HERMETIC ENCAPSULATION FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICES
    7.
    发明申请
    HERMETIC ENCAPSULATION FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICES 审中-公开
    微电子系统(MEMS)器件的渗透性封装

    公开(公告)号:US20170022050A1

    公开(公告)日:2017-01-26

    申请号:US15005826

    申请日:2016-01-25

    IPC分类号: B81B7/00 B81C1/00

    摘要: Embodiments of the invention describe hermetic encapsulation for MEMS devices, and processes to create the hermetic encapsulation structure. Embodiments comprise a MEMS substrate stack that further includes a magnet, a first laminate organic dielectric film, a first hermetic coating disposed over the magnet, a second laminate organic dielectric film disposed on the hermetic coating, a MEMS device layer disposed over the magnet, and a plurality of metal interconnects surrounding the MEMS device layer. A hermetic plate is subsequently bonded to the MEMS substrate stack and disposed over the formed MEMS device layer to at least partially form a hermetically encapsulated cavity surrounding the MEMS device layer. In various embodiments, the hermetically encapsulated cavity is further formed from the first hermetic coating, and at least one of the set of metal interconnects, or a second hermetic coating deposited onto the set of metal interconnects.

    摘要翻译: 本发明的实施例描述了用于MEMS器件的气密封装和用于创建气密封装结构的工艺。 实施例包括进一步包括磁体的MEMS基板堆叠,第一层压有机介电膜,设置在磁体上的第一密封涂层,设置在密封涂层上的第二层压有机绝缘膜,设置在磁体上的MEMS器件层,以及 围绕MEMS器件层的多个金属互连。 密封板随后结合到MEMS衬底叠层并且设置在所形成的MEMS器件层上,以至少部分地形成围绕MEMS器件层的气密封装的腔体。 在各种实施例中,气密封装的空腔进一步由第一密封涂层形成,并且该组金属互连中的至少一个或沉积在该组金属互连件上的第二密封涂层。

    HERMETIC ENCAPSULATION FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICES
    8.
    发明申请
    HERMETIC ENCAPSULATION FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICES 有权
    微电子系统(MEMS)器件的渗透性封装

    公开(公告)号:US20150291415A1

    公开(公告)日:2015-10-15

    申请号:US14137538

    申请日:2013-12-20

    IPC分类号: B81B7/00 B81C1/00

    摘要: Embodiments of the invention describe hermetic encapsulation for MEMS devices, and processes to create the hermetic encapsulation structure. Embodiments comprise a MEMS substrate stack that further includes a magnet, a first laminate organic dielectric film, a first hermetic coating disposed over the magnet, a second laminate organic dielectric film disposed on the hermetic coating, a MEMS device layer disposed over the magnet, and a plurality of metal interconnects surrounding the MEMS device layer. A hermetic plate is subsequently bonded to the MEMS substrate stack and disposed over the formed MEMS device layer to at least partially form a hermetically encapsulated cavity surrounding the MEMS device layer. In various embodiments, the hermetically encapsulated cavity is further formed from the first hermetic coating, and at least one of the set of metal interconnects, or a second hermetic coating deposited onto the set of metal interconnects.

    摘要翻译: 本发明的实施例描述了用于MEMS器件的气密封装和用于创建气密封装结构的工艺。 实施例包括进一步包括磁体的MEMS基板堆叠,第一层压有机介电膜,设置在磁体上的第一密封涂层,设置在密封涂层上的第二层压有机绝缘膜,设置在磁体上的MEMS器件层,以及 围绕MEMS器件层的多个金属互连。 密封板随后结合到MEMS衬底叠层并且设置在所形成的MEMS器件层上,以至少部分地形成围绕MEMS器件层的气密封装的腔体。 在各种实施例中,气密封装的空腔进一步由第一密封涂层形成,并且该组金属互连中的至少一个或沉积在该组金属互连件上的第二密封涂层。

    THERMAL MANAGEMENT IN PACKAGED VCSELS
    10.
    发明申请
    THERMAL MANAGEMENT IN PACKAGED VCSELS 有权
    包装VCSELS中的热管理

    公开(公告)号:US20140314111A1

    公开(公告)日:2014-10-23

    申请号:US13698453

    申请日:2011-11-18

    IPC分类号: H01S5/024

    摘要: Heat management systems for vertical cavity surface emitting laser (VCSEL) chips are provided. Embodiments of the invention provide substrates having, a vertical cavity surface emitting laser chip disposed on the substrate surface and electrically interconnected with the substrate, a thermal frame disposed on the substrate surface and proximate to at least three sides of the vertical cavity surface emitting laser chip, and a thermal interface material disposed between the at least three sides of the vertical cavity surface emitting laser chip and the thermal frame. The substrate can also include a transceiver chip that is operably coupled to a further integrated circuit chip and that is capable of driving the VCSEL chip.

    摘要翻译: 提供了垂直腔表面发射激光(VCSEL)芯片的热管理系统。 本发明的实施例提供了具有设置在衬底表面上并与衬底电互连的垂直腔表面发射激光器芯片的衬底,设置在衬底表面上并且靠近垂直腔表面发射激光器芯片的至少三个侧面的热框架 以及设置在垂直腔表面发射激光芯片和热框架的至少三个侧面之间的热界面材料。 衬底还可以包括可操作地耦合到另一集成电路芯片并且能够驱动VCSEL芯片的收发器芯片。