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    MANUFACTURING METHOD OF ELECTRON SOURCE
    11.
    发明申请
    MANUFACTURING METHOD OF ELECTRON SOURCE 审中-公开
    电子源的制造方法

    公开(公告)号：US20110036810A1

    公开(公告)日：2011-02-17

    申请号：US12866498

    申请日：2008-03-25

    Applicant: Fumihiro Nakahara ,  Ryozo Nonogaki ,  Yoshinori Terui

    Inventor： Fumihiro Nakahara ,  Ryozo Nonogaki ,  Yoshinori Terui

    IPC: C25F3/16 ,  C23F1/00

    CPC classification number: H01J9/025 ,  H01J1/16 ,  H01J1/3044 ,  H01J9/042 ,  H01J37/073 ,  H01J37/3056 ,  H01J2201/30415 ,  H01J2237/06316 ,  H01J2237/06341 ,  H01J2237/3174 ,  H01J2237/31749

    Abstract: An electron gun with a truncated-cone-shaped cathode with uniform emission current density is efficiently manufactured. A manufacturing method of a cathode electron gun equipped with a supply source for diffusing oxide of a metal element on a single crystal needle of tungsten or molybdenum includes steps of forming a truncated-cone-shape having a flat plane at a single crystal edge serving as the cathode by machining beforehand, thereafter thinning and removing a front layer of the flat plane by a focused gallium ion beam, and re-flattening it.

    Abstract translation: 具有均匀发射电流密度的截头锥形阴极的电子枪被有效地制造。 配备有用于在钨或钼的单晶针上扩散金属元素的氧化物的供给源的阴极电子枪的制造方法包括在单晶边缘处形成具有平面的截头圆锥形状的步骤， 预先加工阴极，然后通过聚焦的镓离子束稀释并除去平面的前层，并使其平坦化。

    Field emission array having carbon microstructure and method of manufacturing the same
    14.
    发明授权
    Field emission array having carbon microstructure and method of manufacturing the same 失效
    具有碳微观结构的场发射阵列及其制造方法

    公开(公告)号：US08017413B2

    公开(公告)日：2011-09-13

    申请号：US12450965

    申请日：2008-07-01

    Applicant: Seung Seob Lee ,  Seok Woo Lee ,  Jung A Lee

    Inventor： Seung Seob Lee ,  Seok Woo Lee ,  Jung A Lee

    IPC: H01L21/00

    CPC classification number: H01J1/3044 ,  H01J3/022 ,  H01J9/025 ,  H01J31/127 ,  H01J63/02 ,  H01J2201/30415 ,  H01J2201/30453 ,  H01J2203/0228 ,  H01J2329/0418 ,  H01J2329/0444 ,  H01J2329/4626

    Abstract: Provided is a method for manufacturing a field emission array with a carbon microstructure. The method includes: a photomask attachment step of attaching a photomask with a pattern groove to one surface of a transparent substrate; a photoresist attachment step of attaching a negative photoresist to one surface of the photomask; an exposure step of irradiating light toward the opposite surface of the transparent substrate from the photomask to cure a portion of the negative photoresist with the light irradiated on the negative photoresist through the pattern groove; a developing step of removing an uncured portion of the negative photoresist while leaving the cured portion of the negative photoresist as a microstructure; a pyrolysis step of heating and carbonizing the microstructure thus obtained; and a cathode attachment step of attaching a voltage-supplying cathode to the surface of the transparent substrate on which the microstructure is formed.

    Abstract translation: 提供一种制造具有碳微观结构的场致发射阵列的方法。 该方法包括：光掩模附着步骤，其将具有图案凹槽的光掩模附着到透明基板的一个表面; 将负性光致抗蚀剂附着到光掩模的一个表面的光致抗蚀剂附着步骤; 曝光步骤，从所述光掩模向所述透明基板的相对表面照射光，以通过所述图案凹槽照射在所述负性光致抗蚀剂上的光来固化所述负性光致抗蚀剂的一部分; 去除负性光致抗蚀剂的未固化部分同时留下负性光致抗蚀剂的固化部分作为微结构的显影步骤; 对由此获得的微结构进行加热和碳化的热解步骤; 以及将电压供给阴极安装在其上形成微结构的透明基板的表面上的阴极附着步骤。

    FIELD EMISSION ARRAY HAVING CARBON MICROSTRUCTURE AND METHOD OF MANUFACTURING THE SAME
    15.
    发明申请
    FIELD EMISSION ARRAY HAVING CARBON MICROSTRUCTURE AND METHOD OF MANUFACTURING THE SAME 失效
    具有碳微结构的场发射阵列及其制造方法

    公开(公告)号：US20110089396A1

    公开(公告)日：2011-04-21

    申请号：US12450965

    申请日：2008-07-01

    Applicant: Seung Seob Lee ,  Seok Woo Lee ,  Jung A Lee

    Inventor： Seung Seob Lee ,  Seok Woo Lee ,  Jung A Lee

    IPC: H01L29/16 ,  H01L21/28 ,  H01L21/66

    CPC classification number: H01J1/3044 ,  H01J3/022 ,  H01J9/025 ,  H01J31/127 ,  H01J63/02 ,  H01J2201/30415 ,  H01J2201/30453 ,  H01J2203/0228 ,  H01J2329/0418 ,  H01J2329/0444 ,  H01J2329/4626

    Abstract: Provided is a method for manufacturing a field emission array with a carbon microstructure. The method includes: a photomask attachment step of attaching a photomask with a pattern groove to one surface of a transparent substrate; a photoresist attachment step of attaching a negative photoresist to one surface of the photomask; an exposure step of irradiating light toward the opposite surface of the transparent substrate from the photomask to cure a portion of the negative photoresist with the light irradiated on the negative photoresist through the pattern groove; a developing step of removing an uncured portion of the negative photoresist while leaving the cured portion of the negative photoresist as a microstructure; a pyrolysis step of heating and carbonizing the microstructure thus obtained; and a cathode attachment step of attaching a voltage-supplying cathode to the surface of the transparent substrate on which the microstructure is formed.

    Abstract translation: 提供一种制造具有碳微观结构的场致发射阵列的方法。 该方法包括：光掩模附着步骤，其将具有图案凹槽的光掩模附着到透明基板的一个表面; 将负性光致抗蚀剂附着到光掩模的一个表面的光致抗蚀剂附着步骤; 曝光步骤，从所述光掩模向所述透明基板的相对表面照射光，以通过所述图案凹槽照射在所述负性光致抗蚀剂上的光来固化所述负性光致抗蚀剂的一部分; 去除负性光致抗蚀剂的未固化部分同时留下负性光致抗蚀剂的固化部分作为微结构的显影步骤; 对由此获得的微结构进行加热和碳化的热解步骤; 以及将电压供给阴极安装在其上形成微结构的透明基板的表面上的阴极附着步骤。

    Apparatus and Methods for Growing Nanofibres and Nanotips
    16.
    发明申请
    Apparatus and Methods for Growing Nanofibres and Nanotips 审中-公开
    用于生长纳米纤维和纳米线的装置和方法

    公开(公告)号：US20090078561A1

    公开(公告)日：2009-03-26

    申请号：US12179699

    申请日：2008-07-25

    Applicant: Kenneth Boh Khin Teo ,  Torquil Wells ,  William Ireland Milne ,  Mark Mann ,  Mohamed Mochtar El Gomati

    Inventor： Kenneth Boh Khin Teo ,  Torquil Wells ,  William Ireland Milne ,  Mark Mann ,  Mohamed Mochtar El Gomati

    IPC: C01B31/00 ,  H05B1/00 ,  B01J19/08

    CPC classification number: G01Q70/12 ,  H01J1/3044 ,  H01J9/025 ,  H01J37/073 ,  H01J37/20 ,  H01J37/32009 ,  H01J2201/30415 ,  H01J2201/3043 ,  H01J2237/06316 ,  H01J2237/2001 ,  H01J2237/28

    Abstract: This invention relates to heating apparatus and methods with particular applications for growing a nanofibre, and to nanotips fabricated by such methods and apparatus. Embodiments of the invention can be implemented to provide nanotips for electron gun sources and scanning probe microscopy. A nanotip fabrication apparatus includes a heater for heating an object in the presence of an electric field. The heater comprises: a substantially planar electrically conductive heating element configured to define at least one aperture; a support to mount the heated object such that it protrudes through said aperture; and at least one electrical connection to said heating element. In use, the heating element can be biased by said at least one electrical connection such that the electric field in the vicinity of the object is substantially perpendicular to the plane of the element.

    Abstract translation: 本发明涉及具有用于生长纳米纤维的特殊应用的加热装置和方法，以及通过这些方法和装置制造的纳米技术。 本发明的实施例可以实现为电子枪源和扫描探针显微镜提供纳米尖端。 纳米尖端制造装置包括用于在存在电场的情况下加热物体的加热器。 加热器包括：基本上平面的导电加热元件，其被配置为限定至少一个孔; 用于安装加热物体使得其穿过所述孔突出的支撑件; 以及与所述加热元件的至少一个电连接。 在使用中，加热元件可以被所述至少一个电连接偏压，使得物体附近的电场基本上垂直于元件的平面。

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