Piping system and control for semiconductor processing
    2.
    发明授权
    Piping system and control for semiconductor processing 有权
    管道系统和半导体加工控制

    公开(公告)号:US08623141B2

    公开(公告)日:2014-01-07

    申请号:US12467375

    申请日:2009-05-18

    摘要: A vacuum system for semiconductor fabrication. The system includes a vacuum chamber for performing a semiconductor fabrication process, a vacuum source, and a piping system fluidly connecting the vacuum chamber to the vacuum source. In one embodiment, the piping system is configured without a horizontal flow path section of piping. In some embodiments, the piping system includes a first piping branch and a second piping branch. The first and second piping branches preferably have a symmetrical configuration with respect to the vacuum source. In yet other embodiments, the first and second piping branches preferably each include a throttle valve.

    摘要翻译: 一种用于半导体制造的真空系统。 该系统包括用于执行半导体制造工艺的真空室,真空源和将真空室流体连接到真空源的管道系统。 在一个实施例中,管道系统被配置为没有管道的水平流动路径部分。 在一些实施例中,管道系统包括第一管道分支和第二管道分支。 第一和第二管道分支优选地具有相对于真空源的对称构造。 在其他实施例中,第一和第二管道分支优选地各自包括节流阀。

    METERLESS HYDRAULIC SYSTEM HAVING DISPLACEMENT CONTROL VALVE
    4.
    发明申请
    METERLESS HYDRAULIC SYSTEM HAVING DISPLACEMENT CONTROL VALVE 有权
    具有位移控制阀的无水液压系统

    公开(公告)号:US20130048117A1

    公开(公告)日:2013-02-28

    申请号:US13222895

    申请日:2011-08-31

    IPC分类号: F15C3/00 F16K11/20

    摘要: A hydraulic system is disclosed. The hydraulic system may have a pump, a tank, a displacement actuator having first and second chambers, a regeneration valve, and a load-holding valve. The hydraulic system may also have a displacement control valve including a valve element, and a stationary cage portion at least partially forming a high-pressure passage fluidly connecting the pump and valve element, a low-pressure passage fluidly connecting the valve element and tank, a first displacement actuator passage fluidly connecting the valve element and first chamber, a second displacement actuator passage fluidly connecting the valve element and second chamber, a load-holding control passage fluidly connecting the valve element and load-holding valve, and a regeneration control passage fluidly connecting the valve element and regeneration valve. The displacement control valve may also include a movable cage portion that is movable to selectively restrict fluid flow through only the first and second displacement actuator passages.

    摘要翻译: 公开了一种液压系统。 液压系统可以具有泵,罐,具有第一和第二室的排量致动器,再生阀和负载保持阀。 液压系统还可以具有包括阀元件的位移控制阀和至少部分地形成流体连接泵和阀元件的高压通道的静止保持架部分,流体连接阀元件和油箱的低压通道, 流体连接阀元件和第一室的第一排量致动器通道,流体连接阀元件和第二室的第二排量致动器通道,流体连接阀元件和负载保持阀的负载保持控制通路,再生控制通道 流体连接阀元件和再生阀。 排量控制阀还可以包括可移动的保持架部分,其可移动以选择性地限制流体流过仅第一和第二排量致动器通道。

    Making a liquid/liquid or gas system in microfluidics
    5.
    发明授权
    Making a liquid/liquid or gas system in microfluidics 有权
    在微流体中制备液体/液体或气体双相系统

    公开(公告)号:US08342207B2

    公开(公告)日:2013-01-01

    申请号:US12066840

    申请日:2006-09-22

    IPC分类号: F15C3/00

    摘要: The invention relates to a microfluidic device for making a liquid/liquid or gas biphasic system using a first liquid or a gas and a second liquid, non-miscible with each other, the device having a first hydrophobic surface for the second liquid, the first liquid forming a layer (6) on said first hydrophobic surface. The device comprises means for introducing a drop (7) of the second liquid into the layer of first liquid or gas and in contact with said first hydrophobic surface, and means for displacing the drop on said first hydrophobic surface along a determined path, the device having on the path of the drop, at least one wetting defect causing, upon passing of the drop over this defect, failure of the triple line of contact of the drop on the first hydrophobic surface and inclusion of first liquid (8) or gas into the drop.The invention also relates to the associated method.

    摘要翻译: 本发明涉及用于制造使用第一液体或气体的液体/液体或气体双相系统的微流体装置和彼此不可混溶的第二液体,所述装置具有用于第二液体的第一疏水表面,第一液体 在所述第一疏水表面上形成层(6)的液体。 该装置包括用于将第二液体的液滴(7)引入第一液体或气体层并与所述第一疏水表面接触的装置,以及用于沿所确定的路径移动所述第一疏水表面上的液滴的装置,所述装置 在液滴的路径上,至少一个润湿缺陷在通过该缺陷的下落时导致第一疏水表面上的液滴的三次接触线失效,并将第一液体(8)或气体包含在 下降。 本发明还涉及相关方法。

    OUTFLOW VALVE POSITION INDICATION
    9.
    发明申请
    OUTFLOW VALVE POSITION INDICATION 审中-公开
    溢流阀位置指示

    公开(公告)号:US20100240291A1

    公开(公告)日:2010-09-23

    申请号:US12409286

    申请日:2009-03-23

    IPC分类号: B64D13/00 F15C3/00

    CPC分类号: B64D13/02 Y10T137/6906

    摘要: An aircraft cabin pressure control system outflow valve includes a frame, a valve element, and a position sensor. The frame is configured to be mounted on an aircraft exterior skin. The valve element is rotationally coupled to the frame, and is coupled to receive an actuation drive force. The valve element is responsive to the actuation drive force to rotate to a position between a closed position and a plurality of open positions. The position sensor is coupled to the frame and is configured to directly sense rotation of the valve element and supply a position signal representative of valve element position.

    摘要翻译: 飞机舱压力控制系统流出阀包括框架,阀元件和位置传感器。 框架被配置为安装在飞机外部皮肤上。 阀元件旋转地联接到框架,并且被联接以接收致动驱动力。 阀元件响应致动驱动力以旋转到关闭位置和多个打开位置之间的位置。 位置传感器联接到框架并且被配置为直接感测阀元件的旋转并且提供表示阀元件位置的位置信号。