Group III nitride semiconductor element and epitaxial wafer
    111.
    发明授权
    Group III nitride semiconductor element and epitaxial wafer 有权
    III族氮化物半导体元件和外延晶片

    公开(公告)号:US07873088B2

    公开(公告)日:2011-01-18

    申请号:US12779769

    申请日:2010-05-13

    IPC分类号: H01S5/00

    摘要: A primary surface 23a of a supporting base 23 of a light-emitting diode 21a tilts by an off-angle of 10 degrees or more and less than 80 degrees from the c-plane. A semiconductor stack 25a includes an active layer having an emission peak in a wavelength range from 400 nm to 550 nm. The tilt angle “A” between the (0001) plane (the reference plane SR3 shown in FIG. 5) of the GaN supporting base and the (0001) plane of a buffer layer 33a is 0.05 degree or more and 2 degrees or less. The tilt angle “B” between the (0001) plane of the GaN supporting base (the reference plane SR4 shown in FIG. 5) and the (0001) plane of a well layer 37a is 0.05 degree or more and 2 degrees or less. The tilt angles “A” and “B” are formed in respective directions opposite to each other with reference to the c-plane of the GaN supporting base.

    摘要翻译: 发光二极管21a的支撑基座23的主表面23a从c面倾斜10度以上且小于80度的偏角。 半导体堆叠25a包括在400nm至550nm的波长范围内具有发射峰的活性层。 GaN支撑基底的(0001)面(图5所示的基准面SR3)与缓冲层33a的(0001)面之间的倾斜角“A”为0.05度以上且2度以下。 GaN支撑基座的(0001)面(图5所示的基准面SR4)与阱层37a的(0001)面之间的倾斜角“B”为0.05度以上且2度以下。 相对于GaN支撑基体的c面,倾斜角“A”和“B”形成在彼此相反的各个方向上。

    Oxygen-doped n-type gallium nitride freestanding single crystal substrate
    112.
    发明授权
    Oxygen-doped n-type gallium nitride freestanding single crystal substrate 有权
    氧掺杂n型氮化镓独立单晶衬底

    公开(公告)号:US07667298B2

    公开(公告)日:2010-02-23

    申请号:US12292534

    申请日:2008-11-20

    IPC分类号: H01L29/207 H01L21/205

    摘要: Oxygen is doped into a gallium nitride crystal by preparing a non-C-plane gallium nitride seed crystal, supplying material gases to the seed crystal, growing a non-C-plane gallium nitride crystal on the seed crystal and allowing oxygen to infiltrate via a non-C-plane surface to the growing crystal. Otherwise, oxygen is doped into the crystal by preparing a C-plane gallium nitride seed crystal or a three-rotationally symmetric plane foreign material seed crystal, supplying material gases to the C-plane seed crystal or the foreign seed crystal, growing a faceted C-plane gallium nitride crystal having facets of non-C-planes on the seed crystal, maintaining the facets on the crystal and allowing oxygen to infiltrate via the non-C-plane facets to the crystal.

    摘要翻译: 通过制备非C面氮化镓晶种,向晶种供应材料气体,在晶种上生长非C面氮化镓晶体并允许氧经由 非C平面到生长晶体。 否则,通过制备C面氮化镓晶种或三旋转对称平面异物籽晶将氧气掺杂到晶体中,将材料气体供应到C面晶种或外来晶种,生长出一个刻面C 在晶种上具有非C面的平面的平面氮化镓晶体,保持晶体上的刻面,并允许氧经由非C面刻面渗入晶体。

    VAPOR-PHASE PROCESS APPARATUS, VAPOR-PHASE PROCESS METHOD, AND SUBSTRATE
    113.
    发明申请
    VAPOR-PHASE PROCESS APPARATUS, VAPOR-PHASE PROCESS METHOD, AND SUBSTRATE 失效
    蒸汽相工艺装置,蒸汽相工艺方法和基材

    公开(公告)号:US20090148704A1

    公开(公告)日:2009-06-11

    申请号:US12330904

    申请日:2008-12-09

    摘要: A vapor-phase process apparatus and a vapor-phase process method capable of satisfactorily maintaining quality of processes even when different types of processes are performed are obtained. A vapor-phase process apparatus includes a process chamber, gas supply ports serving as a plurality of gas introduction portions, and a gas supply portion (a gas supply member, a pipe, a flow rate control device, a pipe, and a buffer chamber). The process chamber allows flow of a reaction gas therein. The plurality of gas supply ports are formed in a wall surface (upper wall) of the process chamber along a direction of flow of the reaction gas. The gas supply portion can supply a gas into the process chamber at a different flow rate from each of one gas supply port and another gas supply port different from that one gas supply port among the plurality of gas supply ports.

    摘要翻译: 获得即使进行不同类型的处理也能够令人满意地保持处理质量的气相处理装置和气相处理方法。 气相处理装置包括处理室,用作多个气体导入部的气体供给口,以及气体供给部(气体供给部件,管道,流量控制装置,管道,缓冲室 )。 处理室允许反应气体在其中流动。 多个气体供给口沿着反应气体的流动方向形成在处理室的壁面(上壁)中。 气体供给部能够以与多个气体供给口中的一个气体供给口不同的一个气体供给口和另一个气体供给口中的每一个以不同的流量向处理室供给气体。

    Oxygen-doped n-type gallium nitride freestanding single crystal substrate
    114.
    发明申请
    Oxygen-doped n-type gallium nitride freestanding single crystal substrate 有权
    氧掺杂n型氮化镓独立单晶衬底

    公开(公告)号:US20090108407A1

    公开(公告)日:2009-04-30

    申请号:US12292534

    申请日:2008-11-20

    IPC分类号: H01L21/20 H01B1/02 H01L29/207

    摘要: Oxygen can be doped into a gallium nitride crystal by preparing a non-C-plane gallium nitride seed crystal, supplying material gases including gallium, nitrogen and oxygen to the non-C-plane gallium nitride seed crystal, growing a non-C-plane gallium nitride crystal on the non-C-plane gallium nitride seed crystal and allowing oxygen to infiltrating via a non-C-plane surface to the growing gallium nitride crystal.Otherwise, oxygen can be doped into a gallium nitride crystal by preparing a C-plane gallium nitride seed crystal or a three-rotationally symmetric plane foreign material seed crystal, supplying material gases including gallium, nitrogen and oxygen to the C-plane gallium nitride seed crystal or the three-rotationally symmetric foreign seed crystal, growing a faceted C-plane gallium nitride crystal having facets of non-C-planes on the seed crystal, maintaining the facets on the C-plane gallium nitride crystal and allowing oxygen to infiltrating via the non-C-plane facets to the gallium nitride crystal.

    摘要翻译: 可以通过制备非C面氮化镓晶体,向非C面氮化镓晶种提供包括镓,氮和氧的材料气体,将氧可以掺杂到氮化镓晶体中,生长非C面 在非C面氮化镓晶种上形成氮化镓晶体,并允许氧通过非C面表面渗入生长的氮化镓晶体。 否则,可以通过制备C面氮化镓晶种或三旋转对称平面异物籽晶将氧气掺杂到氮化镓晶体中,将包括镓,氮和氧的材料气体供应到C面氮化镓晶种 晶体或三旋转对称的外来晶种,在晶种上生长具有非C面的小面的C面氮化镓晶体,保持C面氮化镓晶体上的刻面,并允许氧渗透通过 非C面面到氮化镓晶体。

    Method of fabricating single crystal gallium nitride semiconductor substrate, nitride gallium semiconductor substrate and nitride semiconductor epitaxial substrate
    115.
    发明申请
    Method of fabricating single crystal gallium nitride semiconductor substrate, nitride gallium semiconductor substrate and nitride semiconductor epitaxial substrate 有权
    制造单晶氮化镓半导体衬底,氮化镓半导体衬底和氮化物半导体外延衬底的方法

    公开(公告)号:US20080029783A1

    公开(公告)日:2008-02-07

    申请号:US11498155

    申请日:2006-08-03

    申请人: Masaki Ueno

    发明人: Masaki Ueno

    IPC分类号: H01L31/00

    摘要: A method of fabricating a single crystal gallium nitride substrate the step of cutting an ingot of single crystal gallium nitride along predetermined planes to make one or more single crystal gallium nitride substrates. The ingot of single crystal gallium nitride is grown by vapor phase epitaxy in a direction of a predetermined axis. Each predetermined plane is inclined to the predetermined axis. Each substrate has a mirror polished primary surface. The primary surface has a first area and a second area. The first area is between an edge of the substrate and a line 3 millimeter away from the edge. The first area surrounds the second area. An axis perpendicular to the primary surface forms an off-angle with c-axis of the substrate. The off-angle takes a minimum value at a first position in the first area of the primary surface.

    摘要翻译: 制造单晶氮化镓衬底的方法是将单晶氮化镓锭沿着预定平面切割以制造一个或多个单晶氮化镓衬底的步骤。 单晶氮化镓锭通过气相外延沿预定轴线的方向生长。 每个预定平面相对于预定轴线倾斜。 每个基板具有镜面抛光的主表面。 主表面具有第一区域和第二区域。 第一区域位于衬底的边缘和距离边缘3毫米的线之间。 第一个区域围绕第二个区域。 垂直于主表面的轴与衬底的c轴形成偏角。 偏角在主表面的第一区域中的第一位置处具有最小值。

    Method for folding up an air bag
    117.
    发明授权
    Method for folding up an air bag 失效
    折叠气囊的方法

    公开(公告)号:US06994664B2

    公开(公告)日:2006-02-07

    申请号:US10257416

    申请日:2001-04-11

    IPC分类号: B31F1/00

    摘要: An air bag is unfolded on a planar surface and is inflated with air. The air bag is loosely sandwiched between the upper and lower blades that are arranged in a radial configuration. Movable blocks progress toward the center to fold the upper and lower panels of the air bag against the central part of the air bag. The resulting central folded part of the air bag has a wave-like configuration, and the upper and lower panels are separated from each other. The ear-like portions of the air bag are wound around the central folded part of the air bag that is folded in a wave-like configuration. Then, the central part of the air bag is pressed downward to complete the folding process. Gas can be supplied smoothly from the inlet port to the periphery when the air bag is reinflated. The method for folding the air bag is simple, and the air bag can be inflated quickly.

    摘要翻译: 气囊在平面上展开并用空气充气。 安全气囊松散地夹在被布置成径向构型的上下刀片之间。 可移动块朝向中心前进,将气囊的上下面板抵靠气囊的中心部分折叠。 所得到的气囊的中央折叠部分具有波状构造,并且上下面板彼此分离。 安全气囊的耳状部分缠绕在折叠成波状构造的气囊的中央折叠部分上。 然后,将气囊的中央部分向下压,完成折叠过程。 当气囊被重新充气时,气体可以从入口平滑地供应到周边。 折叠气囊的方法简单,气囊可以快速充气。

    Deteriorated state evaluation device of exhaust emission control equipment
    118.
    发明授权
    Deteriorated state evaluation device of exhaust emission control equipment 失效
    废气排放控制设备劣化状态评估装置

    公开(公告)号:US06935099B2

    公开(公告)日:2005-08-30

    申请号:US10484817

    申请日:2002-08-23

    IPC分类号: F01N3/08 F01N11/00 F01N3/00

    摘要: After an engine 1 has started to operate, a state in which a humidity represented by an output of a humidity sensor 19 downstream of a hydrocarbon adsorbent 7 takes a minimum value is sequentially searched for, and a timing at which the humidity changes from the minimum value to a monotonously increasing state is grasped as a timing at which the adsorption of moisture and hydrocarbons by the hydrocarbon adsorbent 7 is saturated. After the engine has started to operate, a parameter representing an integrated amount of moisture given to the hydrocarbon adsorbent 7 by the exhaust gas is sequentially generated, and a deteriorated state of the hydrocarbon adsorbent 7 is evaluated based on the value of the parameter at the timing at which the adsorption is saturated. The deteriorated state of the hydrocarbon absorbent can thus accurately be evaluated by an inexpensive arrangement which employs the humidity sensor 19 disposed downstream of the hydrocarbon adsorbent 7.

    摘要翻译: 在发动机1开始运行之后,依次搜索由碳氢化合物吸附剂7下游的湿度传感器19的输出表示的湿度为最小值的状态,以及湿度从最小值变化的时刻 将作为单一增加状态的值作为将烃类吸附剂7吸收水分和烃类饱和的时刻进行掌握。 在发动机开始运转之后,依次产生表示通过废气赋予烃类吸附剂7的一体化的水分量的参数,根据该吸附剂7的参数值,评价烃吸附剂7的劣化状态 吸附饱和的时间。 因此,可以通过使用设置在烃吸附剂7的下游的湿度传感器19的廉价的装置来精确地评价烃类吸收剂的劣化状态。