公开(公告)号：US20120231626A1

公开(公告)日：2012-09-13

申请号：US13415727

申请日：2012-03-08

Applicant: SANG-HYEOB LEE ,  Sang Ho Yu ,  Kai Wu

Inventor： SANG-HYEOB LEE ,  Sang Ho Yu ,  Kai Wu

IPC: H01L21/768 ,  H01L21/285

CPC classification number: C23C16/0272 ,  C23C16/34 ,  C23C16/45529 ,  C23C16/56 ,  H01L21/28556 ,  H01L21/76846 ,  H01L27/10891

Abstract: The invention provides a method of forming a film stack on a substrate, comprising performing a silicon containing gas soak process to form a silicon containing layer over the substrate, reacting with the silicon containing layer to form a tungsten silicide layer on the substrate, depositing a tungsten nitride layer on the substrate, subjecting the substrate to a nitridation treatment using active nitrogen species from a remote plasma, and depositing a conductive bulk layer directly on the tungsten nitride layer.

Abstract translation: 本发明提供了一种在衬底上形成膜堆叠的方法，包括进行含硅气体保温工艺以在衬底上形成含硅层，与含硅层反应以在衬底上形成硅化钨层，沉积 氮化硅层，使用来自远程等离子体的活性氮物质进行氮化处理，并将导电体层直接沉积在氮化钨层上。

公开(公告)号：US08211799B2

公开(公告)日：2012-07-03

申请号：US13160378

申请日：2011-06-14

Applicant: Amit Khandelwal ,  Madhu Moorthy ,  Avgerinos V. Gelatos ,  Kai Wu

Inventor： Amit Khandelwal ,  Madhu Moorthy ,  Avgerinos V. Gelatos ,  Kai Wu

IPC: H01L21/44

CPC classification number: C23C16/0281 ,  C23C16/08 ,  C23C16/14 ,  C23C16/45525 ,  H01L21/28556 ,  H01L21/28562 ,  H01L21/76843 ,  H01L21/76855 ,  H01L21/76856 ,  H01L21/7687 ,  H01L21/76876 ,  H01L21/76877 ,  H01L2221/1089

Abstract: Embodiments of the invention provide a method for depositing tungsten-containing materials. In one embodiment, a method includes forming a tungsten nucleation layer over an underlayer disposed on the substrate while sequentially providing a tungsten precursor and a reducing gas into a process chamber during an atomic layer deposition (ALD) process and depositing a tungsten bulk layer over the tungsten nucleation layer, wherein the reducing gas contains hydrogen gas and a hydride compound (e.g., diborane) and has a hydrogen/hydride flow rate ratio of about 500:1 or greater. In some examples, the method includes flowing the hydrogen gas into the process chamber at a flow rate within a range from about 1 slm to about 20 slm and flowing a mixture of the hydride compound and a carrier gas into the process chamber at a flow rate within a range from about 50 sccm to about 500 sccm.

Abstract translation: 本发明的实施方案提供了一种沉积含钨材料的方法。 在一个实施例中，一种方法包括在设置在衬底上的底层上形成钨成核层，同时在原子层沉积（ALD）工艺期间依次提供钨前体和还原气体到处理室中，并在其上沉积钨体积层 钨成核层，其中所述还原气体包含氢气和氢化物化合物（例如乙硼烷），并且具有约500:1或更高的氢/氢化物流速比。 在一些实例中，该方法包括以约1slm至约20slm的流速将氢气流入处理室，并将氢化物化合物和载气的混合物以流速流动到处理室中 在约50sccm至约500sccm的范围内。

公开(公告)号：US20120140239A1

公开(公告)日：2012-06-07

申请号：US13152979

申请日：2011-06-03

Applicant: Cheng-Chung LEE ,  Kai Wu

Inventor： Cheng-Chung LEE ,  Kai Wu

IPC: G01B9/02

CPC classification number: G01B11/0675 ,  G01B9/02021 ,  G01B9/02065 ,  G01B9/02081 ,  G01B9/0209 ,  G01B2290/70 ,  G01N21/45

Abstract: A method for real-time monitoring thin film deposition using a dynamic interferometer is revealed. An optical monitoring extracting the temporal phase change of the reflection coefficient of the deposition film stacks. The dynamic interferometer, which gets rid of the influence of vibration and air turbulence, was used in the method to directly detect fluctuating phase of a deposition film stack. Combing with the reflectance or transmittance measurements, the real-time reflection coefficient under normal incidence of monitoring light can be found as well as optical admittance for enhancing the error compensation of the thin film deposition.

Abstract translation: 揭示了使用动态干涉仪实时监测薄膜沉积的方法。 提取沉积膜堆叠的反射系数的时间相位变化的光学监测。 用于直接检测沉积膜叠层波动相位的方法中，摆脱了振动和空气湍流影响的动态干涉仪。 配合反射率或透射率测量，可以发现在监控光的正常入射下的实时反射系数以及用于增强薄膜沉积的误差补偿的光学导纳。

公开(公告)号：US20120140235A1

公开(公告)日：2012-06-07

申请号：US13152902

申请日：2011-06-03

Applicant: Cheng-Chung LEE ,  Kai Wu

Inventor： Cheng-Chung LEE ,  Kai Wu

IPC: G01B9/02

CPC classification number: G01B11/0675

Abstract: A method for measuring the film element using optical multi-wavelength interferometry is revealed. The invention uses reflection coefficients of thin films at different wavelengths to measure the thickness and optical constants of thin films. The phase difference coming from the phase difference between test and reference surfaces is distinguished from the phase difference from the spatial path difference between reference and test beams by doing measurements on different wavelengths, because they change in different ways as the measuring wavelength changes. The phase is then acquired. Combining with the measured reflectance of thin film, the reflection coefficient of thin film is obtained. Collecting the reflection coefficients of each point, the thin film thickness and optical constants distribution in 2 dimensions are calculated. The surface profile is known through the spatial path differences between reference and test beams. These can be measured in a interferometer to avoid the vibration influence.

Abstract translation: 揭示了使用光学多波长干涉测量法测量薄膜元件的方法。 本发明使用不同波长的薄膜的反射系数来测量薄膜的厚度和光学常数。 来自测试和参考表面之间的相位差的相位差通过对不同波长进行测量而与参考和测试光束之间的空间路径差的相位差进行区分，因为它们随着测量波长的变化而以不同的方式变化。 然后获得相位。 结合薄膜的测量反射率，得到薄膜的反射系数。 收集每个点的反射系数，计算二维的薄膜厚度和光学常数分布。 通过参考和测试光束之间的空间路径差异已知表面轮廓。 这些可以在干涉仪中测量，以避免振动的影响。

公开(公告)号：US07993525B2

公开(公告)日：2011-08-09

申请号：US11647566

申请日：2006-12-29

Applicant: Xing Su ,  David J. Liu ,  Kenneth B. Swartz ,  Kai Wu ,  Mineo Yamakawa

Inventor： Xing Su ,  David J. Liu ,  Kenneth B. Swartz ,  Kai Wu ,  Mineo Yamakawa

IPC: G01N1/00 ,  G01N21/00 ,  G01N33/48 ,  G01N33/53 ,  G01N33/553

CPC classification number: G01N1/4044 ,  B01L3/502761 ,  B01L3/502784 ,  B01L2200/0647 ,  B01L2200/0673 ,  B01L2300/0816 ,  B01L2400/0424 ,  B01L2400/043 ,  B01L2400/0638 ,  B01L2400/086 ,  G01N35/0098 ,  G01N35/08 ,  G01N2015/0038 ,  G01N2015/0092 ,  H01F7/20 ,  H01F7/206 ,  H01F2007/068 ,  Y10S436/805 ,  Y10S436/806 ,  Y10T29/49117 ,  Y10T29/4913 ,  Y10T29/49155 ,  Y10T436/25

Abstract: An embodiment of the invention relates to a device for detecting an analyte in a sample. The device comprises a fluidic network and an integrated circuitry component. The fluidic network comprises a sample zone, a cleaning zone and a detection zone. The fluidic network contains a magnetic particle and/or a signal particle. A sample containing an analyte is introduced, and the analyte interacts with the magnetic particle and/or the signal particle through affinity agents. A microcoil array a mechanically movable permanent magnet is functionally coupled to the fluidic network, which are activatable to generate a magnetic field within a portion of the fluidic network, and move the magnetic particle from the sample zone to the detection zone. A detection element is present which detects optical or electrical signals from the signal particle, thus indicating the presence of the analyte.

Abstract translation: 本发明的一个实施例涉及用于检测样品中的分析物的装置。 该装置包括流体网络和集成电路部件。 流体网络包括样品区，清洁区和检测区。 流体网络包含磁性颗粒和/或信号颗粒。 引入含有分析物的样品，并且分析物通过亲和试剂与磁性颗粒和/或信号颗粒相互作用。 微机架阵列机械可移动的永磁体在功能上耦合到流体网络，其可激活以在流体网络的一部分内产生磁场，并将磁性颗粒从样品区域移动到检测区域。 存在检测元件，其检测来自信号颗粒的光学或电信号，从而指示分析物的存在。

公开(公告)号：US07440216B2

公开(公告)日：2008-10-21

申请号：US10455507

申请日：2003-06-04

Applicant: Kai Wu ,  Tamon Kasajima ,  Masashi Shiraishi ,  Ping Shang

Inventor： Kai Wu ,  Tamon Kasajima ,  Masashi Shiraishi ,  Ping Shang

IPC: G11B21/02 ,  G11B5/58 ,  G11B21/24

CPC classification number: G11B5/5552

Abstract: The invention relates to a microactuator comprising a movable structure having a symmetric axis about which the movable structure are divided into two parts which can produce the same movement but in opposite directions; two active arms built with piezoelectric material; two stationary structures to connect the two active arms at their two ends, respectively. The invention also relates to a disk drive suspension which is incorporated with the microactuator.

Abstract translation: 本发明涉及一种微致动器，其包括具有对称轴的可移动结构，所述可移动结构围绕所述可移动结构分成两部分，所述两部分可以产生相同的运动但是在相反的方向上; 两个用压电材料制成的主动臂; 两个固定结构分别在两端连接两个活动臂。 本发明还涉及一种与微型致动器并入的磁盘驱动器悬架。

公开(公告)号：US20060249501A1

公开(公告)日：2006-11-09

申请号：US11118022

申请日：2005-04-29

Applicant: Kin Hung ,  Srikanth Narasimalu ,  Wei Chan ,  Man Chan ,  Cheuk Tang ,  Kai Wu

Inventor： Kin Hung ,  Srikanth Narasimalu ,  Wei Chan ,  Man Chan ,  Cheuk Tang ,  Kai Wu

IPC: F27B5/14

CPC classification number: F27B5/04 ,  F27B5/14

Abstract: An oven is provided for curing or reflowing compounds on objects, such as lead frames or other substrates. The oven comprises a heating chamber, a heating assembly mounted in thermal communication with the heating chamber to provide heat thereto, and a support assembly for supporting the object in the heating chamber for heating. The heating assembly and support assembly are configured to be movable relative to one another for controllably positioning the object at variable distances with respect to the heating assembly. Heating of the object according to a heating profile can thus be achieved by controlled heating of the object at different temperatures by positioning the object at different distances with respect to the heating assembly during the heating process although there is a single heating zone.

Abstract translation: 提供了一种烤箱，用于固化或回收化合物，如物体，如引线框架或其他基材。 烘箱包括加热室，与加热室热连通以加热的加热组件，以及用于将加热室中的物体支撑在加热室中的支撑组件。 加热组件和支撑组件被构造成相对于彼此可移动，以相对于加热组件以可变距离可控地定位物体。 因此，可以通过在加热过程中将物体相对于加热组件定位在不同距离处，通过在不同温度下受控加热物体来实现物体的加热，尽管存在单个加热区。

公开(公告)号：US20060141498A1

公开(公告)日：2006-06-29

申请号：US11273964

申请日：2005-11-14

Applicant: Kai Wu ,  Charles Miyada ,  Thong Nguyen

Inventor： Kai Wu ,  Charles Miyada ,  Thong Nguyen

IPC: C12Q1/68 ,  C12P19/34 ,  C12N9/22

CPC classification number: C12N9/88 ,  C12Q1/6806 ,  C12Q2600/158 ,  C12Q2525/143 ,  C12Q2521/301 ,  C12Q2521/131

Abstract: Methods for using an apurinic/apyrimidinic endonuclease, capable of cleaving both single- and double-stranded cDNA, for fragmentation and labeling of single stranded or double stranded DNA molecules are provided. Amplification methods that generate single-stranded amplified cDNA are also disclosed. In the subject methods AP sites in a population of nucleic acids are cleaved by an AP endonuclease that is active on both double and single stranded DNA. Fragments may be end labeled. In preferred embodiments APE 1 is used. The methods may be used in a variety of applications where end-labeling single or double stranded DNA is desired.

Abstract translation: 提供了使用能够切割单链和双链cDNA，用于单链或双链DNA分子的片段化和标记的无嘌呤/脱嘧啶核苷酸内切酶的方法。 还公开了产生单链扩增cDNA的扩增方法。 在本发明方法中，核酸群体中的AP位点被双链和单链DNA上活性的AP内切核酸酶切割。 片段可能是末端标记的。 在优选实施方案中，使用APE 1。 所述方法可用于需要终止标记单链或双链DNA的多种应用。

公开(公告)号：US20060035258A1

公开(公告)日：2006-02-16

申请号：US11199742

申请日：2005-08-08

Applicant: Rajeswari Tadakamalla ,  Kai Wu

Inventor： Rajeswari Tadakamalla ,  Kai Wu

IPC: C12Q1/68 ,  G06F19/00 ,  G01N33/48 ,  G01N33/50

CPC classification number: C12Q1/6809 ,  G16B25/00 ,  Y02A90/26 ,  C12Q2565/501 ,  C12Q2531/119 ,  C12Q2521/301

Abstract: Methods and computer software products for identifying changes in genomic DNA copy number are disclosed. Methods for identifying homozygous deletions and genetic amplifications are disclosed. Genomic DNA is amplified generically and amplified sample is hybridized to an expression array. The expression array comprises probes to regions of genes that are expressed. The probes are complementary to genomic sequences found in mRNAs. Signal intensity is correlated to copy number. The methods may be used to detect copy number changes in cancerous tissue compared to normal tissue. The methods may be used to diagnose cancer and other diseases associated with chromosomal anomalies.

Abstract translation: 公开了用于鉴定基因组DNA拷贝数变化的方法和计算机软件产品。 公开了鉴定纯合缺失和遗传扩增的方法。 基因组DNA被放大一般，扩增的样品与表达数组杂交。 表达阵列包括对表达的基因区域的探针。 探针与mRNAs中发现的基因组序列互补。 信号强度与拷贝数相关。 与正常组织相比，该方法可用于检测癌组织中的拷贝数变化。 该方法可用于诊断与染色体异常相关的癌症和其他疾病。

公开(公告)号：US06937443B2

公开(公告)日：2005-08-30

申请号：US10098067

申请日：2002-03-13

Applicant: Jeffery L. Wang ,  Takehiro Kamigama ,  Chi Hung Yuen ,  Kai Wu

Inventor： Jeffery L. Wang ,  Takehiro Kamigama ,  Chi Hung Yuen ,  Kai Wu

IPC: G11B5/48 ,  G11B5/55 ,  G11B5/596

CPC classification number: G11B5/4833 ,  G11B5/4813 ,  G11B5/4846 ,  G11B5/5526 ,  Y10T29/49025 ,  Y10T29/49027 ,  Y10T29/4903

Abstract: A system and method for an improved magnetic head arm assembly (HAA) is disclosed. The HAA includes three principal components, a head gimbal assembly (HGA), a flexible printed circuit (FPC) assembly, and an actuator coil assembly. The design allows for HAA rigidity, yet each of the components is designable and manufacturable independent of one another, in addition to other advantages over current methods.

Abstract translation: 公开了一种改进的磁头臂组件（HAA）的系统和方法。 HAA包括三个主要部件，头万向节组件（HGA），柔性印刷电路（FPC）组件和致动器线圈组件。 该设计允许HAA刚性，但是除了与现有方法相比的其它优点之外，每个部件彼此独立地可设计和制造。