Organic thin-film transistor manufacturing method, organic thin-film transistor, and organic thin-film transistor sheet
    34.
    发明申请
    Organic thin-film transistor manufacturing method, organic thin-film transistor, and organic thin-film transistor sheet 有权
    有机薄膜晶体管制造方法,有机薄膜晶体管和有机薄膜晶体管片

    公开(公告)号:US20040129937A1

    公开(公告)日:2004-07-08

    申请号:US10742194

    申请日:2003-12-19

    发明人: Katsura Hirai

    IPC分类号: H01L035/24 H01L051/00

    摘要: An organic thin-film transistor manufacturing method and an organic thin-film transistor manufactured by the method are disclosed, the method comprising the steps of a) forming a gate electrode on a substrate, b) forming a gate insulating layer on the substrate, c) forming an organic semiconductor layer on the substrate, d) forming an organic semiconductor layer protective layer on the organic semiconductor layer, e) removing a part of the organic semiconductor layer protective layer, and f) forming a source electrode and a drain electrode at portions where the organic semiconductor layer protective layer has been removed, so that the source electrode and drain electrode contacts the organic semiconductor layer.

    摘要翻译: 公开了一种通过该方法制造的有机薄膜晶体管制造方法和有机薄膜晶体管,该方法包括以下步骤:a)在衬底上形成栅电极,b)在衬底上形成栅极绝缘层,c )在所述衬底上形成有机半导体层,d)在所述有机半导体层上形成有机半导体层保护层,e)去除所述有机半导体层保护层的一部分,以及f)形成源电极和漏电极 去除了有机半导体层保护层的部分,使得源电极和漏电极接触有机半导体层。

    Multi-layer gate dielectric field-effect transistor and manufacturing process thereof
    40.
    发明授权
    Multi-layer gate dielectric field-effect transistor and manufacturing process thereof 有权
    多层栅介质场效应晶体管及其制造方法

    公开(公告)号:US09368737B2

    公开(公告)日:2016-06-14

    申请号:US13877441

    申请日:2011-10-05

    IPC分类号: H01L35/24 H01L51/05 H01L51/00

    摘要: A field-effect transistor includes a gate, a source and a drain; a semiconductor layer between the source and the drain; and a gate insulator between the gate and the semiconductor layer. The gate insulator comprises a first layer adjoining the semiconductor layer; and a second layer. The first layer is formed from an amorphous fluoropolymer having a first dielectric constant and a first thickness. The second layer has a second dielectric constant and a second thickness. The first dielectric constant is smaller than 3, the first thickness is smaller than 200 nm, the second dielectric constant is higher than 5, and the second thickness is smaller than 500 nm.

    摘要翻译: 场效应晶体管包括栅极,源极和漏极; 源极和漏极之间的半导体层; 以及栅极和半导体层之间的栅极绝缘体。 栅极绝缘体包括邻接半导体层的第一层; 和第二层。 第一层由具有第一介电常数和第一厚度的无定形含氟聚合物形成。 第二层具有第二介电常数和第二厚度。 第一介电常数小于3,第一厚度小于200nm,第二介电常数高于5,第二厚度小于500nm。