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    Sensing structure of alignment of a probe for testing integrated circuits
    121.
    发明授权
    Sensing structure of alignment of a probe for testing integrated circuits 有权

    公开(公告)号：US10746788B2

    公开(公告)日：2020-08-18

    申请号：US16296052

    申请日：2019-03-07

    Applicant: STMicroelectronics S.r.l.

    Inventor： Alberto Pagani

    IPC: G01R31/28 ,  C12Q1/00 ,  G01R1/067 ,  H01L21/66 ,  H01L21/00 ,  G01N1/00 ,  G01R11/00

    Abstract: A sensing structure is presented for use in testing integrated circuits on a substrate. The sensing structure includes a probe region corresponding to a conductive region for connecting to the integrated circuit. A first sensing region at least partially surrounds the probe region. A plurality of sensing elements connects in series such that a first of the plurality of sensing elements has two terminals respectively connected to the first sensing region and the probe region. And a second of the plurality of sensing elements has two terminals respectively connected to the probe region and a first reference potential.

    Integrated Detection Device, in Particular Detector Particles such as Particlates or Alpha Particles
    123.
    发明申请
    Integrated Detection Device, in Particular Detector Particles such as Particlates or Alpha Particles 审中-公开

    公开(公告)号：US20190072676A1

    公开(公告)日：2019-03-07

    申请号：US16174016

    申请日：2018-10-29

    Applicant: STMicroelectronics S.r.l.

    Inventor： Sara Loi ,  Alberto Pagani

    IPC: G01T1/178 ,  G01T1/29 ,  G01T1/24

    Abstract: A process for manufacturing an optical system includes forming a first hydrophobic surface at a semiconductor substrate, providing a first drop of transparent material having a first shape on the first hydrophobic surface, and allowing the first drop to harden to form a first optical element having the first shape. The optical system may be a particle detector, and the process may optionally further include forming a light source at the semiconductor substrate configured to generate a light beam that passes through the first optical element and a cavity to a photodetector.

    METHOD FOR PRODUCING PROBES FOR TESTING INTEGRATED ELECTRONIC CIRCUITS
    124.
    发明申请
    METHOD FOR PRODUCING PROBES FOR TESTING INTEGRATED ELECTRONIC CIRCUITS 审中-公开

    公开(公告)号：US20190011484A1

    公开(公告)日：2019-01-10

    申请号：US16130536

    申请日：2018-09-13

    Applicant: STMicroelectronics S.r.l.

    Inventor： Alberto Pagani

    IPC: G01R3/00 ,  G01R1/073 ,  G01R31/319 ,  G01R1/067

    Abstract: Cantilever probes are produced for use in a test apparatus of integrated electronic circuits. The probes are configured to contact corresponding terminals of the electronic circuits to be tested during a test operation. The probe bodies are formed of electrically conductive materials. On a lower portion of each probe body that, in use, is directed to the respective terminal to be contacted, an electrically conductive contact region is formed having a first hardness value equal to or greater than 300 HV; each contact region and the respective probe body form the corresponding probe.

    Integrated electronic device for monitoring humidity and/or corrosion
    126.
    发明授权
    Integrated electronic device for monitoring humidity and/or corrosion 有权

    公开(公告)号：US10001453B2

    公开(公告)日：2018-06-19

    申请号：US14781104

    申请日：2014-03-28

    Applicant: STMICROELECTRONICS S.r.l.

    Inventor： Alberto Pagani ,  Bruno Murari

    IPC: G01N27/22 ,  G01N17/00 ,  G01N17/04

    CPC classification number: G01N27/223 ,  G01N17/04

    Abstract: An integrated electronic device 1 for detecting at least one parameter related to humidity and/or presence of water and/or acidity/basicity of an environment surrounding the device is described. Such device 1 comprises a separation layer 14 from the surrounding environment, comprising at least one portion of insulating material 14, and further comprises a first conductive member 11 and a second conductive member 12, made of an electrically conductive material, arranged inside the separation layer 14, with respect to the surrounding environment, and separated from the surrounding environment by the separation layer 14. The device 1 also comprises a measurement module 15, having two measurement terminals 151, 152, electrically connected with the first 11 and the second 12 conductive members, respectively; the measurement module 15 is configured to provide an electric potential difference between the first 11 and the second 12 conductive members. The device 1 further comprises electrode means 13, configured to act as an electrode, arranged outside of the separation layer 14, with respect to the first 11 and the second 12 conductive members; the electrode means 13 are arranged so as to form, with the first 11 and the second 12 conductive members, an electromagnetic circuit having an electromagnetic circuit overall impedance variable based upon the exposure to environmental conditions with a variable level of humidity and/or acidity/basicity. The measurement module 15 is configured to measure the electromagnetic circuit overall impedance, which is present between the measurement terminals 151, 152, and to determine the at least one parameter to be detected, based on the overall impedance measured.

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