SPAD photodiode
    17.
    发明授权

    公开(公告)号:US12087873B2

    公开(公告)日:2024-09-10

    申请号:US17702186

    申请日:2022-03-23

    CPC classification number: H01L31/107

    Abstract: A photodiode is formed in a semiconductor substrate of a first conductivity type. The photodiode includes a first region having a substantially hemispherical shape and a substantially hemispherical core of a second conductivity type, different from the first conductivity type, within the first region. An epitaxial layer covers the semiconductor substrate and buries the first region and core.

Patent Agency Ranking