公开(公告)号：US09634230B2

公开(公告)日：2017-04-25

申请号：US14554568

申请日：2014-11-26

Applicant: Akira Shimofuku ,  Osamu Machida ,  Atsushi Takeuchi

Inventor： Akira Shimofuku ,  Osamu Machida ,  Atsushi Takeuchi

IPC: H01L41/08 ,  G01B11/14 ,  B41J2/14 ,  H01L41/09 ,  B41J2/16 ,  H01L41/318

CPC classification number: H01L41/0805 ,  B41J2/14 ,  B41J2/161 ,  B41J2/1634 ,  B41J2/1645 ,  B41J2202/03 ,  G01B11/14 ,  H01L41/081 ,  H01L41/0973 ,  H01L41/318

Abstract: Disclosed is a method of fabricating an electromechanical transducer film. The method includes treating a surface of a first electrode to be liquid-repellent, the first electrode being formed on one surface of a substrate, irradiating the surface of the first liquid-repellent electrode with an energy ray while moving an irradiation position in accordance with a shape of the electromechanical transducer film to be formed and a shape of an alignment mark to be formed, and forming the alignment mark by applying an application liquid to an area including a portion irradiated with the energy ray in accordance with the shape of the alignment mark in the irradiating step, the application liquid being applied by an inkjet method.

公开(公告)号：US09401471B2

公开(公告)日：2016-07-26

申请号：US13821378

申请日：2011-09-05

Applicant: Satoshi Mizukami ,  Yoshikazu Akiyama ,  Masaru Shinkai ,  Osamu Machida

Inventor： Satoshi Mizukami ,  Yoshikazu Akiyama ,  Masaru Shinkai ,  Osamu Machida

IPC: H01L41/047 ,  H01L41/09 ,  H01L41/08 ,  B41J2/045 ,  B41J2/14 ,  B41J2/16 ,  H01L27/20 ,  H01L41/29

CPC classification number: H01L41/0973 ,  B41J2/045 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/1425 ,  B41J2002/14491 ,  H01L27/20 ,  H01L41/0477 ,  H01L41/0478 ,  H01L41/0805 ,  H01L41/29

Abstract: A manufacturing method of an electromechanical transducing device includes forming a vibration plate on a substrate; forming a first electrode made of a metal on the vibration plate; forming a second electrode made of an electrically conductive oxide on the first electrode; coating a surface modification material and carrying out surface modification of only the first electrode; forming an electromechanical transducing film on the second electrode; and forming a third electrode made of an electrically conductive oxide on the electromechanical transducing film.

Abstract translation: 机电换能装置的制造方法包括在基板上形成振动板; 在振动板上形成由金属制成的第一电极; 在所述第一电极上形成由导电氧化物制成的第二电极; 涂覆表面改性材料并进行仅第一电极的表面改性; 在所述第二电极上形成机电换向膜; 以及在机电转换膜上形成由导电氧化物制成的第三电极。

公开(公告)号：US09085145B2

公开(公告)日：2015-07-21

申请号：US14243177

申请日：2014-04-02

Applicant: Akira Shimofuku ,  Osamu Machida ,  Ryoh Tashiro ,  Yasuhiro Watanabe

Inventor： Akira Shimofuku ,  Osamu Machida ,  Ryoh Tashiro ,  Yasuhiro Watanabe

IPC: B41J2/045 ,  H01L41/22 ,  H04R17/00 ,  B41J2/14 ,  B41J2/16 ,  H01L41/047

CPC classification number: B41J2/14201 ,  B41J2/161 ,  B41J2/164 ,  H01L41/047 ,  H01L41/318 ,  H01L41/331

Abstract: Disclosed is an electromechanical transducer film forming method including a surface modification process; an application process; and processes of drying, thermally decomposing, and crystallizing sol-gel solution applied to a portion of a surface of a first electrode. An electromechanical transducer film is formed on a desired pattern area on the surface of the first electrode by repeating the above processes. In the application process, each of dots of the sol-gel solution applied by the inkjet method drops onto both a first area inside the desired pattern area and a second area outside the desired pattern area. The first area is a hydrophilic area on the surface of the first electrode, and the second area is a hydrophobic area on the surface of the first electrode. The hydrophilic area and the hydrophobic area have been modified by the surface modification process.

Abstract translation: 公开了一种包括表面改性工艺的机电换能器成膜方法; 申请流程; 以及施加到第一电极表面的一部分上的溶胶 - 凝胶溶液的干燥，热分解和结晶过程。 通过重复上述过程，在第一电极的表面上的期望图案区域上形成机电换能器膜。 在涂布过程中，通过喷墨法施加的溶胶 - 凝胶溶液的每个点落在期望图案区域内的第一区域和期望图案区域外的第二区域上。 第一区域是第一电极表面上的亲水区域，第二区域是第一电极表面上的疏水区域。 亲水区域和疏水区域已经通过表面改性过程进行了修饰。

公开(公告)号：US08960866B2

公开(公告)日：2015-02-24

申请号：US13737128

申请日：2013-01-09

Applicant: Osamu Machida ,  Yoshikazu Akiyama ,  Ryo Tashiro ,  Akira Shimofuku ,  Eiichi Ohta ,  Kenichi Ogata

Inventor： Osamu Machida ,  Yoshikazu Akiyama ,  Ryo Tashiro ,  Akira Shimofuku ,  Eiichi Ohta ,  Kenichi Ogata

IPC: B41J2/045 ,  H01L41/08 ,  H01L41/318 ,  H01L41/331 ,  B41J2/14

CPC classification number: B41J2/045 ,  B41J2/14233 ,  H01L41/0805 ,  H01L41/318 ,  H01L41/331

Abstract: Disclosed is an electromechanical transducer element including a first electrode disposed on a substrate; an electromechanical transducer film disposed on a first portion of the first electrode; and a second electrode disposed on a second portion of the electromechanical transducer film, wherein an actuator portion formed by laminating the substrate, the first electrode, the electromechanical transducer film, and the second electrode has a stiffness such that, in a cross section of the actuator portion, the stiffness gradually increases from an end portion of the actuator portion to a center portion of the actuator portion.

Abstract translation: 公开了一种机电换能器元件，包括设置在基板上的第一电极; 设置在所述第一电极的第一部分上的机电换能器膜; 以及设置在所述机电换能器膜的第二部分上的第二电极，其中通过层叠所述基板，所述第一电极，所述机电换能器膜和所述第二电极而形成的致动器部分具有刚度，使得在所述 致动器部分的刚度从致动器部分的端部逐渐增加到致动器部分的中心部分。

公开(公告)号：US08888253B2

公开(公告)日：2014-11-18

申请号：US13368631

申请日：2012-02-08

Applicant: Osamu Machida ,  Atsushi Takeuchi ,  Dongsik Jang ,  Ryoh Tashiro

Inventor： Osamu Machida ,  Atsushi Takeuchi ,  Dongsik Jang ,  Ryoh Tashiro

IPC: B41J2/045 ,  B41J2/165 ,  H01L41/08 ,  H01L41/317 ,  B41J2/16 ,  H01L41/09 ,  H01L41/187

CPC classification number: B41J2/161 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1646 ,  H01L41/0805 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/317

Abstract: Disclosed is a method of manufacturing an electromechanical transducer layer on a surface of a substrate, including discharging a solution including a source material to form the electromechanical transducer layer from a nozzle of a nozzle plate to coat the solution on the surface of the substrate while applying voltage between the nozzle plate and the substrate to charge the nozzle plate at a first polarity and the substrate at a second polarity opposite to the first polarity such that a split droplet split from a main droplet which is coated on the surface of the substrate becomes charged at the second polarity and is attracted and collected by the nozzle plate; and applying a heat treatment to the substrate on which the solution is coated to crystallize the solution to form the electromechanical transducer layer.

Abstract translation: 公开了一种在基板的表面上制造机电换能器层的方法，包括排出包括源材料的溶液，以从喷嘴板的喷嘴形成机电换能器层，以在涂覆表面上涂布溶液 所述喷嘴板和所述基板之间的电压以第一极性对所述喷嘴板充电，并且所述基板处于与所述第一极性相反的第二极性，使得从涂覆在所述基板的表面上的主液滴分裂的分流液滴被充电 以第二极性吸引并被喷嘴板收集; 对涂布有溶液的基板进行热处理，使溶液结晶化，形成机电换能器层。

公开(公告)号：US08772836B2

公开(公告)日：2014-07-08

申请号：US13042519

申请日：2011-03-08

Applicant: Osamu Machida

Inventor： Osamu Machida

IPC: H01L29/66

CPC classification number: H01L29/7787 ,  H01L29/2003 ,  H01L29/7391 ,  H01L29/872

Abstract: To provide a semiconductor device in which a rectifying element capable of reducing a leak current in reverse bias when a high voltage is applied and reducing a forward voltage drop Vf and a transistor element are integrally formed on a single substrate.A semiconductor device has a transistor element and a rectifying element on a single substrate. The transistor element has an active layer formed on the substrate and three electrodes (source electrode, drain electrode, and gate electrode) disposed on the active layer. The rectifying element has an anode electrode disposed on the active layer, a cathode electrode which is the drain electrode, and a first auxiliary electrode between the anode electrode and cathode electrode.

Abstract translation: 提供一种半导体器件，其中，当施加高电压时能够减小反向偏压中的漏电流并且减小正向压降Vf和晶体管元件的整流元件整体形成在单个衬底上。 半导体器件在单个衬底上具有晶体管元件和整流元件。 晶体管元件具有形成在基板上的有源层和设置在有源层上的三个电极（源电极，漏电极和栅电极）。 整流元件具有设置在有源层上的阳极电极，作为漏电极的阴极电极和位于阳极电极和阴极电极之间的第一辅助电极。

公开(公告)号：US08646180B2

公开(公告)日：2014-02-11

申请号：US13265192

申请日：2010-05-27

Applicant: Yoshikazu Akiyama ,  Takakazu Kihira ,  Keiji Ueda ,  Akira Shimofuku ,  Osamu Machida

Inventor： Yoshikazu Akiyama ,  Takakazu Kihira ,  Keiji Ueda ,  Akira Shimofuku ,  Osamu Machida

IPC: B21D53/76 ,  B23P17/00 ,  B41J2/015

CPC classification number: H01L41/0973 ,  H01L41/318

Abstract: A method of producing an electromechanical transducer includes a first step of partially modifying a surface of a first electrode; a second step of applying a sol-gel liquid including a metal composite oxide to a predetermined area of the partially-modified surface of the first electrode; a third step of performing drying, thermal decomposition, and crystallization on the applied sol-gel liquid to form an electromechanical transduction film, wherein the drying includes a heat-treatment at 120° C., the decomposition includes thermal decomposition performed at 500° C., and the crystallization includes heat treatment for crystallization at 700° C.; a fourth step of repeating the first, second, and third steps to obtain the electromechanical transduction film with a desired thickness; and a fifth step of forming a second electrode on the electromechanical transduction film.

Abstract translation: 一种制造机电换能器的方法包括：第一步骤，部分地改变第一电极的表面; 将包含金属复合氧化物的溶胶 - 凝胶液施加到第一电极的部分改性表面的预定区域的第二步骤; 在所施加的溶胶 - 凝胶液上进行干燥，热分解和结晶以形成机电转换膜的第三步骤，其中所述干燥包括在120℃下的热处理，所述分解包括在500℃下进行的热分解 ，结晶包括在700℃下结晶的热处理。 重复第一，第二和第三步骤以获得具有所需厚度的机电转换膜的第四步骤; 以及在机电转换膜上形成第二电极的第五步骤。

公开(公告)号：US08558587B2

公开(公告)日：2013-10-15

申请号：US13482384

申请日：2012-05-29

Applicant: Osamu Machida ,  Shinji Sato

Inventor： Osamu Machida ,  Shinji Sato

IPC: H03K3/00

CPC classification number: H02M3/1588 ,  H02M1/08 ,  Y02B70/1466

Abstract: A gate driver turns on/off a switching element Q1 by applying a control signal from a controller to a gate of the switching element. The switching element has the gate, a drain, and a source and contains a wide-bandgap semiconductor. The gate driver includes a parallel circuit that includes a first capacitor C1 and a first resistor R1 and is connected between the controller and the gate of the switching element and a short-circuit unit S4 that is connected between the gate and source of the switching element and short-circuits the gate and source of the switching element after a delay from an OFF pulse of the control signal.

Abstract translation: 栅极驱动器通过将来自控制器的控制信号施加到开关元件的栅极来打开/关闭开关元件Q1。 开关元件具有栅极，漏极和源极，并且包含宽带隙半导体。 栅极驱动器包括并联电路，其包括第一电容器C1和第一电阻器R1，并且连接在控制器和开关元件的栅极之间，并且连接在开关元件的栅极和源极之间的短路单元S4 并且在从控制信号的OFF脉冲延迟之后使开关元件的栅极和源极短路。

公开(公告)号：US08546937B2

公开(公告)日：2013-10-01

申请号：US13033251

申请日：2011-02-23

Applicant: Osamu Machida ,  Michiyoshi Izawa

Inventor： Osamu Machida ,  Michiyoshi Izawa

IPC: H01L23/34 ,  H01L23/48

CPC classification number: H01L29/7813 ,  H01L23/49513 ,  H01L23/49541 ,  H01L23/49562 ,  H01L23/49575 ,  H01L24/05 ,  H01L24/06 ,  H01L24/29 ,  H01L24/32 ,  H01L24/45 ,  H01L24/48 ,  H01L24/49 ,  H01L27/0605 ,  H01L27/085 ,  H01L29/2003 ,  H01L29/42316 ,  H01L29/7786 ,  H01L29/872 ,  H01L2224/04026 ,  H01L2224/04042 ,  H01L2224/05073 ,  H01L2224/05082 ,  H01L2224/05155 ,  H01L2224/05166 ,  H01L2224/05553 ,  H01L2224/05624 ,  H01L2224/05644 ,  H01L2224/0603 ,  H01L2224/06505 ,  H01L2224/291 ,  H01L2224/32245 ,  H01L2224/45124 ,  H01L2224/45144 ,  H01L2224/45147 ,  H01L2224/48091 ,  H01L2224/48247 ,  H01L2224/48465 ,  H01L2224/48624 ,  H01L2224/48644 ,  H01L2224/48724 ,  H01L2224/48844 ,  H01L2224/49171 ,  H01L2224/73265 ,  H01L2224/92247 ,  H01L2924/01014 ,  H01L2924/01015 ,  H01L2924/01023 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01074 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/0132 ,  H01L2924/014 ,  H01L2924/0781 ,  H01L2924/12032 ,  H01L2924/1305 ,  H01L2924/13055 ,  H01L2924/1306 ,  H01L2924/13063 ,  H01L2924/13064 ,  H01L2924/13091 ,  H01L2924/181 ,  H01L2924/00014 ,  H01L2924/00 ,  H01L2924/01013 ,  H01L2924/01026 ,  H01L2224/48824 ,  H01L2224/48744

Abstract: A semiconductor devices includes a first die pad having the conductivity connected to one end of a DC power source, a second die pad having the conductivity connected to the other end of the DC power source, a first switching element provided on the first die pad, receiving DC power from the DC power source via the first die pad, and having a terminal opposite to the first die pad connected to a first output terminal, and a second switching element provided on the second die pad, receiving the DC power from the DC power source via the second die pad, and connected to the first output terminal, and having a terminal opposite to the second die pad.

Abstract translation: 半导体器件包括具有连接到DC电源的一端的导电性的第一管芯焊盘，具有连接到DC电源的另一端的导电性的第二管芯焊盘，设置在第一管芯焊盘上的第一开关元件， 从直流电源经由第一管芯焊盘接收直流电力，并且具有与连接到第一输出端子的第一管芯焊盘相对的端子和设置在第二管芯焊盘上的第二开关元件，从DC接收直流电力 电源，并且连接到第一输出端子，并且具有与第二管芯焊盘相对的端子。

公开(公告)号：US08425026B2

公开(公告)日：2013-04-23

申请号：US13004203

申请日：2011-01-11

Applicant: Osamu Machida ,  Yoshikazu Akiyama ,  Keiji Ueda ,  Akira Shimofuku

Inventor： Osamu Machida ,  Yoshikazu Akiyama ,  Keiji Ueda ,  Akira Shimofuku

IPC: B41J2/04 ,  B41J2/17

CPC classification number: B41J2/14233 ,  H01L41/0805 ,  H01L41/0926 ,  H01L41/318

Abstract: A method for manufacturing an electromechanical transducer film including a lower electrode and plural layers of a sol-gel solution film formed on the lower electrode by an inkjet method, the method including the steps of a) modifying a surface of the lower electrode, b) forming a first sol-gel solution film on the surface of the lower electrode by ejecting droplets of a sol-gel solution to the surface of the lower electrode, and c) forming a second sol-gel solution film on the first sol-gel solution film by ejecting droplets of the sol-gel solution to a surface of the first sol-gel solution film. Adjacent dots formed on the surface of the lower electrode by the droplets ejected in step b) overlap each other. Adjacent dots formed on the surface of the first sol-gel solution film by the droplets ejected in step c) do not overlap each other.

Abstract translation: 一种制造机电换能器薄膜的方法，所述机电换能器薄膜包括下电极和通过喷墨方法形成在下电极上的多层溶胶 - 凝胶溶液膜，所述方法包括以下步骤：a）修改下电极的表面，b） 通过将溶胶 - 凝胶溶液的液滴喷射到下电极的表面，在下电极的表面上形成第一溶胶 - 凝胶溶液膜，以及c）在第一溶胶 - 凝胶溶液上形成第二溶胶 - 凝胶溶液膜 通过将溶胶 - 凝胶溶液的液滴喷射到第一溶胶 - 凝胶溶液膜的表面上。 在步骤b）中喷射的液滴在下电极的表面上形成的相邻点彼此重叠。 在步骤c）中喷射的液滴在第一溶胶 - 凝胶溶液膜的表面上形成的相邻点彼此不重叠。