公开(公告)号：US10037864B2

公开(公告)日：2018-07-31

申请号：US15594712

申请日：2017-05-15

Applicant: MAPPER LITHOGRAPHY IP B.V.

Inventor： Alexander Hendrik Vincent Van Veen ,  Willem Henk Urbanus

IPC: G03B27/52 ,  H01J37/09 ,  H01J37/30 ,  H01J37/317 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/147 ,  H01J37/302

CPC classification number: H01J37/09 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/147 ,  H01J37/3007 ,  H01J37/302 ,  H01J37/3174 ,  H01J37/3177 ,  H01J2237/002 ,  H01J2237/026 ,  H01J2237/0262 ,  H01J2237/0264 ,  H01J2237/16 ,  H01J2237/182 ,  H01J2237/188

Abstract: The invention relates to a charged particle beam generator. The generator may comprise a high voltage shielding arrangement (201) for shielding components outside the shielding arrangement from high voltages within the shielding arrangement, and a vacuum pump (220) located outside the shielding arrangement for regulating a pressure of a space within the shielding arrangement. The generator may comprise a collimator system with a cooling arrangement (405a/407a-407b/405b) comprising cooling channels inside electrodes of the collimator system.

公开(公告)号：US20150123754A1

公开(公告)日：2015-05-07

申请号：US14389972

申请日：2012-07-07

Applicant: Guoqiang Yu ,  Peng Guo ,  Xiufeng Han ,  Chaohui Guo ,  Xiaoyu Sun ,  Xiangqian Zhou

Inventor： Guoqiang Yu ,  Peng Guo ,  Xiufeng Han ,  Chaohui Guo ,  Xiaoyu Sun ,  Xiangqian Zhou

IPC: H01F7/20

CPC classification number: H01J37/09 ,  G01R33/093 ,  G01R33/096 ,  H01F7/202 ,  H01F7/204 ,  H01F41/00 ,  H01J37/141 ,  H01J2237/0262 ,  H01J2237/0264 ,  H01J2237/28 ,  H01J2237/31754 ,  H01L43/12

Abstract: A nano-patterned system comprises a vacuum chamber, a sample stage and a magnetic-field applying device. The magnetic-field applying device comprises a power supply, magnetic poles, and a magnetic-field generation device having a magnetic conductive soft iron core and a coil connected to the power supply and wound on the soft iron core to generate a magnetic field. The soft iron core is a semi-closed frame structure and the magnetic poles are respectively disposed at the two ends of the semi-closed frame structure. The sample stage is inside the vacuum chamber. The magnetic poles are opposite one another inside the vacuum chamber with respect to the sample stage. The coil and soft iron core are outside the vacuum chamber. The soft iron core leads the magnetic field generated by the coil into the vacuum chamber. The magnetic poles locate a sample on the sample stage and apply a local magnetic field.

Abstract translation: 纳米图案系统包括真空室，样品台和磁场施加装置。 磁场施加装置包括电源，磁极和具有导电软铁芯的磁场产生装置和连接到电源的线圈并缠绕在软铁芯上以产生磁场的磁场产生装置。 软铁芯是半封闭框架结构，磁极分别设置在半封闭框架结构的两端。 样品台位于真空室内。 磁极相对于样品台在真空室内彼此相对。 线圈和软铁芯在真空室外。 软铁芯将线圈产生的磁场引入真空室。 磁极将样品定位在样品台上并施加局部磁场。

公开(公告)号：US07550753B2

公开(公告)日：2009-06-23

申请号：US11770037

申请日：2007-06-28

Applicant: Nishino Shigehiro ,  Ono Ryoichi

Inventor： Nishino Shigehiro ,  Ono Ryoichi

IPC: H01J27/00

CPC classification number: H05H15/00 ,  H01J27/02 ,  H01J37/04 ,  H01J37/16 ,  H01J37/3171 ,  H01J2237/0262 ,  H01J2237/038 ,  H01J2237/04735 ,  H01J2237/08

Abstract: A charged particle generator includes a charged particle source provided inside an insulating member which comprises a first box-shaped insulating member having an opening at its top; a second box-shaped insulating member housed inside the first box-shaped insulating member and having an opening at its top, and side walls and a bottom portion which are respectively spaced from side walls and a bottom portion of the first box-shaped insulating member; and an inverted box-shaped insulating member having an opening at its bottom and side walls which are inserted into the space between the side walls of the first and second box-shaped insulating members.

Abstract translation: 带电粒子发生器包括设置在绝缘构件内部的带电粒子源，其包括在其顶部具有开口的第一盒形绝缘构件; 第二盒形绝缘构件，其容纳在第一箱形绝缘构件的内部并且在其顶部具有开口，以及侧壁和底部，其分别与第一箱形绝缘构件的侧壁和底部分隔开 ; 以及在其底部具有开口的倒置的箱形绝缘构件和插入第一和第二盒形绝缘构件的侧壁之间的空间中的侧壁。

公开(公告)号：US20080230713A1

公开(公告)日：2008-09-25

申请号：US11689769

申请日：2007-03-22

Applicant: Yongzhang Huang ,  Neil K. Colvin ,  Kevin J. Hoyt

Inventor： Yongzhang Huang ,  Neil K. Colvin ,  Kevin J. Hoyt

IPC: H01J27/02

CPC classification number: H01J27/08 ,  H01J37/08 ,  H01J37/3171 ,  H01J2237/0262 ,  H01J2237/061 ,  H01J2237/082 ,  H01J2237/166

Abstract: An exemplary ion source for creating a stream of ions has a chamber body that at least partially bounds an ionization region of the arc chamber. The arc chamber body is used with a hot filament arc chamber housing that either directly or indirectly heats a cathode to sufficient temperature to cause electrons to stream through the ionization region of the arc chamber. A seals has a ceramic body having an outer wall that abuts the arc chamber body along a circumferential outer lip. The seal also has one or more radially inner channels bounded by one or more inner walls spaced inwardly from the outer wall.

Abstract translation: 用于产生离子流的示例性离子源具有至少部分地界定电弧室的电离区域的室主体。 电弧室主体与热丝电弧室壳体一起使用，其直接或间接地将阴极加热至足够的温度，以使电子流过电弧室的电离区域。 密封件具有陶瓷体，该陶瓷体具有沿着周向外唇缘邻接电弧室主体的外壁。 密封件还具有一个或多个径向内部通道，其由与外壁间隔开的一个或多个内壁限定。

公开(公告)号：US20080067410A1

公开(公告)日：2008-03-20

申请号：US11770037

申请日：2007-06-28

Applicant: Nishino Shigehiro ,  Ono Ryoichi

Inventor： Nishino Shigehiro ,  Ono Ryoichi

IPC: H01J27/00

CPC classification number: H05H15/00 ,  H01J27/02 ,  H01J37/04 ,  H01J37/16 ,  H01J37/3171 ,  H01J2237/0262 ,  H01J2237/038 ,  H01J2237/04735 ,  H01J2237/08

Abstract: There is provided a charged particle generator configured to be resistant to outside discharge, and an accelerator comprising the generator and an acceleration tube for accelerating charged particles by application of an acceleration voltage. A charged particle generator (1) of the present invention comprises a first box-shaped insulating member (4), having an opening at its top; a second insulating members (5), which is housed inside the first box-shaped insulating member (4) and has an opening at its top, and whose side walls (13) and bottom portion (14) are spaced at a predetermined distance from the outside adjacent side walls (10) and bottom portion (9) of the first box-shaped insulating member (4); and an inverted box-shaped insulating members (7), having an opening at its bottom such that each of its side walls (21) is inserted into the space between the side walls (10, 13) of the first and second box-shaped insulating members (4, 5), characterized in that charged particles generated from a charged particle source (2) installed inside the second box-shaped insulating member (5) are emitted through emerging holes (11, 17) formed in the bottom portions (9, 14) of the first and second box-shaped insulating member. (4, 5).

Abstract translation: 提供了一种被配置为能够抵抗外部放电的带电粒子发生器，以及包括发电机的加速器和用于通过施加加速电压来加速带电粒子的加速管。 本发明的带电粒子发生器（1）包括在其顶部具有开口的第一盒形绝缘构件（4） 第二绝缘构件（5），其容纳在第一盒状绝缘构件（4）的内部并且在其顶部具有开口，并且其侧壁（13）和底部（14）以预定距离间隔开 第一箱形绝缘构件（4）的相邻的侧壁（10）和底部（9）的外侧; 和倒置的箱形绝缘构件（7），在其底部具有开口，使得其每个侧壁（21）插入到第一和第二盒形的侧壁（10,13）之间的空间中 绝缘构件（4,5），其特征在于，从安装在第二盒状绝缘构件（5）内部的带电粒子源（2）产生的带电粒子通过形成在底部的出射孔（11,17）发射 第一和第二箱形绝缘构件的第一和第二盒形绝缘构件。 （4,5）。

公开(公告)号：US20070145269A1

公开(公告)日：2007-06-28

申请号：US11537062

申请日：2006-09-29

Applicant: BENYAMIN BULLER ,  William Devore ,  Juergen Frosien ,  Richard Lozes ,  Henry Pearce-Percy ,  Dieter Winkler

Inventor： BENYAMIN BULLER ,  William Devore ,  Juergen Frosien ,  Richard Lozes ,  Henry Pearce-Percy ,  Dieter Winkler

IPC: G21K7/00

CPC classification number: H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/244 ,  H01J2237/004 ,  H01J2237/0213 ,  H01J2237/0262 ,  H01J2237/2448 ,  H01J2237/24571

Abstract: Methods and apparatus to facilitate the measurement of the amount of scattered electrons collected by an anti-fogging baffle arrangement are provided. For some embodiments, by affixing a lead to an electrically isolated (floating) portion of the baffle arrangement, the amount of scattered electrons collected thereby may be read out, for example, as a current signal. Thus, for such embodiments, the baffle arrangement may double as a detector, allowing an image of surface (e.g., a mask or substrate surface) to be generated.

Abstract translation: 提供了有助于测量由防雾挡板装置收集的散射电子量的方法和装置。 对于一些实施例，通过将引线附接到挡板装置的电隔离（浮动）部分，由此收集的散射电子的量可以例如被读出为电流信号。 因此，对于这样的实施例，挡板装置可以作为检测器加倍，从而允许产生表面（例如，掩模或衬底表面）的图像。

公开(公告)号：US11961627B2

公开(公告)日：2024-04-16

申请号：US18326935

申请日：2023-05-31

Applicant: ASML Netherlands B.V.

Inventor： Alexander Hendrik Vincent Van Veen ,  Willem Henk Urbanus ,  Marco Jan-Jaco Wieland

IPC: H01J37/30 ,  G21K1/02 ,  G21K5/04 ,  H01J37/12 ,  H01J37/16 ,  H01J37/317

CPC classification number: G21K5/04 ,  G21K1/02 ,  H01J37/12 ,  H01J37/16 ,  H01J37/3007 ,  H01J37/3177 ,  H01J2237/002 ,  H01J2237/0213 ,  H01J2237/0216 ,  H01J2237/024 ,  H01J2237/0262 ,  H01J2237/032 ,  H01J2237/1207 ,  H01J2237/1215 ,  H01J2237/16 ,  H01J2237/1825 ,  H01J2237/30472

Abstract: The invention relates to charged particle beam generator comprising a charged particle source for generating a charged particle beam, a collimator system comprising a collimator structure with a plurality of collimator electrodes for collimating the charged particle beam, a beam source vacuum chamber comprising the charged particle source, and a generator vacuum chamber comprising the collimator structure and the beam source vacuum chamber within a vacuum, wherein the collimator system is positioned outside the beam source vacuum chamber. Each of the beam source vacuum chamber and the generator vacuum chamber may be provided with a vacuum pump.

公开(公告)号：US11804356B2

公开(公告)日：2023-10-31

申请号：US17656731

申请日：2022-03-28

Applicant: ASML Netherlands B.V.

Inventor： Xuerang Hu ,  Weiming Ren ,  Xuedong Liu ,  Zhong-wei Chen

IPC: H01J37/147 ,  H01J37/12 ,  H01J37/26

CPC classification number: H01J37/1477 ,  H01J37/12 ,  H01J37/26 ,  H01J2237/0213 ,  H01J2237/0262 ,  H01J2237/038 ,  H01J2237/0435

Abstract: Disclosed herein is an apparatus comprising: a first electrically conductive layer; a second electrically conductive layer; a plurality of optics element s between the first electrically conductive layer and the second electrically conductive layer, wherein the plurality of optics elements are configured to influence a plurality of beams of charged particles; a third electrically conductive layer between the first electrically conductive layer and the second electrically conductive layer; and an electrically insulating layer physically connected to the optics elements, wherein the electrically insulating layer is configured to electrically insulate the optics elements from the first electrically conductive layer, and the second electrically conductive layer.

公开(公告)号：US20180261422A1

公开(公告)日：2018-09-13

申请号：US15914498

申请日：2018-03-07

Applicant: JEOL Ltd.

Inventor： Tatsuru Kuramoto ,  Yuichiro Ohori ,  Yoshinori Matsuda ,  Makoto Aoshima

IPC: H01J37/09 ,  H01J37/28 ,  H01J37/244 ,  H01J37/14 ,  H01J37/30

CPC classification number: H01J37/09 ,  H01J37/023 ,  H01J37/14 ,  H01J37/244 ,  H01J37/28 ,  H01J37/3005 ,  H01J37/3056 ,  H01J2237/024 ,  H01J2237/0262 ,  H01J2237/14 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/2804 ,  H01J2237/2806

Abstract: A scanning electron microscope having a charged particle device that processes a specimen using a charged particle beam, the scanning electron microscope includes: an electron source; a secondary-electron detector that detects secondary electrons generated from the specimen; a backscattered-electron detector that is disposed closer to the electron source than a detection surface of the secondary-electron detector to detect backscattered electrons generated from the specimen; a shielding plate for shielding a detection surface of the backscattered-electron detector; and a moving mechanism that moves the shielding plate. In a state where the shielding plate is moved by the moving mechanism so as to shield the detection surface of the backscattered-electron detector, the shielding plate is located between the detection surface of the backscattered-electron detector and the detection surface of the secondary-electron detector.

公开(公告)号：US10062546B2

公开(公告)日：2018-08-28

申请号：US14890258

申请日：2013-05-14

Applicant: Hitachi, Ltd.

Inventor： Noriyuki Lee ,  Hiroyuki Yamamoto ,  Akira Sugawara

IPC: H01L37/00 ,  H01J37/305 ,  H01J37/317

CPC classification number: H01J37/3056 ,  H01J37/317 ,  H01J2237/0262 ,  H01J2237/045 ,  H01J2237/12 ,  H01J2237/151 ,  H01J2237/206 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: To realize a focused-ion-beam machining apparatus capable of machining a thin sample with a wide area and a uniform film thickness and a needle-like sample with a sharp tip, in a focused-ion-beam machining apparatus including: an ion source (1); an electronic lens (3) focusing an ion beam extracted from the ion source (1) and irradiating the ion beam to a sample (5); and a sample holder (13) holding the sample (5), the sample holder (13) is provided with a shield electrode (7) arranged in a manner such as to cover the sample (5), and the sample (5) and the shield electrode (7) are insulated from each other in a manner such that voltages can be applied to them separately from each other.