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    Inertial and pressure sensors on single chip
    24.
    发明授权
    Inertial and pressure sensors on single chip 有权
    惯性和压力传感器在单芯片上

    公开(公告)号：US09194882B2

    公开(公告)日：2015-11-24

    申请号：US14447696

    申请日：2014-07-31

    Applicant: Robert Bosch GmbH

    Inventor： Ando Feyh ,  Gary O'Brien

    IPC: B81B3/00 ,  G01P15/08 ,  G01P15/14 ,  G01P1/02 ,  G01P15/125 ,  G01L1/14 ,  G01L1/18

    CPC classification number: G01P15/0802 ,  B81B3/0021 ,  B81B7/02 ,  B81B2201/025 ,  B81B2201/0264 ,  G01C19/5769 ,  G01C19/5783 ,  G01L1/14 ,  G01L1/18 ,  G01P1/023 ,  G01P15/125 ,  G01P15/14 ,  G01P15/18 ,  G01P2015/0862 ,  G01P2015/088

    Abstract: In one embodiment, the process flow for a capacitive pressures sensor is combined with the process flow for an inertial sensor. In this way, an inertial sensor is realized within the membrane layer of the pressure sensor. The device layer is simultaneously used as z-axis electrode for out-of-plane sensing in the inertial sensor, and/or as the wiring layer for the inertial sensor. The membrane layer (or cap layer) of the pressure sensor process flow is used to define the inertial sensor sensing structures. Insulating nitride plugs in the membrane layer are used to electrically decouple the various sensing structures for a multi-axis inertial sensor, allowing for fully differential sensing.

    Abstract translation: 在一个实施例中，电容式压力传感器的工艺流程与惯性传感器的工艺流程相结合。 以这种方式，在压力传感器的膜层内实现惯性传感器。 器件层同时用作惯性传感器中的平面外感测的z轴电极，和/或用作惯性传感器的布线层。 压力传感器工艺流程的膜层（或盖层）用于定义惯性传感器感测结构。 膜层中的绝缘氮化物塞用于电耦合用于多轴惯性传感器的各种感测结构，允许完全差分感测。

    FORCE FEEDBACK ELECTRODES IN MEMS ACCELEROMETER
    25.
    发明申请
    FORCE FEEDBACK ELECTRODES IN MEMS ACCELEROMETER 审中-公开
    力学反馈电极在MEMS加速度计

    公开(公告)号：US20140260618A1

    公开(公告)日：2014-09-18

    申请号：US14190721

    申请日：2014-02-26

    Applicant: Agency for Science Technology and Research (A*STAR) ,  PGS Geophysical AS

    Inventor： Ilker Ender Ocak ,  Chengliang Sun ,  Julius Ming-Lin Tsai ,  Sanchitha Nirodha Fernando

    IPC: G01P15/125

    CPC classification number: G01V1/18 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/0837 ,  G01P2015/0862 ,  G01P2015/0882 ,  G01V1/09 ,  G01V1/38

    Abstract: A microelectromechanical system (MEMS) accelerometer having separate sense and force-feedback electrodes is disclosed. The use of separate electrodes may in some embodiments increase the dynamic range of such devices. Other possible advantages include, for example, better sensitivity, better noise suppression, and better signal-to-noise ratio. In one embodiment, the accelerometer includes three silicon wafers, fabricated with sensing electrodes forming capacitors in a fully differential capacitive architecture, and with separate force feedback electrodes forming capacitors for force feedback. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a restoring force to the proof mass region. MEMS accelerometers with force-feedback electrodes may be used in geophysical surveys, e.g., for seismic sensing or acoustic positioning.

    Abstract translation: 公开了具有分离的感测和力反馈电极的微机电系统（MEMS）加速计。 在一些实施例中，单独电极的使用可以增加这种装置的动态范围。 其他可能的优点包括例如更好的灵敏度，更好的噪声抑制和更好的信噪比。 在一个实施例中，加速度计包括三个硅晶片，由感应电极制成，其形成全差分电容结构的电容器，并且具有单独的力反馈电极，形成用于力反馈的电容器。 这些电极可以分离在二氧化硅层上。 在一些实施例中，加速度计还包括二氧化硅层，压电结构，吸气剂层，接合垫，粘合间隔物和力反馈电极，其可以对检测质量区域施加恢复力。 具有力反馈电极的MEMS加速度计可用于地球物理勘测，例如用于地震检测或声学定位。

    MEMS inclinometer having a reduced vibration rectification error
    28.
    发明授权
    MEMS inclinometer having a reduced vibration rectification error 有权

    公开(公告)号：US11993509B2

    公开(公告)日：2024-05-28

    申请号：US17179157

    申请日：2021-02-18

    Applicant: STMicroelectronics S.r.l.

    Inventor： Gabriele Gattere ,  Francesco Rizzini

    IPC: B81B3/00 ,  G01P15/00 ,  G01P15/08

    CPC classification number: B81B3/0018 ,  G01P15/001 ,  B81B2201/0235 ,  G01P2015/0862

    Abstract: A MEMS inclinometer includes a substrate, a first mobile mass and a sensing unit. The sensing unit includes a second mobile mass, a number of elastic elements, which are interposed between the second mobile mass and the substrate and are compliant in a direction parallel to a first axis, and a number of elastic structures, each of which is interposed between the first and second mobile masses and is compliant in a direction parallel to the first axis and to a second axis. The sensing unit further includes a fixed electrode that is fixed with respect to the substrate and a mobile electrode fixed with respect to the second mobile mass, which form a variable capacitor.

    Micromechanical structure and micromechanical sensor
    29.
    发明授权
    Micromechanical structure and micromechanical sensor 有权

    公开(公告)号：US11858805B2

    公开(公告)日：2024-01-02

    申请号：US17447002

    申请日：2021-09-07

    Applicant: Robert Bosch GmbH

    Inventor： Stefan Kiesel ,  Cristian Nagel ,  Sebastian Guenther

    IPC: B81B3/00 ,  G01P15/08 ,  G01P15/18 ,  G01P15/125

    CPC classification number: B81B3/0021 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  B81B2201/0235 ,  G01P2015/0862

    Abstract: A micromechanical structure, including a substrate, a seismic mass movable with respect to the substrate, and first and second detectors. A first direction and a second direction perpendicular to the first direction define a main extension plane of the substrate. The first and second detectors respectively detect a translatory deflection, and a rotatory deflection. The seismic mass is connected to the substrate via an anchoring element and four torsion spring sections. The first detector include an electrode structure, including first electrodes attached at the seismic mass and second electrodes attached at the substrate. The first and second electrodes have a two-dimensional extension in the second direction and in a third direction perpendicular to the main extension plane. The anchoring element includes first and second sections with a gap between them. A connecting element connects two first electrodes and is guided through the gap.

    ACCELEROMETER ELEMENT FOR DETECTING OUT-OF-PLANE ACCELERATIONS
    30.
    发明公开
    ACCELEROMETER ELEMENT FOR DETECTING OUT-OF-PLANE ACCELERATIONS 审中-公开

    公开(公告)号：US20230305036A1

    公开(公告)日：2023-09-28

    申请号：US18189577

    申请日：2023-03-24

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： Altti TORKKELI ,  Matti LIUKKU ,  Petteri KILPINEN

    IPC: G01P15/125 ,  G01P15/08

    CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P2015/0862

    Abstract: An accelerometer element is provided that includes a body, a mass and a spring system that couples the mass to the body. The spring system configures the mass to rotate reciprocally about a rotary axis. The mass includes a volume of a bulk material that forms two essentially closed surfaces and incorporates between those two closed surfaces one or more weight elements, each of which is formed of a substance whose weight per unit volume is different from weight per unit volume of the bulk material. The weight elements are incorporated in the mass so that the centre of gravity of the mass is offset from the rotary axis in an in-plane direction and the centre of gravity of the mass and the rotary axis are at the same level within the mass in the out-of-plane direction.

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