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    Fluorine control system for excimer lasers
    2.
    发明授权
    Fluorine control system for excimer lasers 失效
    准分子激光器氟控制系统

    公开(公告)号：US5978406A

    公开(公告)日：1999-11-02

    申请号：US16525

    申请日：1998-01-30

    申请人： Shahryar Rokni ,  Tom A. Watson ,  David J. Tammadge

    发明人： Shahryar Rokni ,  Tom A. Watson ,  David J. Tammadge

    IPC分类号： G03F7/20 ,  H01S3/036 ,  H01S3/225

    CPC分类号： G03F7/70558 ,  G03F7/70575 ,  H01S3/036 ,  H01S3/225

    摘要： An excimer laser with a laser gas containing fluorine in which the fluorine concentration is maintained continuously at or substantially at desired predetermined levels. A real time or substantially real time fluorine monitor provides a feedback signal to a fluorine flow control system which provides continuous fluorine injection flow into the laser chamber to precisely compensate for fluorine depletion and maintain fluorine concentration precisely at desired levels. In a preferred embodiment, fluorine detector which may be a chemical detector periodically measures the fluorine concentration in laser gas discharged from the laser in order to calibrate the real time or substantially real time fluorine monitor. In a second preferred embodiment, the continuous inlet flow is from two gas sources, one containing fluorine, a noble gas and a buffer gas and the other containing only the noble gas and the buffer gas. In a third embodiment, the continuous inlet flow is from a gas source containing fluorine, a noble gas and a buffer gas and filtered gas discharged from the laser.

    摘要翻译： 一种具有氟的激光气体的准分子激光，其中氟浓度连续地保持在或基本上保持在期望的预定水平。 实时或基本上实时的氟监测器向氟流量控制系统提供反馈信号，该氟流量控制系统提供连续的氟注入流入激光室以精确补偿氟耗尽，并将氟浓度精确保持在所需水平。 在优选实施例中，可以是化学检测器的氟检测器周期性地测量从激光器排出的激光气体中的氟浓度，以校准实时或实质上实时的氟监测器。 在第二优选实施例中，连续入口流是来自两个气体源，一个​​含氟，惰性气体和缓冲气体，另一个仅含有惰性气体和缓冲气体。 在第三实施例中，连续入口流是从含有氟，惰性气体和缓冲气体的气体源和从激光器排出的过滤气体。