Abstract:
The invention relates to a method (3) of fabricating a mould (39, 39′, 39″) that includes the following steps: a) providing (10) a substrate (9, 9′) that has a top layer (21, 21′) and a bottom layer (23, 23′) made of electrically conductive, micromachinable material, and secured to each other by an electrically insulating, intermediate layer (22, 22′); b) etching (11, 12, 14, 2, 4) at least one pattern (26, 26′, 27) in the top layer (21, 21′) as far as the intermediate layer (22, 22′) to form at least one cavity (25, 25′) in said mould; c) coating (6, 16) the top part of said substrate with an electrically insulating coating (30, 30′); d) directionally etching (8, 18) said coating and said intermediate layer to limit the presence thereof exclusively at each vertical wall (31, 31′, 33) formed in said top layer. The invention concerns the field of micromechanical parts, in particular, for timepiece movements.
Abstract:
The invention relates to a method (1) of manufacturing a silicon-metal composite micromechanical component (51) combining DRIE and LIGA processes. The invention also relates to a micromechanical component (51) including a layer wherein one part (53) is made of silicon and another part (41) of metal so as to form a composite micromechanical component (51). The invention concerns the field of timepiece movements.
Abstract:
The invention relates to a method of fabricating a micromechanical part (11, 31, 41) made of a single piece material. According to the invention, the method includes the following steps: a) forming a substrate (1, 21) which includes the negative cavity (3, 23) for said micromechanical part to be fabricated; b) forming a sacrificial layer (5, 25) on one portion of the substrate (1, 21); c) depositing particles (6, 26) on the substrate (1, 21) intended to form a germination layer; d) removing the sacrificial layer (5, 25) so as to selectively leave one portion of the substrate (1, 21) free of any particles (6, 26); e) depositing a layer of material (7, 27) by chemical vapour phase deposition so that the material is exclusively deposited where the particles (6, 26) remain; f) removing the substrate (1, 21) to release the micromechanical part (11, 31, 41) formed in said negative cavity.
Abstract:
Method for coating micromechanical components of a micromechanical system, in particular a watch movement, comprising: providing a substrate component to be coated; providing said component with a diamond coating; wherein said diamond coating conductivity is increased in order to reduce dust attraction by the coated component when used in said micromechanical system. Corresponding micromechanical components and systems are also provided.
Abstract:
The invention relates to a method (3) of fabricating a mould (39, 39′, 39″) that includes the following steps: a) providing (10) a substrate (9, 9′) that has a top layer (21, 21′) and a bottom layer (23, 23′) made of electrically conductive, micromachinable material, and secured to each other by an electrically insulating, intermediate layer (22, 22′); b) etching (11, 12, 14, 2, 4) at least one pattern (26, 26′, 27) in the top layer (21, 21′) as far as the intermediate layer (22, 22′) to form at least one cavity (25, 25′) in said mould; c) coating (6, 16) the top part of said substrate with an electrically insulating coating (30, 30′); d) directionally etching (8, 18) said coating and said intermediate layer to limit the presence thereof exclusively at each vertical wall (31, 31′, 33) formed in said top layer. The invention concerns the field of micromechanical parts, in particular, for timepiece movements.
Abstract:
The invention relates to a method of manufacturing (1) a mechanical part (51) including the following steps: a) providing (3) a substrate (53) made of micro-machinable material; b) etching (5), with help of photolithography, a pattern (50) that includes said part through said entire substrate; According to the invention, the method further includes the following steps: c) assembling (13) a clip (91) on said part so that said part (51) is ready to be mounted without the portion made of micro-machinable material having to be touched; d) releasing (11) the part (51) from the substrate (53) so as to mount said part in a device such as a timepiece movement. The invention concerns the field of timepiece manufacture.
Abstract:
An apparatus is described to reduce a play occurring in a micro-mechanical gear arrangement, the apparatus having a moveable hub coupled to a gear of the micro-mechanical gear arrangement, the moveable hub configured to permit a movement of the gear that reduces the play. A push rod is coupled to the moveable hub and at least one buckling beam is tethered to the push rod so that a force is exerted upon the push rod to cause the movement of the gear, the force being transferable to the gear via the moveable hub.
Abstract:
A substrate on which a plurality of thin films having a plurality of cross-sections corresponding to the cross-section of a micro-structure are formed is placed on a substrate holder. The substrate holder is elevated to bond a thin film formed on the substrate to the surface of a stage, and by lowering the substrate holder, the thin film is separated from the substrate and transferred to the stage side. The transfer process is repeated to laminate a plurality of thin films on the stage and to form the micro-structure. Accordingly, there are provided a micro-structure having high dimensional precision, especially high resolution in the lamination direction, which can be manufactured from a metal or an insulator such as ceramics and can be manufactured in the combined form of structural elements together, and a manufacturing method and an apparatus thereof.
Abstract:
A substrate on which a plurality of thin films having a plurality of cross-sections corresponding to the cross-section of a micro-structure are formed is placed on a substrate holder. The substrate holder is elevated to bond a thin film formed on the substrate to the surface of a stage, and by lowering the substrate holder, the thin film is separated from the substrate and transferred to the stage side. The transfer process is repeated to laminate a plurality of thin films on the stage and to form the micro-structure. Accordingly, there are provided a micro-structure having high dimensional precision, especially high resolution in the lamination direction, which can be manufactured from a metal or an insulator such as ceramics and can be manufactured in the combined form of structural elements together, and a manufacturing method and an apparatus thereof.
Abstract:
A micro mechanical component of the present invention comprises a base, and at least one drive portion supported on the base and relatively driving to the base, in which the drive portion is formed from a diamond layer. Thus, because the drive portion has excellent mechanical strength and modulus of elasticity, the operational performance can be greatly improved as a micro mechanical component processed in a fine shape, from the conventional level. Further, because the drive portion exhibits excellent device characteristics under severe circumstances, the range of applications as a micro mechanical component can be widely expanded from the conventional range.