Protective film with a dicing film

    公开(公告)号:JP5368608B2

    公开(公告)日:2013-12-18

    申请号:JP2012149597

    申请日:2012-07-03

    IPC分类号: H01L21/301

    摘要: PROBLEM TO BE SOLVED: To provide a dicing film with a protection film which shortens a down time, and can stick a dicing film onto a semiconductor wafer without positional deviation. SOLUTION: In the dicing film with the protection film in which a dicing film and a protection film are stacked, a difference between the transmissivity at a wavelength of 600-700 nm of the protection film and the transmissivity of the dicing film with the protection film in a portion through which light for film detection of the dicing film firstly transmits is 20% or more. COPYRIGHT: (C)2013,JPO&INPIT