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公开(公告)号:US08686428B1
公开(公告)日:2014-04-01
申请号:US13678588
申请日:2012-11-16
Applicant: Monolithic 3D Inc.
Inventor: Deepak Sekar , Zvi Or-Bach , Brian Cronquist
IPC: H01L21/70 , H01L21/822
CPC classification number: H01L21/84 , H01L21/743 , H01L21/76898 , H01L21/8221 , H01L21/845 , H01L27/0688 , H01L27/1203 , H01L27/1211
Abstract: A device with an external surface, the device including: a substrate including first mono-crystal transistors; a second layer including second mono-crystal transistors, the second mono-crystal transistors overlaying the first mono-crystal transistors; and a plurality of thermal conduction paths from a plurality of the second layer locations to the external surface, wherein at least one of the thermal conduction paths includes an electrically nonconductive contact.
Abstract translation: 一种具有外表面的器件,该器件包括:包括第一单晶晶体管的衬底; 包括第二单晶晶体管的第二层,覆盖第一单晶晶体管的第二单晶晶体管; 以及从多个第二层位置到外表面的多个热传导路径,其中至少一个导热路径包括非导电接触。
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公开(公告)号:US08674470B1
公开(公告)日:2014-03-18
申请号:US13726091
申请日:2012-12-22
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Brian Cronquist
IPC: H01L21/00
CPC classification number: H01L25/0657 , H01L21/743 , H01L21/76898 , H01L23/481 , H01L23/485 , H01L23/522 , H01L24/25 , H01L25/50 , H01L27/0688 , H01L27/088 , H01L27/092 , H01L29/4236 , H01L29/66621 , H01L29/78 , H01L2224/24146 , H01L2225/06544 , H01L2225/06589 , H01L2924/0002 , H01L2924/01104 , H01L2924/12032 , H01L2924/12042 , H01L2924/13091 , H01L2924/2064 , H01L2924/351 , H01L2924/00
Abstract: An Integrated Circuit device, including: a base wafer including single crystal, the base wafer including a plurality of first transistors; at least one metal layer providing interconnection between the plurality of first transistors; a second layer of less than 2 micron thickness, the second layer including a plurality of second single crystal transistors, the second layer overlying the at least one metal layer; and at least one conductive layer underneath the second layer, the at least one conductive layer is constructed to provide a back-bias to a portion of the plurality of second single crystal transistors.
Abstract translation: 一种集成电路器件,包括:包括单晶的基底晶片,所述基底晶片包括多个第一晶体管; 提供所述多个第一晶体管之间的互连的至少一个金属层; 第二层小于2微米厚,第二层包括多个第二单晶晶体管,第二层覆盖至少一个金属层; 以及在所述第二层下面的至少一个导电层,所述至少一个导电层被构造成向所述多个第二单晶晶体管的一部分提供反偏压。
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公开(公告)号:US12243765B2
公开(公告)日:2025-03-04
申请号:US18829079
申请日:2024-09-09
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Brian Cronquist , Deepak C. Sekar
IPC: H01L21/683 , G11C8/16 , H01L21/74 , H01L21/762 , H01L21/768 , H01L23/48 , H01L23/525 , H10B10/00 , H10B12/00 , H10B20/00 , H10B20/25 , H10B41/20 , H10B41/40 , H10B41/41 , H10B43/20 , H10B43/40 , H10D10/01 , H10D30/01 , H10D30/60 , H10D30/68 , H10D30/69 , H10D64/01 , H10D64/27 , H10D84/01 , H10D84/03 , H10D84/85 , H10D84/90 , H10D86/00 , H10D86/01 , H10D88/00 , H10D89/10 , H01L23/00 , H01L23/367 , H01L25/00 , H01L25/065 , H10D86/40 , H10D86/60
Abstract: A 3D semiconductor device, the device including: a first level including a first single crystal layer and including first transistors which each includes a single crystal channel; a first metal layer; a second metal layer overlaying the first metal layer; a second level including second transistors, first memory cells including at least one second transistor, and overlaying the second metal layer; a third level including third transistors and overlaying the second level; a fourth level including fourth transistors, second memory cells including at least one fourth transistor, and overlaying the third level, where at least one of the second transistors includes a metal gate, where the first level includes memory control circuits which control writing to the second memory cells, and at least one Phase-Lock-Loop (“PLL”) circuit or at least one Digital-Lock-Loop (“DLL”) circuit.
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公开(公告)号:US20250070091A1
公开(公告)日:2025-02-27
申请号:US18942886
申请日:2024-11-11
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Brian Cronquist
IPC: H01L25/065 , H01L21/74 , H01L21/768 , H01L23/00 , H01L23/48 , H01L23/485 , H01L23/522 , H01L25/00 , H01L27/06 , H01L27/088 , H01L27/092 , H01L29/423 , H01L29/66 , H01L29/78
Abstract: A 3D semiconductor device including: a first level with first-transistors, a single crystal layer overlaid by at least one first metal-layer which includes interconnects between the first-transistors forming first control circuits with a sense amplifiers; the first metal-layer(s) overlaid by a second metal-layer which is overlaid by a second level which includes first memory cells which include second-transistors with a metal gate, overlaid by a third level which includes second memory cells which include third-transistors and are partially disposed atop the control circuits, which control the data written to second memory cells; a fourth metal-layer overlaying a third metal-layer which overlays the third level; where third-transistor gate locations are aligned to second-transistor gate locations within greater than 0.2 nm error, the average thickness of second metal-layer is at least twice the average thickness of the third metal-layer; the second metal-layer includes a global power distribution grid.
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公开(公告)号:US12225704B2
公开(公告)日:2025-02-11
申请号:US18731340
申请日:2024-06-02
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Jin-Woo Han , Brian Cronquist
IPC: H10B10/00 , G11C16/04 , H10B12/00 , H10B41/10 , H10B41/35 , H10B41/41 , H10B43/10 , H10B43/35 , H10B43/40
Abstract: A semiconductor device including: a first level including at least four independently controlled first memory arrays, where the first level includes first transistors; a second level disposed on top of the first level, where the second level includes second memory arrays; and a third level disposed on top of the second level, where the third level includes third transistors and a plurality of third metal layers, where the third level is bonded to the second level, where the bonded includes oxide to oxide bonding regions and a plurality of metal to metal bonding regions, where the first level includes first filled holes, where the second level includes second filled holes, where the second filled holes are aligned to the first filled holes with a more than 1 nm but less than 40 nm alignment error, and where the third level includes at least one SRAM memory array.
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公开(公告)号:US12154817B1
公开(公告)日:2024-11-26
申请号:US17942109
申请日:2022-09-09
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Brian Cronquist , Deepak C. Sekar
IPC: H01L21/683 , G11C8/16 , H01L21/74 , H01L21/762 , H01L21/768 , H01L21/822 , H01L21/8238 , H01L21/84 , H01L23/48 , H01L23/525 , H01L27/02 , H01L27/06 , H01L27/092 , H01L27/10 , H01L27/105 , H01L27/118 , H01L27/12 , H01L29/423 , H01L29/66 , H01L29/78 , H01L29/788 , H01L29/792 , H10B10/00 , H10B12/00 , H10B20/00 , H10B41/20 , H10B41/40 , H10B41/41 , H10B43/20 , H10B43/40 , H01L23/00 , H01L23/367 , H01L25/00 , H01L25/065 , H10B20/20
Abstract: A method for producing a 3D memory device including: providing a first level including a first single-crystal layer and control circuits, where the first level includes at least two interconnecting metal layers; forming at least one second level disposed above the first level; performing a first etch step including etching holes within the second level; forming at least one third level above the second level; performing a second etch step including etching holes within the third level; and performing additional processing steps to form a plurality of first memory cells within the second level and a plurality of second memory cells within the third level; each of first memory cells include one first transistor and each of second memory cells include one second transistor, where first memory cells and second memory cells are a NAND nonvolatile type memory, and at least one of the second transistors include a metal gate.
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公开(公告)号:US20240379553A1
公开(公告)日:2024-11-14
申请号:US18783965
申请日:2024-07-25
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Brian Cronquist
IPC: H01L23/528 , H01L21/66 , H01L23/522 , H10B80/00
Abstract: A semiconductor device including: a first level including: a first silicon layer including a first single crystal silicon layer; first transistors each including a single-crystal channel; a first metal layer connected to the first transistors and the second metal layer; a third metal layer connected to the second metal layer; a second level including second transistors; a third level including third transistors, the third level is disposed over the second level which is disposed over the first level; a fifth metal layer disposed over a fourth metal layer disposed over the third level; and a via disposed through the second level, where at least one of the second transistors includes a metal gate, where the device includes at least one temperature sensor, and where at least one element within at least one of the second transistors has been processed independently of the third transistors.
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公开(公告)号:US20240363385A1
公开(公告)日:2024-10-31
申请号:US18736423
申请日:2024-06-06
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Brian Cronquist , Deepak C. Sekar
IPC: H01L21/683 , G11C8/16 , H01L21/74 , H01L21/762 , H01L21/768 , H01L21/822 , H01L21/8238 , H01L21/84 , H01L23/00 , H01L23/367 , H01L23/48 , H01L23/525 , H01L25/00 , H01L25/065 , H01L27/02 , H01L27/06 , H01L27/092 , H01L27/10 , H01L27/105 , H01L27/118 , H01L27/12 , H01L29/423 , H01L29/66 , H01L29/78 , H01L29/788 , H01L29/792 , H10B10/00 , H10B12/00 , H10B20/00 , H10B20/20 , H10B41/20 , H10B41/40 , H10B41/41 , H10B43/20 , H10B43/40
CPC classification number: H01L21/6835 , G11C8/16 , H01L21/743 , H01L21/76254 , H01L21/76898 , H01L21/8221 , H01L21/823828 , H01L21/84 , H01L23/481 , H01L23/5252 , H01L27/0207 , H01L27/0688 , H01L27/092 , H01L27/10 , H01L27/105 , H01L27/11807 , H01L27/11898 , H01L27/1203 , H01L29/4236 , H01L29/66272 , H01L29/66621 , H01L29/66825 , H01L29/66833 , H01L29/66901 , H01L29/78 , H01L29/7841 , H01L29/7843 , H01L29/7881 , H01L29/792 , H10B10/00 , H10B10/125 , H10B12/053 , H10B12/09 , H10B12/20 , H10B12/50 , H10B20/00 , H10B41/20 , H10B41/40 , H10B41/41 , H10B43/20 , H10B43/40 , H01L23/3677 , H01L24/13 , H01L24/16 , H01L24/45 , H01L24/48 , H01L25/0655 , H01L25/0657 , H01L25/50 , H01L27/1214 , H01L27/1266 , H01L2221/68368 , H01L2223/5442 , H01L2223/54426 , H01L2224/131 , H01L2224/16145 , H01L2224/16146 , H01L2224/16227 , H01L2224/16235 , H01L2224/32145 , H01L2224/32225 , H01L2224/45124 , H01L2224/45147 , H01L2224/48091 , H01L2224/48227 , H01L2224/73204 , H01L2224/73253 , H01L2224/73265 , H01L2224/81005 , H01L2224/83894 , H01L2225/06513 , H01L2225/06541 , H01L2924/00011 , H01L2924/01002 , H01L2924/01004 , H01L2924/01013 , H01L2924/01018 , H01L2924/01019 , H01L2924/01029 , H01L2924/01046 , H01L2924/01066 , H01L2924/01068 , H01L2924/01077 , H01L2924/01078 , H01L2924/01322 , H01L2924/10253 , H01L2924/10329 , H01L2924/12032 , H01L2924/12033 , H01L2924/12036 , H01L2924/12042 , H01L2924/1301 , H01L2924/1305 , H01L2924/13062 , H01L2924/13091 , H01L2924/14 , H01L2924/1461 , H01L2924/15311 , H01L2924/1579 , H01L2924/16152 , H01L2924/181 , H01L2924/19041 , H01L2924/30105 , H01L2924/3011 , H01L2924/3025 , H10B12/05 , H10B20/20
Abstract: A 3D semiconductor device, the device including: a first level including a first single crystal layer, the first level including first transistors, where each of the first transistors includes a single crystal channel; a first metal layer; a second metal layer overlaying the first metal layer; a second level including second transistors, first memory cells including at least one second transistor, and overlaying the second metal layer, a third level including third transistors and overlaying the second level, a fourth level including fourth transistors, second memory cells including at least one fourth transistor, and overlaying the third level, where the first level includes memory control circuits which control writing to the second memory cells, and at least one Phase-Lock-Loop (“PLL”) circuit or at least one Digital-Lock-Loop (“DLL”) circuit.
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公开(公告)号:US12027518B1
公开(公告)日:2024-07-02
申请号:US18603526
申请日:2024-03-13
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Brian Cronquist
IPC: H01L27/06 , G03F9/00 , H01L21/762 , H01L21/768 , H01L21/822 , H01L21/8238 , H01L21/84 , H01L23/367 , H01L23/48 , H01L23/522 , H01L23/528 , H01L23/532 , H01L23/544 , H01L27/02 , H01L27/092 , H01L27/105 , H01L27/118 , H01L27/12 , H01L29/423 , H01L29/45 , H01L29/66 , H01L29/732 , H01L29/786 , H01L29/808 , H01L29/812 , H10B10/00 , H10B12/00 , H10B20/00 , H10B41/20 , H10B43/20 , H01L21/268 , H01L23/00 , H01L27/088
CPC classification number: H01L27/0688 , G03F9/7076 , G03F9/7084 , H01L21/76254 , H01L21/76898 , H01L21/8221 , H01L21/823871 , H01L21/84 , H01L23/367 , H01L23/481 , H01L23/5226 , H01L23/528 , H01L23/53214 , H01L23/53228 , H01L23/544 , H01L27/0207 , H01L27/092 , H01L27/105 , H01L27/11807 , H01L27/11898 , H01L27/1203 , H01L29/42392 , H01L29/458 , H01L29/66272 , H01L29/66621 , H01L29/66848 , H01L29/66901 , H01L29/732 , H01L29/78639 , H01L29/78642 , H01L29/78645 , H01L29/808 , H01L29/812 , H10B10/00 , H10B10/125 , H10B12/053 , H10B12/09 , H10B12/50 , H10B20/00 , H10B41/20 , H10B43/20 , H01L21/268 , H01L24/73 , H01L27/088 , H01L29/66545 , H01L2223/5442 , H01L2223/54426 , H01L2223/54453 , H01L2224/16145 , H01L2224/16225 , H01L2224/32145 , H01L2224/32225 , H01L2224/45124 , H01L2224/45147 , H01L2224/48091 , H01L2224/48227 , H01L2224/73204 , H01L2224/73253 , H01L2224/73265 , H01L2924/00011 , H01L2924/10253 , H01L2924/12032 , H01L2924/1301 , H01L2924/1305 , H01L2924/13062 , H01L2924/13091 , H01L2924/14 , H01L2924/15311 , H01L2924/181 , H01L2924/3011 , H01L2924/3025
Abstract: A semiconductor device including: a first silicon level including a first single crystal silicon layer and first transistors; a first metal layer disposed over it; a second metal layer disposed over the first metal layer; a third metal layer disposed over the second metal layer; a second level including second transistors, disposed over the third metal layer; a fourth metal layer disposed over the second level; a fifth metal layer disposed over the fourth metal layer, where the fourth metal layer is aligned to the first metal layer with a less than 240 nm alignment error; where the fifth metal layer includes global power delivery; each of the third transistors comprises a metal gate; a via disposed through the second level and the third level, where a typical thickness of the second metal layer is greater than a typical thickness of the third metal layer by at least 50%.
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公开(公告)号:US20240213073A1
公开(公告)日:2024-06-27
申请号:US18424790
申请日:2024-01-27
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Brian Cronquist , Deepak C. Sekar
IPC: H01L21/683 , G11C8/16 , H01L21/74 , H01L21/762 , H01L21/768 , H01L21/822 , H01L21/8238 , H01L21/84 , H01L23/00 , H01L23/367 , H01L23/48 , H01L23/525 , H01L25/00 , H01L25/065 , H01L27/02 , H01L27/06 , H01L27/092 , H01L27/10 , H01L27/105 , H01L27/118 , H01L27/12 , H01L29/423 , H01L29/66 , H01L29/78 , H01L29/788 , H01L29/792 , H10B10/00 , H10B12/00 , H10B20/00 , H10B20/20 , H10B41/20 , H10B41/40 , H10B41/41 , H10B43/20 , H10B43/40
CPC classification number: H01L21/6835 , G11C8/16 , H01L21/743 , H01L21/76254 , H01L21/76898 , H01L21/8221 , H01L21/823828 , H01L21/84 , H01L23/481 , H01L23/5252 , H01L27/0207 , H01L27/0688 , H01L27/092 , H01L27/10 , H01L27/105 , H01L27/11807 , H01L27/11898 , H01L27/1203 , H01L29/4236 , H01L29/66272 , H01L29/66621 , H01L29/66825 , H01L29/66833 , H01L29/66901 , H01L29/78 , H01L29/7841 , H01L29/7843 , H01L29/7881 , H01L29/792 , H10B10/00 , H10B10/125 , H10B12/053 , H10B12/09 , H10B12/20 , H10B12/50 , H10B20/00 , H10B41/20 , H10B41/40 , H10B41/41 , H10B43/20 , H10B43/40 , H01L23/3677 , H01L24/13 , H01L24/16 , H01L24/45 , H01L24/48 , H01L25/0655 , H01L25/0657 , H01L25/50 , H01L27/1214 , H01L27/1266 , H01L2221/68368 , H01L2223/5442 , H01L2223/54426 , H01L2224/131 , H01L2224/16145 , H01L2224/16146 , H01L2224/16227 , H01L2224/16235 , H01L2224/32145 , H01L2224/32225 , H01L2224/45124 , H01L2224/45147 , H01L2224/48091 , H01L2224/48227 , H01L2224/73204 , H01L2224/73253 , H01L2224/73265 , H01L2224/81005 , H01L2224/83894 , H01L2225/06513 , H01L2225/06541 , H01L2924/00011 , H01L2924/01002 , H01L2924/01004 , H01L2924/01013 , H01L2924/01018 , H01L2924/01019 , H01L2924/01029 , H01L2924/01046 , H01L2924/01066 , H01L2924/01068 , H01L2924/01077 , H01L2924/01078 , H01L2924/01322 , H01L2924/10253 , H01L2924/10329 , H01L2924/12032 , H01L2924/12033 , H01L2924/12036 , H01L2924/12042 , H01L2924/1301 , H01L2924/1305 , H01L2924/13062 , H01L2924/13091 , H01L2924/14 , H01L2924/1461 , H01L2924/15311 , H01L2924/1579 , H01L2924/16152 , H01L2924/181 , H01L2924/19041 , H01L2924/30105 , H01L2924/3011 , H01L2924/3025 , H10B12/05 , H10B20/20
Abstract: A 3D semiconductor device, the device including: a first level including a first single crystal layer, the first level including first transistors, where each of the first transistors includes a single crystal channel; first metal layer; a second metal layer overlaying the first metal layer; and a second level including a second single crystal layer, the second level including second transistors and at least one third metal layer, where the second level overlays the first level, where at least one of the second transistors includes a transistor channel, where the second level includes a plurality of DRAM memory cells, where each of the plurality of DRAM memory cells includes at least one of the second transistors and one capacitor, where the second level is directly bonded to the first level, and where the bonded includes metal to metal bonds.
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