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    Stud tensioning device for flange cover
    21.
    发明授权
    Stud tensioning device for flange cover 有权
    用于法兰盖的螺栓张紧装置

    公开(公告)号：US6085929A

    公开(公告)日：2000-07-11

    申请号：US170191

    申请日：1998-10-13

    Applicant: Allen S. Malsbury ,  Ronald T. Myszka ,  Joseph Kalinosky ,  Richard Klick

    Inventor： Allen S. Malsbury ,  Ronald T. Myszka ,  Joseph Kalinosky ,  Richard Klick

    IPC: B01J3/03 ,  C10B25/10 ,  C10B25/16 ,  F16J13/06 ,  F16J13/12 ,  F17C13/06 ,  B65D45/00

    CPC classification number: C10B25/10 ,  B01J3/03 ,  F16J13/06 ,  F16J13/12

    Abstract: A mechanism for selectively securing a cover to a flange of a pressure vessel. The cover and flange each have openings that are aligned when the cover is in position facing the flange. The mechanism includes an anchor plate having a hole therethrough. A piston is slidable in a direction normal to the cover in alignment with the opening therethrough. A stud extends from to the piston with a stud head remote from the piston. The stud head fits through the opening of the closer of the cover and flange and through a wider portion of the anchor plate hole, and is positioned opposite the flange and cover from the piston when the cover is positioned over the flange. The stud head does not fit through a narrower portion of the anchor plate hole. A resilient member biases the piston away from the cover. A selectively activated actuator overcomes the resilient member and forces the stud head away from the flange and the anchor plate. The anchor plate moves between (i) a locking position, in which the narrower portion of the hole is aligned with the openings so that the resilient member can bias the stud head against the anchor plate, and (ii) an unlocked position, in which the wider portion of the hole is aligned with the openings so that the resilient member can bias the stud head into the enlarged portion of the anchor plate hole.

    Abstract translation: 用于选择性地将盖固定到压力容器的凸缘的机构。 盖和凸缘均具有当盖位于面向凸缘的位置时对准的开口。 该机构包括具有穿过其中的孔的锚板。 活塞可以在垂直于盖的方向上与通过其的开口对准地滑动。 螺柱从活塞远离活塞延伸，螺柱头远离活塞。 螺栓头部穿过盖和凸缘的更靠近的开口并且穿过锚板孔的较宽部分，并且当盖定位在凸缘上方时，其与活塞相对地定位成与活塞相对。 螺栓头不能穿过锚板孔的较窄部分。 弹性构件使活塞偏离盖。 选择性激活的致动器克服弹性构件并迫使螺柱头远离凸缘和锚板。 锚定板在（i）锁定位置之间移动，在该锁定位置，孔的较窄部分与开口对准，使得弹性构件可以将螺柱头部抵靠锚板偏置，以及（ii）解锁位置，其中 孔的较宽部分与开口对准，使得弹性构件可将螺柱头偏压到锚板孔的扩大部分。

    Pressure vessel safety locking mechanism
    23.
    发明授权
    Pressure vessel safety locking mechanism 失效
    压力容器安全锁定机构

    公开(公告)号：US6042793A

    公开(公告)日：2000-03-28

    申请号：US998320

    申请日：1997-12-24

    Applicant: Larry R. Rosio ,  Richard K. Reber ,  Marc Quint

    Inventor： Larry R. Rosio ,  Richard K. Reber ,  Marc Quint

    IPC: B01J3/00 ,  B01J3/03 ,  F16J13/24 ,  B65D45/32

    CPC classification number: B01J3/002 ,  B01J3/03 ,  F16J13/24

    Abstract: The invention discloses a plurality of cylindrical slugs linked together by a cable. The slugs are separated by spacers and the cable is crimped at each end thereof to keep the slugs and spacers from coming off the cable. The cable-slugs-spacers assembly is inserted through a guide tube and into an annulus locking the cover of the pressure vessel to the housing of the vessel. A relief mechanism is provided in the cover to ensure that the cable-slugs-spacers assembly is fully inserted in the annulus thus preventing accidental extrication of the cover when the vessel is pressurized. A proximity sensor is positioned in the housing of the vessel and senses the pressure of the first slug inserted into the annulus thus insuring that the cable-slugs-spacers assembly has been fully inserted in the annulus. A coupling is provided on one end of the cable-slugs-spacers assembly to positively lock the assembly in place ensuring that the cover will not be extricated from the pressure vessel under pressure.

    Abstract translation: 本发明公开了一种通过电缆连接在一起的多个圆柱形块塞。 通过间隔物分离出塞子，并且电缆在其每一端被压接，以防止塞子和垫片从电缆脱落。 电缆段 - 间隔件组件通过引导管插入到将压力容器的盖锁定到容器壳体的环形空间中。 在盖中设置有一个释放机构，以确保电缆段 - 间隔件组件完全插入环形空间中，从而防止当容器被加压时罩的意外抽出。 接近传感器定位在容器的壳体中并且感测插入到环形空间中的第一块的压力，从而确保电缆段 - 间隔件组件已经完全插入环空中。 在电缆段 - 间隔件组件的一端上设置有联接件，以将组件积极地锁定在位，确保在压力下盖不会从压力容器中排出。

    Method and apparatus for measuring pressure in microwave heated vessels
    24.
    发明授权
    Method and apparatus for measuring pressure in microwave heated vessels 失效
    用于测量微波加热容器压力的方法和装置

    公开(公告)号：US5981924A

    公开(公告)日：1999-11-09

    申请号：US932301

    申请日：1997-09-17

    Applicant: Werner Lautenschlager

    Inventor： Werner Lautenschlager

    IPC: B01J3/00 ,  B01J3/03 ,  B01J3/04 ,  B01J19/12 ,  G01N1/44 ,  H05B6/64

    CPC classification number: G01N1/44 ,  B01J19/126 ,  B01J3/002 ,  B01J3/03 ,  B01J3/04 ,  B01J2219/00162 ,  B01J2219/002 ,  B01J2219/00218 ,  B01J2219/0024 ,  B01J2219/1209 ,  B01J2219/1218

    Abstract: A pressure monitoring system in which pressure in a container causes a slide which extends out from the container, to be moved against a group of springs in cascade formation and which are screened from microwave radiation. The extent of such movement, which corresponds to changes in container pressure, is measured by means of a light transmitter and a receiver which cause light to be reflected off a reflective surface of the slide and then analyzed. Also disclosed is a process in which the heating of a container is controlled as a function of the differential quotient of pressure over time.

    Abstract translation: 一种压力监测系统，其中容器中的压力引起从容器延伸出的滑动件，以抵抗一系列级联形成的弹簧移动并从微波辐射中筛选。 借助于光发射器和接收器来测量与容器压力变化相对应的这种运动的程度，该光发射器和接收器使光从载玻片的反射表面反射然后被分析。 还公开了一种方法，其中容器的加热作为随着时间的压力差值的函数被控制。

    Heating pressure processing apparatus
    25.
    发明授权
    Heating pressure processing apparatus 失效
    加热压力处理装置

    公开(公告)号：US5979306A

    公开(公告)日：1999-11-09

    申请号：US47402

    申请日：1998-03-25

    Applicant: Takao Fujikawa ,  Yutaka Narukawa ,  Itaru Masuoka ,  Takahiro Yuki ,  Yoshihiko Sakashita

    Inventor： Takao Fujikawa ,  Yutaka Narukawa ,  Itaru Masuoka ,  Takahiro Yuki ,  Yoshihiko Sakashita

    IPC: B01J3/00 ,  B01J3/03 ,  B01J3/04 ,  H01L21/314 ,  H01L21/324 ,  H01L21/768 ,  B30B15/34

    CPC classification number: B01J3/008 ,  B01J3/03 ,  B01J3/04 ,  H01L21/314

    Abstract: A heating pressure processing apparatus in which gas sealing property and safety can be ensured, and economic property can be improved in heating pressure processing of workpieces such as Si wafers sheet by sheet. A processing vessel 1 formed of vessel components 2, 3 is divided into at least two parts or more in the axial direction thereof and has a seal ring 9 provided in the divided parts of the vessel components 2, parts 3 in such a manner as to be replaceable. The vessel components 2, 3 have shaped parts forming a processing space 5 for a workpiece 4 when the divided parts are sealed through the seal ring 9, the vessel components 2, 3 also having cooling means 10 for the seal ring 9. A ram is provided 18 for pressing the vessel components 2, 3 in the axial direction of the vessel in order to ensure the sealing in the divided parts; and a gas introducing device 20 is provided for introducing a pressurized gas to the processing space 5 in order to process the workpiece.

    Abstract translation: 能够确保气体密封性和安全性的加热压力处理装置，并且可以逐张地提高诸如Si晶片的工件的加热压力加工的经济性。 由容器部件2,3形成的处理容器1在其轴向上被分成至少两部分以上，并且具有设置在容器部件2，部件3的分割部分中的密封环9， 可更换 容器部件2,3具有成形部件，当分隔部件通过密封环9密封时，形成工件4的处理空间5，容器部件2,3也具有用于密封环9的冷却装置10。 设置用于在容器的轴向方向上按压容器部件2,3，以确保分割部分的密封; 并且设置有用于将加压气体引入处理空间5以便处理工件的气体引入装置20。

    Sealing device for high pressure vessel
    26.
    发明授权
    Sealing device for high pressure vessel 失效
    高压容器密封装置

    公开(公告)号：US5798126A

    公开(公告)日：1998-08-25

    申请号：US861392

    申请日：1997-05-21

    Applicant: Takao Fujikawa ,  Noriaki Nakai

    Inventor： Takao Fujikawa ,  Noriaki Nakai

    IPC: F16J13/02 ,  B01J3/03 ,  B30B5/02 ,  B30B11/00 ,  B29C43/10

    CPC classification number: B30B11/002 ,  B01J3/03 ,  Y10S425/026 ,  Y10S425/047

    Abstract: A sealing device for preventing leakage of pressure in pressure-processing a workpiece to be processed under isostatic pressure in a high pressure vessel, includes a ring member fitted to the opening/closing end of the vessel. When a cover is closed, an axial seal ring and a plane seal ring are mounted, with the plane seal ring adhered to the cover.

    Abstract translation: 一种密封装置，用于防止在高压容器中以等压压力加工待处理的工件的压力泄漏，包括安装在容器的开/关端的环件。 当盖子关闭时，安装轴向密封环和平面密封环，平面密封环粘附到盖子上。

    Decompression container
    28.
    发明授权
    Decompression container 失效
    减压容器

    公开(公告)号：US5520142A

    公开(公告)日：1996-05-28

    申请号：US409427

    申请日：1995-03-24

    Applicant: Towl Ikeda ,  Katsumi Ishii ,  Yoji Iizuka

    Inventor： Towl Ikeda ,  Katsumi Ishii ,  Yoji Iizuka

    IPC: B01J3/03 ,  C23C14/00 ,  C23C14/56 ,  C23C16/44 ,  H01L21/00 ,  H01L21/205 ,  H01L21/302 ,  H01L21/3065 ,  C23C16/00

    CPC classification number: H01L21/67017 ,  B01J3/03 ,  C23C14/564 ,  C23C16/4401

    Abstract: A gap is defined between an inner region of an end face of a first container member of a container and an inner region of an abutting portion of a second container member, the inner regions being situated inside a seal member. The respective inner regions of the end face of the first container member and the abutting portion of the second container member, which are situated inside the seal member, are prevented from coming into contact with each other when the interior of the container is decompressed. Even though the second container member is bent inward by atmospheric pressure when the container is decompressed to a predetermined degree of vacuum, therefore, the abutting portion thereof cannot come into contact with the inner edge of the end face of the first container member. Thus, if decompression and exposure to atmospheric pressure are repeated to bend the container member repeatedly, there is no possibility of the inner edge portion of the end face of the first container member being separated or rubbed off to produce dust.

    Abstract translation: 在容器的第一容器构件的端面的内部区域和第二容器构件的抵接部的内部区域之间限定有间隙，内部区域位于密封构件的内部。 当容器内部减压时，防止位于密封构件内部的第一容器构件的端面的各个内部区域和第二容器构件的抵接部分彼此接触。 因此，即使当容器减压至预定的真空度时第二容器构件向内弯曲，因此其抵接部分不能与第一容器构件的端面的内边缘接触。 因此，如果重复减压和暴露于大气压力以反复地使容器构件弯曲，则不会使第一容器构件的端面的内边缘部分分离或摩擦而产生灰尘。

    Vacuum gate valve
    29.
    发明授权
    Vacuum gate valve 失效
    真空闸阀

    公开(公告)号：US5271602A

    公开(公告)日：1993-12-21

    申请号：US841817

    申请日：1992-02-26

    Applicant: Kazutoshi Funaba

    Inventor： Kazutoshi Funaba

    IPC: B01J3/03 ,  C23C14/56 ,  F16K3/12 ,  F16K41/10 ,  F16K51/02 ,  F16K3/18

    CPC classification number: B01J3/03 ,  C23C14/568 ,  F16K3/12 ,  F16K41/10 ,  F16K51/02

    Abstract: A vacuum gate valve device having a vacuum path includes: a valve casing; a valve body provided in the valve casing, the valve body being allowed to reciprocate between two positions to close and open the vacuum path; a bonnet flange for closing the casing; driving member provided on the bonnet flange for reciprocably driving the valve body, the driving member having a stem shaft which is loosely inserted into a through hole of the bonnet flange and is coupled with the valve body; and a member for isolating a sliding portion of the stem shaft from the vacuum path.

    Abstract translation: 具有真空路径的真空闸阀装置包括：阀壳; 阀体，其设置在所述阀壳体中，所述阀体允许在两个位置之间往复运动，以闭合和打开所述真空通路; 用于封闭外壳的发动机罩法兰; 所述驱动构件设置在所述发动机罩法兰上用于往复驱动所述阀体，所述驱动构件具有松动地插入所述发动机罩法兰的通孔中并与所述阀体联接的杆轴; 以及用于将所述杆轴的滑动部分与所述真空路径隔离的构件。

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