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27 条记录 (耗时 0.038 秒)

    Laser lithography quality alarm system
    21.
    发明授权
    Laser lithography quality alarm system 失效
    激光光刻质量报警系统

    公开(公告)号：US06408260B1

    公开(公告)日：2002-06-18

    申请号：US09505233

    申请日：2000-02-16

    申请人： Michael P. C. Watts ,  Tom A. Watson

    发明人： Michael P. C. Watts ,  Tom A. Watson

    IPC分类号： G06F1500

    CPC分类号： G03F7/70025 ,  G03F7/70525 ,  G03F7/70591 ,  G05B19/00 ,  G05B2219/31205 ,  G05B2219/31485 ,  G07C3/005 ,  Y02P90/86

    摘要： An electric discharge laser with an associated programmable controller which (1) will permit an operator to specify beam quality parameters based on historical data (2) will monitor those parameters and (3) will provide a notification signal to the operator informing him when the beam quality is adequate for integrated circuit fabrication. The controller is programmed to indicate an out-of-control condition when one or more quality parameters exhibit certain specified non-random behavior such as two out of three quality measurements deviating by more than 4 standard deviations and/or three out of four quality measurements deviating by more three standard deviations. In a preferred embodiment the program is designed to detect poor quality by looking for these “runs” of bad quantity data and to produce false indication of system out of control, on the average, no more than once each two months.

    摘要翻译： 具有相关可编程控制器的放电激光器（1）将允许操作者基于历史数据（2）指定光束质量参数将监视这些参数，并且（3）将向操作者提供通知信号，以便当光束 质量足以用于集成电路制造。 控制器被编程为当一个或多个质量参数表现出特定的非随机行为时指示失控状态，例如偏离超过4个标准偏差的三个质量测量中的两个和/或四个质量测量中的三分之一 偏离更多的三个标准偏差。 在优选实施例中，该程序旨在通过查找这些“数量”数据的错误来检测质量差，并且每两个月平均不超过一次产生系统失控的虚假指示。

    Tangential fan with cutoff assembly and vibration control for electric discharge laser
    26.
    发明授权
    Tangential fan with cutoff assembly and vibration control for electric discharge laser 有权
    切向风扇切割组件和放电激光器的振动控制

    公开(公告)号：US6034984A

    公开(公告)日：2000-03-07

    申请号：US310786

    申请日：1999-05-12

    申请人： Thomas Hofmann ,  James K. Howey ,  Robert A. Shannon ,  Richard C. Ujazdowski ,  Tom A. Watson ,  R. Kyle Webb

    发明人： Thomas Hofmann ,  James K. Howey ,  Robert A. Shannon ,  Richard C. Ujazdowski ,  Tom A. Watson ,  R. Kyle Webb

    IPC分类号： G03F7/20 ,  H01S3/036 ,  H01S3/225 ,  H01S3/22

    CPC分类号： H01S3/036 ,  G03F7/708 ,  H01S3/225

    摘要： A tangential fan and cutoff assembly for recirculating a lasing gas mixture has blade members, which vary in circumferential position stepwise from end to end, and/or a tapered anode assembly. The number of blade members can be constant or variable between ends. The circumferential position of blade members can shift monotonically or reversibly between ends. Blade members are stiffened by optimally selecting the number and placement of hub members to control the natural vibration frequency of the fan. Methods of forming tangential fans include casting, and machining from a solid block. Monolithic structures can be joined, typically by electron-beam welding. Casting, welding, and machining processes introduce no additional contaminants. Tangential fans produced have mechanical rigidity, accurate tolerances, and low contaminant concentrations. Blade members can be formed into air foil shapes.

    摘要翻译： 用于再循环激光气体混合物的切向风扇和切割组件具有叶片构件，其周向位置从端到端逐渐变化，和/或锥形阳极组件。 刀片构件的数量可以在端部之间是恒定的或可变的。 叶片构件的圆周位置可以在端部之间单调或可逆地移动。 叶片构件通过最佳地选择轮毂构件的数量和布置来控制风扇的固有振动频率而变硬。 形成切向风扇的方法包括从固体块铸造和加工。 通常可以通过电子束焊接来连接整体结构。 铸造，焊接和加工过程不会引起额外的污染物。 生产的切向风扇具有机械刚度，精度公差和污染物浓度低。 叶片构件可以形成为空气箔形状。

    Fluorine control system for excimer lasers
    27.
    发明授权
    Fluorine control system for excimer lasers 失效
    准分子激光器氟控制系统

    公开(公告)号：US5978406A

    公开(公告)日：1999-11-02

    申请号：US16525

    申请日：1998-01-30

    申请人： Shahryar Rokni ,  Tom A. Watson ,  David J. Tammadge

    发明人： Shahryar Rokni ,  Tom A. Watson ,  David J. Tammadge

    IPC分类号： G03F7/20 ,  H01S3/036 ,  H01S3/225

    CPC分类号： G03F7/70558 ,  G03F7/70575 ,  H01S3/036 ,  H01S3/225

    摘要： An excimer laser with a laser gas containing fluorine in which the fluorine concentration is maintained continuously at or substantially at desired predetermined levels. A real time or substantially real time fluorine monitor provides a feedback signal to a fluorine flow control system which provides continuous fluorine injection flow into the laser chamber to precisely compensate for fluorine depletion and maintain fluorine concentration precisely at desired levels. In a preferred embodiment, fluorine detector which may be a chemical detector periodically measures the fluorine concentration in laser gas discharged from the laser in order to calibrate the real time or substantially real time fluorine monitor. In a second preferred embodiment, the continuous inlet flow is from two gas sources, one containing fluorine, a noble gas and a buffer gas and the other containing only the noble gas and the buffer gas. In a third embodiment, the continuous inlet flow is from a gas source containing fluorine, a noble gas and a buffer gas and filtered gas discharged from the laser.

    摘要翻译： 一种具有氟的激光气体的准分子激光，其中氟浓度连续地保持在或基本上保持在期望的预定水平。 实时或基本上实时的氟监测器向氟流量控制系统提供反馈信号，该氟流量控制系统提供连续的氟注入流入激光室以精确补偿氟耗尽，并将氟浓度精确保持在所需水平。 在优选实施例中，可以是化学检测器的氟检测器周期性地测量从激光器排出的激光气体中的氟浓度，以校准实时或实质上实时的氟监测器。 在第二优选实施例中，连续入口流是来自两个气体源，一个​​含氟，惰性气体和缓冲气体，另一个仅含有惰性气体和缓冲气体。 在第三实施例中，连续入口流是从含有氟，惰性气体和缓冲气体的气体源和从激光器排出的过滤气体。