公开(公告)号：US20090182039A1

公开(公告)日：2009-07-16

申请号：US11988383

申请日：2006-07-06

申请人： Masakazu Imamura ,  Takayuki Suzuki ,  Takeshi Murakami ,  Keita Nakanishi ,  Hiroshi Uebayashi ,  Haruka Nakamura ,  Masamichi Yuda ,  Naoko Amenomiya ,  Yuuji Awamura ,  Hiroshi Tomiyama

发明人： Masakazu Imamura ,  Takayuki Suzuki ,  Takeshi Murakami ,  Keita Nakanishi ,  Hiroshi Uebayashi ,  Haruka Nakamura ,  Masamichi Yuda ,  Naoko Amenomiya ,  Yuuji Awamura ,  Hiroshi Tomiyama

IPC分类号： A61K31/351 ,  C07D315/00

CPC分类号： C07C215/90 ,  C07D309/10

摘要： A choline salt crystal of (1S)-1,5-anhydro-1-[5-(azulen-2-ylmethyl)-2-hydroxyphenyl]-D-glucitol which shows an endothermic peak at 194 to 198° C. as measured by differential scanning calorimetry (DSC analysis) and shows main peaks at about 2θ (°) 5.58, 14.72, 16.80, 17.82, 21.02, and 22.46 as measured by X-ray powder diffraction. Thus, a crystal of an azulene compound can be produced which is in a single crystal form, has a constant quality, can be produced with good reproducibility, can be provided stably as a crystal of an drug substance for use in the preparation of a pharmaceutical and is excellent in storage stability.

摘要翻译： （1S）-1,5-脱水-1- [5-（薁-2-基甲基）-2-羟基苯基] -D-葡萄糖醇的胆碱盐晶体，其在194至198℃下显示吸热峰 通过差示扫描量热法（DSC分析），并且通过X射线粉末衍射测量显示在约2θ（°）5.58,14.72,16.80,17.82,21.02和22.46处的主峰。 因此，可以制造az烯化合物的结晶，其为单晶形式，具有恒定的质量，可以以良好的再现性制备，可以稳定地提供用作制备药物的药物的晶体 储存稳定性优异。

公开(公告)号：US20090069252A1

公开(公告)日：2009-03-12

申请号：US12173614

申请日：2008-07-15

申请人： Masakazu Imamura ,  Takeshi Murakami ,  Ryota Shiraki ,  Kazuhiro Ikegai ,  Takashi Sugane ,  Fumiyoshi Iwasaki ,  Eiji Kurosaki ,  Hiroshi Tomiyama ,  Atsushi Noda ,  Kayoko Kitta ,  Yoshinori Kobayashi

发明人： Masakazu Imamura ,  Takeshi Murakami ,  Ryota Shiraki ,  Kazuhiro Ikegai ,  Takashi Sugane ,  Fumiyoshi Iwasaki ,  Eiji Kurosaki ,  Hiroshi Tomiyama ,  Atsushi Noda ,  Kayoko Kitta ,  Yoshinori Kobayashi

IPC分类号： A61K31/7042 ,  C07H7/06

CPC分类号： C07D495/04 ,  A61K31/351 ,  A61K31/381 ,  A61K31/4035 ,  A61K31/404 ,  A61K31/41 ,  A61K31/4184 ,  A61K31/423 ,  A61K31/428 ,  A61K31/4433 ,  A61K31/497 ,  A61K31/5377 ,  C07D405/10 ,  C07D407/10 ,  C07D409/10 ,  C07D413/10 ,  C07D417/10

摘要： The present invention provides C-glycoside derivatives and salts thereof, wherein B ring is bonded to A ring via —X— and A ring is directly bonded to the glucose residue, and it is usable as a Na+-glucose cotransporter inhibitor, especially for a therapeutic and/or preventive agent for diabetes such as insulin-dependent diabetes (type 1 diabetes) and insulin-independent diabetes (type 2 diabetes), as well as diabetes related diseases such as an insulin-resistant diseases and obesity.

摘要翻译： 本发明提供C-糖苷衍生物及其盐，其中B环通过-X-与A环结合，A环与葡萄糖残基直接结合，可用作Na + - 葡萄糖共转运蛋白抑制剂，尤其用于 胰岛素依赖性糖尿病（1型糖尿病）和胰岛素依赖性糖尿病（2型糖尿病）等糖尿病治疗剂和/或预防剂，以及糖尿病相关疾病如胰岛素抵抗疾病和肥胖症。

公开(公告)号：US20090050822A1

公开(公告)日：2009-02-26

申请号：US11819026

申请日：2007-06-25

申请人： Mamoru Nakasuji ,  Tohru Satake ,  Kenji Watanabe ,  Takeshi Murakami ,  Nobuharu Noji ,  Hirosi Sobukawa ,  Tsutomu Karimata ,  Shoji Yoshikawa ,  Toshifumi Kimba ,  Shin Oowada ,  Mutsumi Saito ,  Muneki Hamashima ,  Toru Takagi ,  Naoto Kihara ,  Hiroshi Nishimura

发明人： Mamoru Nakasuji ,  Tohru Satake ,  Kenji Watanabe ,  Takeshi Murakami ,  Nobuharu Noji ,  Hirosi Sobukawa ,  Tsutomu Karimata ,  Shoji Yoshikawa ,  Toshifumi Kimba ,  Shin Oowada ,  Mutsumi Saito ,  Muneki Hamashima ,  Toru Takagi ,  Naoto Kihara ,  Hiroshi Nishimura

IPC分类号： A61N5/00

CPC分类号： H01J37/185 ,  G01N23/225 ,  G01N23/2251 ,  H01J37/06 ,  H01J37/073 ,  H01J37/20 ,  H01J37/222 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/082 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/204 ,  H01J2237/22 ,  H01J2237/24564 ,  H01J2237/2806 ,  H01J2237/2816 ,  H01J2237/2817

摘要： The present invention provides an electron beam apparatus for evaluating a sample surface, which has a primary electro-optical system for irradiating a sample with a primary electron beam, a detecting system, and a secondary electro-optical system for directing secondary electron beams emitted from the sample surface by the irradiation of the primary electron beam to the detecting system.

公开(公告)号：US20090032708A1

公开(公告)日：2009-02-05

申请号：US12216233

申请日：2008-07-01

申请人： Mamoru Nakasuji ,  Nobuharu Noji ,  Tohru Satake ,  Masahiro Hatakeyama ,  Toshifumi Kimba ,  Hirosi Sobukawa ,  Shoji Yoshikawa ,  Takeshi Murakami ,  Kenji Watanabe ,  Tsutomu Karimata ,  Shin Oowada ,  Mutsumi Saito ,  Yuichiro Yamazaki ,  Takamitsu Nagai ,  Ichirota Nagahama

发明人： Mamoru Nakasuji ,  Nobuharu Noji ,  Tohru Satake ,  Masahiro Hatakeyama ,  Toshifumi Kimba ,  Hirosi Sobukawa ,  Shoji Yoshikawa ,  Takeshi Murakami ,  Kenji Watanabe ,  Tsutomu Karimata ,  Shin Oowada ,  Mutsumi Saito ,  Yuichiro Yamazaki ,  Takamitsu Nagai ,  Ichirota Nagahama

IPC分类号： G01N23/00 ,  H01J3/14

CPC分类号： H01J29/70 ,  G01N23/225 ,  G01N23/2251 ,  G01N23/227 ,  H01J37/06 ,  H01J37/073 ,  H01J37/141 ,  H01J37/185 ,  H01J37/20 ,  H01J37/222 ,  H01J37/244 ,  H01J37/266 ,  H01J37/28 ,  H01J2237/082 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/204 ,  H01J2237/22 ,  H01J2237/24564 ,  H01J2237/2806 ,  H01J2237/2816 ,  H01J2237/2817 ,  H01L21/6719 ,  H01L21/67213

摘要： An inspection apparatus by an electron beam comprises: an electron-optical device 70 having an electron-optical system for irradiating the object with a primary electron beam from an electron beam source, and a detector for detecting the secondary electron image projected by the electron-optical system; a stage system 50 for holding and moving the object relative to the electron-optical system; a mini-environment chamber 20 for supplying a clean gas to the object to prevent dust from contacting to the object; a working chamber 31 for accommodating the stage device, the working chamber being controllable so as to have a vacuum atmosphere; at least two loading chambers 41, 42 disposed between the mini-environment chamber and the working chamber, adapted to be independently controllable so as to have a vacuum atmosphere; and a loader 60 for transferring the object to the stage system through the loading chambers.

公开(公告)号：US20080315095A1

公开(公告)日：2008-12-25

申请号：US12222404

申请日：2008-08-08

申请人： Mamoru Nakasuji ,  Tohru Satake ,  Nobuharu Noji ,  Takeshi Murakami ,  Kenji Watanabe ,  Toshifumi Kimba ,  Kenichi Suematsu

发明人： Mamoru Nakasuji ,  Tohru Satake ,  Nobuharu Noji ,  Takeshi Murakami ,  Kenji Watanabe ,  Toshifumi Kimba ,  Kenichi Suematsu

IPC分类号： G01N23/00

CPC分类号： H01J37/28 ,  G01N23/225 ,  H01J2237/0635 ,  H01J2237/2817

摘要： An object of the present invention is to provide an electron beam apparatus, in which a plurality of electron beams, e.g., four electron beams, is produced for one optical axis with a relatively high current achieved for each electron beam.Provided is an electron beam apparatus comprising: an electron beam emitter (32) having an electron gun (30), said electron gun (30) disposed along an optical axis (23) and operable to emit a plurality of off-axis electron beams along a direction defined by a certain angle with respect to the optical axis (23); a plurality of apertures (34) disposed at a location offset from the optical axis (23); and an electromagnetic lens (7) for forming a magnetic field between the electron gun (30) and the apertures (34) to control the plurality of off-axis electron beams emitted from the electron gun (30) so that the plurality of off-axis electron beams passes through the apertures (34).

摘要翻译： 本发明的目的是提供一种电子束装置，其中为每个电子束获得的相对高的电流为一个光轴产生多个电子束，例如四个电子束。 本发明提供一种电子束装置，包括：具有电子枪（30）的电子束发射器（32），所述电子枪（30）沿着光轴（23）设置并且可操作以沿着光轴发射多个离轴电子束 相对于光轴（23）限定一定角度的方向; 设置在偏离光轴（23）的位置处的多个孔（34）; 以及用于在电子枪（30）和孔（34）之间形成磁场的电磁透镜（7），以控制从电子枪（30）发射的多个离轴电子束， 轴电子束通过孔（34）。

公开(公告)号：US20080302184A1

公开(公告)日：2008-12-11

申请号：US11946507

申请日：2007-11-28

申请人： Yasuo Yamaguchi ,  Makio Horikawa ,  Mika Okumura ,  Kimitoshi Sato ,  Takeshi Murakami

发明人： Yasuo Yamaguchi ,  Makio Horikawa ,  Mika Okumura ,  Kimitoshi Sato ,  Takeshi Murakami

IPC分类号： G01P15/125 ,  G01R3/00

CPC分类号： G01P15/125 ,  B81B3/0086 ,  B81B2201/0235 ,  B81B2207/07 ,  G01P1/023 ,  G01P15/0802 ,  G01P2015/0814 ,  Y10T29/49002

摘要： First and second semiconductor layers are attached to each other with an insulation layer sandwiched therebetween. An acceleration sensor device is formed in the first semiconductor layer. A control device for controlling the acceleration sensor device is formed on the second semiconductor layer. Through holes are formed in the second semiconductor layer, and an insulation layer is formed to cover the wall surfaces of the through holes. Through interconnections are formed within the through holes for electrically connecting the acceleration sensor device and the control device to each other. Accordingly, it is possible to obtain an acceleration sensor having excellent detection accuracy while having a reduced size, and a fabrication method thereof.

摘要翻译： 第一和第二半导体层通过夹在其间的绝缘层彼此附接。 在第一半导体层中形成加速度传感器装置。 用于控制加速度传感器装置的控制装置形成在第二半导体层上。 在第二半导体层中形成通孔，并且形成绝缘层以覆盖通孔的壁表面。 通孔之间形成有用于将加速度传感器装置和控制装置彼此电连接的通孔。 因此，能够获得尺寸小的检测精度优异的加速度传感器及其制造方法。

公开(公告)号：US07408175B2

公开(公告)日：2008-08-05

申请号：US11783780

申请日：2007-04-12

申请人： Toshifumi Kimba ,  Tohru Satake ,  Tsutomu Karimata ,  Kenji Watanabe ,  Nobuharu Noji ,  Takeshi Murakami ,  Masahiro Hatakeyama ,  Mamoru Nakasuji ,  Hirosi Sobukawa ,  Shoji Yoshikawa ,  Shin Oowada ,  Mutsumi Saito

发明人： Toshifumi Kimba ,  Tohru Satake ,  Tsutomu Karimata ,  Kenji Watanabe ,  Nobuharu Noji ,  Takeshi Murakami ,  Masahiro Hatakeyama ,  Mamoru Nakasuji ,  Hirosi Sobukawa ,  Shoji Yoshikawa ,  Shin Oowada ,  Mutsumi Saito

IPC分类号： H01J37/18

CPC分类号： H01J37/222 ,  G01N23/225 ,  G01N23/2251 ,  H01J37/06 ,  H01J37/073 ,  H01J37/185 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/0216 ,  H01J2237/082 ,  H01J2237/2002 ,  H01J2237/2007 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/204 ,  H01J2237/22 ,  H01J2237/24564 ,  H01J2237/2806 ,  H01J2237/2813 ,  H01J2237/2816 ,  H01J2237/2817 ,  H01L2224/48227 ,  H01L2924/01019 ,  H01L2924/01025 ,  H01L2924/01057 ,  H01L2924/01067 ,  H01L2924/01078 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/3025 ,  H01L2924/00

摘要： A substrate inspection apparatus 1-1 (FIG. 1) of the present invention performs the following steps of: carrying a substrate “S” to be inspected into an inspection chamber 23-1; maintaining a vacuum in said inspection chamber; isolating said inspection chamber from a vibration; moving successively said substrate by means of a stage 26-1 with at least one degree of freedom; irradiating an electron beam having a specified width; helping said electron beam reach to a surface of said substrate via a primary electron optical system 10-1; trapping secondary electrons emitted from said substrate via a secondary electron optical system 20-1 and guiding it to a detecting system 35-1; forming a secondary electron image in an image processing system based on a detection signal of a secondary electron beam obtained by said detecting system; detecting a defective location in said substrate based on the secondary electron image formed by said image processing system; indicating and/or storing said defective location in said substrate by CPU 37-1; and taking said completely inspected substrate out of the inspection chamber. Thereby, the defect inspection on the substrate can be performed successively with high level of accuracy and efficiency as well as with higher throughput.

摘要翻译： 本发明的基板检查装置1-1（图1）执行以下步骤：将要检查的基板“S”运送到检查室23-1中; 在所述检查室中保持真空; 将所述检查室与振动隔离; 通过至少一个自由度的阶段26-1连续地移动所述衬底; 照射具有指定宽度的电子束; 帮助所述电子束经由一次电子光学系统10-1到达所述衬底的表面; 通过二次电子光学系统20-1捕获从所述衬底发射的二次电子并将其引导到检测系统35-1; 基于由所述检测系统获得的二次电子束的检测信号，在图像处理系统中形成二次电子图像; 基于由所述图像处理系统形成的二次电子图像检测所述基板中的缺陷位置; 通过CPU37-1指示和/或存储所述衬底中的所述缺陷位置; 并将完全检查的基板从检查室中取出。 因此，可以以高水平的精度和效率以及更高的生产量连续地执行基板上的缺陷检查。

公开(公告)号：US07361895B2

公开(公告)日：2008-04-22

申请号：US11304680

申请日：2005-12-16

申请人： Mamoru Nakasuji ,  Takao Kato ,  Nobuharu Noji ,  Tohru Satake ,  Takeshi Murakami ,  Kenji Watanabe

发明人： Mamoru Nakasuji ,  Takao Kato ,  Nobuharu Noji ,  Tohru Satake ,  Takeshi Murakami ,  Kenji Watanabe

IPC分类号： H01J49/44

CPC分类号： H01J3/10 ,  B82Y10/00 ,  B82Y40/00 ,  G01N23/225 ,  H01J3/021 ,  H01J37/063 ,  H01J37/073 ,  H01J37/1471 ,  H01J37/1472 ,  H01J37/3174 ,  H01J2237/06316 ,  H01J2237/2817

摘要： An electron beam apparatus, in which an electron beam emitted from an electron gun having a cathode and an anode is focused and irradiated onto a sample, and secondary electrons emanated from the sample are directed into a detector, the apparatus further comprising means for optimizing irradiation of the electron beam emitted from the electron gun onto the sample, the optimizing means may be two-stage deflectors disposed in proximity to the electron gun which deflects and directs the electron beam emitted in a specific direction so as to be in alignment with the optical axis direction of the electron beam apparatus, the electron beam emitted in the specific direction being at a certain angle with respect to the optical axis due to the fact that, among the crystal orientations of said cathode, a specific crystal orientation allowing a higher level of electron beam emission out of alignment with the optical axis direction.

摘要翻译： 电子束装置，其中从具有阴极和阳极的电子枪发射的电子束被聚焦并照射到样品上，并且从样品发出的二次电子被引导到检测器中，该装置还包括用于优化照射的装置 从电子枪发射到样品上的电子束的优化装置可以是设置在电子枪附近的两级偏转器，其偏转并引导沿特定方向发射的电子束以与光学器件对准 电子束装置的轴方向，由于在所述阴极的晶体取向中具有更高水平的特定晶体取向的事实，在特定方向上发射的电子束相对于光轴成一定角度 电子束发射与光轴方向不对准。

公开(公告)号：US20080067377A1

公开(公告)日：2008-03-20

申请号：US11760235

申请日：2007-06-08

申请人： Masahiro Hatakeyama ,  Takeshi Murakami ,  Nobuharu Noji ,  Mamoru Nakasuji ,  Hirosi Sobukawa ,  Satoshi Mori ,  Tsutomu Karimata

发明人： Masahiro Hatakeyama ,  Takeshi Murakami ,  Nobuharu Noji ,  Mamoru Nakasuji ,  Hirosi Sobukawa ,  Satoshi Mori ,  Tsutomu Karimata

IPC分类号： G21K7/00

CPC分类号： H01J37/153 ,  H01J37/065 ,  H01J2237/061 ,  H01J2237/06375 ,  H01J2237/083 ,  H01J2237/1534 ,  H01J2237/24592 ,  H01J2237/28

摘要： An electron beam apparatus for providing an evaluation of a sample, such as a semiconductor wafer, that includes a micro-pattern with a minimum line width not greater than 0.1 μm with high throughput. A primary electron beam generated by an electron gun is irradiated onto a sample and secondary electrons emanating from the sample are formed into an image on a detector by an image projection optical system. An electron gun 61 has a cathode 1 and a drawing electrode 3, and an electron emission surface 1a of the cathode defines a concave surface. The drawing electrode 3 has a convex surface 3a composed of a partial outer surface of a second sphere facing the electron emission surface 1a of the cathode and an aperture 73 formed through the convex surface for passage of the electrons. An aberration correction optical apparatus comprises two identically sized multi-polar Wien filters arranged such that their centers are in alignment with a 1/4 plane position and a ¾ plane position, respectively, along an object plane-image plane segment in the aberration correction optical apparatus, and optical elements having bidirectional focus disposed in an object plane position, an intermediate image-formation plane position and an image plane position, respectively, in the aberration correction optical apparatus.

摘要翻译： 一种用于提供诸如半导体晶片的样品的评估的电子束装置，其包括具有不大于0.1μm的最小线宽的微量图案，具有高生产量。 由电子枪产生的一次电子束照射在样品上，从样品发出的二次电子通过图像投影光学系统形成检测器上的图像。 电子枪61具有阴极1和拉伸电极3，阴极的电子发射表面1a限定凹面。 拉制电极3具有由面对阴极的电子发射表面1a的第二球体的部分外表面和由电子通过凸面形成的孔73构成的凸面3a。 像差校正光学装置包括两个相同大小的多极维恩滤波器，其布置成使得它们的中心分别与像差校正光学中的物平面图像平面段的1/4平面位置和¾平面位置对准 装置和具有分别设置在像差校正光学装置中的物平面位置，中间图像形成平面位置和图像平面位置的双向焦点的光学元件。

公开(公告)号：US07328596B2

公开(公告)日：2008-02-12

申请号：US11188944

申请日：2005-07-25

申请人： Hiroyasu Hasegawa ,  Masanari Okuno ,  Takeshi Murakami ,  Mitsuo Murakami

发明人： Hiroyasu Hasegawa ,  Masanari Okuno ,  Takeshi Murakami ,  Mitsuo Murakami

IPC分类号： B60R25/02 ,  E05B63/00

CPC分类号： B60R25/02153 ,  Y10T70/5531 ,  Y10T70/5664 ,  Y10T70/5956

摘要： A steering lock that is easy to assemble but difficult for an automobile thief to dismantle. The steering lock includes a cover on which a support structure for supporting a lock mechanism is integrally formed. The lock mechanism is attached to the cover to assemble a first subunit. A steering lock ECU is attached to an ECU case to assemble a second subunit. The first subunit is attached to the second subunit to assemble a lock unit. The lock unit is attached to the housing. A bolt fastens the lock unit and the housing to each other. A second connector is then attached to the housing.

摘要翻译： 一种易于组装但难以将汽车小偷拆卸的转向锁。 转向锁包括盖，其上一体地形成有用于支撑锁定机构的支撑结构。 锁定机构附接到盖子以组装第一子单元。 转向锁定ECU附接到ECU壳体以组装第二子单元。 第一子单元附接到第二子单元以组装锁单元。 锁定单元连接到外壳。 螺栓将锁定单元和壳体彼此紧固。 然后将第二连接器附接到壳体。