公开(公告)号：US11815079B2

公开(公告)日：2023-11-14

申请号：US17611793

申请日：2020-04-24

申请人： Edwards Limited

发明人： Andrew David Chew

IPC分类号： F04B37/02 ,  F04B37/14 ,  F04B41/06 ,  F04B49/06 ,  F04B37/08 ,  H01J41/16 ,  H01J7/18 ,  C23C14/56 ,  F04B7/02

CPC分类号： F04B7/02 ,  C23C14/564 ,  F04B37/08 ,  F04B37/14 ,  F04B41/06 ,  F04B49/06 ,  H01J7/18 ,  H01J41/16 ,  Y10S417/901

摘要： A vacuum pumping system comprising: a high pressure getter pump configured to operate from an initial pressure of between 10 and 10−2 mbar to a second pressure between 10−3 mbar and 10−6 mbar and at least one high vacuum pump configured to operate at higher vacuums than the high pressure getter pump, the two pumps being mounted on a same flange, the flange being configured to mount the vacuum pumping system to a vacuum chamber.

公开(公告)号：US11270863B2

公开(公告)日：2022-03-08

申请号：US16487354

申请日：2018-02-16

申请人： NEC NETWORK AND SENSOR SYSTEMS, LTD.

发明人： Taishi Masuda

IPC分类号： H01J7/18 ,  H01J23/26 ,  H01J23/027 ,  H01J23/087 ,  H01J25/34 ,  H03F3/58 ,  H01J23/12

摘要： The objective of the invention is to provide a microwave tube, or the like, wherein gas adsorption action of a getter may be satisfactorily performed independently from a microwave amplification operation. In order to solve this problem, this microwave electron tube comprises: a helix wherein a microwave may progress oriented from an input section to an output section within a helical tube; an electron gun emitting an electron flow oriented toward the helix; a focusing device causing the electron flow to traverse the vicinity of the helix in the direction of a collector; the collector absorbing the electron flow; and a getter having a heater insulated from the cathode provided in the electron gun.

公开(公告)号：US20210031167A1

公开(公告)日：2021-02-04

申请号：US17073063

申请日：2020-10-16

申请人： INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY ERICA CAMPUS

发明人： YONGHO CHOA ,  Nusia EOM ,  Hyoryoung LIM

IPC分类号： B01J20/10 ,  B01J21/08 ,  H01L23/26 ,  B01J35/00 ,  H01J7/18 ,  B01J37/34 ,  B01J20/02 ,  B01J20/30 ,  B01J35/02 ,  B01J20/06 ,  B01J20/32 ,  B01J23/42 ,  B01J23/44 ,  B01J37/00 ,  B01J37/02

摘要： A moisture and hydrogen adsorption getter is provided. The moisture and hydrogen adsorption getter includes a silicon substrate including a concave portion and a convex portion, a silicon oxide layer conformally provided along a surface of the concave portion and a surface of the convex portion and configured to adsorb moisture, and a hydrogen adsorption pattern disposed on the silicon oxide layer. A portion of the silicon oxide layer is exposed between portions of the hydrogen adsorption pattern.

公开(公告)号：US10651001B2

公开(公告)日：2020-05-12

申请号：US16312565

申请日：2017-03-16

申请人： MEIDENSHA CORPORATION

发明人： Daizo Takahashi ,  Michihiro Hatanaka

IPC分类号： H01J1/14 ,  H01J35/06 ,  H01J1/304 ,  H01J3/02 ,  H01J7/18 ,  H01J35/12

摘要： An emitter (3) and a target (7) are arranged so as to face each other in a vacuum chamber (1), and a guard electrode (5) is provided at an outer circumferential side of an electron generating portion (31) of the emitter (3). The emitter (3) is supported movably in both end directions of the vacuum chamber (1) by the emitter supporting unit (4) having a movable body (40). The emitter supporting unit (4) is operated by an operating unit (6) connected to the emitter supporting unit (4). By operating the emitter supporting unit (4) by the operating unit (6), a distance between the electron generating portion (31) of the emitter (3) and the target (7) is changed, and a position of the emitter (3) is fixed at an arbitrary distance, then field emission is performed with the position of the emitter (3) fixed.

公开(公告)号：US20180105948A1

公开(公告)日：2018-04-19

申请号：US15835536

申请日：2017-12-08

申请人： Daniel A. Scherson

发明人： Daniel A. Scherson

IPC分类号： C25D21/04 ,  C25D17/00 ,  C25D21/12 ,  F04B37/02 ,  H01M16/00 ,  C25D17/10 ,  F16L59/065 ,  H01J7/18 ,  C25D5/48 ,  C25D3/00

CPC分类号： C25D21/04 ,  C25D3/00 ,  C25D5/48 ,  C25D17/00 ,  C25D17/002 ,  C25D17/10 ,  C25D21/12 ,  F04B37/02 ,  F16L59/065 ,  H01J7/18 ,  H01J9/385 ,  H01M16/00

摘要： An apparatus for forming a vacuum in a sealed enclosure through an electrochemical reaction includes an electrochemical cell comprising a cathode and an anode supported on a solid electrolyte. The solid electrolyte is a Li-ion non-volatile electrolyte containing a dissolved metal salt. The cathode is constructed of a material with which lithium is known to form alloys. The anode is constructed of a lithium-ion containing material. The cell is operable to expose lithium metal on the cathode.

公开(公告)号：US09945368B2

公开(公告)日：2018-04-17

申请号：US14819093

申请日：2015-08-05

申请人： Vaclab Inc.

发明人： Fumio Watanabe ,  Reiki Watanabe

IPC分类号： F04B37/02 ,  H01J7/18 ,  F04B37/08

CPC分类号： F04B37/02 ,  F04B37/08 ,  H01J7/18 ,  H01J7/186

摘要： A non-evaporable getter 1 includes a mesh 3, a frame 2 which is attached to the mesh 3 and suppresses deformation of the mesh 3, and a powder-state getter material 4 which is surrounded by the mesh 3 and the frame 2, and whose particle size is larger than a mesh opening of the mesh 3.

公开(公告)号：US09543166B2

公开(公告)日：2017-01-10

申请号：US14931806

申请日：2015-11-03

申请人： Micron Technology, Inc.

发明人： Michael Tan ,  Cheng P. Pour

IPC分类号： H01L21/00 ,  H01L21/76 ,  H01L21/46 ,  H01L21/322 ,  B32B7/12 ,  H01J7/18 ,  H01L23/20 ,  H01L23/28 ,  H01L23/26 ,  H01L21/56 ,  H01L23/00 ,  H01L27/146 ,  H01L31/18 ,  H01L51/52 ,  H01L23/31

CPC分类号： H01L23/26 ,  H01L21/3221 ,  H01L21/3225 ,  H01L21/565 ,  H01L23/3128 ,  H01L23/564 ,  H01L27/14698 ,  H01L31/186 ,  H01L51/5259 ,  H01L2224/16225 ,  H01L2924/15311 ,  Y10T428/28

摘要： Disclosed embodiments include external gettering provided by electronic packaging. An external gettering element for a semiconductor substrate, which may be incorporated as part of an electronic packaging for the structure, is disclosed. Semiconductor structures and stacked semiconductor structures including an external gettering element are also disclosed. An encapsulation mold compound providing external gettering is also disclosed. Methods of fabricating such devices are also disclosed.

摘要翻译： 公开的实施例包括由电子包装提供的外部吸气。 公开了一种用于半导体衬底的外部吸杂元件，其​​可以被结合作为用于该结构的电子封装的一部分。 还公开了包括外部吸杂元件的半导体结构和堆叠半导体结构。 还公开了提供外部吸气剂的封装模具化合物。 还公开了制造这种装置的方法。

公开(公告)号：US08961816B2

公开(公告)日：2015-02-24

申请号：US14348350

申请日：2013-05-13

申请人： Saes Getters S.P.A.

发明人： Alberto Coda ,  Alessandro Gallitognotta ,  Antonio Bonucci ,  Andrea Conte

IPC分类号： H01J7/18 ,  H01J35/20 ,  H01K1/56 ,  C22C14/00 ,  C22C16/00

CPC分类号： H01J7/183

摘要： Getter devices based on powders of alloys particularly suitable for hydrogen and nitrogen sorption are described. Such alloys have a composition including zirconium, vanadium, titanium and, optionally, one or more elements selected from iron, chromium, manganese, cobalt, nickel and aluminum.

摘要翻译： 描述了基于特别适用于氢和氮吸附的合金粉末的吸气装置。 这种合金具有包括锆，钒，钛和任选的一种或多种选自铁，铬，锰，钴，镍和铝的元素的组合物。

公开(公告)号：US08562856B2

公开(公告)日：2013-10-22

申请号：US11995156

申请日：2006-07-18

申请人： Roberto Giannantonio ,  Giorgio Longoni ,  Chiara Vescovi ,  Lorena Cattaneo

发明人： Roberto Giannantonio ,  Giorgio Longoni ,  Chiara Vescovi ,  Lorena Cattaneo

IPC分类号： H01J7/18 ,  H01J35/20 ,  H01K1/56 ,  C09K3/00 ,  B01J31/00 ,  B01J37/00 ,  B01J20/00 ,  C08F4/02 ,  C08F4/60

CPC分类号： H01J7/183 ,  B01J20/0222 ,  B01J20/0237 ,  B01J20/16 ,  B01J20/18 ,  B01J20/22 ,  B01J20/26 ,  B01J20/28026 ,  B01J20/28033 ,  B01J20/28042 ,  B01J20/28097 ,  B01J20/3236

摘要： Getter systems are provided having a phase being active in the sorption of gas inserted in the pores of a porous material. The porous material is, in turn, dispersed in a polymeric means that is permeable to the gas to be sorbed.

摘要翻译： 提供吸气系统，其具有在插入多孔材料的孔中的气体吸附中有活性的相。 多孔材料又分散在对被吸附气体是可渗透的聚合物装置中。

公开(公告)号：US08226850B1

公开(公告)日：2012-07-24

申请号：US12564341

申请日：2009-09-22

申请人： Youngjae Byun ,  William S. Whiteside

发明人： Youngjae Byun ,  William S. Whiteside

IPC分类号： C09K15/08 ,  C09K15/02 ,  H01J7/18 ,  H01K1/56

CPC分类号： C09K15/326 ,  A23L3/3436

摘要： An oxygen scavenging system comprising a free radical scavenger (e.g., α-tocopherol, trimethylhydroquinone, ubiquinol, carotenoids, flavonoids, etc. and mixtures thereof) and a transition metal (e.g., iron (II), copper, manganese, cobalt, etc. and mixtures thereof) in a medium is generally provided. The medium containing the antioxidant and the transition metal has been thermally processed by heating to at least about 150° F. for at least about 10 minutes. Methods of removing oxygen from an environment surrounded by a medium containing the oxygen scavenging system and methods of making the oxygen scavenging system in a medium are also provided.

摘要翻译： 包含自由基清除剂（例如α-生育酚，三甲基氢醌，泛醌，类胡萝卜素，类黄酮等及其混合物）和过渡金属（例如铁（II），铜，锰，钴等）的氧清除系统 和其混合物）通常提供。 含有抗氧化剂和过渡金属的介质通过加热至少约150°F进行热处理至少约10分钟。 还提供了从包含除氧系统的介质包围的环境中除去氧气的方法以及在介质中制备氧气清除系统的方法。