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    Micromechanical Angular Acceleration Sensor and Method for Measuring an Angular Acceleration
    22.
    发明申请
    Micromechanical Angular Acceleration Sensor and Method for Measuring an Angular Acceleration 有权
    微机械角加速度传感器和测量角加速度的方法

    公开(公告)号：US20120297878A1

    公开(公告)日：2012-11-29

    申请号：US13479746

    申请日：2012-05-24

    Applicant: Reinhard Neul ,  Torsten Ohms ,  Mirko Hattass ,  Daniel Christoph Meisel

    Inventor： Reinhard Neul ,  Torsten Ohms ,  Mirko Hattass ,  Daniel Christoph Meisel

    IPC: G01P15/097

    CPC classification number: G01P15/0922 ,  H01L41/1132

    Abstract: A micromechanical angular acceleration sensor for measuring an angular acceleration is disclosed. The sensor includes a substrate, a seismic mass, at least one suspension, which fixes the seismic mass to the substrate in a deflectable manner, and at least one piezoresistive and/or piezoelectric element for measuring the angular acceleration. The piezoresistive and/or piezoelectric element is arranged in a cutout of the seismic mass. A corresponding method and uses of the sensor are also disclosed.

    Abstract translation: 公开了一种用于测量角加速度的微机械角加速度传感器。 传感器包括基板，抗震块，至少一个悬架，其以可偏转的方式将地震质量固定到基板，以及用于测量角加速度的至少一个压阻和/或压电元件。 压阻和/或压电元件布置在地震块的切口中。 还公开了传感器的相应方法和用途。

    YAW RATE SENSOR
    24.
    发明申请
    YAW RATE SENSOR 有权
    YAW RATE传感器

    公开(公告)号：US20100000321A1

    公开(公告)日：2010-01-07

    申请号：US12303443

    申请日：2007-06-06

    Applicant: Reinhard Neul ,  Johannes Classen ,  Axel Franke ,  Marco Quander ,  Udo-Martin Gomez ,  Kersten Kehr

    Inventor： Reinhard Neul ,  Johannes Classen ,  Axel Franke ,  Marco Quander ,  Udo-Martin Gomez ,  Kersten Kehr

    IPC: G01C19/56

    CPC classification number: G01C19/5762 ,  G01C19/5747

    Abstract: A yaw rate sensor includes a drive mass element which is situated above a surface of a substrate and is drivable to vibrate by a drive device along a first axis extending along the surface, having a detection mass element, which is deflectable under the influence of a Coriolis force along a second axis perpendicular to the surface, and having a detection device by which the deflection of the detection mass element along the second axis is detectable. Due to the arrangement of the second axis perpendicular to the surface, the yaw rate sensor may be integrated into a chip together with additional yaw rate sensors suitable for detection of rotations about axes of rotation in other directions.

    Abstract translation: 偏航率传感器包括驱动质量元件，该驱动质量元件位于衬底的表面上方并且可被驱动装置驱动，沿着沿表面延伸的第一轴线振动，具有检测质量元件，该检测质量元件可在 科里奥利力沿着垂直于表面的第二轴线，并且具有检测装置，通过该检测装置可以检测检测质量元件沿着第二轴线的偏转。 由于垂直于表面的第二轴的布置，横摆角速度传感器可以与适合于检测围绕其它方向的旋转轴线的旋转的附加横摆速率传感器一体地集成到一个芯片中。

    Yaw Rate Sensor
    26.
    发明申请
    Yaw Rate Sensor 审中-公开
    偏航率传感器

    公开(公告)号：US20070234803A1

    公开(公告)日：2007-10-11

    申请号：US10577743

    申请日：2004-08-13

    Applicant: Udo-Martin Gomez ,  Reinhard Neul ,  Kersten Kehr ,  Marko Rocznik

    Inventor： Udo-Martin Gomez ,  Reinhard Neul ,  Kersten Kehr ,  Marko Rocznik

    IPC: G01C19/56

    CPC classification number: G01C19/5755

    Abstract: The yaw rate sensor of the present invention has force-conveying means. The central idea of the invention is that the force action conveyed by this arrangement has a frequency such that the frequency of the conveyed force action is an integral multiple of the frequency of the oscillation of the drive element parallel to the X-axis.

    Abstract translation: 本发明的偏航率传感器具有力传递装置。 本发明的中心思想是通过这种布置传递的力作用具有这样的频率，使得所输送的力作用的频率是与驱动元件平行于X轴的振荡频率的整数倍。

    Micromechanical motion sensor
    27.
    发明申请
    Micromechanical motion sensor 有权
    微机械运动传感器

    公开(公告)号：US20070180907A1

    公开(公告)日：2007-08-09

    申请号：US10556172

    申请日：2004-03-24

    Applicant: Dietmar Krieg ,  Udo-Martin Gomez ,  Reinhard Neul

    Inventor： Dietmar Krieg ,  Udo-Martin Gomez ,  Reinhard Neul

    IPC: G01P9/04 ,  G01C19/56 ,  G01C25/00 ,  G01P9/02 ,  G01P21/00

    CPC classification number: G01C19/5712 ,  G01C19/5726 ,  G01C19/5776

    Abstract: A micromechanical motion sensor is capable of detecting a deflection imparted to an oscillatably mounted bar spring element excited to a permanent periodic oscillation by an electrostatic oscillating drive to which a periodic drive voltage is applied. To compensate non-linearities of the resonance frequency response of the bar spring element, a sum of a normal drive voltage signal and a compensation drive signal may be applied to a comb drive. In an alternative embodiment, separate compensation comb drive units may be additionally provided to the comb drive units used for the oscillation drive and a compensation voltage signal may be applied to them to compensate for the non-linearity.

    Abstract translation: 微机械运动传感器能够检测通过施加周期性驱动电压的静电振荡驱动器激发到永久周期性振荡的可摆放安装的弹簧元件的偏转。 为了补偿棒弹簧元件的共振频率响应的非线性，可以将正常驱动电压信号和补偿驱动信号的总和施加到梳齿驱动器。 在替代实施例中，分离的补偿梳驱动单元可以附加地提供给用于振荡驱动的梳状驱动单元，并且补偿电压信号可以被施加到它们以补偿非线性。

    Method and system for detecting a spatial movement state of moving objects
    28.
    发明授权
    Method and system for detecting a spatial movement state of moving objects 失效
    用于检测移动物体的空间运动状态的方法和系统

    公开(公告)号：US06925413B2

    公开(公告)日：2005-08-02

    申请号：US10320278

    申请日：2002-12-16

    Applicant: Dietmar Krieg ,  Reinhard Neul ,  Dorothea Papathanassiou ,  Roland Mueller-Fiedler ,  Michael Knauss

    Inventor： Dietmar Krieg ,  Reinhard Neul ,  Dorothea Papathanassiou ,  Roland Mueller-Fiedler ,  Michael Knauss

    IPC: B60R21/01 ,  B60R21/0132 ,  G01C21/16 ,  G01P9/04 ,  G01P15/18 ,  H05K3/30 ,  G01C17/00 ,  G01C19/00

    CPC classification number: G01C17/00 ,  B60R21/0132 ,  B60R2021/01184 ,  B60R2021/0119 ,  B60R2021/01327 ,  G01C21/16 ,  G01P15/18 ,  H05K3/301

    Abstract: A method and a system for detecting the spatial movement state of moving objects, e.g., vehicles. Due to a, for example, non-cartesian arrangement of four rotational rate sensors and/or acceleration sensors, it is also possible to obtain a redundant signal in addition to the desired useful signal indicating the spatial movement state, e.g., the rotational movement and/or acceleration in space; if this redundant signal is large enough in comparison with the rotational rate actually applied, it may be used for detection of the size of the error and the defective sensor. The four sensors are mounted, for example, on a sensor platform forming a three-sided truncated pyramid so that all possible three-way combinations of sensors are mutually linearly independent. The accuracy about the vertical axis is defined by the angle of inclination of the side faces of the truncated pyramid.

    Abstract translation: 一种用于检测运动物体（例如车辆）的空间运动状态的方法和系统。 例如，由于例如四个转速传感器和/或加速度传感器的非笛卡尔布置，除了表示空间运动状态的期望的有用信号之外，还可以获得冗余信号，例如旋转运动和 /或空间加速; 如果该冗余信号与实际施加的旋转速度相比足够大，则其可用于检测误差的尺寸和有缺陷的传感器。 四个传感器例如安装在形成三边截棱锥的传感器平台上，使得传感器的所有可能的三向组合相互线性独立。 垂直轴的精度由截顶棱锥的侧面的倾斜角定义。

    Device for bias potential generation for an oscillating rotation speed sensor
    29.
    发明授权
    Device for bias potential generation for an oscillating rotation speed sensor 失效
    用于摆动转速传感器的偏置电位产生装置

    公开(公告)号：US06553833B1

    公开(公告)日：2003-04-29

    申请号：US09830183

    申请日：2001-04-23

    Applicant: Karsten Funk ,  Reinhard Neul ,  Gunar Lorenz

    Inventor： Karsten Funk ,  Reinhard Neul ,  Gunar Lorenz

    IPC: G01P904

    CPC classification number: G01C19/5726 ,  G01C19/5712

    Abstract: The invention relates to a device for generating bias voltages for the electrodes of a rotation rate sensor. By evaluating a rotation rate signal and a quadrature signal, control signals are generated, using an adaptive quadrature compensator, that are converted by means of a bias voltage generating arrangement into bias voltages that are delivered to the electrodes of an electrode arrangement disposed underneath the seismic mass or masses of the rotation rate sensor. As a result, the sensor structure can be inclined in such a way that the quadrature signal occurring at the output is minimized. In accordance with a further feature of the invention, the bias voltages generated by the bias voltage generating arrangement are modified, as a function of the output signal of a bandwidth adjusting circuit, in such a way that the amplitude frequency response of the detection motion has a desired bandwidth.

    Abstract translation: 本发明涉及一种用于产生旋转速率传感器的电极的偏置电压的装置。 通过评估旋转速率信号和正交信号，使用自适应正交补偿器产生控制信号，该自适应正交补偿器通过偏置电压产生装置转换成偏置电压，该偏压被输送到设置在地震下的电极装置的电极 质量或质量的转速传感器。 结果，传感器结构可以以使输出端发生的正交信号最小化的方式倾斜。 根据本发明的另一特征，由偏置电压产生装置产生的偏置电压作为带宽调整电路的输出信号的函数被修改，使得检测运动的振幅频率响应具有 期望的带宽。

    Micromechanical system
    30.
    发明授权
    Micromechanical system 有权
    微机械系统

    公开(公告)号：US09003881B2

    公开(公告)日：2015-04-14

    申请号：US13197100

    申请日：2011-08-03

    Applicant: Reinhard Neul ,  Daniel Christoph Meisel

    Inventor： Reinhard Neul ,  Daniel Christoph Meisel

    IPC: G01C19/56 ,  G01C19/5755

    CPC classification number: G01C19/5755

    Abstract: A yaw-rate sensor for determining a Coriolis force includes a semiconductor substrate, a mass body mounted so it is movable over the semiconductor substrate, a drive unit for setting the mass body into an oscillating movement, and a detection unit for determining a deflection of the mass body which is caused by the Coriolis force. The detection unit includes a piezoresistive element, whose electrical resistance is a function of the deformation of the piezoresistive element.

    Abstract translation: 用于确定科里奥利力的偏转速率传感器包括半导体衬底，安装成可在半导体衬底上移动的质量体，用于将质量体设置为振荡运动的驱动单元，以及用于确定 由科里奥利力造成的质量体。 检测单元包括压阻元件，其电阻是压阻元件的变形的函数。

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