Positive resist composition, method of forming resist pattern using the same, and polymeric compound
    12.
    发明授权
    Positive resist composition, method of forming resist pattern using the same, and polymeric compound 有权
    正型抗蚀剂组合物,使用其形成抗蚀剂图案的方法和聚合物

    公开(公告)号:US08268529B2

    公开(公告)日:2012-09-18

    申请号:US12687430

    申请日:2010-01-14

    摘要: A positive resist composition including a base component (A) which exhibits changed solubility in an alkali developing solution under the action of acid and an acid-generator component (B) which generates acid upon exposure dissolved in an organic solvent (S), the base component (A) containing a polymeric compound (A1) including a structural unit (a0) derived from an acrylate ester having a cyclic group containing a sulfonyl group on the side chain thereof, a structural unit (a1) derived from an acrylate ester containing an acid dissociable, dissolution inhibiting group and a structural unit (a5) represented by general formula (a5-1) (Y1 represents an aliphatic hydrocarbon group; Z represents a monovalent organic group; a represents an integer of 1 to 3, and b represents an integer of 0 to 2, provided that a+b=1 to 3).

    摘要翻译: 一种正性抗蚀剂组合物,其包含在碱的作用下在碱性显影液中的溶解度变化的碱成分(A)和暴露于有机溶剂(S)时产生酸的酸产生剂成分(B),所述碱 含有由侧链上具有含有磺酰基的环状基团的丙烯酸酯衍生的结构单元(a0)的高分子化合物(A1)的组分(A),来源于丙烯酸酯的结构单元(a1) 酸解离,溶解抑制基团和由通式(a5-1)表示的结构单元(a5)(Y1表示脂族烃基; Z表示一价有机基团; a表示1〜3的整数,b表示 0〜2的整数,条件是a + b = 1〜3)。

    Positive resist composition, method of forming resist pattern, and polymeric compound
    14.
    发明授权
    Positive resist composition, method of forming resist pattern, and polymeric compound 有权
    正型抗蚀剂组合物,形成抗蚀剂图案的方法和聚合物

    公开(公告)号:US08182976B2

    公开(公告)日:2012-05-22

    申请号:US12461688

    申请日:2009-08-20

    摘要: A positive resist composition including a base component (A) which exhibits increased solubility in an alkali developing solution under action of acid and an acid-generator component (B) which generates acid upon exposure, the resin component (A) including at least one structural unit (a0) selected from the group consisting of a structural unit represented by general formula (a0-1) [R2 represents a divalent linking group, and R3 represents a cyclic group containing —SO2— within the ring skeleton thereof] and a structural unit (a2) derived from an acrylate ester containing a lactone-containing cyclic group, and the polymeric compound (A1) containing an acid dissociable, dissolution inhibiting group within the structure thereof.

    摘要翻译: 一种正性抗蚀剂组合物,其包含在酸的作用下在碱性显影液中显示出增加的溶解度的碱成分(A)和曝光时产生酸的酸发生剂成分(B),所述树脂成分(A)包含至少一种结构 单元(a0)选自由通式(a0-1)表示的结构单元[R2表示二价连接基团,R 3表示在其环骨架中含有-SO 2的环状基团]和结构单元 (a2)和含有含内酯的环状基团的丙烯酸酯衍生的聚合化合物(A1)和在其结构内含有酸解离性,溶解抑制基团的高分子化合物(A1)。

    WATER-SOLUBLE ELECTRICALLY CONDUCTIVE POLYMERS
    15.
    发明申请
    WATER-SOLUBLE ELECTRICALLY CONDUCTIVE POLYMERS 有权
    水溶性导电聚合物

    公开(公告)号:US20110155963A1

    公开(公告)日:2011-06-30

    申请号:US12650225

    申请日:2009-12-30

    申请人: Dong Hoon CHOI

    发明人: Dong Hoon CHOI

    摘要: Water-soluble electrically conductive polymers and a composition comprising such polymers are provided. Also, an electrically conductive layer or film formed from the composition, and articles comprising the electrically conductive layer or film are provided. The electrically conductive polymers according to the present disclosure have one or more hydrophilic side chains. Hydrophilic side chains are covalently bonded to the conductive polymers, which allow the polymer to be stable at high temperature. Thus, the stability of electrical conductivity is prolonged. Depending on the concentration of hydrophilic side chains, the conductivity may be changed. The hydrophilic side chains provide a successful way to fabricate a ductile film exhibiting tunable conductivity. Furthermore, high levels of surface-resistance uniformity can be achieved in the field of coating technology that uses eco-friendly water-based solvents to uniformly and quickly coat the conductive polymer on to plastic film surfaces.

    摘要翻译: 提供了水溶性导电聚合物和包含这种聚合物的组合物。 此外,提供由该组合物形成的导电层或膜,以及包含导电层或膜的制品。 根据本公开的导电聚合物具有一个或多个亲水侧链。 亲水侧链与导电聚合物共价键合,使聚合物在高温下稳定。 因此,电导率的稳定性延长。 根据亲水侧链的浓度,可以改变导电性。 亲水侧链提供了制造出具有可调电导率的延性膜的成功方法。 此外,在使用环保水性溶剂的涂料技术领域中可以实现高水平的表面电阻均匀性,以均匀且快速地将导电聚合物涂覆在塑料膜表面上。

    RESIN AND RESIST COMPOSITION
    16.
    发明申请
    RESIN AND RESIST COMPOSITION 有权
    树脂和树脂组合物

    公开(公告)号:US20100323296A1

    公开(公告)日:2010-12-23

    申请号:US12821008

    申请日:2010-06-22

    摘要: A resin comprises a structural unit derived from a compound represented by the formula (aa) wherein T represents a C4 to C36 alicyclic hydrocarbon group, the hydrogen atom contained in the alicyclic hydrocarbon group may be replaced by a halogen atom, a hydroxyl group, a C1 to C12 alkyl group optionally substituted with a halogen atom or a hydroxyl group, a C1 to C12 alkoxyl group, a C6 to C12 aryl group, a C7 to C12 aralkyl group, a glycidyloxy group, a C2 to C4 acyl group, an alkoxycarbonyl group, an alkanoyloxyalkyl group or a cyano group, and the —CH2— contained in the alicyclic hydrocarbon group is replaced by at least one —SO2— and furthermore may be replaced by —CO—, —O—, —S—, —SO2— or —N(Rc)—; Rc represents a hydrogen atom or a C1 to C6 alkyl group; R1 represents a hydrogen atom, a halogen atom, or a C1 to C6 alkyl group that may optionally has halogen atoms; and Z1 represents an optionally substituted C1 to C17 saturated hydrocarbon group, and the —CH2— contained in the saturated hydrocarbon group may be replaced by —CO—, —O—, —S— or —N(Rc)—.

    摘要翻译: 树脂包含衍生自由式(aa)表示的化合物的结构单元,其中T表示C4-C36脂环族烃基,脂环族烃基中所含的氢原子可以被卤素原子,羟基, 任选被卤素原子或羟基取代的C1〜C12烷基,C1〜C12烷氧基,C6〜C12芳基,C7〜C12芳烷基,缩水甘油氧基,C2〜C4酰基,烷氧基羰基 基团,烷酰氧基烷基或氰基,脂环族烃基中的-CH 2被至少一个-SO 2 - 代替,并且还可以被-CO - , - O - , - S - , - SO 2 - 或-N(Rc) - ; Rc表示氢原子或C1〜C6烷基; R1表示氢原子,卤素原子或可任选具有卤素原子的C1-C6烷基; Z 1表示任选取代的C 1〜C 17饱和烃基,饱和烃基中的-CH 2可以被-CO - , - O - , - S-或-N(R c) - 代替。