公开(公告)号：US3428391A

公开(公告)日：1969-02-18

申请号：US3428391D

申请日：1964-01-20

Applicant: HARRY S NEWCOMER

Inventor： NEWCOMER HARRY S

IPC: G01J3/14 ,  G02B7/18

CPC classification number: G01J3/14

公开(公告)号：US3100264A

公开(公告)日：1963-08-06

申请号：US527160

申请日：1960-01-28

Applicant: POLARAD ELECTRONICS CORP

Inventor： LAWRENCE JAFFE DAVID ,  ALAN ROSS ,  ABRAHAM SONNENSCHEIN

IPC: B64G3/00 ,  G01J3/00 ,  G01J3/14 ,  G01J3/28 ,  G01S3/781 ,  G01S3/782

CPC classification number: G01J3/14 ,  B64G3/00 ,  G01C21/025 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/2803 ,  G01S3/781 ,  G01S3/782

公开(公告)号：US2451572A

公开(公告)日：1948-10-19

申请号：US63741245

申请日：1945-12-27

Applicant: BELL TELEPHONE LABOR INC

Inventor： MOORE HILBERT R

IPC: G01J3/14

CPC classification number: G01J3/14

公开(公告)号：US2330694A

公开(公告)日：1943-09-28

申请号：US39271041

申请日：1941-05-09

Applicant: SPENCER LENS CO

Inventor： ESTEY ROGER S ,  HARPER KENNARD W

IPC: G01J3/14

CPC classification number: G01J3/14

公开(公告)号：US2305776A

公开(公告)日：1942-12-22

申请号：US36417040

申请日：1940-11-04

Applicant: GERHARD HANSEN

Inventor： GERHARD HANSEN

IPC: G01J3/14

CPC classification number: G01J3/14

公开(公告)号：US1840476A

公开(公告)日：1932-01-12

申请号：US34864429

申请日：1929-03-20

Applicant: HILGER LTD ADAM

Inventor： FRANK TWYMAN

IPC: G01J3/14

CPC classification number: G01J3/14

公开(公告)号：US12124053B2

公开(公告)日：2024-10-22

申请号：US18081971

申请日：2022-12-15

Applicant: Cymer, LLC

Inventor： Eric Anders Mason

IPC: G02B26/00 ,  G01J3/06 ,  G01J3/14 ,  G01J3/18 ,  G02B5/04 ,  G02B27/12 ,  G02B27/14 ,  G02B27/42 ,  G03F7/00 ,  H01L21/027 ,  H01S3/00 ,  H01S3/08 ,  H01S3/23 ,  G01J3/12 ,  H01S3/225

CPC classification number: G02B27/4244 ,  G01J3/06 ,  G01J3/14 ,  G01J3/1804 ,  G02B26/007 ,  G03F7/70575 ,  H01L21/0275 ,  H01S3/0085 ,  H01S3/08004 ,  H01S3/2308 ,  G01J2003/061 ,  G01J2003/063 ,  G01J2003/064 ,  G01J2003/069 ,  G01J2003/1208 ,  H01S3/08009 ,  H01S3/225 ,  H01S3/2366

Abstract: A spectral feature selection apparatus includes a dispersive optical element arranged to interact with a pulsed light beam; three or more refractive optical elements arranged in a path of the pulsed light beam between the dispersive optical element and a pulsed optical source; and one or more actuation systems, each actuation system associated with a refractive optical element and configured to rotate the associated refractive optical element to thereby adjust a spectral feature of the pulsed light beam. At least one of the actuation systems is a rapid actuation system that includes a rapid actuator configured to rotate its associated refractive optical element about a rotation axis. The rapid actuator includes a rotary stepper motor having a rotation shaft that rotates about a shaft axis that is parallel with the rotation axis of the associated refractive optical element.

公开(公告)号：US20240110779A1

公开(公告)日：2024-04-04

申请号：US18535364

申请日：2023-12-11

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomofumi SUZUKI ,  Kyosuke KOTANI ,  Tatsuya SUGIMOTO ,  Yutaka KURAMOTO ,  Katsumi SHIBAYAMA ,  Noburo HOSOKAWA ,  Hirokazu YAMAMOTO ,  Takuo KOYAMA

IPC: G01B9/02 ,  B81B3/00 ,  G01J3/02 ,  G01J3/10 ,  G01J3/14 ,  G01J3/45 ,  G02B7/182 ,  G02B26/08 ,  G02B27/14

CPC classification number: G01B9/02051 ,  B81B3/00 ,  B81B3/0021 ,  B81B3/007 ,  G01B9/02049 ,  G01J3/0202 ,  G01J3/021 ,  G01J3/0237 ,  G01J3/108 ,  G01J3/14 ,  G01J3/45 ,  G02B7/182 ,  G02B26/0816 ,  G02B26/0833 ,  G02B26/0841 ,  G02B27/144 ,  B81B2201/042 ,  B81B2203/0154 ,  G01J2003/104 ,  G01J3/4532

Abstract: A mirror unit 2 includes a mirror device 20 including a base 21 and a movable mirror 22, an optical function member 13, and a fixed mirror 16 that is disposed on a side opposite to the mirror device 20 with respect to the optical function member 13. The mirror device 20 is provided with a light passage portion 24 that constitutes a first portion of an optical path between the beam splitter unit 3 and the fixed mirror 16. The optical function member 13 is provided with a light transmitting portion 14 that constitutes a second portion of the optical path between the beam splitter unit 3 and the fixed mirror 16. A second surface 21b of the base 21 and a third surface 13a of the optical function member 13 are joined to each other.

公开(公告)号：US11906770B2

公开(公告)日：2024-02-20

申请号：US17541037

申请日：2021-12-02

Applicant: KLA Corporation

Inventor： Shankar Krishnan ,  David Y. Wang

IPC: G02B5/30 ,  G02B5/04 ,  G01J3/02 ,  G01J3/14 ,  G02B17/04

CPC classification number: G02B5/3091 ,  G01J3/0224 ,  G01J3/14 ,  G02B5/04 ,  G02B17/04

Abstract: A monolithic optical retarder formed from a monolithic prism may include an input face for receiving a light beam, an output face aligned with an optical axis of the light beam prior to entering the input face, and three or more reflection faces. The three or more reflection faces may be oriented to provide an optical path for the light beam from the input face to the output face via reflection by the three or more reflection faces, where the monolithic optical retarder imparts a selected optical retardation on the light beam based on total internal reflection on at least one of the reflection faces. Further, the input face, the output face, and the three or more reflection faces may be oriented such that an optical axis of the light beam exiting the output face is equal to the optical axis of the light beam entering the input face.

公开(公告)号：US20240000317A1

公开(公告)日：2024-01-04

申请号：US18211354

申请日：2023-06-19

Applicant: Omni Medsci, Inc.

Inventor： Mohammed N. ISLAM

IPC: A61B5/00 ,  G01J3/10 ,  G01J3/28 ,  G01J3/14 ,  G01J3/453 ,  G01J3/42 ,  G01J3/02 ,  G01N21/35 ,  G16H40/67 ,  G01N21/359 ,  A61B5/145 ,  G01N33/15 ,  G01N33/49 ,  G01N21/3563 ,  G01N21/39 ,  G01N33/02 ,  G01N33/44 ,  G01N21/88 ,  A61B5/1455 ,  G16Z99/00 ,  A61C19/04 ,  G01N21/3504

CPC classification number: A61B5/0088 ,  A61B5/0075 ,  G01J3/108 ,  G01J3/28 ,  G01J3/14 ,  G01J3/453 ,  G01J3/42 ,  A61B5/7257 ,  G01J3/0218 ,  G01N21/35 ,  G16H40/67 ,  G01N21/359 ,  A61B5/0013 ,  A61B5/0022 ,  A61B5/0086 ,  A61B5/14532 ,  A61B5/14546 ,  A61B5/4547 ,  G01N33/15 ,  G01N33/49 ,  G01J3/2823 ,  G01N21/3563 ,  G01N21/39 ,  G01N33/02 ,  G01N33/442 ,  G01N21/88 ,  A61B5/6801 ,  A61B5/7405 ,  A61B5/742 ,  G01N33/025 ,  A61B5/1455 ,  G16Z99/00 ,  A61B5/7203 ,  A61C19/04 ,  G01J3/02 ,  G01N21/3504 ,  G01N2201/129 ,  H01S3/302

Abstract: A sensing system includes laser diodes with Bragg reflectors generating light having an initial light intensity and one or more near-infrared optical wavelengths. The laser diodes are modulated with a pulsed output with 0.5 to 2 nanosecond pulse duration. A beam splitter receives light from the laser diodes, splits the light into a received sample arm light directed to an object and a received reference arm light. A detection system includes a second lens and spectral filters in front of a photodiode array. The photodiode array is coupled to CMOS transistors and receives at least a portion of the received reference arm light and generates a reference detector signal. The detection system is synchronized with the laser diodes. A time-of-flight measurement is based on a comparison of the sample detector signal and the reference detector signal and measures a temporal distribution of photons in the received reflected sample arm light.