公开(公告)号：US09829357B2

公开(公告)日：2017-11-28

申请号：US13992136

申请日：2011-10-14

申请人： Tjalf Pirk ,  Thomas Wagner ,  Ando Feyh ,  Georg Bischopink ,  Axel Franke

发明人： Tjalf Pirk ,  Thomas Wagner ,  Ando Feyh ,  Georg Bischopink ,  Axel Franke

IPC分类号： G01D21/02 ,  G01C19/5783 ,  H01L25/065 ,  G01P1/02

CPC分类号： G01D21/02 ,  G01C19/5783 ,  G01P1/023 ,  H01L25/0657 ,  H01L2224/16145 ,  H01L2224/16245 ,  H01L2224/48145 ,  H01L2224/48245 ,  H01L2224/48247 ,  H01L2224/73257 ,  H01L2225/06506 ,  H01L2225/06513 ,  Y10T29/49128 ,  H01L2924/00012

摘要： A microelectromechanical sensor module includes a sensing mechanism for measuring an acceleration, pressure, air humidity or the like, a control mechanism for controlling the sensing mechanism, an energy supply mechanism for supplying the sensor module with energy, and a transmission mechanism for transmitting signals of the sensing mechanism. At least three of the mechanisms are integrated at the chip level in at least one chip in each case. A corresponding method is implemented to produce the microelectromechanical sensor module.

公开(公告)号：US09261363B2

公开(公告)日：2016-02-16

申请号：US12303443

申请日：2007-06-06

申请人： Reinhard Neul ,  Johannes Classen ,  Axel Franke ,  Marco Quander ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

发明人： Reinhard Neul ,  Johannes Classen ,  Axel Franke ,  Marco Quander ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

IPC分类号： G01C19/56 ,  G01C19/5762 ,  G01C19/5747

CPC分类号： G01C19/5762 ,  G01C19/5747

摘要： A yaw rate sensor includes a drive mass element which is situated above a surface of a substrate and is drivable to vibrate by a drive device along a first axis extending along the surface, having a detection mass element, which is deflectable under the influence of a Coriolis force along a second axis perpendicular to the surface, and having a detection device by which the deflection of the detection mass element along the second axis is detectable. Due to the arrangement of the second axis perpendicular to the surface, the yaw rate sensor may be integrated into a chip together with additional yaw rate sensors suitable for detection of rotations about axes of rotation in other directions.

摘要翻译： 偏航率传感器包括驱动质量元件，该驱动质量元件位于衬底的表面上方并且可被驱动装置驱动，沿着沿表面延伸的第一轴线振动，具有检测质量元件，该检测质量元件可在 科里奥利力沿着垂直于表面的第二轴线，并且具有检测装置，通过该检测装置可以检测到检测质量元件沿着第二轴线的偏转。 由于垂直于表面的第二轴的布置，横摆角速度传感器可以与适合于检测围绕其它方向的旋转轴线的旋转的附加横摆速率传感器一体地集成到一个芯片中。

公开(公告)号：US09086302B2

公开(公告)日：2015-07-21

申请号：US13258570

申请日：2010-03-01

申请人： Axel Franke

发明人： Axel Franke

IPC分类号： H01L29/84 ,  G01D5/241

CPC分类号： G01D5/2412 ,  H01L29/84

摘要： A measuring element for recording a deflection includes a region which is situated on a semi-conductor substrate and an electrode for influencing a conductivity of the region, the electrode being mounted deflectably in relation to the region, in such a way that an overlap region is formed between the electrode and the region, the overlap region having a dimension that is variable with a deflection of the electrode. A change in the output signal of the measuring element is a function of the conductivity of the region and is controllable by a change in the dimension of the overlap region, the change in the dimension of the overlap region having a non-linear relationship with the deflection of the electrode so that a change in the output signal of the measuring element has a non-linear relationship with the deflection of the electrode.

摘要翻译： 用于记录偏转的测量元件包括位于半导体衬底上的区域和用于影响该区域的导电性的电极，电极相对于区域可偏转地安装，使得重叠区域为 形成在电极和区域之间，重叠区域具有随着电极的偏转而变化的尺寸。 测量元件的输出信号的变化是该区域的电导率的函数，并且可以通过重叠区域的尺寸的变化来控制，与重叠区域的重叠区域的尺寸具有非线性关系的尺寸的变化 电极的偏转使得测量元件的输出信号的变化与电极的偏转成非线性关系。

公开(公告)号：US09040336B2

公开(公告)日：2015-05-26

申请号：US14058806

申请日：2013-10-21

申请人： Johannes Classen ,  Axel Franke ,  Jens Frey ,  Heribert Weber ,  Frank Fischer ,  Patrick Wellner

发明人： Johannes Classen ,  Axel Franke ,  Jens Frey ,  Heribert Weber ,  Frank Fischer ,  Patrick Wellner

IPC分类号： H01L21/00 ,  B81C1/00 ,  B81B3/00 ,  B81B7/00

CPC分类号： B81C1/00015 ,  B81B3/0018 ,  B81B7/0058

摘要： A manufacturing method for a cap, for a hybrid vertically integrated component having a MEMS component a relatively large cavern volume having a low cavern internal pressure, and a reliable overload protection for the micromechanical structure of the MEMS component. A cap structure is produced in a flat cap substrate in a multistep anisotropic etching, and includes at least one mounting frame having at least one mounting surface and a stop structure, on the cap inner side, having at least one stop surface, the surface of the cap substrate being masked for the multistep anisotropic etching with at least two masking layers made of different materials, and the layouts of the masking layers and the number and duration of the etching steps being selected so that the mounting surface, the stop surface, and the cap inner side are situated at different surface levels of the cap structure.

摘要翻译： 一种用于具有MEMS部件的混合垂直集成部件的盖的制造方法，具有较低的洞穴内部压力的相对较大的洞穴体积以及用于MEMS部件的微机械结构的可靠的过载保护。 在多步骤各向异性蚀刻中，在平盖基板中制造盖结构，并且包括至少一个安装框架，该安装框架具有至少一个安装表面和止动结构，在盖内侧具有至少一个止动表面， 掩模基板被掩模用于具有由不同材料制成的至少两个掩模层的多步各向异性蚀刻，并且选择掩模层的布局以及蚀刻步骤的数量和持续时间，使得安装表面，止动表面和 帽内侧位于帽结构的不同表面水平处。

公开(公告)号：US08833135B2

公开(公告)日：2014-09-16

申请号：US13197084

申请日：2011-08-03

申请人： Axel Franke ,  Mirko Hattass ,  Alexander Buhmann ,  Marian Keck

发明人： Axel Franke ,  Mirko Hattass ,  Alexander Buhmann ,  Marian Keck

IPC分类号： G01P15/125 ,  G01P21/00 ,  G01P15/08

CPC分类号： G01P15/125 ,  G01P2015/0814

摘要： A sensor system having a substrate and a mass which is movably suspended relative to the substrate is described, the sensor system including detection arrangement for detecting a deflection of the seismic mass relative to the substrate along a deflection direction, the detection arrangement including a first measuring electrode affixed to the substrate and a second measuring electrode affixed to the substrate, and a first overlap, which is perpendicular to the deflection direction, between the first measuring electrode and the seismic mass along the deflection direction is greater than a second overlap, which is perpendicular to the deflection direction, between the second measuring electrode and the seismic mass.

摘要翻译： 描述了具有基板和相对于基板可移动地悬挂的质量块的传感器系统，该传感器系统包括用于沿着偏转方向检测地震质体相对于基底的偏转的检测装置，该检测装置包括第一测量 固定在基板上的电极和固定在基板上的第二测量电极，以及沿偏转方向在第一测量电极和地震块之间垂直于偏转方向的第一重叠大于第二重叠， 垂直于偏转方向，在第二测量电极和地震质量之间。

公开(公告)号：US08695427B2

公开(公告)日：2014-04-15

申请号：US13116759

申请日：2011-05-26

申请人： Jochen Reinmuth ,  Ralf Boessendoerfer ,  Axel Franke ,  Mirko Hattass

发明人： Jochen Reinmuth ,  Ralf Boessendoerfer ,  Axel Franke ,  Mirko Hattass

IPC分类号： G01P15/125

CPC分类号： G01B7/085 ,  B81B2201/0242 ,  B81C99/0045 ,  G01P15/125 ,  G01P2015/082 ,  G01P2015/0831

摘要： A micromechanical component is described including a substrate having a spacer layer and a test structure for ascertaining the thickness of the spacer layer. The test structure includes a seismic mass, which is elastically deflectable along a measuring axis parallel to the substrate, a first electrode system and a second electrode system for deflecting the seismic mass along the measuring axis, having a mass electrode, which is produced by a part of the seismic mass, and a substrate electrode, which is situated on the substrate in each case, the first electrode system being designed to be thicker than the second electrode system by the layer thickness of the spacer layer.

摘要翻译： 描述了一种微机械部件，其包括具有间隔层的基板和用于确定间隔层的厚度的测试结构。 测试结构包括沿着平行于基板的测量轴线可弹性偏转的地震质量块，用于沿着测量轴偏转地震质量块的第一电极系统和第二电极系统，具有质量电极，其由 地震质量的一部分，以及基板电极，其位于每种情况下的基板上，第一电极系统被设计为比间隔层的层厚度厚于第二电极系统。

公开(公告)号：US08493078B2

公开(公告)日：2013-07-23

申请号：US12925067

申请日：2010-10-12

申请人： Axel Franke ,  Alexander Buhmann ,  Marian Keck

发明人： Axel Franke ,  Alexander Buhmann ,  Marian Keck

IPC分类号： G01R27/26

CPC分类号： G01C19/5755 ,  B81B3/0086 ,  B81B2201/0235 ,  B81B2201/0264 ,  B81B2203/0136 ,  G01D5/24 ,  G01P15/125 ,  G01P2015/0814

摘要： A sensor for capacitive detection of a mechanical deflection includes a substrate having a first substrate electrode and a second substrate electrode; and a mass movable relative to the substrate. The mass is divided into: a first electrically separate region having a first ground electrode; and a second electrically separate region of the mass having a second ground electrode. At least one portion of the first ground electrode is situated in a first region between the first substrate electrode and the second substrate electrode, and forms a first differential capacitor. At least one portion of the second ground electrode is situated in a second region between the first substrate electrode and the second substrate electrode, and forms a second differential capacitor.

摘要翻译： 用于电容式检测机械偏转的传感器包括具有第一基板电极和第二基板电极的基板; 以及相对于基板移动的质量。 质量分为：具有第一接地电极的第一电分离区域; 以及具有第二接地电极的所述质量体的第二电分离区域。 第一接地电极的至少一部分位于第一基板电极和第二基板电极之间的第一区域中，并且形成第一差分电容器。 第二接地电极的至少一部分位于第一基板电极和第二基板电极之间的第二区域中，并形成第二差分电容器。

公开(公告)号：US08461833B2

公开(公告)日：2013-06-11

申请号：US12927259

申请日：2010-11-09

申请人： Johannes Classen ,  Arnd Kaelberer ,  Hans-Joerg Faisst ,  Axel Franke ,  Mirko Hattass ,  Holger Rank ,  Robert Sattler ,  Alexander Buhmann ,  Ramona Maas ,  Marian Keck

发明人： Johannes Classen ,  Arnd Kaelberer ,  Hans-Joerg Faisst ,  Axel Franke ,  Mirko Hattass ,  Holger Rank ,  Robert Sattler ,  Alexander Buhmann ,  Ramona Maas ,  Marian Keck

IPC分类号： G01R33/02 ,  G01R33/00

CPC分类号： G01R33/0286 ,  B81C99/003 ,  G01P15/125 ,  G01P15/18 ,  G01P21/00

摘要： A method for determining the sensitivity of a sensor provides the following steps: a) first and second deflection voltages are applied to first and second electrode systems of the sensor, respectively, and first and second electrostatic forces are exerted on an elastically suspended seismic mass of the sensor by the first and second electrode systems, respectively, and a restoring force is exerted on the mass as a result of the elasticity of the mass, and a force equilibrium is established among the first and second electrostatic forces and the restoring force, and the mass assumes a deflection position characteristic of the force equilibrium, and an output signal characteristic of the force equilibrium and of the deflection position is measured; and b) the sensitivity of the sensor is computed on the basis of the first and second deflection voltages.

摘要翻译： 用于确定传感器的灵敏度的方法提供以下步骤：a）分别将第一和第二偏转电压施加到传感器的第一和第二电极系统，并且第一和第二静电力施加在弹性悬浮的地震块 分别由第一和第二电极系统的传感器和由于质量的弹性而对质量施加回复力，并且在第一和第二静电力和恢复力之间建立力平衡，并且 质量呈现力平衡特性的偏转位置，并且测量力平衡和偏转位置的特征的输出信号; 以及b）基于第一和第二偏转电压来计算传感器的灵敏度。

公开(公告)号：US08353213B2

公开(公告)日：2013-01-15

申请号：US12678669

申请日：2008-09-19

申请人： Jochen Zoellin ,  Axel Franke ,  Kathrin Van Teeffelen ,  Christina Leinenbach

发明人： Jochen Zoellin ,  Axel Franke ,  Kathrin Van Teeffelen ,  Christina Leinenbach

IPC分类号： G01P15/125 ,  G01P15/08

CPC分类号： G01P15/125 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/084

摘要： A sensor element is provided for sensing accelerations in three spatial directions, which furnishes reliable measurement results and moreover can be implemented economically and with a small configuration. The sensor element encompasses at least one seismic mass deflectable in three spatial directions, a diaphragm structure that functions as a suspension mount for the seismic mass, and at least one stationary counterelectrode for capacitive sensing of the deflections of the diaphragm structure. According to the exemplary embodiments and/or exemplary methods of the present invention, the diaphragm structure encompasses at least four electrode regions, electrically separated from one another, that are mechanically coupled via the seismic mass.

摘要翻译： 提供了用于感测三个空间方向上的加速度的传感器元件，其提供可靠的测量结果，并且还可以经济地实现并且具有小的配置。 传感器元件包括至少一个在三个空间方向上可偏转的地震质量，作为用于地震质量块的悬挂安装件的隔膜结构，以及至少一个用于对隔膜结构的偏转进行电容感测的固定反电极。 根据本发明的示例性实施例和/或示例性方法，隔膜结构包括彼此电分离的至少四个电极区域，其经由地震块机械耦合。

公开(公告)号：US08286854B2

公开(公告)日：2012-10-16

申请号：US12806135

申请日：2010-08-06

申请人： Christian Rettig ,  Axel Franke ,  Ando Feyh

发明人： Christian Rettig ,  Axel Franke ,  Ando Feyh

IPC分类号： B23K20/00

CPC分类号： G01C19/56 ,  B81B7/0041 ,  B81B7/02 ,  B81C2203/0109 ,  G01P15/0802 ,  Y10T29/49144 ,  Y10T29/49146 ,  Y10T428/13

摘要： A microsystem has a first cavity which is sealed off from the surroundings and a second cavity which is sealed off from the surroundings. The first cavity is bounded by a first bond joint and the second cavity is bounded by a second bond joint. Either the first bond joint or the second bond joint is a eutectic bond joint or a diffusion-soldered joint.

摘要翻译： 微系统具有与周围环境密封的第一空腔和与周围环境密封的第二空腔。 第一腔体由第一接合接头限定，第二腔体由第二接合接头限定。 第一接合接头或第二接合接头是共晶接合接头或扩散焊接接头。