公开(公告)号：US06987265B2

公开(公告)日：2006-01-17

申请号：US10083481

申请日：2002-02-27

申请人： Yuko Iwabuchi ,  Hideo Todokoro ,  Hiroyoshi Mori ,  Mitsugu Sato ,  Yasutsugu Usami ,  Mikio Ichihashi ,  Satoru Fukuhara ,  Hiroyuki Shinada ,  Yutaka Kaneko ,  Katsuya Sugiyama ,  Atsuko Takafuji ,  Hiroshi Toyama

发明人： Yuko Iwabuchi ,  Hideo Todokoro ,  Hiroyoshi Mori ,  Mitsugu Sato ,  Yasutsugu Usami ,  Mikio Ichihashi ,  Satoru Fukuhara ,  Hiroyuki Shinada ,  Yutaka Kaneko ,  Katsuya Sugiyama ,  Atsuko Takafuji ,  Hiroshi Toyama

IPC分类号： H01J37/28

CPC分类号： H01J37/28 ,  G01N23/20 ,  G01N23/2251 ,  G03F7/7065 ,  G06T7/001 ,  G06T2207/10056 ,  G06T2207/30148 ,  H01J37/04 ,  H01J37/20 ,  H01J37/265 ,  H01J2237/04756 ,  H01J2237/20221 ,  H01J2237/2444 ,  H01J2237/24592 ,  H01J2237/2817 ,  H01J2237/31766

摘要： Problems encountered in the conventional inspection method and the conventional apparatus adopting the method are solved by the present invention using an electron beam by providing a novel inspection method and an inspection apparatus adopting the novel method which are capable of increasing the speed to scan a specimen such as a semiconductor wafer.The inspection novel method provided by the present invention comprises the steps of: generating an electron beam; converging the generated electron beam on a specimen by using an objective lens; scanning the specimen by using the converged electron beam; continuously moving the specimen during scanning; detecting charged particles emanating from the specimen at a location between the specimen and the objective lens and converting the detected charged particles into an electrical signal; storing picture information conveyed by the electrical signal; comparing a picture with another by using the stored picture information; and detecting a defect of the specimen.

公开(公告)号：US06956211B2

公开(公告)日：2005-10-18

申请号：US10656166

申请日：2003-09-08

申请人： Mitsugu Sato ,  Hideo Todokoro ,  Yoichi Ose ,  Makoto Ezumi ,  Noriaki Arai ,  Takashi Doi

发明人： Mitsugu Sato ,  Hideo Todokoro ,  Yoichi Ose ,  Makoto Ezumi ,  Noriaki Arai ,  Takashi Doi

IPC分类号： G01Q10/00 ,  G01Q20/02 ,  G01Q30/02 ,  H01J3/14 ,  H01J29/70 ,  H01J37/153 ,  H01J37/28

CPC分类号： H01J37/153 ,  H01J2237/1506 ,  H01J2237/1534 ,  H01J2237/28

摘要： A charged particle beam apparatus produces little reduction in resolution when the beam is inclined with respect to a sample. The trajectory of a primary beam 4 is deflected by a deflector or changed by a movable aperture such that the beam is incident on a plurality of lenses 6 and 7 off the axes thereof. A means is provided to control the off-axis trajectory of the beam such that an aberration produced by the objective lens 7 when the beam is inclined can be canceled by an aberration produced by the other lens 6.

摘要翻译： 当束相对于样品倾斜时，带电粒子束装置的分辨率几乎不降低。 主光束4的轨迹被偏转器偏转或者被可动孔径改变，使得光束入射到多个透镜6和7的轴线上。 提供了一种用于控制光束的离轴轨迹的装置，使得当光束倾斜时由物镜7产生的像差可以被另一透镜6产生的像差消除。

公开(公告)号：US06872943B2

公开(公告)日：2005-03-29

申请号：US10192692

申请日：2002-07-11

申请人： Atsushi Takane ,  Satoru Yamaguchi ,  Osamu Komuro ,  Yasuhiko Ozawa ,  Hideo Todokoro

发明人： Atsushi Takane ,  Satoru Yamaguchi ,  Osamu Komuro ,  Yasuhiko Ozawa ,  Hideo Todokoro

IPC分类号： G01B15/04 ,  G01B15/08 ,  H01J37/28 ,  H01L21/66 ,  G01K1/08 ,  G01N23/00

CPC分类号： H01J37/28 ,  H01J2237/2815

摘要： A method for determining a depression/protrusion, especially of a line and space pattern formed on a sample, and an apparatus therefor. A charged particle beam is scanned with its direction being inclined to the original optical axis of the charged particle beam or a sample stage is inclined, broadening of a detected signal in a line scanning direction of the charged particle beam is measured, the broadening is compared with that when the charged particle beam is scanned with its direction being parallel to the original optical axis of the charged particle beam, and a depression/protrusion of the scanned portion is determined on the basis of increase/decrease of the broadening.

公开(公告)号：US20050061975A1

公开(公告)日：2005-03-24

申请号：US10963815

申请日：2004-10-14

申请人： Hideo Todokoro

发明人： Hideo Todokoro

IPC分类号： G01N23/04 ,  G01Q10/00 ,  G01Q30/02 ,  G01Q30/04 ,  H01J37/302 ,  H01J37/304 ,  G01N23/00

CPC分类号： H01J37/3023 ,  G01N23/04 ,  H01J37/304 ,  H01J2237/304 ,  H01J2237/30411 ,  H01J2237/30416

摘要： An electron microscope observation system and an observation method are provided. According to one aspect of the invention, an observation appointment and approval screen is displayed on the two image display units, and the sample preparation-processed in the observation center side based on an instruction given from the operation center is loaded, and observation of the sample is executed based on sample observation condition information to output image information, and the observation image is displayed on the two image display units, and charge processing is executed based on a content level of the observation including preparation processing of the sample and occupying hours of the electron microscope to display the charge processing result.

摘要翻译： 提供电子显微镜观察系统和观察方法。 根据本发明的一个方面，在两个图像显示单元上显示观察约会和批准屏幕，并且基于从操作中心给出的指令来加载在观察中心侧处理的样本，并且观察 基于样本观察条件信息执行样本以输出图像信息，并且将观察图像显示在两个图像显示单元上，并且基于包括样本的准备处理和观察时间的观察的内容水平执行计费处理 电子显微镜显示充电处理结果。

公开(公告)号：US06791084B2

公开(公告)日：2004-09-14

申请号：US10246453

申请日：2002-09-19

申请人： Goroku Shimoma ,  Tadashi Otaka ,  Mitsugu Sato ,  Hideo Todokoro ,  Shunichi Watanabe ,  Tadanori Takahashi ,  Masahiro Kawawa ,  Masanori Gunji ,  Terumichi Nishino

发明人： Goroku Shimoma ,  Tadashi Otaka ,  Mitsugu Sato ,  Hideo Todokoro ,  Shunichi Watanabe ,  Tadanori Takahashi ,  Masahiro Kawawa ,  Masanori Gunji ,  Terumichi Nishino

IPC分类号： H01J3728

CPC分类号： H01J37/28 ,  H01J2237/2814

摘要： A width-measurement method of reducing or eliminating an error in measurement of a width of an object on a sample resulting from the dimension of the beam diameter, wherein a width-measured value of the object to be width-measured which has been obtained on the basis of a secondary signal obtained from secondary particles emitted from the sample having thereon the object to be width-measured is corrected with a value with respect to a dimension value of a beam diameter.

摘要翻译： 一种宽度测量方法，用于减少或消除由光束直径尺寸导致的样品宽度测量误差，其中宽度测量对象的宽度测量值已经在 从其上具有待宽度测量对象的样品发射的二次粒子获得的二次信号的基础用相对于束直径的尺寸值的值进行校正。

公开(公告)号：US06653633B2

公开(公告)日：2003-11-25

申请号：US10356498

申请日：2003-02-03

申请人： Atsushi Takane ,  Haruo Yoda ,  Hideo Todokoro ,  Fumio Mizuno ,  Shoji Yoshida ,  Mitsuji Ikeda ,  Mitsugu Sato ,  Makoto Ezumi

发明人： Atsushi Takane ,  Haruo Yoda ,  Hideo Todokoro ,  Fumio Mizuno ,  Shoji Yoshida ,  Mitsuji Ikeda ,  Mitsugu Sato ,  Makoto Ezumi

IPC分类号： H01J3726

CPC分类号： G06T5/002 ,  G06T5/003 ,  G06T5/20 ,  G06T5/50 ,  G06T7/13 ,  G06T7/62 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J37/21 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/21 ,  H01J2237/216 ,  H01J2237/221 ,  H01J2237/226 ,  H01J2237/281 ,  H01J2237/2815 ,  H01J2237/2817

摘要： It is an object of the present invention to obtain an image which is focused on all portions of a sample and to provide a charged particle beam apparatus capable of obtaining a two-dimensional image which has no blurred part over an entire sample. In order to achieve the above object, the present invention comprises means for changing a focus condition of a charged particle beam emitted from a charged particle source, a charged particle detector for detecting charged particles irradiated from a surface portion of said sample in response to the emitted charged particle beam, and means for composing a two-dimensional image of the surface portion of the based on signals on which said charged particle beam is focused, said signals being among signals output from the charged particle detector.

摘要翻译： 本发明的目的是获得一种聚焦于样品的所有部分的图像，并提供一种能够获得在整个样品上没有模糊部分的二维图像的带电粒子束装置。 为了实现上述目的，本发明包括用于改变从带电粒子源发射的带电粒子束的聚焦条件的装置，用于检测从所述样品的表面部分照射的带电粒子的带电粒子检测器， 发射的带电粒子束，以及用于根据所述带电粒子束聚焦的信号来构成表面部分的二维图像的装置，所述信号在从带电粒子检测器输出的信号中。

公开(公告)号：US06538249B1

公开(公告)日：2003-03-25

申请号：US09612302

申请日：2000-07-07

申请人： Atsushi Takane ,  Haruo Yoda ,  Hideo Todokoro ,  Fumio Mizuno ,  Shoji Yoshida ,  Mitsuji Ikeda ,  Mitsugu Sato ,  Makoto Ezumi

发明人： Atsushi Takane ,  Haruo Yoda ,  Hideo Todokoro ,  Fumio Mizuno ,  Shoji Yoshida ,  Mitsuji Ikeda ,  Mitsugu Sato ,  Makoto Ezumi

IPC分类号： H01J3726

CPC分类号： G06T5/002 ,  G06T5/003 ,  G06T5/20 ,  G06T5/50 ,  G06T7/13 ,  G06T7/62 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J37/21 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/21 ,  H01J2237/216 ,  H01J2237/221 ,  H01J2237/226 ,  H01J2237/281 ,  H01J2237/2815 ,  H01J2237/2817

摘要： It is an object of the present invention to obtain an image which is focused on all portions of a sample and to provide a charged particle beam apparatus capable of obtaining a two-dimensional image which has no blurred part over an entire sample. In order to achieve the above object, the present invention comprises means for changing a focus condition of a charged particle beam emitted from a charged particle source, a charged particle detector for detecting charged particles irradiated from a surface portion of said sample in response to the emitted charged particle beam, and means for composing a two-dimensional image of the surface portion of the based on signals on which said charged particle beam is focused, said signals being among signals output from the charged particle detector.

摘要翻译： 本发明的目的是获得一种聚焦于样品的所有部分的图像，并提供一种能够获得在整个样品上没有模糊部分的二维图像的带电粒子束装置。 为了实现上述目的，本发明包括用于改变从带电粒子源发射的带电粒子束的聚焦条件的装置，用于检测从所述样品的表面部分照射的带电粒子的带电粒子检测器， 发射的带电粒子束，以及用于根据所述带电粒子束聚焦的信号来组合表面部分的二维图像的装置，所述信号是从带电粒子检测器输出的信号。

公开(公告)号：US06512227B2

公开(公告)日：2003-01-28

申请号：US09982965

申请日：2001-10-22

申请人： Yuko Iwabuchi ,  Hideo Todokoro ,  Hiroyoshi Mori ,  Mitsugu Sato ,  Yasutsugu Usami ,  Mikio Ichihashi ,  Satoru Fukuhara ,  Hiroyuki Shinada ,  Yutaka Kaneko ,  Atsuko Takafuji ,  Hiroshi Toyama ,  Katsuya Sugiyama

发明人： Yuko Iwabuchi ,  Hideo Todokoro ,  Hiroyoshi Mori ,  Mitsugu Sato ,  Yasutsugu Usami ,  Mikio Ichihashi ,  Satoru Fukuhara ,  Hiroyuki Shinada ,  Yutaka Kaneko ,  Atsuko Takafuji ,  Hiroshi Toyama ,  Katsuya Sugiyama

IPC分类号： G01N2300

CPC分类号： H01J37/28 ,  G01N23/04 ,  H01J2237/2817

摘要： An object of the present invention is to provide an inspection method using an electron beam and an inspection apparatus therefor, which are capable of enhancing the resolution, improving the inspection speed and reliability, and realizing miniaturization the apparatus. To achieve the above object, according to the present invention, there is provided an inspection method using an electron beam, including the steps of; applying a voltage on a sample via a sample stage; converging an electron beam on the sample; scanning the sample with the converged electron beam and simultaneously, continuously moving the sample stage; detecting charged particles generated from the sample; and detecting a defect on the sample on the basis of the detected charged particles; wherein a distance between the sample and the shield frame is determined on the basis of a critical discharge between the sample stage and the shield frame; coils of at least hexapoles for correcting the shape of an electron beam are provided; the electron beam is deflected for blanking during movement of the sample with the crossover of the electron beam taken as a fulcrum of blanking; or the magnitude of the voltage applied to the sample may be determined depending on the kind of sample.

公开(公告)号：US5900629A

公开(公告)日：1999-05-04

申请号：US44833

申请日：1998-03-20

申请人： Hideo Todokoro ,  Makoto Ezumi

发明人： Hideo Todokoro ,  Makoto Ezumi

IPC分类号： H01J37/244 ,  H01J37/256 ,  H01J37/28 ,  H01J37/285

CPC分类号： H01J37/244 ,  H01J37/145 ,  H01J37/268 ,  H01J37/28 ,  H01J2237/04 ,  H01J2237/04756 ,  H01J2237/2449

摘要： A scanning microscope is provided for producing a scan image at high spatial resolution and in a low acceleration voltage area. An acceleration tube is located in an electron beam path of an objective lens for applying a post-acceleration voltage of the primary electron beam. The application of an overlapping voltage onto a sample allows a retarding electric field against the primary electron beam to be formed between the acceleration tube and the sample. The secondary electrons generated from the sample and the secondary signals such as reflected electrons are extracted into the acceleration tube through the effect of an electric field (retarding electric field) immediately before the sample. The signals are detected by secondary signal detectors located upwardly than the acceleration tube.

公开(公告)号：US5866904A

公开(公告)日：1999-02-02

申请号：US970201

申请日：1997-11-14

申请人： Hideo Todokoro ,  Kenji Takamoto ,  Tadashi Otaka ,  Fumio Mizuno ,  Satoru Yamada ,  Sadao Terakado ,  Katsuhiro Kuroda ,  Ken Ninomiya ,  Tokuo Kure

发明人： Hideo Todokoro ,  Kenji Takamoto ,  Tadashi Otaka ,  Fumio Mizuno ,  Satoru Yamada ,  Sadao Terakado ,  Katsuhiro Kuroda ,  Ken Ninomiya ,  Tokuo Kure

IPC分类号： G01Q30/02 ,  G01B15/00 ,  G01B15/04 ,  G01Q30/04 ,  H01J37/26

CPC分类号： G01B15/00 ,  G01B15/04 ,  H01J2237/2448 ,  H01J2237/24495 ,  H01J2237/281

摘要： An electron beam which can transmit through part of a specimen and can reach a portion not exposing to the electron beam is irradiated and a scanning image is obtained on the basis of a signal secondarily generated from a portion irradiated with the electron beam. Dimension-measuring start and end points are set on the scanning image and a dimension therebetween is measured. A cubic model is assumed, the cubic model is modified so as to match the scanning image, and dimension measurement is carried out on the basis of a modified cubic model.