Thin film transistor
    20.
    发明授权
    Thin film transistor 有权
    薄膜晶体管

    公开(公告)号:US09443986B2

    公开(公告)日:2016-09-13

    申请号:US14195863

    申请日:2014-03-04

    CPC classification number: H01L29/7869 H01L29/26

    Abstract: A thin file transistor includes a gate electrode, a source electrode, a drain electrode, a gate-insulating layer, and an oxide semiconductor layer. The oxide semiconductor layer includes indium-gallium-zinc oxide with a formula of InxGayZnzOw, in which x, y and z satisfy the following formulas 1.5≦(y/x)≦2 and 1.5≦(y/z)≦2. The gate-insulating layer is positioned between the gate electrode and the oxide semiconductor layer. The source electrode and the drain electrode are respectively connected to two different sides of the oxide semiconductor layer.

    Abstract translation: 薄文件晶体管包括栅电极,源电极,漏电极,栅极绝缘层和氧化物半导体层。 氧化物半导体层包括具有InxGayZnzOw式的铟镓锌氧化物,其中x,y和z满足下式1.5≤(y / x)≤2和1.5≤(y / z)≤2。 栅极绝缘层位于栅电极和氧化物半导体层之间。 源电极和漏电极分别连接到氧化物半导体层的两个不同侧。

Patent Agency Ranking