公开(公告)号：US09460991B1

公开(公告)日：2016-10-04

申请号：US13864242

申请日：2013-04-17

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Deepak Sekar

IPC: H01L21/70 ,  H01L23/62 ,  H01L23/498

CPC classification number: H01L21/4871 ,  H01L21/823487 ,  H01L23/34 ,  H01L23/367 ,  H01L23/3677 ,  H01L23/373 ,  H01L23/3732 ,  H01L23/49827 ,  H01L23/49838 ,  H01L23/5226 ,  H01L23/60 ,  H01L25/0657 ,  H01L25/50 ,  H01L27/0207 ,  H01L27/0248 ,  H01L27/0688 ,  H01L27/092 ,  H01L27/098 ,  H01L2225/06527 ,  H01L2225/06541 ,  H01L2225/06589 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A 3D semiconductor device, including: a first layer including first transistors; a second layer overlying the first transistors and including second transistors; wherein the second layer includes a through layer via with a diameter of less than 150 nm; and a first circuit including at least one of the first transistors, and the first circuit has a first circuit output connected to at least one of the second transistors, wherein the at least one of the second transistors is connected to a device output that is designed to be connected to external devices, and wherein the at least one of the second transistors is substantially larger than the at least one of the first transistors.

Abstract translation: 一种3D半导体器件，包括：包括第一晶体管的第一层; 覆盖所述第一晶体管并包括第二晶体管的第二层; 其中所述第二层包括直径小于150nm的贯通层通孔; 以及第一电路，其包括所述第一晶体管中的至少一个，并且所述第一电路具有连接到所述第二晶体管中的至少一个的第一电路输出，其中所述第二晶体管中的至少一个连接到设计的器件输出 以连接到外部设备，并且其中所述第二晶体管中的至少一个基本上大于所述至少一个所述第一晶体管。

公开(公告)号：US09419031B1

公开(公告)日：2016-08-16

申请号：US14461539

申请日：2014-08-18

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak Sekar

IPC: H01L27/146 ,  H01L21/822

CPC classification number: H01L27/14605 ,  H01L21/8221 ,  H01L25/0756 ,  H01L27/14612 ,  H01L27/14634 ,  H01L27/153 ,  H01L31/0725 ,  H01L31/1892 ,  H01L33/0079 ,  H01L33/34 ,  H01L2924/0002 ,  Y02E10/50 ,  H01L2924/00

Abstract: An integrated device, including: a first mono-crystal layer including a plurality of image sensor pixels and alignment marks; an overlaying oxide on top of the first mono-crystal layer; and a second mono-crystal layer overlaying the oxide, where the second mono-crystal layer includes a plurality of single crystal transistors aligned to the alignment marks.

Abstract translation: 一种集成装置，包括：包括多个图像传感器像素和对准标记的第一单晶层; 在第一单晶层的顶部上的覆盖氧化物; 以及覆盖所述氧化物的第二单晶层，其中所述第二单晶层包括与所述对准标记对准的多个单晶体晶体管。

公开(公告)号：US09219005B2

公开(公告)日：2015-12-22

申请号：US13623756

申请日：2012-09-20

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak Sekar ,  Brian Cronquist ,  Ze'ev Wurman

IPC: H01L23/48 ,  H01L21/762 ,  H01L23/544 ,  H01L21/683 ,  H01L27/06 ,  H01L27/092 ,  B82Y10/00 ,  H01L21/84 ,  H01L29/66 ,  H01L27/02 ,  H01L29/78 ,  H01L27/105 ,  H01L27/108 ,  H01L29/788 ,  H01L29/792 ,  H01L27/11 ,  H01L27/115 ,  H01L27/118 ,  H01L27/12 ,  G11C16/04 ,  G11C16/10 ,  H01L29/786 ,  H01L29/10 ,  H01L23/00 ,  H01L25/065 ,  H01L27/088 ,  G11C11/41 ,  G11C17/18 ,  G11C29/32 ,  G11C29/44

CPC classification number: B82Y10/00 ,  G11C11/41 ,  G11C16/0408 ,  G11C16/0483 ,  G11C16/10 ,  G11C17/18 ,  G11C29/32 ,  G11C29/44 ,  H01L21/6835 ,  H01L21/76254 ,  H01L21/84 ,  H01L23/544 ,  H01L24/13 ,  H01L24/16 ,  H01L24/32 ,  H01L24/48 ,  H01L25/0655 ,  H01L27/0207 ,  H01L27/0688 ,  H01L27/0694 ,  H01L27/088 ,  H01L27/092 ,  H01L27/1052 ,  H01L27/10802 ,  H01L27/10894 ,  H01L27/10897 ,  H01L27/1104 ,  H01L27/1108 ,  H01L27/1116 ,  H01L27/11524 ,  H01L27/11526 ,  H01L27/11529 ,  H01L27/11551 ,  H01L27/1157 ,  H01L27/11573 ,  H01L27/11578 ,  H01L27/11807 ,  H01L27/1203 ,  H01L29/1033 ,  H01L29/66545 ,  H01L29/66795 ,  H01L29/66825 ,  H01L29/66833 ,  H01L29/7841 ,  H01L29/785 ,  H01L29/78696 ,  H01L29/7881 ,  H01L29/792 ,  H01L2221/6835 ,  H01L2221/68381 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2224/131 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/48227 ,  H01L2224/73204 ,  H01L2224/73265 ,  H01L2224/81001 ,  H01L2924/00014 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/12042 ,  H01L2924/1305 ,  H01L2924/13062 ,  H01L2924/13091 ,  H01L2924/1461 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/3011 ,  H01L2924/3025 ,  H01L2924/00012 ,  H01L2924/00015 ,  H01L2924/014 ,  H01L2924/3512 ,  H01L2924/00 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207

Abstract: A 3D IC based mobile system including: a first semiconductor layer including first mono-crystallized transistors, where the first mono-crystallized transistors are interconnected by at least one metal layer including aluminum or copper; a second layer including second mono-crystallized transistors and overlaying the at least one metal layer, where the at least one metal layer is in-between the first semiconductor layer and the second layer; a plurality of thermal paths between the second mono-crystallized transistors and a heat removal apparatus, where at least one of the plurality of thermal paths includes a thermal contact adapted to conduct heat and not conduct electricity; and a heat spreader layer between the second layer and the at least one metal layer.

Abstract translation: 一种基于3D IC的移动系统，包括：包括第一单结晶晶体管的第一半导体层，其中第一单结晶晶体管通过包括铝或铜的至少一个金属层互连; 第二层，包括第二单结晶晶体管并且覆盖所述至少一个金属层，其中所述至少一个金属层在所述第一半导体层和所述第二层之间; 所述第二单结晶晶体管和散热装置之间的多个热路径，其中所述多个热路径中的至少一个包括适于传导热量而不导电的热接触; 以及在所述第二层和所述至少一个金属层之间的散热层。

公开(公告)号：US09099424B1

公开(公告)日：2015-08-04

申请号：US13869115

申请日：2013-04-24

Applicant: Monolithic 3D Inc.

Inventor： Deepak Sekar ,  Zvi Or-Bach ,  Brian Cronquist

IPC: H01L29/72 ,  H01L23/373

CPC classification number: H01L23/5225 ,  H01L23/3677 ,  H01L27/0688 ,  H01L27/088 ,  H01L27/092 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A mobile system, including: a 3D device, the 3D device including: a first layer of first transistors, overlaid by at least one interconnection layer, where the interconnection layer comprises copper or aluminum; a second layer including second transistors, the second layer overlaying the interconnection layer, the second layer including: a plurality of electrical connections connecting the second transistors with the interconnection layer; and at least one thermally conductive and electrically non-conductive contact, the at least one thermally conductive and electrically non-conductive contact thermally connects the second layer to the top or bottom surface of the 3D device.

Abstract translation: 一种移动系统，包括：3D设备，所述3D设备包括：由至少一个互连层覆盖的第一层第一晶体管，所述互连层包括铜或铝; 包括第二晶体管的第二层，覆盖所述互连层的所述第二层，所述第二层包括：将所述第二晶体管与所述互连层连接的多个电连接; 以及至少一个导热和非导电接触，所述至少一个导热和非导电接触将所述第二层热连接到所述3D器件的顶表面或底表面。

公开(公告)号：US11430668B2

公开(公告)日：2022-08-30

申请号：US17705392

申请日：2022-03-28

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Deepak Sekar

IPC: H01L23/498 ,  H01L21/48 ,  H01L23/34 ,  H01L27/02 ,  H01L21/8234 ,  H01L27/06 ,  H01L27/098 ,  H01L23/522 ,  H01L23/367 ,  H01L27/092 ,  H01L25/00 ,  H01L23/60 ,  H01L25/065 ,  H01L23/373

Abstract: A 3D semiconductor device a first level, where the first level includes a first layer which includes first transistors, where the first level includes a second layer, the second layer including first interconnections; a second level overlaying the first level, where the second level includes a third layer which includes second transistors, and where the second level includes a fourth layer, the fourth layer including second interconnections and a plurality of connection paths, where the plurality of connection paths provides connections from a plurality of the first transistors to a plurality of the second transistors, where the second level is bonded to the first level, where the bonded includes oxide to oxide bond regions, where the bonded includes metal to metal bond regions, where the second level includes at least one first ElectroStatic Discharge (ESD) circuit, and where the first level includes at least one second ESD circuit.

公开(公告)号：US20210225663A1

公开(公告)日：2021-07-22

申请号：US17222960

申请日：2021-04-05

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Deepak Sekar

IPC: H01L21/48 ,  H01L23/498 ,  H01L23/34 ,  H01L27/02 ,  H01L21/8234 ,  H01L27/06 ,  H01L27/098 ,  H01L23/522 ,  H01L23/367 ,  H01L27/092 ,  H01L25/00 ,  H01L23/60 ,  H01L25/065

Abstract: A 3D semiconductor device, the device including: a first level, where the first level includes a first layer, the first layer including first transistors, and where the first level includes a second layer, the second layer including first interconnections; a second level overlaying the first level, where the second level includes a third layer, the third layer including second transistors, and where the second level includes a fourth layer, the fourth layer including second interconnections; and a plurality of connection paths, where the plurality of connection paths provides connections from a plurality of the first transistors to a plurality of the second transistors, where the second level is bonded to the first level, where the bonded includes oxide to oxide bond regions, where the bonded includes metal to metal bond regions, where the third layer includes a crystalline layer, and where the second level includes a Radio Frequency (“RF”) circuit.

公开(公告)号：US11004694B1

公开(公告)日：2021-05-11

申请号：US17115766

申请日：2020-12-08

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Deepak Sekar

IPC: H01L23/498 ,  H01L21/48 ,  H01L23/34 ,  H01L27/02 ,  H01L21/8234 ,  H01L27/06 ,  H01L27/098 ,  H01L23/522 ,  H01L23/367 ,  H01L27/092 ,  H01L25/00 ,  H01L23/60 ,  H01L25/065 ,  H01L23/373

Abstract: A 3D semiconductor device, the device including: a first level, where the first level includes a first layer, the first layer including first transistors, and where the first level includes a second layer, the second layer including first interconnections; a second level overlaying the first level, where the second level includes a third layer, the third layer including second transistors, and where the second level includes a fourth layer, the fourth layer including second interconnections; and a plurality of connection paths, where the plurality of connection paths provides connections from a plurality of the first transistors to a plurality of the second transistors, where the second level is bonded to the first level, where the bonded includes oxide to oxide bond regions, where the bonded includes metal to metal bond regions, where the second level includes at least one memory array, and where the third layer includes material other than silicon.

公开(公告)号：US10903089B1

公开(公告)日：2021-01-26

申请号：US17061563

申请日：2020-10-01

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Deepak Sekar

IPC: H01L23/498 ,  H01L21/48 ,  H01L23/34 ,  H01L27/02 ,  H01L21/8234 ,  H01L27/06 ,  H01L27/098 ,  H01L23/522 ,  H01L23/367 ,  H01L27/092 ,  H01L25/00 ,  H01L23/60 ,  H01L25/065 ,  H01L23/373

Abstract: A 3D semiconductor device, the device comprising: a first level, wherein said first level comprises a first layer, said first layer comprising first transistors, and wherein said first level comprises a second layer, said second layer comprising first interconnections; a second level overlaying said first level, wherein said second level comprises a third layer, said third layer comprising second transistors, and wherein said second level comprises a fourth layer, said fourth layer comprising second interconnections; and a plurality of connection paths, wherein said plurality of connection paths provides connections from a plurality of said first transistors to a plurality of said second transistors, wherein said second level is bonded to said first level, wherein said bonded comprises oxide to oxide bond regions, wherein said bonded comprises metal to metal bond regions, wherein said second level comprises at least one memory array, wherein said second level comprises at least one Phase Lock Loop (“PLL) circuit, and wherein said third layer comprises crystalline silicon.

公开(公告)号：US10043781B2

公开(公告)日：2018-08-07

申请号：US15904377

申请日：2018-02-25

Applicant: Monolithic 3D Inc.

Inventor： Deepak Sekar ,  Zvi Or-Bach ,  Brian Cronquist

IPC: H01L23/48 ,  H01L25/065 ,  H01L23/367 ,  H01L27/092 ,  H01L21/8234 ,  H01L27/088 ,  H01L23/522 ,  H01L27/06

CPC classification number: H01L25/0657 ,  H01L21/823475 ,  H01L23/3677 ,  H01L23/481 ,  H01L23/5225 ,  H01L27/0688 ,  H01L27/088 ,  H01L27/0886 ,  H01L27/092 ,  H01L27/0922 ,  H01L2225/06527 ,  H01L2225/06541 ,  H01L2225/06589 ,  H01L2924/00 ,  H01L2924/0002

Abstract: A 3D semiconductor device, the device including: a first single crystal layer including a plurality of first transistors; at least one metal layer interconnecting the first transistors, a portion of the first transistors forming a plurality of logic gates; a plurality of second transistors overlaying the first single crystal layer; at least one connection from the plurality of first transistors to a plurality of through silicon vias (TSVs); a plurality of third transistors overlaying the plurality of second transistors, where the plurality of second transistors are self-aligned to the plurality of third transistors having been processed following the same lithography step; and a first memory array and a second memory array, where the first memory array includes the plurality of second transistors and the second memory array includes the plurality of third transistors.

公开(公告)号：US20170200716A1

公开(公告)日：2017-07-13

申请号：US15470872

申请日：2017-03-27

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Deepak Sekar

IPC: H01L27/06 ,  H01L23/367 ,  H01L23/00 ,  H01L27/088 ,  H01L23/58 ,  H01L23/528 ,  H01L23/544 ,  H01L23/522

CPC classification number: H01L27/0688 ,  H01L23/3677 ,  H01L23/544 ,  H01L23/552 ,  H01L23/562 ,  H01L23/585 ,  H01L27/088 ,  H01L27/092 ,  H01L27/1211 ,  H01L2223/54426 ,  H01L2223/54453

Abstract: An Integrated Circuit device, including: a first layer including first single crystal transistors; a second layer overlaying the first layer, the second layer including second single crystal transistors, where the second layer thickness is less than one micron, where a plurality of the first transistors is circumscribed by a first dice lane of at least 10 microns width, and there are no first conductive connections to the plurality of the first transistors that cross the first dice lane, where a plurality of the second transistors are circumscribed by a second dice lane of at least 10 microns width, and there are no second conductive connections to the plurality of the second transistors that cross the second dice lane, and at least one thermal conducting path from at least one of the second single crystal transistors to an external surface of the device.