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公开(公告)号：US06674585B1
公开(公告)日：2004-01-06
申请号：US10067597
申请日：2002-02-04
Applicant: Robert J. Calvet , Roman C. Gutierrez , Tony Kai Tang
Inventor： Robert J. Calvet , Roman C. Gutierrez , Tony Kai Tang
IPC: G02B700
CPC classification number: G02B7/00 , B81B2201/047 , B81B2203/0163 , B81C3/005 , B81C2203/054 , Y10S977/932
Abstract: Micromachined passive alignment assemblies and methods of using and making the same are provided. The alignment assemblies are used to align at least one optical element. The alignment assemblies may be configured with kinematic, pseudo-kinematic, redundant or degenerate support structures. One alignment assembly comprises a base and a payload, which supports at least one optical element. The payload may be coupled to the base via connecting structures. The base, the payload and/or the connecting structures may have internal flexure assemblies for preloading a connection, thermal compensation and/or strain isolation.
Abstract translation: 提供微加工的无源对准组件及其使用和制造方法。 对准组件用于对准至少一个光学元件。 对准组件可以配置有运动学，伪运动学，冗余或简并支持结构。 一个对准组件包括支撑至少一个光学元件的底座和有效载荷。 有效载荷可以经由连接结构连接到基座。 基座，有效载荷和/或连接结构可以具有用于预加载连接，热补偿和/或应变隔离的内部挠曲组件。
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公开(公告)号：US20240365670A1
公开(公告)日：2024-10-31
申请号：US18641417
申请日：2024-04-21
Applicant: Coretronic MEMS Corporation
Inventor： Hao-Chien Cheng , Kai-Chih Liang , Ming-Ching Wu
CPC classification number: H10N30/206 , B81B3/0021 , H10N30/802 , B81B2203/0163 , B81B2203/0346 , B81B2203/04 , B81B2203/058 , G02B26/0858
Abstract: A piezoelectric actuating apparatus includes a frame having an opening, a rotatable element, first and second actuating elements, a sensing element, transmission elements, a sensing electrode, and a driving electrode. The rotatable element is in the opening, connected to the frame via a rotating shaft structure, and reciprocatingly swings relative to the frame around an axis of the rotating shaft structure as a center. The first actuating element is connected to the rotatable element. The transmission elements are between the first and second actuating elements, and between the first actuating element and the sensing element. The second actuating element and the sensing element are coupled to the rotatable element via the transmission elements. The sensing electrode is on a part of the transmission elements and the sensing element. The driving electrode is on another part of the transmission elements and the first and second actuating elements.
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公开(公告)号：US20240270565A1
公开(公告)日：2024-08-15
申请号：US18642889
申请日：2024-04-23
Inventor： Kuei-Sung Chang , Shang-Ying Tsai , Wei-Jhih Mao
CPC classification number: B81B3/0054 , B81C1/0019 , B81B2203/0163 , B81C2201/0125 , B81C2201/0132
Abstract: Various embodiments of the present disclosure are directed towards a semiconductor structure comprising a spring structure. A first substrate underlies a second substrate. The first and second substrates at least partially define a cavity. A microelectromechanical systems (MEMS) component is arranged in the cavity. The spring structure is disposed between a region of the second substrate and the MEMS component. The spring structure comprises a first layer and a second layer. The first layer continuously extends along a first vertical surface of the second layer.
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公开(公告)号：US11993510B2
公开(公告)日：2024-05-28
申请号：US17840936
申请日：2022-06-15
Inventor： Kuei-Sung Chang , Shang-Ying Tsai , Wei-Jhih Mao
CPC classification number: B81B3/0054 , B81C1/0019 , B81B2203/0163 , B81C2201/0125 , B81C2201/0132
Abstract: Various embodiments of the present disclosure are directed towards a microelectromechanical systems (MEMS) structure including a composite spring. A first substrate underlies a second substrate. A third substrate overlies the second substrate. The first, second, and third substrates at least partially define a cavity. The second substrate comprises a moveable mass in the cavity and between the first and third substrates. The composite spring extends from a peripheral region of the second substrate to the moveable mass. The composite spring is configured to suspend the moveable mass in the cavity. The composite spring includes a first spring layer comprising a first crystal orientation, and a second spring layer comprising a second crystal orientation different than the first crystal orientation.
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公开(公告)号：US11860184B2
公开(公告)日：2024-01-02
申请号：US17447876
申请日：2021-09-16
Applicant: Robert Bosch GmbH
Inventor： Cristian Nagel , Johannes Classen , Lars Tebje , Rolf Scheben , Rudy Eid
IPC: G01P15/08 , G01P15/125 , B81B3/00
CPC classification number: G01P15/0802 , B81B3/001 , B81B3/0051 , G01P15/125 , B81B2201/0235 , B81B2203/0163 , B81B2203/04 , G01P2015/0831 , G01P2015/0862 , G01P2015/0871
Abstract: A micromechanical structure including a substrate, a moveable seismic mass, a detection structure, and a main spring. The seismic mass is connected to the substrate using the main spring. A first direction and a second direction perpendicular thereto define a main extension plane of the substrate. The detection structure detects a deflection of the seismic mass and includes first electrodes mounted at the seismic mass and second electrodes mounted at the substrate. The first electrodes and second electrodes have a two-dimensional extension in the first and second directions. The micromechanical structure has a graduated stop structure including a first spring stop, a second spring stop, and a fixed stop.
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Patent Agency Ranking
公开(公告)号：US20230174369A1
公开(公告)日：2023-06-08
申请号：US18073879
申请日：2022-12-02
Applicant: USound GmbH
Inventor： Andrea Rusconi Clerici Beltrami , Ferruccio Bottoni
IPC: B81B3/00
CPC classification number: B81B3/0021 , B81B2201/0257 , B81B2203/0118 , B81B2203/0127 , B81B2203/0163 , B81B2203/0315
Abstract: A transducer unit for a MEMS sound transducer includes a support, a transducer element connected to the support and deflectable along a reciprocation axis, a coupling element for connecting the transducer element to a diaphragm in a manner spaced apart from the transducer element, and a spring region formed between the transducer element and the coupling element, the spring region including at least one spring element, which movably connects the transducer element to the coupling element, and which includes a damping layer, which at least partially covers the spring element.
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公开(公告)号：US20180135985A1
公开(公告)日：2018-05-17
申请号：US15808179
申请日：2017-11-09
Applicant: SHIN SUNG C&T CO., LTD.
Inventor： Ci Moo SONG , Keun Jung YOUN , Jeong Sik KANG , Yong Kook KIM , Seung Ho HAN , Hyun Ju SONG
IPC: G01C19/5712 , B81B3/00
CPC classification number: G01C19/5712 , B81B3/0062 , B81B7/02 , B81B2201/0242 , B81B2203/0163 , G01C19/5719 , G01C19/5747
Abstract: A MEMS gyroscope including: a frame arranged parallel to a bottom wafer substrate; a sensor mass body excited at one degree of freedom in an excitation mode, and of which the displacement is sensed at two degrees of freedom by a Coriolis force in a sensing mode when an external angular velocity is input to the frame; and at least two sensing electrode for sensing a displacement of the sensor mass body, the displacement being sensed at the two degrees of freedom, wherein the sensor mass body comprises an inner mass body and an outer mass body surrounding the inner mass body, the outer mass body and the frame are connected by a first support spring, and the outer mass body and the inner mass body are connected by a second support spring.
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公开(公告)号：US09958271B2
公开(公告)日：2018-05-01
申请号：US14495786
申请日：2014-09-24
Applicant: InvenSense, Inc.
Inventor： Ozan Anac , Joseph Seeger
IPC: G01C19/5762 , G01C19/56 , G01C19/5733 , G01C19/5747 , G01P15/08 , B81B3/00
CPC classification number: G01C19/5762 , B81B3/0051 , B81B2201/0242 , B81B2203/0163 , G01C19/5733 , G01C19/5747 , G01P15/0802
Abstract: Embodiments for modifying a spring mass configuration are disclosed that minimize the effects of unwanted nonlinear motion on a MEMS sensor. The modifications include any or any combination of providing a rigid element between rotating structures of the spring mass configuration, tuning a spring system between the rotating structures and coupling an electrical cancellation system to the rotating structures. In so doing unwanted nonlinear motion such as unwanted 2nd harmonic motion is minimized.
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公开(公告)号：US09887685B2
公开(公告)日：2018-02-06
申请号：US14984886
申请日：2015-12-30
Applicant: International Business Machines Corporation
Inventor： Johan B. C. Engelen , Mark A. Lantz , Wabe W. Koelmans
CPC classification number: H03H9/02393 , B81B3/0045 , B81B3/007 , B81B7/008 , B81B2203/0163 , B81C1/00698 , B81C2201/017 , H02N11/00 , H03H9/02244 , H03H2009/02165 , H03H2009/02299 , H03H2009/02322
Abstract: A mechanical resonator includes a spring-mass system, wherein the spring-mass system comprises a phase-change material. The mechanical resonator typically comprises an electrical circuit portion, coupled to the phase-change material to alter a phase configuration within the phase-change material. Methods of operation are also disclosed.
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公开(公告)号：US20170366103A1
公开(公告)日：2017-12-21
申请号：US15187012
申请日：2016-06-20
Applicant: Faez BA-TIS , Ridha BEN-MRAD
Inventor： Faez BA-TIS , Ridha BEN-MRAD
IPC: H02N1/00
CPC classification number: H02N1/002 , B81B3/0021 , B81B2203/0136 , B81B2203/0163 , B81B2203/053
Abstract: A MEMS electrostatic piston-tube actuator is disclosed. The actuator comprises two structures. A structure that comprises a plurality of fixed piston-like electrodes that are attached to a base, and form the stator of the actuator. A second structure that comprises a plurality of moving tube-like electrodes that are attached to the body of the upper structure and form the rotor of the actuator. The rotor is attached to the stator through a mechanical spring. The rotor of the actuator provides a translational motion, about the normal axis to the structures. The present piston-tube actuator utilizes a configuration that enables the use of wide area electrodes, and therefore, provides a high output force enabling translation of the rotor.
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