Method for manufacturing holding device and holding device

    公开(公告)号:US12027406B2

    公开(公告)日:2024-07-02

    申请号:US17052634

    申请日:2019-01-08

    Abstract: A holding device manufacturing method includes a step of preparing a first joined body which includes a pre-machining ceramic member having a first surface and a fifth surface located opposite the first surface and approximately parallel to the first surface, a base member, and a joining portion disposed between the first surface of the pre-machining ceramic member and a third surface of the base member and joining the pre-machining ceramic member and the base member together. The thickness of the joining portion of the first joined body in a first direction, in which the first surface and the third surface face each other via the joining portion, increases from one end side toward the other end side of the joining portion in a second direction perpendicular to the first direction. The method includes a step of machining the fifth surface of the pre-machining ceramic member in the first joined body.

    SEMICONDUCTOR MANUFACTURING EQUIPMENT COMPONENT AND METHOD OF MAKING THE SAME
    47.
    发明申请
    SEMICONDUCTOR MANUFACTURING EQUIPMENT COMPONENT AND METHOD OF MAKING THE SAME 审中-公开
    半导体制造设备组件及其制造方法

    公开(公告)号:US20160099163A1

    公开(公告)日:2016-04-07

    申请号:US14870115

    申请日:2015-09-30

    Abstract: A method of making a semiconductor manufacturing equipment component, such as an electrostatic chuck, includes an application step of applying a photosensitive metal paste onto a ceramic green sheet, which is to become the body substrate, the photosensitive metal paste being a heating element material; an exposure-and-development step of exposing the photosensitive metal paste, which has been applied onto the ceramic green sheet, to light and developing the photosensitive metal paste to form an intermediate heating element, which is to become the heating element, on the ceramic green sheet; and a firing step of co-firing the ceramic green sheet and the intermediate heating element to form the body substrate and the heating element.

    Abstract translation: 一种制造半导体制造设备部件如静电卡盘的方法包括将感光金属浆料施加到作为主体基板的陶瓷生片上的施加步骤,感光金属膏是加热元件材料; 曝光和显影步骤,其将施加到陶瓷生片上的感光金属膏曝光,以使感光性金属膏发光并显影,以形成在陶瓷上成为加热元件的中间加热元件 绿色板材 以及烧结陶瓷生片和中间加热元件以形成主体基板和加热元件的烧制步骤。

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