Abstract:
An activated gas injector includes a flow passage defining member partitioned into a gas activation passage and a gas introduction passage by a partition wall; a gas introduction port through which a process gas is introduced into the gas introduction passage; a pair of electrodes to be supplied with electrical power to activate the process gas, wherein the electrodes extend along the partition wall in the gas activation passage; through-holes formed in the partition wall and arranged along a longitudinal direction of the electrodes, wherein the through-holes allow the process gas to flow from the gas introduction passage to the gas activation passage; and gas ejection holes provided in the gas activation passage along the longitudinal direction of the electrodes, wherein the gas ejection holes allow the process gas activated in the gas activation passage to be ejected therefrom.
Abstract:
The present invention provides methods for fabricating an electrode device component, the method comprising the steps of: (i) providing a biocompatible carrier material, and (ii) performing an ablative method on the biocompatible carrier material to form a recess, the recess capable of receiving a biocompatible electrode material. The components so fabricated are useful as carriers for biological electrodes, such as cochlear electrodes and nerve cuff electrodes.
Abstract:
A light-emitting device includes an autotransformer, a circuit module and a light-emitting module. The autotransformer includes a first positive conductive wire for receiving a first input voltage within a first predetermined voltage range, a second positive conductive wire for receiving a second input voltage within a second predetermined voltage range, and a common negative conductive wire electrically mated to the first positive conductive wire and the second positive conductive wire. The first predetermined voltage range is larger than the second predetermined voltage range. The circuit module includes a driver electrically connected to the autotransformer, and a predetermined operating voltage value for driving the driver is substantially within the second predetermined voltage range. The light-emitting module is electrically connected to the driver. Therefore, one of both the first and the second positive conductive wires along with the common negative conductive wire are electrically connected to an AC power source.
Abstract:
Systems and methods for distributing power to a plurality of integrated circuit dies are provided. In some aspects, a system includes a substrate and a plurality of integrated circuit dies disposed on the substrate. Each of the plurality of integrated circuit dies includes a circuit and a target inductive element coupled to the circuit. The system also includes a power supply module configured to generate a source power signal. The system also includes at least one source inductive element configured to electromagnetically couple the source power signal to one or more of the plurality of the target inductive elements to generate one or more target power signals that supply power to one or more corresponding circuits.
Abstract:
An electrode having a gas discharge function, where the degree of freedom related to a maximum gas flow rate is abundant, an electrode cover member may be thinned, and a change of a gas behavior according to time is difficult to be generated in a processing chamber during gas introduction. The electrode includes: a base material having a plurality of gas holes; and an electrode cover member having a plurality of gas holes respectively corresponding to the plurality of gas holes of the base material in a one-to-one manner, fixed to the base material, and disposed facing a processing space in which the object is plasma-processed, wherein a gas hole diameter of the electrode cover member is larger than a gas hole diameter of the base material.
Abstract:
A target for sputtering which enables to attain high rate film-formation of a transparent conductive film suitable for a blue LED or a solar cell, and a noduleless film-formation, an oxide sintered body most suitable for obtaining the same, and a production method thereof.A oxide sintered body comprising an indium oxide and a cerium oxide, and further comprising, as an oxide, one or more kinds of an metal element (M element) selected from the metal element group consisting of titanium, zirconium, hafnium, molybdenum and tungsten, wherein the cerium content is 0.3 to 9% by atom, as an atomicity ratio of Ce/(In+Ce+M) , the M element content is equal to or lower than 1% by atom, as an atomicity ratio of M/(In+Ce+M) , and the total content of cerium and the M element is equal to or lower than 9% by atom, as an atomicity ratio of (Ce+M)/(In+Ce+M) , characterized in that said oxide sintered body has an In2O3 phase of a bixbyite structure as a main crystal phase, has a CeO2 phase of a fluorite-type structure finely dispersed as crystal grains having an average particle diameter of equal to or smaller than 3 μm, as a second phase; a production method for a oxide sintered body obtained by mixing indium oxide powder and cerium oxide powder, and the raw material powder with average particle diameter of equal to or smaller than 1.5 μm containing oxide powder of M element and then molding the mixed powder, and sintering the molding by a normal pressure sintering method, or molding and sintering the mixed powder by a hot press method, and the like.
Abstract translation:能够实现适合于蓝色LED或太阳能电池的透明导电膜的高速成膜,无节点成膜,最适合于获得该氧化物烧结体的溅射靶和制造方法 其中。 包含氧化铟和氧化铈的氧化物烧结体,并且还包含作为氧化物的一种或多种选自钛,锆,铪,钼和钨的金属元素组中的一种或多种金属元素(M元素) 其中铈含量为0.3〜9原子%,作为Ce /(In + Ce + M)的原子数比,M元素含量为1原子%以下,原子比为M / (Ce + M)/(In + Ce + M),并且铈和M元素的总含量等于或低于9原子%,原子数比(Ce + M)/(In + Ce + M) 所述氧化物烧结体具有作为主晶相的二氧化硅结构的In 2 O 3相,具有以平均粒径为3μm以下的晶粒微分散的萤石型结构的CeO 2相作为 第二阶段 通过混合氧化铟粉末和氧化铈粉末得到的氧化物烧结体的制造方法以及含有M元素的氧化物粉末的平均粒径等于或小于1.5μm的原料粉末,然后将该混合粉末成型, 通过常压烧结法烧结成型体,或通过热压法成型和烧结混合粉末等。