thermal treatment at 700.degree. C. or below and changing the refractory metal layer to silicide.
摘要:
A method of cleaning semiconductor devices which removes or transmutes the contaminants sticking on sidewalls of a pattern or a trench is formed is disclosed. A substrate to be treated on which a pattern or a trench is formed is located in a processing container. A reactive gas which reacts with the contaminants sticking on the sidewall of the pattern or the trench to produce reactive ions which remove or transmute the contaminants is introduced into the processing container. Plasma of the reactive gas is produced by electronic cyclotron resonance in order to produce reactive ions from the reactive gas introduced into the processing container. According to the method, the temperature of the reactive ions in the plasma becomes high, with the result that the motion of the reactive ions in the plasma becomes more active. Accordingly, a velocity vector in a horizontal direction of the reactive ions becomes larger, which enables efficient removal or change in quality of the contaminants sticking on the sidewalls of the pattern or the trench.
摘要:
A principal feature of the present invention is to clean a surface of a semiconductor substrate without providing a damaged layer to the surface thereof. A native oxide film formed on the surface of a silicon substrate is etched by plasma employing a gas containing fluorine. The surface of the semiconductor substrate is again subjected to plasma etching by employing a gas containing fluorine in order to remove a surface damaged layer and a fluorocarbon layer formed in the above step of plasma etching. The semiconductor substrate surface is irradiated with ultraviolet rays under a low pressure in order to dissociate and remove fluorine atoms chemically adsorbed to the semiconductor substrate surface upon the latter plasma etching.
摘要:
A butenoic or propenoic acid derivative having the following formula in which G is an aryl or a heterocyclic ring, R11 and R12 are hydrogen or an alkyl, X is sulfur or oxygen, R2 and R3 are hydrogen, an substituent such as an alkyl and J is pyridyl or phenyl having substituents and a heterocyclic ring may be formed between R2, R3 and J is provided here and is useful in the pharmacological field. ##STR1##
摘要:
A plasma etching apparatus comprises a chamber, a holding table for holding samples, such as a semiconductor substrate to be etched, in the chamber, a plasma-generating device for generating a plasma within the chamber, and a magnetic-field-forming device which forms a magnetic field perpendicular to the surface of the sample placed on the holding table and parallel the inner wall of the chamber.
摘要:
A semiconductor light emitting device includes a semiconductor structure, a transparent electrically-conducting layer, a dielectric film, and a metal reflecting layer. The semiconductor structure includes an active region. The transparent electrically-conducting layer is formed on the upper surface of the semiconductor structure. The dielectric film is formed on the upper surface of the transparent electrically-conducting layer. The metal reflecting layer is formed on the upper surface of the dielectric film. The dielectric film has at least one opening whereby partially exposing the transparent electrically-conducting layer. The transparent electrically-conducting layer is electrically connected to the metal reflecting layer through the opening. A barrier layer is partially formed and covers the opening so that the barrier layer is interposed between the transparent electrically-conducting layer and the metal reflecting layer.