公开(公告)号：US11855604B2

公开(公告)日：2023-12-26

申请号：US17031181

申请日：2020-09-24

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Federico Vercesi ,  Lorenzo Corso ,  Giorgio Allegato ,  Gabriele Gattere

IPC: H03H9/10 ,  B81B7/00 ,  B81C1/00 ,  H03H3/02 ,  H03H9/17 ,  H03H9/15

CPC classification number: H03H9/1021 ,  B81B7/0038 ,  B81C1/00285 ,  H03H3/02 ,  H03H9/17 ,  B81B2201/0271 ,  B81B2203/0118 ,  B81B2203/0315 ,  B81B2203/04 ,  B81B2207/07 ,  B81C2201/0105 ,  B81C2203/0118 ,  H03H2003/022 ,  H03H2003/027 ,  H03H2009/155

Abstract: A microelectromechanical resonator device has: a main body, with a first surface and a second surface, opposite to one another along a vertical axis, and made of a first layer and a second layer, arranged on the first layer; a cap, having a respective first surface and a respective second surface, opposite to one another along the vertical axis, and coupled to the main body by bonding elements; and a piezoelectric resonator structure formed by: a mobile element, constituted by a resonator portion of the first layer, suspended in cantilever fashion with respect to an internal cavity provided in the second layer and moreover, on the opposite side, with respect to a housing cavity provided in the cap; a region of piezoelectric material, arranged on the mobile element on the first surface of the main body; and a top electrode, arranged on the region of piezoelectric material, the mobile element constituting a bottom electrode of the piezoelectric resonator structure.

公开(公告)号：US11668585B2

公开(公告)日：2023-06-06

申请号：US17460030

申请日：2021-08-27

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Luca Guerinoni ,  Gabriele Gattere

IPC: G01C25/00 ,  G01C19/72

CPC classification number: G01C25/005 ,  G01C19/726

Abstract: A gyroscopic sensor unit detects a phase drift between a demodulated output signal and demodulation signal during output of a quadrature test signal. A delay calculator detects the phase drift based on changes in the demodulated output signal during application of the quadrature test signal. A delay compensation circuit compensates for the phase drift by delaying the demodulation signal by the phase drift value.

公开(公告)号：US11543428B2

公开(公告)日：2023-01-03

申请号：US16898350

申请日：2020-06-10

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Gabriele Gattere ,  Francesco Rizzini ,  Alessandro Tocchio

IPC: G01P15/125 ,  G01P15/08

Abstract: An inertial structure is elastically coupled through a first elastic structure to a supporting structure so as to move along a sensing axis as a function of a quantity to be detected. The inertial structure includes first and second inertial masses which are elastically coupled together by a second elastic structure to enable movement of the second inertial mass along the sensing axis. The first elastic structure has a lower elastic constant than the second elastic structure so that, in presence of the quantity to be detected, the inertial structure moves in a sensing direction until the first inertial mass stops against a stop structure and the second elastic mass can move further in the sensing direction. Once the quantity to be detected ends, the second inertial mass moves in a direction opposite to the sensing direction and detaches the first inertial mass from the stop structure.

公开(公告)号：US20220205784A1

公开(公告)日：2022-06-30

申请号：US17700275

申请日：2022-03-21

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Gabriele Gattere ,  Carlo Valzasina ,  Luca Giuseppe Falorni

IPC: G01C19/5747 ,  G01C19/5712 ,  H01G5/011 ,  G01C25/00 ,  B81C1/00

Abstract: A multi-axis MEMS gyroscope includes a micromechanical detection structure having a substrate, a driving-mass arrangement, a driven-mass arrangement with a central window, and a sensing-mass arrangement which undergoes sensing movements in the presence of angular velocities about a first horizontal axis and a second horizontal axis. A sensing-electrode arrangement is fixed with respect to the substrate and is set underneath the sensing-mass arrangement. An anchorage assembly is set within the central window for constraining the driven-mass arrangement to the substrate at anchorage elements. The anchorage assembly includes a rigid structure suspended above the substrate that is elastically coupled to the driven mass by elastic connection elements at a central portion, and is coupled to the anchorage elements by elastic decoupling elements at end portions thereof.

公开(公告)号：US10862449B2

公开(公告)日：2020-12-08

申请号：US16171885

申请日：2018-10-26

Applicant: STMicroelectronics S.r.l.

Inventor： Carlo Valzasina ,  Gabriele Gattere ,  Alessandro Tocchio ,  Giacomo Langfelder

IPC: H03H9/02 ,  H03B5/30 ,  H03B5/04 ,  H03L1/02 ,  H03L7/197 ,  H03H9/24

Abstract: A MEMS resonator system has a micromechanical resonant structure and an electronic processing circuit including a first resonant loop that excites a first vibrational mode of the structure and generates a first signal at a first resonance frequency. A compensation module compensates, as a function of a measurement of temperature variation, a first variation of the first resonance frequency caused by the temperature variation to generate a clock signal at a desired frequency that is stable relative to temperature. The electronic processing circuit further includes a second resonant loop, which excites a second vibrational mode of the structure and generates a second signal at a second resonance frequency. A temperature-sensing module receives the first and second signals and generates the measurement of temperature variation as a function of the first variation of the first resonance frequency and a second variation of the second resonance frequency caused by the temperature variation.

公开(公告)号：US12050102B2

公开(公告)日：2024-07-30

申请号：US17025977

申请日：2020-09-18

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Gabriele Gattere ,  Carlo Valzasina ,  Enri Duqi

IPC: B81B7/00 ,  G01B7/16 ,  G01L1/14 ,  H01G5/01 ,  H01G5/16 ,  H01H1/00 ,  H03K17/975 ,  G06F3/044

CPC classification number: G01B7/22 ,  B81B7/0058 ,  G01L1/14 ,  H01G5/01 ,  H01G5/16 ,  H01H1/0036 ,  H03K17/975 ,  B81B2201/0221 ,  B81B2201/0292 ,  B81B2203/0154 ,  B81B2203/0181 ,  B81B2203/0307 ,  B81B2203/04 ,  B81B2203/056 ,  B81B2207/012 ,  G06F3/044

Abstract: A button device includes a MEMS sensor having a MEMS strain detection structure and a deformable substrate configured to undergo deformation under the action of an external force. The MEMS strain detection structure includes a mobile element carried by the deformable substrate via at least a first and a second anchorage, the latter fixed with respect to the deformable substrate and configured to displace and generate a deformation force on the mobile element in the presence of the external force; and stator elements capacitively coupled to the mobile element. The deformation of the mobile element causes a capacitance variation between the mobile element and the stator elements. Furthermore, the MEMS sensor is configured to generate detection signals correlated to the capacitance variation.

公开(公告)号：US11993509B2

公开(公告)日：2024-05-28

申请号：US17179157

申请日：2021-02-18

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Gattere ,  Francesco Rizzini

IPC: B81B3/00 ,  G01P15/00 ,  G01P15/08

CPC classification number: B81B3/0018 ,  G01P15/001 ,  B81B2201/0235 ,  G01P2015/0862

Abstract: A MEMS inclinometer includes a substrate, a first mobile mass and a sensing unit. The sensing unit includes a second mobile mass, a number of elastic elements, which are interposed between the second mobile mass and the substrate and are compliant in a direction parallel to a first axis, and a number of elastic structures, each of which is interposed between the first and second mobile masses and is compliant in a direction parallel to the first axis and to a second axis. The sensing unit further includes a fixed electrode that is fixed with respect to the substrate and a mobile electrode fixed with respect to the second mobile mass, which form a variable capacitor.

公开(公告)号：US11971284B2

公开(公告)日：2024-04-30

申请号：US17204664

申请日：2021-03-17

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Gabriele Gattere ,  Francesco Rizzini ,  Luca Guerinoni ,  Lorenzo Corso ,  Domenico Giusti

IPC: G01F1/84

CPC classification number: G01F1/8472 ,  G01F1/8404

Abstract: Embodiments of a Coriolis-force-based flow sensing device and embodiments of methods for manufacturing embodiments of the Coriolis-force-based flow sensing device, comprising the steps of: forming a driving electrode; forming, on the driving electrode, a first sacrificial region; forming, on the first sacrificial region, a first structural portion with a second sacrificial region buried therein; forming openings for selectively etching the second sacrificial region; forming, within the openings, a porous layer having pores; removing the second sacrificial region through the pores of the porous layer, forming a buried channel; growing, on the porous layer and not within the buried channel, a second structural portion that forms, with the first structural region, a structural body; selectively removing the first sacrificial region thus suspending the structural body on the driving electrode.

公开(公告)号：US11969757B2

公开(公告)日：2024-04-30

申请号：US17191475

申请日：2021-03-03

Applicant: STMicroelectronics S.r.l.

Inventor： Federico Vercesi ,  Alessandro Danei ,  Giorgio Allegato ,  Gabriele Gattere ,  Roberto Campedelli

IPC: B06B1/06 ,  H10N30/01

CPC classification number: B06B1/0666 ,  H10N30/01

Abstract: A method for manufacturing a PMUT device including a piezoelectric element located at a membrane element is provided. The method includes receiving a silicon on insulator substrate having a first silicon layer, an oxide layer, and a second silicon layer. Portions of a first surface of the second silicon layer are exposed by removing exposed side portions of the first silicon layer and corresponding portions of the oxide layer, and a central portion including the remaining portions of the first silicon layer and of the oxide layer is defined. Anchor portions for the membrane element are formed at the exposed portions of the first surface of the second silicon layer. The piezoelectric element is formed above the central portion, and the membrane element is defined by selectively removing the second layer and removing the remaining portion of the oxide from under the remaining portion of the first silicon layer.

公开(公告)号：US11313681B2

公开(公告)日：2022-04-26

申请号：US16655096

申请日：2019-10-16

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Gabriele Gattere ,  Carlo Valzasina ,  Luca Giuseppe Falorni

IPC: G01C19/00 ,  G01C19/5747 ,  G01C19/5712 ,  H01G5/011 ,  G01C25/00 ,  B81C1/00 ,  G01C19/58

Abstract: A multi-axis MEMS gyroscope includes a micromechanical detection structure having a substrate, a driving-mass arrangement, a driven-mass arrangement with a central window, and a sensing-mass arrangement which undergoes sensing movements in the presence of angular velocities about a first horizontal axis and a second horizontal axis. A sensing-electrode arrangement is fixed with respect to the substrate and is set underneath the sensing-mass arrangement. An anchorage assembly is set within the central window for constraining the driven-mass arrangement to the substrate at anchorage elements. The anchorage assembly includes a rigid structure suspended above the substrate that is elastically coupled to the driven mass by elastic connection elements at a central portion, and is coupled to the anchorage elements by elastic decoupling elements at end portions thereof.