公开(公告)号：US07067864B2

公开(公告)日：2006-06-27

申请号：US10363055

申请日：2001-12-26

申请人： Akio Nishida ,  Yasuko Yoshida ,  Shuji Ikeda

发明人： Akio Nishida ,  Yasuko Yoshida ,  Shuji Ikeda

IPC分类号： H01L27/108

CPC分类号： H01L27/11 ,  H01L27/1104

摘要： In order to provide a semiconductor integrated circuit device such as a high-performance semiconductor integrated circuit device capable of reducing a soft error developed in each memory cell of a SRAM, the surface of a wiring of a cross-connecting portion, of a SRAM memory cell having a pair of n-channel type MISFETs whose gate electrodes and drains are respectively cross-connected, is formed in a shape that protrudes from the surface of a silicon oxide film. A silicon nitride film used as a capacitive insulating film, and an upper electrode are formed on the wiring. A capacitance can be formed of the wiring, the silicon nitride film and the upper electrode.

摘要翻译： 为了提供一种半导体集成电路器件，例如能够减少在SRAM的每个存储单元中产生的软错误的高性能半导体集成电路器件，SRAM存储器的交叉连接部分的布线表面 其栅电极和漏极分别交叉连接的一对n沟道型MISFET形成为从氧化硅膜的表面突出的形状。 在布线上形成用作电容绝缘膜的氮化硅膜和上电极。 电容可以由布线，氮化硅膜和上电极形成。

公开(公告)号：US06677194B2

公开(公告)日：2004-01-13

申请号：US10162573

申请日：2002-06-06

申请人： Toshiaki Yamanaka ,  Akio Nishida ,  Yasuko Yoshida ,  Shuji Ikeda ,  Kenichi Kuroda ,  Shiro Kamohara ,  Shinichiro Kimura ,  Eiichi Murakami ,  Hideyuki Matsuoka ,  Masataka Minami

发明人： Toshiaki Yamanaka ,  Akio Nishida ,  Yasuko Yoshida ,  Shuji Ikeda ,  Kenichi Kuroda ,  Shiro Kamohara ,  Shinichiro Kimura ,  Eiichi Murakami ,  Hideyuki Matsuoka ,  Masataka Minami

IPC分类号： H01L218238

CPC分类号： H01L21/823807 ,  H01L21/2652 ,  H01L21/823842 ,  H01L21/823892

摘要： A low threshold voltage NMIS area and a high threshold voltage PMIS area are set by a photoresist mask also used for well formation. Using a photoresist mask with openings for the NMIS and PMIS, the NMIS and PMIS areas are set by one ion implantation step. After gate oxidation, ion implantation is conducted through an amorphous silicon film onto wells, channels, and gate electrodes. A plurality of CMIS threshold voltages can be set and the gate electrodes of both polarities can be formed in a reduced number of steps using photoresist. This solves the problem in which photomasks are required as many as there are ion implantation types for wells, channel stoppers, gate electrodes, and threshold voltage control and hence the number of manufacturing steps and the production cost are increased.

摘要翻译： 低阈值电压NMIS区域和高阈值电压PMIS区域由也用于阱形成的光致抗蚀剂掩模设置。 使用具有用于NMIS和PMIS的开口的光致抗蚀剂掩模，通过一个离子注入步骤设置NMIS和PMIS区域。 栅极氧化后，离子注入通过非晶硅膜导入孔，通道和栅电极。 可以设置多个CMIS阈值电压，并且可以以减少数量的步骤使用光致抗蚀剂形成两个极性的栅电极。 这解决了需要光掩模的问题，因为存在孔，通道阻挡件，栅电极和阈值电压控制的离子注入类型，因此制造步骤的数量和生产成本增加。

公开(公告)号：US20090218608A1

公开(公告)日：2009-09-03

申请号：US12362995

申请日：2009-01-30

申请人： Akio NISHIDA ,  Yasuko Yoshida ,  Shuji Ikeda

发明人： Akio NISHIDA ,  Yasuko Yoshida ,  Shuji Ikeda

IPC分类号： H01L27/11

CPC分类号： H01L27/11 ,  H01L27/1104

摘要： In order to provide a semiconductor integrated circuit device such as a high-performance semiconductor integrated circuit device capable of reducing a soft error developed in each memory cell of a SRAM, the surface of a wiring of a cross-connecting portion, of a SRAM memory cell having a pair of n-channel type MISFETs whose gate electrodes and drains are respectively cross-connected, is formed in a shape that protrudes from the surface of a silicon oxide film. A silicon nitride film used as a capacitive insulating film, and an upper electrode are formed on the wiring. A capacitance can be formed of the wiring, the silicon nitride film and the upper electrode.

摘要翻译： 为了提供一种半导体集成电路器件，例如能够减少在SRAM的每个存储单元中产生的软错误的高性能半导体集成电路器件，SRAM存储器的交叉连接部分的布线表面 其栅电极和漏极分别交叉连接的一对n沟道型MISFET形成为从氧化硅膜的表面突出的形状。 在布线上形成用作电容绝缘膜的氮化硅膜和上电极。 电容可以由布线，氮化硅膜和上电极形成。

公开(公告)号：US06753231B2

公开(公告)日：2004-06-22

申请号：US10379543

申请日：2003-03-06

申请人： Shuji Ikeda ,  Yasuko Yoshida ,  Masayuki Kojima ,  Kenji Shiozawa ,  Mitsuyuki Kimura ,  Norio Nakagawa ,  Koichiro Ishibashi ,  Yasuhisa Shimazaki ,  Kenichi Osada ,  Kunio Uchiyama

发明人： Shuji Ikeda ,  Yasuko Yoshida ,  Masayuki Kojima ,  Kenji Shiozawa ,  Mitsuyuki Kimura ,  Norio Nakagawa ,  Koichiro Ishibashi ,  Yasuhisa Shimazaki ,  Kenichi Osada ,  Kunio Uchiyama

IPC分类号： H01L21336

CPC分类号： H01L27/105 ,  H01L27/1052

摘要： An operational margin of a memory of a semiconductor integrated circuit device including an SRAM is improved. In order to set the Vth of driving MISFETs Qd, transfer MISFETs Qt and MISFETs for load resistance QL forming memory cells of an SRAM, relatively and intentionally higher than the Vth of predetermined MISFETs of SRAM peripheral circuits and logic circuits such as microprocessor, an impurity introduction step is introduced to set the Vth of the driving MISFETs Qd, transfer MISFETs Qt and MISFETs for load resistance, separately from an impurity introduction step for setting the Vth of the predetermined MISFETs.

摘要翻译： 提高了包括SRAM的半导体集成电路器件的存储器的操作裕度。 为了设置驱动MISFET Qd的Vth，传输用于形成SRAM的存储单元的负载电阻QL的MISFET Qt和MISFET相对有意地高于SRAM外围电路和诸如微处理器的逻辑电路的预定MISFET的Vth，杂质 介绍引入步骤，用于设置驱动MISFET Qd的Vth，用于负载电阻的传输MISFET Qt和MISFET，与用于设置预定MISFET的Vth的杂质引入步骤分开。

公开(公告)号：US5780328A

公开(公告)日：1998-07-14

申请号：US835197

申请日：1997-04-07

申请人： Kazushi Fukuda ,  Yasuko Yoshida ,  Yutaka Hoshino ,  Naotaka Hashimoto ,  Kyoichiro Asayama ,  Yuuki Koide ,  Keiichi Yoshizumi ,  Eri Okamoto ,  Satoru Haga ,  Shuji Ikeda

发明人： Kazushi Fukuda ,  Yasuko Yoshida ,  Yutaka Hoshino ,  Naotaka Hashimoto ,  Kyoichiro Asayama ,  Yuuki Koide ,  Keiichi Yoshizumi ,  Eri Okamoto ,  Satoru Haga ,  Shuji Ikeda

IPC分类号： H01L27/088 ,  H01L21/8234 ,  H01L21/8238 ,  H01L21/8239 ,  H01L21/8244 ,  H01L27/11 ,  H01L21/336

CPC分类号： H01L21/823814 ,  H01L21/823871 ,  H01L27/1052 ,  H01L27/11 ,  H01L27/1104

摘要： When the source and drain regions (an n.sup.- type semiconductor region and an n.sup.+ type semiconductor region) of a complementary MISFET and a p-type semiconductor region for use as a punch-through stopper are formed in a p-type well in a substrate having a p- and an n-type well, p-type impurities for the punch-through stopper are suppressed from being supplied to the feeding portion (an n.sup.+ type semiconductor region) of the n-type well.

摘要翻译： 当在衬底中的p型阱中形成用作穿通阻挡层的互补MISFET和p型半导体区域的源区和漏区（n型半导体区和n +型半导体区） 具有p型和n型阱时，抑制了穿通止动件的p型杂质被供给到n型阱的馈电部（n +型半导体区）。

公开(公告)号：US20080061384A1

公开(公告)日：2008-03-13

申请号：US11936443

申请日：2007-11-07

申请人： Tomio Iwasaki ,  Hiroshi Moriya ,  Hideo Miura ,  Shuji Ikeda

发明人： Tomio Iwasaki ,  Hiroshi Moriya ,  Hideo Miura ,  Shuji Ikeda

IPC分类号： H01L29/78

CPC分类号： H01L21/823462 ,  H01L21/28097 ,  H01L21/28185 ,  H01L21/28194 ,  H01L21/28518 ,  H01L21/31604 ,  H01L21/823412 ,  H01L27/1085 ,  H01L27/10873 ,  H01L29/045 ,  H01L29/4908 ,  H01L29/4975 ,  H01L29/513 ,  H01L29/516 ,  H01L29/517 ,  H01L29/78696

摘要： Diffusion layers 2-5 are formed on a silicon substrate 1, and gate dielectric films 6, 7 and gate electrodes 8, 9 are formed on these diffusion layers 2-5 so as to be MOS transistors. Zirconium oxide or hafnium oxide is used as a major component of gate dielectric films 6, 7. Gate dielectric films 6, 7 are formed, for example, by CVD. As substrate 1, there is used one of which the surface is (111) crystal face so as to prevent diffusion of oxygen into silicon substrate 1 or gate electrodes 8, 9. In case of using a substrate of which the surface is (111) crystal face, diffusion coefficient of oxygen is less than 1/100 of the case in which a silicon substrate of which the surface is (001) crystal face is used, and oxygen diffusion is controlled. Thus, oxygen diffusion is controlled, generation of leakage current is prevented and properties are improved. There is realized a semiconductor device having high reliability and capable of preventing deterioration of characteristics concomitant to miniaturization.

摘要翻译： 在硅衬底1上形成扩散层2-5，并且在这些扩散层2-5上形成栅电介质膜6,7和栅电极8，以便成为MOS晶体管。 氧化锆或氧化铪被用作栅极电介质膜6,7的主要成分。例如通过CVD形成栅极绝缘膜6,7。 作为基板1，使用表面为（111）晶面的其中之一，以防止氧扩散到硅基板1或栅电极8,9中。在使用其表面为（111）的基板的情况下， 在使用表面为（001）晶面的硅衬底的情况下，氧的扩散系数小于氧的扩散系数的1/100，并且控制氧扩散。 因此，控制氧扩散，防止漏电流的产生，提高性能。 实现了具有高可靠性并且能够防止伴随小型化的特性劣化的半导体器件。

公开(公告)号：US06686274B1

公开(公告)日：2004-02-03

申请号：US09787743

申请日：2001-06-08

申请人： Hiromi Shimazu ,  Tomio Iwasaki ,  Hiroyuki Ohta ,  Hideo Miura ,  Shuji Ikeda

发明人： Hiromi Shimazu ,  Tomio Iwasaki ,  Hiroyuki Ohta ,  Hideo Miura ,  Shuji Ikeda

IPC分类号： H01L2144

CPC分类号： H01L29/665 ,  H01L21/28518 ,  H01L21/76877

摘要： In a semiconductor device having a cobalt silicide film, at least nickel or iron is contained in the cobalt silicide film for preventing the rise of resistance incidental to thinning of the film.

摘要翻译： 在具有钴硅化物膜的半导体器件中，钴硅化物膜中至少含有镍或铁，以防止附着于薄膜变薄的电阻上升。

公开(公告)号：US06503803B2

公开(公告)日：2003-01-07

申请号：US09766645

申请日：2001-01-23

申请人： Hiromi Todorobaru ,  Hideo Miura ,  Masayuki Suzuki ,  Shinji Nishihara ,  Shuji Ikeda ,  Masashi Sahara ,  Shinichi Ishida ,  Hiromi Abe ,  Atushi Ogishima ,  Hiroyuki Uchiyama ,  Sonoko Abe

发明人： Hiromi Todorobaru ,  Hideo Miura ,  Masayuki Suzuki ,  Shinji Nishihara ,  Shuji Ikeda ,  Masashi Sahara ,  Shinichi Ishida ,  Hiromi Abe ,  Atushi Ogishima ,  Hiroyuki Uchiyama ,  Sonoko Abe

IPC分类号： H01L21336

CPC分类号： H01L29/7845 ,  H01L23/485 ,  H01L23/5226 ,  H01L2924/0002 ,  H01L2924/00

摘要： Disclosed is a method of fabricating a semiconductor device including forming an insulating film on a silicon substrate; forming a contact hole in the insulating film; depositing a titanium film to be in contact with the silicon substrate in the contact hole; and causing a heat reaction between the titanium film and the silicon substrate such that the titanium film is subjected to silicide reaction with the thickness 4 nm to 48 nm or, more preferably, with the thickness of 8 nm to 34 nm. In the instance where the contact hole is filled with doped polycrystal silicon material, the titanium film is deposited to be in contact with the polycrystal silicon in the contact hole. The silicon substrate/silicon body may have at least a MISFET formed thereon in which case the contact hole is formed to expose an active region of the MISFET, as one example.

摘要翻译： 公开了一种制造半导体器件的方法，包括在硅衬底上形成绝缘膜; 在绝缘膜上形成接触孔; 在接触孔中沉积与硅衬底接触的钛膜; 并且在钛膜和硅衬底之间引起热反应，使得钛膜以4nm至48nm的厚度进行硅化物反应，更优选地，以8nm至34nm的厚度进行硅化物反应。 在接触孔填充掺杂的多晶硅材料的情况下，沉积钛膜以与接触孔中的多晶硅接触。 作为一个示例，硅衬底/硅体可以具有至少形成在其上的MISFET，在这种情况下，形成接触孔以暴露MISFET的有源区。

公开(公告)号：US06268658B1

公开(公告)日：2001-07-31

申请号：US09500242

申请日：2000-02-08

申请人： Hiromi Todorobaru ,  Hideo Miura ,  Masayuki Suzuki ,  Shinji Nishihara ,  Shuji Ikeda ,  Masashi Sahara ,  Shinichi Ishida ,  Hiromi Abe ,  Atushi Ogishima ,  Hiroyuki Uchiyama ,  Sonoko Abe

发明人： Hiromi Todorobaru ,  Hideo Miura ,  Masayuki Suzuki ,  Shinji Nishihara ,  Shuji Ikeda ,  Masashi Sahara ,  Shinichi Ishida ,  Hiromi Abe ,  Atushi Ogishima ,  Hiroyuki Uchiyama ,  Sonoko Abe

IPC分类号： H01L2348

CPC分类号： H01L29/7845 ,  H01L23/485 ,  H01L23/5226 ,  H01L2924/0002 ,  H01L2924/00

摘要： A semiconductor device comprises a silicon substrate, an electrical wiring metal, an insulating film formed on the silicon substrate, a plurality of contact holes formed in the insulating film for connecting the silicon substrate and the electrical wiring metal to each other, and a titanium silicide film formed in the contact holes. The thickness of the titanium silicide film is 10 nm to 120 nm or, preferably, 20 nm to 84 nm. Semiconductor regions and the electrical wiring metal are connected to each other through the titanium silicide film.

摘要翻译： 半导体器件包括硅衬底，电布线金属，形成在硅衬底上的绝缘膜，形成在用于将硅衬底和电布线金属彼此连接的绝缘膜中的多个接触孔，以及硅化钛 膜在接触孔中形成。 硅化钛膜的厚度为10nm〜120nm，优选为20nm〜84nm。 半导体区域和电布线金属通过硅化钛膜彼此连接。

公开(公告)号：US6080611A

公开(公告)日：2000-06-27

申请号：US880445

申请日：1997-06-24

申请人： Hideo Miura ,  Shunji Moribe ,  Hisayuki Kato ,  Atsuyoshi Koike ,  Shuji Ikeda ,  Asao Nishimura

发明人： Hideo Miura ,  Shunji Moribe ,  Hisayuki Kato ,  Atsuyoshi Koike ,  Shuji Ikeda ,  Asao Nishimura

IPC分类号： H01L21/8247 ,  C23C16/24 ,  C23C16/44 ,  C23C16/455 ,  C23C16/52 ,  H01L21/20 ,  H01L21/205 ,  H01L21/28 ,  H01L21/285 ,  H01L21/336 ,  H01L29/04 ,  H01L29/49 ,  H01L29/78 ,  H01L29/788 ,  H01L29/792 ,  H01L31/18 ,  H01L21/8238

CPC分类号： C23C16/45561 ,  C23C16/24 ,  C23C16/45523 ,  C23C16/52 ,  H01L21/02381 ,  H01L21/02488 ,  H01L21/02532 ,  H01L21/02579 ,  H01L21/02609 ,  H01L21/0262 ,  H01L21/28035 ,  H01L21/28525 ,  H01L21/28556 ,  H01L29/045 ,  H01L29/4916 ,  H01L29/66757 ,  H01L31/182 ,  H01L2924/0002 ,  Y02E10/546 ,  Y02P70/521

摘要： A semiconductor device containing a polycrystalline silicon thin film wherein crystal grains of the silicon thin film have mainly a columnar structure and a crystal orientation of individual crystal grains is almost in a uniform direction can be produced by depositing a non-impurity-doped silicon thin film or an impurity layer on an interface of underlying film, followed by deposition of impurity-doped silicon thin film, if necessary, followed by heat treatment for polycrystallization.