公开(公告)号：US06251699B1

公开(公告)日：2001-06-26

申请号：US09617175

申请日：2000-07-17

Applicant: Matthias Fuertsch ,  Michael Offenberg

Inventor： Matthias Fuertsch ,  Michael Offenberg

IPC: H01L2100

CPC classification number: B81C1/00666 ,  B81B2203/0118 ,  B81C2201/0109 ,  B81C2201/0164 ,  B81C2201/0169

Abstract: A method for fabricating micromechanical components, which provides for depositing one or a plurality of sacrificial layers on a silicon substrate and, thereon, a silicon layer. In subsequent method steps, a structure is patterned out of the silicon layer, and the sacrificial layer is removed, at least under one section of the structure. The silicon layer is doped by an implantation process.

Abstract translation: 一种用于制造微机械部件的方法，其提供在硅衬底上以及其上的硅层上沉积一个或多个牺牲层。 在随后的方法步骤中，从硅层图案化结构，并且至少在该结构的一个部分处去除牺牲层。 通过注入工艺掺杂硅层。

公开(公告)号：US06055858A

公开(公告)日：2000-05-02

申请号：US362936

申请日：1999-07-28

Applicant: Horst Muenzel ,  Dietrich Schubert ,  Alexandra Boehringer ,  Michael Offenberg ,  Klaus Heyers ,  Markus Lutz

Inventor： Horst Muenzel ,  Dietrich Schubert ,  Alexandra Boehringer ,  Michael Offenberg ,  Klaus Heyers ,  Markus Lutz

IPC: G01P15/02 ,  G01P3/48 ,  G01P9/04 ,  G01P15/08 ,  G01P15/125 ,  H01L29/84 ,  G01P3/00

CPC classification number: G01P3/48 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  Y10S148/135 ,  Y10S148/159

Abstract: An acceleration sensor is composed of a three-layer system. The acceleration sensor and conductor tracks are patterned out of the third layer. The conductor tracks are electrically isolated from other regions of the third layer by recesses and electrically insulated from a first layer by a second electrically insulating layer. In this manner, a simple electrical contacting is achieved, which is configured out of a three-layer system. One exemplary application of the acceleration sensor includes mounting the acceleration sensor on a vibrational system of an rpm (rate-of-rotation sensor). This simplifies the manufacturing of an rpm sensor, since the vibrational system and the acceleration sensor are configured out of a three-layer system, wherein the conductor tracks are run into the frame of the rpm sensor in which the vibrational system is suspended, so as to allow excursion.

Abstract translation: 加速度传感器由三层系统组成。 将加速度传感器和导体轨迹从第三层图案化。 导体轨道通过凹部与第三层的其它区域电绝缘，并且通过第二电绝缘层与第一层电绝缘。 以这种方式，实现了由三层系统构成的简单的电接触。 加速度传感器的一个示例性应用包括将加速度传感器安装在rpm（转速传感器）的振动系统上。 这简化了rpm传感器的制造，因为振动系统和加速度传感器是由三层系统构成的，其中导体轨道运行到其中悬挂振动系统的转速传感器的框架中，以便 允许游览。

公开(公告)号：US5983721A

公开(公告)日：1999-11-16

申请号：US940140

申请日：1997-09-29

Applicant: Peter Sulzberger ,  Michael Offenberg

Inventor： Peter Sulzberger ,  Michael Offenberg

IPC: G01L1/14 ,  B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  G01P15/08 ,  G01P15/125

CPC classification number: B81B3/0072 ,  G01P15/0802 ,  G01P15/125 ,  B81B2203/0109 ,  B81B2203/0136 ,  B81B2203/0307 ,  B81B2203/051 ,  G01P2015/0814

Abstract: A micromechanical component includes a one-piece surface structure that is created on a substrate. The one-piece surface structure is attached to the surface of the substrate by at least two anchoring areas. The anchoring areas are a small distance apart, which is comparatively small in comparison with the lateral dimension of the surface structure. The surface structure has movable electrodes. Opposite them there are rigid electrodes that are attached to the substrate by additional anchoring areas. The additional anchoring areas also have a small distance between one another and to the anchoring areas.

Abstract translation: 微机械部件包括在基板上产生的一体式表面结构。 一体式表面结构通过至少两个锚定区附接到基板的表面。 锚固区域距离相对较小，与表面结构的横向尺寸相比较小。 表面结构具有可动电极。 与它们相对的是具有通过附加锚固区附接到基底的刚性电极。 附加的锚固区域彼此之间和锚固区域之间也具有小的距离。

公开(公告)号：US5937275A

公开(公告)日：1999-08-10

申请号：US809945

申请日：1997-10-27

Applicant: Horst Munzel ,  Michael Offenberg ,  Klaus Heyers ,  Bernhard Elsner ,  Markus Lutz ,  Helmut Skapa ,  Heinz-Georg Vossenberg ,  Nicholas Buchan ,  Eckhard Graf

Inventor： Horst Munzel ,  Michael Offenberg ,  Klaus Heyers ,  Bernhard Elsner ,  Markus Lutz ,  Helmut Skapa ,  Heinz-Georg Vossenberg ,  Nicholas Buchan ,  Eckhard Graf

IPC: G01P15/08 ,  H01L29/84 ,  G01L23/10 ,  G01P15/09

CPC classification number: G01P15/0802

Abstract: A method for producing acceleration sensors is proposed, in which a silicon layer that is deposited in an epitaxial application system is used. Above sacrificial layers (2) applied to the substrate (1), the material grows in the form of a polysilicon layer (6), which has a certain surface roughness. By application of a photoresist and by a wet etching process, this surface roughness is eliminated. Alternatively, chemical-mechanical smoothing is contemplated.

Abstract translation: PCT No.PCT / DE96 / 01236 Sec。 371日期1997年10月27日第 102（e）1997年10月27日PCT PCT 1996年7月9日PCT公布。 第WO97 / 04319号公报 日期1997年2月6日提出了一种用于制造加速度传感器的方法，其中使用沉积在外延应用系统中的硅层。 在施加到基板（1）的牺牲层（2）上方，材料以具有一定表面粗糙度的多晶硅层（6）的形式生长。 通过施加光致抗蚀剂和通过湿蚀刻工艺，可以消除该表面粗糙度。 或者，考虑化学机械平滑化。

公开(公告)号：US5631422A

公开(公告)日：1997-05-20

申请号：US550484

申请日：1995-10-30

Applicant: Peter Sulzberger ,  Michael Offenberg ,  Bernhard Elsner ,  Markus Lutz

Inventor： Peter Sulzberger ,  Michael Offenberg ,  Bernhard Elsner ,  Markus Lutz

IPC: G01P15/08 ,  G01P15/125 ,  H01L29/84 ,  H01G7/00

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P2015/0814

Abstract: A sensor includes a first silicon layer, and a sensor element including at least one electrode structured from the first silicon layer. The sensor also includes at least one connecting element also structured from the first silicon layer. The connecting element has a doping less than the doping of the electrode. The sensor comprises at least one conductor track on the first silicon layer routed over the connecting element and coupled to the sensor element for supplying an external signal.

Abstract translation: 传感器包括第一硅层和包括由第一硅层构成的至少一个电极的传感器元件。 该传感器还包括至少一个也由第一硅层构成的连接元件。 连接元件的掺杂小于电极的掺杂。 传感器包括在连接元件上布线的第一硅层上的至少一个导体轨道，并且耦合到传感器元件以提供外部信号。

公开(公告)号：US5569852A

公开(公告)日：1996-10-29

申请号：US355760

申请日：1994-12-14

Applicant: Jiri Marek ,  Frank Bantien ,  Horst Muenzel ,  Michael Offenberg

Inventor： Jiri Marek ,  Frank Bantien ,  Horst Muenzel ,  Michael Offenberg

IPC: G01P15/08 ,  G01P15/125 ,  H01L29/84

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P2015/0814

Abstract: A contacting of a capacitive accelerometer sensor of monocrystalline material is achieved by a capacitive accelerometer sensor having a structure etched out of a monocrystalline layer arranged on a substrate, including a seismic mass that is only joined to the substrate by suspension segments and executing a movement in its longitudinal direction in response to the occurrence of an acceleration of parallel, plate-like first fingers extending out from this mass at right angles to their longitudinal direction and of plate-like second fingers running parallel to the first fingers and anchored to the substrate. The first and second fingers form a capacitor arrangement. The suspension segments, which are anchored with their end region that is distant from the seismic mass to the substrate, and second fingers are electrically isolated, by an isolation strip, from the other remaining layer of monocrystalline material. A passivation layer extends over the isolation strip, and at least partially over the remaining layer. Conductors arranged on the passivation layer and serving as connecting leads for the capacitor arrangement extend across the isolation strip up to the connections of the capacitor arrangement, and are contacted there.

Abstract translation: 单晶材料的电容式加速度计传感器的接触是通过电容式加速度计传感器实现的，该传感器具有从布置在基底上的单晶层中蚀刻出的结构，包括仅通过悬挂段连接到基底的地震质量块， 其纵向方向响应于从该质量块与其纵向方向成直角地延伸的平行的板状第一指状物的加速度以及平行于第一指状物并且锚固到基底的板状第二指状物的加速度。 第一和第二指形成电容器布置。 将其远离地震质体的端部区域锚定到基底的悬挂段和第二指状物通过隔离带与另一个剩余的单晶材料层电隔离。 钝化层在隔离带上延伸，并且至少部分地覆盖剩余层。 布置在钝化层上并且用作电容器布置的连接引线的导体跨过隔离带延伸直到电容器装置的连接，并且在那里接触。

公开(公告)号：US08627719B2

公开(公告)日：2014-01-14

申请号：US12459993

申请日：2009-07-09

Applicant: Michael Offenberg ,  Michael Baus

Inventor： Michael Offenberg ,  Michael Baus

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P2015/0831

Abstract: A micromechanical sensor element includes: a substrate; a first seismic mass suspended from the substrate, which is deflectable from a first rest position by an acceleration acting perpendicularly to a main plane of extension; and a second seismic mass, which is deflectable from a second rest position by the acceleration. At least a partial overlap is provided between the first seismic mass and the second seismic mass perpendicular to the main plane of extension.

Abstract translation: 微机械传感器元件包括：基板; 从衬底悬挂的第一个地震质量块，其通过垂直于主平面延伸的加速度从第一静止位置偏转; 以及第二地震质量块，其可以通过加速度从第二静止位置偏转。 在第一抗震块与垂直于主延伸平面的第二震震块之间至少提供部分重叠。

公开(公告)号：US20050230708A1

公开(公告)日：2005-10-20

申请号：US11028370

申请日：2005-01-03

Applicant: Frank Reichenbach ,  Stefan Pinter ,  Frank Henning ,  Hans Artmann ,  Helmut Baumann ,  Franz Laemer ,  Michael Offenberg ,  Georg Bischopink

Inventor： Frank Reichenbach ,  Stefan Pinter ,  Frank Henning ,  Hans Artmann ,  Helmut Baumann ,  Franz Laemer ,  Michael Offenberg ,  Georg Bischopink

IPC: B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  C30B1/00

CPC classification number: B81C1/00293 ,  B81B2201/0228 ,  B81B2207/095 ,  B81C2201/0115 ,  B81C2203/0136 ,  B81C2203/0145

Abstract: The invention relates to a sensor with at least one silicon-based micromechanical structure, which is integrated with a sensor chamber of a foundation wafer, and with at least one covering that covers the foundation wafer in the region of the sensor chamber, and to a method for producing a sensor. It is provided that in the sensor of the invention, the covering (13) comprises a first layer (32) (deposition layer) that is permeable to an etching medium and the reaction products, and a hermetically sealing second layer (34) (sealing layer) located above it, and that in the method of the invention, at least the sensor chamber (28) present in the foundation wafer (11) after the establishment of the structure (26) is filled with an oxide (30), in particular CVD oxide or porous oxide; the sensor chamber (28) is covered by a first layer (32) (deposition layer), in particular of polysilicon, that is transparent to an etching medium and the reaction products or is retroactively made transparent; the oxide (30) in the sensor chamber (28) is removed through the deposition layer (32) with the etching medium; and next, a second layer (34) (sealing layer), in particular of metal or an insulator, is applied to the deposition layer (32) and hermetically seals off the sensor chamber (28).

Abstract translation: 本发明涉及具有至少一个硅基微机械结构的传感器，其与基础晶片的传感器室结合，并且在传感器室的区域中具有覆盖基础晶片的至少一个覆盖物，以及至少一个 传感器的制造方法 设置在本发明的传感器中，覆盖物（13）包括可蚀刻介质和反应产物的第一层（沉积层）和密封的第二层（34）（密封 层），并且在本发明的方法中，在建立结构（26）之后，至少存在于基础晶片（11）中的传感器室（28）填充有氧化物（30），其中 特定的CVD氧化物或多孔氧化物; 传感器室（28）由对蚀刻介质和反应产物透明的或者具有回溯性的透明的第一层（32）（沉积层）（特别是多晶硅）覆盖; 传感器室（28）中的氧化物（30）通过蚀刻介质通过沉积层（32）去除; 接下来，将特别是金属或绝缘体的第二层（34）（密封层）施加到沉积层（32）并气密地密封传感器室（28）。

公开(公告)号：US5792675A

公开(公告)日：1998-08-11

申请号：US730257

申请日：1996-10-15

Applicant: Michael Offenberg

Inventor： Michael Offenberg

IPC: B81B3/00 ,  G01P15/08 ,  G01P15/125 ,  H01L49/00 ,  H01L21/00

CPC classification number: B81B3/0086 ,  B81B3/0035 ,  B81B3/0078 ,  B81C1/00595 ,  G01P15/0802 ,  G01P15/125 ,  B81B2201/0235 ,  B81B2203/0118 ,  B81B2203/0136 ,  B81C2201/0107 ,  B81C2201/0109 ,  B81C2201/016 ,  G01P2015/0814

Abstract: In an accelerometer sensor of crystalline material, whose components are composed partly of monocrystalline and partly of polycrystalline material, a band-shaped seismic mass preferably is composed of polycrystalline material, whose suspension by means of suspension segments of monocrystalline material at the end regions permits a movement in the longitudinal direction upon the occurrence of an acceleration. Parallel plates extend from this mass at right angles to their longitudinal direction and, together with additional plates, which run parallel to said plates and are anchored at a base, form a capacitor arrangement and are composed, in particular, of monocrystalline material. At least the monocrystalline material is doped to attain an electric conductivity. When lightly doped, the long and thin plates and suspension segments have a high conductivity, given a very small mechanical prestressing, and can easily be isotropically undercut. The polycrystalline formation of the seismic mass can be designed to be very wide and large by etching away an underlying sacrificial oxide.

Abstract translation: 在结晶材料的加速度传感器中，其部件部分由单晶组成，部分由多晶材料组成，带状地震质量体优选地由多晶材料组成，其结晶区域的单晶材料悬浮段的悬浮液允许 发生加速时的纵向移动。 平行板从该质量块垂直于其纵向方向延伸，并且与另外的板一起平行于所述板并锚定在基座上，形成电容器布置，并且特别地由单晶材料组成。 至少单晶材料被掺杂以获得导电性。 当轻掺杂时，长且薄的板和悬浮段具有高导电性，给定非常小的机械预应力，并且可以容易地各向同性地切削。 通过蚀刻掉潜在的牺牲氧化物，可以将地震块的多晶形成设计得非常宽和大。

公开(公告)号：US5578755A

公开(公告)日：1996-11-26

申请号：US348700

申请日：1994-12-02

Applicant: Michael Offenberg

Inventor： Michael Offenberg

IPC: B81B3/00 ,  G01P15/08 ,  G01P15/125 ,  H01L49/00

CPC classification number: B81B3/0086 ,  B81B3/0035 ,  B81B3/0078 ,  B81C1/00595 ,  G01P15/0802 ,  G01P15/125 ,  B81B2201/0235 ,  B81B2203/0118 ,  B81B2203/0136 ,  B81C2201/0107 ,  B81C2201/0109 ,  B81C2201/016 ,  G01P2015/0814

Abstract: In an accelerometer sensor of crystalline material, whose components are composed partly of monocrystalline and partly of polycrystalline material, a band-shaped seismic mass preferably is composed of polycrystalline material, whose suspension by means of suspension segments of monocrystalline material at the end regions permits a movement in the longitudinal direction upon the occurrence of an acceleration. Parallel plates extend from this mass at right angles to their longitudinal direction and, together with additional plates, which run parallel to said plates and are anchored at a base, form a capacitor arrangement and are composed, in particular, of monocrystalline material. At least the monocrystalline material is doped to attain an electric conductivity. When lightly doped, the long and thin plates and suspension segments have a high conductivity, given a very small mechanical prestressing, and can easily be isotropically undercut. The polycrystalline formation of the seismic mass can be designed to be very wide and large by etching away an underlying sacrificial oxide.

Abstract translation: 在结晶材料的加速度传感器中，其部件部分由单晶组成，部分由多晶材料组成，带状地震质量体优选地由多晶材料组成，其结晶区域的单晶材料悬浮段的悬浮液允许 发生加速时的纵向移动。 平行板从该质量块垂直于其纵向方向延伸，并且与另外的板一起平行于所述板并锚定在基座上，形成电容器布置，并且特别地由单晶材料组成。 至少单晶材料被掺杂以获得导电性。 当轻掺杂时，长且薄的板和悬浮段具有高导电性，给定非常小的机械预应力，并且可以容易地各向同性地切削。 通过蚀刻掉潜在的牺牲氧化物，可以将地震块的多晶形成设计得非常宽和大。