公开(公告)号：US20120049336A1

公开(公告)日：2012-03-01

申请号：US13289918

申请日：2011-11-04

Applicant: Yan Xun Xue ,  Jun Lu ,  Lei Shi ,  Liang Zhao

Inventor： Yan Xun Xue ,  Jun Lu ,  Lei Shi ,  Liang Zhao

IPC: H01L23/495

CPC classification number: H01L24/73 ,  H01L21/4842 ,  H01L23/3107 ,  H01L23/49541 ,  H01L23/49551 ,  H01L24/29 ,  H01L24/37 ,  H01L24/40 ,  H01L24/48 ,  H01L24/83 ,  H01L24/84 ,  H01L24/85 ,  H01L24/92 ,  H01L24/97 ,  H01L2224/0603 ,  H01L2224/29339 ,  H01L2224/371 ,  H01L2224/37599 ,  H01L2224/48247 ,  H01L2224/73221 ,  H01L2224/83101 ,  H01L2224/83801 ,  H01L2224/8385 ,  H01L2224/85 ,  H01L2224/92 ,  H01L2224/97 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01057 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/13091 ,  H01L2924/30107 ,  H01L2924/3011 ,  H01L2224/83 ,  H01L2224/84 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207

Abstract: A method is disclosed for attaching an interconnection plate to semiconductor die within leadframe package. A base leadframe is provided with die pad for attaching semiconductor die. An interconnection plate is provided for attachment to the base leadframe and semiconductor die. Add a base registration feature onto base leadframe and a plate registration feature onto interconnection plate with the registration features designed to match each other such that, upon approach of the interconnection plate to base leadframe, the two registration features would engage and guide each other causing concomitant self-aligned attachment of the interconnection plate to base leadframe. Next, the interconnection plate is brought into close approach to base leadframe to engage and lock plate registration feature to base registration feature hence completing attachment of the interconnection plate to semiconductor die and forming a leadframe package.

Abstract translation: 公开了一种将引线框封装内的互连板连接到半导体管芯的方法。 基座引线框架设置有用于附接半导体管芯的管芯焊盘。 提供互连板，用于附接到基底引线框架和半导体管芯。 将基准注册功能添加到基准引线框架和板对准特征到互连板上，其中配准特征被设计成彼此匹配，使得在互连板到基底引线框架的接近时，两个配准特征将相互接合并引导彼此引起伴随 互连板与基座引线框架的自对准连接。 接下来，使互连板靠近基底引线框架以将板对准特征接合并锁定到基准对准特征，从而完成互连板连接到半导体管芯并形成引线框封装。

公开(公告)号：US20110309454A1

公开(公告)日：2011-12-22

申请号：US13077720

申请日：2011-03-31

Applicant: Yueh-Se Ho ,  Hamza Yilmaz ,  Yan Xun Xue ,  Jun Lu

Inventor： Yueh-Se Ho ,  Hamza Yilmaz ,  Yan Xun Xue ,  Jun Lu

IPC: H01L27/088

CPC classification number: H01L23/49524 ,  H01L23/3107 ,  H01L23/49537 ,  H01L23/49562 ,  H01L23/49575 ,  H01L24/06 ,  H01L24/37 ,  H01L24/40 ,  H01L24/41 ,  H01L24/48 ,  H01L24/49 ,  H01L24/73 ,  H01L24/81 ,  H01L24/84 ,  H01L25/074 ,  H01L25/18 ,  H01L2224/0401 ,  H01L2224/05553 ,  H01L2224/05599 ,  H01L2224/32245 ,  H01L2224/33181 ,  H01L2224/371 ,  H01L2224/40095 ,  H01L2224/40245 ,  H01L2224/4118 ,  H01L2224/48091 ,  H01L2224/48137 ,  H01L2224/48145 ,  H01L2224/48177 ,  H01L2224/48247 ,  H01L2224/48257 ,  H01L2224/49111 ,  H01L2224/49171 ,  H01L2224/73221 ,  H01L2224/8385 ,  H01L2224/8485 ,  H01L2224/85399 ,  H01L2224/92 ,  H01L2924/00013 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/07802 ,  H01L2924/1306 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/181 ,  H01L2224/81 ,  H01L2224/84 ,  H01L2224/45099 ,  H01L2924/00 ,  H01L2224/13099 ,  H01L2224/13599 ,  H01L2224/05099 ,  H01L2224/29099 ,  H01L2224/29599 ,  H01L2924/00012

Abstract: A combined packaged power semiconductor device includes a flipped top source low-side MOSFET electrically connected to a top surface of a die paddle, a first metal interconnection plate connecting between a bottom drain of a high-side MOSFET or a top source of a flipped high-side MOSFET to a bottom drain of the low-side MOSFET, and a second metal interconnection plate stacked on top of the high-side MOSFET chip. The high-side, low-side MOSFET and the IC controller can be packaged three-dimensionally that reduces the overall size of semiconductor devices and can maximize the chip's size within a package of the same size and improves the performance of the semiconductor devices. The top source of flipped low-side MOSFET is connected to the top surface of the die paddle and thus is grounded through the exposed bottom surface of die paddle, which simplifies the shape of exposed bottom surface of the die paddle and maximizes the area to facilitate heat dissipation.

Abstract translation: 组合封装的功率半导体器件包括电连接到管芯焊盘的顶表面的翻转顶部源极低侧MOSFET，连接在高侧MOSFET的底部漏极或翻转高电平的顶部源的第一金属互连板 的低端MOSFET的底部漏极和堆叠在高侧MOSFET芯片的顶部上的第二金属互连板。 高侧，低端MOSFET和IC控制器可以三维封装，从而减小半导体器件的总体尺寸，并可在相同尺寸的封装内最大限度地提高芯片的尺寸，并提高半导体器件的性能。 翻转的低侧MOSFET的顶部源极连接到管芯焊盘的顶表面，并且因此通过裸片的裸露的底表面接地，这简化了裸片焊盘的暴露的底面的形状，并使面积最大化 散热。

公开(公告)号：US20110227207A1

公开(公告)日：2011-09-22

申请号：US12819111

申请日：2010-06-18

Applicant: Hamza Yilmaz ,  Xiaotian Zhang ,  Yan Xun Xue ,  Anup Bhalla ,  Jun Lu ,  Kai Liu ,  Yueh-Se Ho ,  John Amato

Inventor： Hamza Yilmaz ,  Xiaotian Zhang ,  Yan Xun Xue ,  Anup Bhalla ,  Jun Lu ,  Kai Liu ,  Yueh-Se Ho ,  John Amato

IPC: H01L23/52 ,  H01L23/495 ,  H01L21/00

CPC classification number: H01L23/49541 ,  H01L23/3107 ,  H01L23/49524 ,  H01L23/49537 ,  H01L23/49562 ,  H01L23/49575 ,  H01L24/37 ,  H01L24/40 ,  H01L24/41 ,  H01L24/48 ,  H01L24/81 ,  H01L24/84 ,  H01L2224/27013 ,  H01L2224/29101 ,  H01L2224/2929 ,  H01L2224/32245 ,  H01L2224/37011 ,  H01L2224/40095 ,  H01L2224/40245 ,  H01L2224/40247 ,  H01L2224/4103 ,  H01L2224/45014 ,  H01L2224/48247 ,  H01L2224/84801 ,  H01L2224/8485 ,  H01L2224/92 ,  H01L2924/00014 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01067 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/1306 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/181 ,  H01L2224/81 ,  H01L2224/84 ,  H01L2924/00 ,  H01L2924/00012 ,  H01L2224/45015 ,  H01L2924/207 ,  H01L2224/37099

Abstract: The present invention is directed to a lead-frame having a stack of semiconductor dies with interposed metalized clip structure. Level projections extend from the clip structure to ensure that the clip structure remains level during fabrication.

Abstract translation: 本发明涉及具有插入金属夹结构的半导体管芯堆叠的引线框架。 水平投影从夹子结构延伸，以确保夹子结构在制造过程中保持水平。

公开(公告)号：US20110221008A1

公开(公告)日：2011-09-15

申请号：US12722528

申请日：2010-03-12

Applicant: Jun Lu ,  Kai Liu ,  Yan Xun Xue

Inventor： Jun Lu ,  Kai Liu ,  Yan Xun Xue

IPC: H01L23/52 ,  H01L27/088 ,  H01L21/70 ,  H01L23/28

CPC classification number: H01L21/565 ,  H01L23/3107 ,  H01L23/49517 ,  H01L23/49524 ,  H01L23/49551 ,  H01L23/49562 ,  H01L23/49575 ,  H01L24/34 ,  H01L24/37 ,  H01L24/40 ,  H01L24/48 ,  H01L25/07 ,  H01L2224/32245 ,  H01L2224/37011 ,  H01L2224/37147 ,  H01L2224/4007 ,  H01L2224/40095 ,  H01L2224/40137 ,  H01L2224/40245 ,  H01L2224/48091 ,  H01L2224/48247 ,  H01L2224/73263 ,  H01L2224/73265 ,  H01L2224/8385 ,  H01L2224/84801 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01075 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/1306 ,  H01L2924/13091 ,  H01L2924/181 ,  H01L2924/00 ,  H01L2924/00012 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207

Abstract: A semiconductor package with connecting plate for internal connection comprise: a plurality of chips each having a plurality of contact areas on a top surface; one or more connecting plates having a plurality of electrically isolated connecting plate portions each connecting a contact area of the semiconductor chips. The method of making the semiconductor package includes the steps of connecting one or more connecting plates to a plurality of semiconductor chips, applying a molding material to encapsulate the chips and the connecting plates, separating a plurality of connecting plate portions of the connecting plates by shallow cutting through or by grinding.

Abstract translation: 具有用于内部连接的连接板的半导体封装包括：多个芯片，每个芯片在顶表面上具有多个接触区域; 一个或多个连接板具有多个电隔离的连接板部分，每个连接板部分连接半导体芯片的接触区域。 制造半导体封装的方法包括将一个或多个连接板连接到多个半导体芯片的步骤，施加模制材料以封装芯片和连接板，将连接板的多个连接板部分分开浅 切割或磨削。

公开(公告)号：US20110193208A1

公开(公告)日：2011-08-11

申请号：US13092059

申请日：2011-04-21

Applicant: Yan Xun Xue ,  Yueh-Se Ho ,  Hamza Yilmaz ,  Jun Lu

Inventor： Yan Xun Xue ,  Yueh-Se Ho ,  Hamza Yilmaz ,  Jun Lu

IPC: H01L23/495 ,  H01L21/60

CPC classification number: H01L24/49 ,  H01L23/3107 ,  H01L23/492 ,  H01L23/49503 ,  H01L23/49548 ,  H01L23/49562 ,  H01L24/16 ,  H01L24/29 ,  H01L24/32 ,  H01L24/33 ,  H01L24/37 ,  H01L24/40 ,  H01L24/45 ,  H01L24/48 ,  H01L24/73 ,  H01L24/81 ,  H01L24/83 ,  H01L24/91 ,  H01L2224/13099 ,  H01L2224/26175 ,  H01L2224/27013 ,  H01L2224/291 ,  H01L2224/29111 ,  H01L2224/29139 ,  H01L2224/29294 ,  H01L2224/29339 ,  H01L2224/32057 ,  H01L2224/32245 ,  H01L2224/32506 ,  H01L2224/371 ,  H01L2224/40245 ,  H01L2224/451 ,  H01L2224/48091 ,  H01L2224/48247 ,  H01L2224/49111 ,  H01L2224/73153 ,  H01L2224/73255 ,  H01L2224/73257 ,  H01L2224/73265 ,  H01L2224/83051 ,  H01L2224/83385 ,  H01L2224/838 ,  H01L2224/83801 ,  H01L2224/92247 ,  H01L2224/97 ,  H01L2924/00014 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/0105 ,  H01L2924/01074 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/0132 ,  H01L2924/01322 ,  H01L2924/014 ,  H01L2924/1306 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/181 ,  H01L2224/85 ,  H01L2224/81 ,  H01L2224/84 ,  H01L2224/83 ,  H01L2924/00 ,  H01L2224/05599 ,  H01L2924/00012

Abstract: The invention relates to a semiconductor package of a flip chip and a method for making the semiconductor package. The semiconductor chip comprises a metal-oxide-semiconductor field effect transistor. On a die paddle including a first base, a second base and a third base, half-etching or punching is performed on the top surfaces of the first base and the second base to obtain plurality of grooves that divide the top surface of the first base into a plurality of areas comprising multiple first connecting areas, and divide the top surface of the second base into a plurality of areas comprising at least a second connecting area. The semiconductor chip is connected to the die paddle at the first connecting areas and the second connecting area.

Abstract translation: 本发明涉及倒装芯片的半导体封装以及制造半导体封装的方法。 半导体芯片包括金属氧化物半导体场效应晶体管。 在包括第一基底，第二基底和第三基底的裸片上，在第一基底和第二基底的顶表面上进行半蚀刻或冲孔，以获得多个凹槽，该凹槽将第一基底 进入包括多个第一连接区域的多个区域，并且将第二基座的顶表面分成包括至少第二连接区域的多个区域。 半导体芯片在第一连接区域和第二连接区域处连接到管芯焊盘。

公开(公告)号：US20110129961A1

公开(公告)日：2011-06-02

申请号：US12592596

申请日：2009-11-30

Applicant: Yan Xun Xue ,  Jun Lu

Inventor： Yan Xun Xue ,  Jun Lu

IPC: H01L21/78

CPC classification number: H01L23/49551 ,  H01L21/4842 ,  H01L21/561 ,  H01L23/4952 ,  H01L23/49562 ,  H01L24/45 ,  H01L24/48 ,  H01L24/49 ,  H01L24/97 ,  H01L2224/32245 ,  H01L2224/451 ,  H01L2224/48247 ,  H01L2224/49111 ,  H01L2224/73265 ,  H01L2224/97 ,  H01L2924/00014 ,  H01L2924/01033 ,  H01L2924/01082 ,  H01L2924/181 ,  H01L2224/85 ,  H01L2224/83 ,  H01L2924/00 ,  H01L2924/00015 ,  H01L2224/05599 ,  H01L2924/00012

Abstract: This invention discloses a process for packaging semiconductor device with external leads. The process includes comprises Step 1: providing a lead frame comprising a plurality of lead frame units connected by a plurality of metal beams, each lead frame unit comprising a die pad and a plurality of leads located on opposite sides of the die pad; adhering a semiconductor chip onto each of the die pad, and providing a plurality of metal connections for electrically connecting each chip to its corresponding leads; Step 2 providing a plastic molding material to enclose the plurality of the lead frame units, the metal beams, the chips, and at least portions of the metal connections; Step 3 removing a portion of the plastic molding material above the metal beams to expose the metal beams and portions of the leads in connection with the metal beams; and Step 4 separating each lead frame unit, forming a plurality of individual semiconductor plastic package components with external leads.

Abstract translation: 本发明公开了一种用外部引线封装半导体器件的方法。 该方法包括步骤1：提供引线框架，该引线框架包括由多个金属梁连接的多个引线框架单元，每个引线框架单元包括管芯焊盘和位于管芯焊盘的相对侧上的多个引线; 将半导体芯片粘附到每个芯片焊盘上，并且提供多个金属连接件，用于将每个芯片电连接到其相应的引线; 步骤2提供塑料模制材料以封闭多个引线框架单元，金属梁，芯片以及金属连接件的至少部分; 步骤3，移除金属梁上方的塑料成型材料的一部分，以暴露金属梁和引线的与金属梁相关的部分; 以及步骤4分离每个引线框架单元，用外部引线形成多个单独的半导体塑料封装部件。

公开(公告)号：US20110095409A1

公开(公告)日：2011-04-28

申请号：US12606290

申请日：2009-10-27

Applicant: Yan Xun Xue ,  Jun Lu ,  Le Shi ,  Liang Zhao

Inventor： Yan Xun Xue ,  Jun Lu ,  Le Shi ,  Liang Zhao

IPC: H01L23/495 ,  H01L21/60

CPC classification number: H01L24/73 ,  H01L21/4842 ,  H01L23/3107 ,  H01L23/49541 ,  H01L23/49551 ,  H01L24/29 ,  H01L24/37 ,  H01L24/40 ,  H01L24/48 ,  H01L24/83 ,  H01L24/84 ,  H01L24/85 ,  H01L24/92 ,  H01L24/97 ,  H01L2224/0603 ,  H01L2224/29339 ,  H01L2224/371 ,  H01L2224/37599 ,  H01L2224/48247 ,  H01L2224/73221 ,  H01L2224/83101 ,  H01L2224/83801 ,  H01L2224/8385 ,  H01L2224/85 ,  H01L2224/92 ,  H01L2224/97 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01057 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/13091 ,  H01L2924/30107 ,  H01L2924/3011 ,  H01L2224/83 ,  H01L2224/84 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207

Abstract: A method is disclosed for attaching an interconnection plate to semiconductor die within leadframe package. A base leadframe is provided with die pad for attaching semiconductor die. An interconnection plate is provided for attachment to the base leadframe and semiconductor die. Add a base registration feature onto base leadframe and a plate registration feature onto interconnection plate with the registration features designed to match each other such that, upon approach of the interconnection plate to base leadframe, the two registration features would engage and guide each other causing concomitant self-aligned attachment of the interconnection plate to base leadframe. Next, the interconnection plate is brought into close approach to base leadframe to engage and lock plate registration feature to base registration feature hence completing attachment of the interconnection plate to semiconductor die and forming a leadframe package.

Abstract translation: 公开了一种将引线框封装内的互连板连接到半导体管芯的方法。 基座引线框架设置有用于附接半导体管芯的管芯焊盘。 提供互连板，用于附接到基底引线框架和半导体管芯。 将基准注册功能添加到基准引线框架和板对准特征到互连板上，其中配准特征被设计成彼此匹配，使得在互连板到基底引线框架的接近时，两个配准特征将相互接合并引导彼此引起伴随 互连板与基座引线框架的自对准连接。 接下来，使互连板靠近基底引线框架以将板对准特征接合并锁定到基准对准特征，从而完成互连板连接到半导体管芯并形成引线框封装。

公开(公告)号：US09391005B2

公开(公告)日：2016-07-12

申请号：US14033140

申请日：2013-09-20

Applicant: Yan Xun Xue ,  Yueh-Se Ho ,  Hamza Yilmaz ,  Jun Lu ,  Lei Shi ,  Liang Zhao ,  Ping Huang

Inventor： Yan Xun Xue ,  Yueh-Se Ho ,  Hamza Yilmaz ,  Jun Lu ,  Lei Shi ,  Liang Zhao ,  Ping Huang

IPC: H01L23/495

CPC classification number: H01L23/49537 ,  H01L23/49541 ,  H01L23/49548 ,  H01L23/49551 ,  H01L23/49562 ,  H01L23/49575 ,  H01L2224/16245 ,  H01L2924/13091 ,  H01L2924/00

Abstract: A power semiconductor package has an ultra thin chip with front side molding to reduce substrate resistance; a lead frame unit with grooves located on both side leads provides precise positioning for connecting numerous bridge-shaped metal clips to the front side of the side leads. The bridge-shaped metal clips are provided with bridge structure and half or fully etched through holes for relieving superfluous solder during manufacturing process.

Abstract translation: 功率半导体封装具有超薄芯片，具有正面成型以降低基板电阻; 具有位于两侧引线上的凹槽的引线框单元提供精确的定位，用于将多个桥形金属夹连接到侧引线的前侧。 桥形金属夹具有桥结构和半或完全蚀刻的通孔，用于在制造过程中缓解多余的焊料。

公开(公告)号：US20150249045A1

公开(公告)日：2015-09-03

申请号：US14194502

申请日：2014-02-28

Applicant: Yan Xun Xue ,  Hamza Yilmaz ,  Yueh-Se Ho ,  Jun Lu

Inventor： Yan Xun Xue ,  Hamza Yilmaz ,  Yueh-Se Ho ,  Jun Lu

IPC: H01L23/495 ,  H01L23/29 ,  H01L21/78

CPC classification number: H01L23/49551 ,  H01L21/561 ,  H01L21/78 ,  H01L23/043 ,  H01L23/24 ,  H01L23/293 ,  H01L23/3114 ,  H01L23/492 ,  H01L23/49513 ,  H01L23/4952 ,  H01L23/49555 ,  H01L23/49562 ,  H01L23/49575 ,  H01L2224/73253

Abstract: A preparation method for a power semiconductor device includes: providing a lead frame containing a plurality of chip mounting units, one side edge of a die paddle of each chip mounting unit is bent and extended upwardly and one lead connects to the bent side edge of the die paddle and extends in an opposite direction from the die paddle; attaching a semiconductor chip to the top surface of the die paddle; forming metal bumps on each electrode at the front of the semiconductor chip with a top end of each metal bump protruding out of a plane of the top surface of the lead; heating the metal bump and pressing a top end of each metal bump by a pressing plate forming a flat top end surface that is flush with the top surface of the lead; and cutting the lead frame to separate individual chip mounting units.

Abstract translation: 一种功率半导体器件的制备方法，包括：提供包含多个芯片安装单元的引线框架，每个芯片安装单元的模板的一个侧边缘向上弯曲并向上延伸，并且一个引线连接到所述芯片安装单元的弯曲侧边缘 模具桨，并且在与模桨相反的方向上延伸; 将半导体芯片附接到所述管芯焊盘的顶表面; 在半导体芯片的前面的每个电极上形成金属凸块，每个金属凸块的顶端从引线的顶表面的平面突出; 加热金属凸块并通过压板压制每个金属凸块的顶端，该压板形成与引线顶表面齐平的平坦顶端表面; 并切割引线框架以分离各个芯片安装单元。

公开(公告)号：US20140361418A1

公开(公告)日：2014-12-11

申请号：US13913183

申请日：2013-06-07

Applicant: Yan Xun Xue ,  Yueh-Se Ho ,  Hamza Yilmaz ,  Jun Lu

Inventor： Yan Xun Xue ,  Yueh-Se Ho ,  Hamza Yilmaz ,  Jun Lu

IPC: H01L23/495

CPC classification number: H01L23/4951 ,  H01L23/492 ,  H01L23/49513 ,  H01L23/49541 ,  H01L23/49548 ,  H01L23/49562 ,  H01L24/73 ,  H01L2224/16245 ,  H01L2224/48091 ,  H01L2224/49111 ,  H01L2224/92247 ,  H01L2924/01322 ,  H01L2924/13091 ,  H01L2924/00014 ,  H01L2924/00

Abstract: The invention relates to a semiconductor package of a flip chip and a method for making the semiconductor package. The semiconductor chip comprises a metal-oxide-semiconductor field effect transistor. On a die paddle including a first base, a second base and a third base, half-etching or punching is performed on the top surfaces of the first base and the second base to obtain plurality of grooves that divide the top surface of the first base into a plurality of areas comprising multiple first connecting areas, and divide the top surface of the second base into a plurality of areas comprising at least a second connecting area. The semiconductor chip is connected to the die paddle at the first connecting areas and the second connecting area.

Abstract translation: 本发明涉及倒装芯片的半导体封装以及制造半导体封装的方法。 半导体芯片包括金属氧化物半导体场效应晶体管。 在包括第一基底，第二基底和第三基底的裸片上，在第一基底和第二基底的顶表面上进行半蚀刻或冲孔，以获得多个凹槽，该凹槽将第一基底 进入包括多个第一连接区域的多个区域，并且将第二基座的顶表面分成包括至少第二连接区域的多个区域。 半导体芯片在第一连接区域和第二连接区域处连接到管芯焊盘。