Non-volatile memory device and method of manufacturing the same
    63.
    发明申请
    Non-volatile memory device and method of manufacturing the same 失效
    非易失性存储器件及其制造方法

    公开(公告)号:US20080105915A1

    公开(公告)日:2008-05-08

    申请号:US11605317

    申请日:2006-11-29

    CPC classification number: H01L29/7881 H01L29/66825

    Abstract: A semiconductor device may include a tunnel insulating layer disposed on an active region of a substrate, field insulating patterns disposed in surface portions of the substrate to define the active region, each of the field insulating patterns having an upper recess formed at an upper surface portion thereof, a stacked structure disposed on the tunnel insulating layer, and impurity diffusion regions disposed at surface portions of the active region adjacent to the stacked structure.

    Abstract translation: 半导体器件可以包括设置在衬底的有源区上的隧道绝缘层,设置在衬底的表面部分中以限定有源区的场绝缘图案,每个场绝缘图案具有形成在上表面部分的上凹部 设置在隧道绝缘层上的堆叠结构,以及设置在与堆叠结构相邻的有源区的表面部分处的杂质扩散区。

    Trench Isolation Methods, Methods of Forming Gate Structures Using the Trench Isolation Methods and Methods of Fabricating Non-Volatile Memory Devices Using the Trench Isolation Methods
    66.
    发明申请
    Trench Isolation Methods, Methods of Forming Gate Structures Using the Trench Isolation Methods and Methods of Fabricating Non-Volatile Memory Devices Using the Trench Isolation Methods 审中-公开
    沟槽隔离方法,使用沟槽隔离方法形成栅极结构的方法和使用沟槽隔离方法制造非易失性存储器件的方法

    公开(公告)号:US20080044981A1

    公开(公告)日:2008-02-21

    申请号:US11769042

    申请日:2007-06-27

    CPC classification number: H01L21/76232

    Abstract: Methods of fabricating semiconductor devices including forming a mask pattern on a semiconductor substrate are provided. The mask pattern defines a first opening that at least partially exposes the semiconductor substrate and includes a pad oxide layer and a nitride layer pattern on the pad oxide layer pattern. The nitride layer has a line width substantially larger than the pad oxide layer pattern. A second opening that is connected to the first opening is formed by at least partially removing a portion of the semiconductor substrate exposed through the first opening. The second opening has a sidewall that has a first inclination angle and at least partially exposing the semiconductor substrate. A trench connected to the second opening is formed by etching a portion of the semiconductor substrate exposed through the second opening using the mask pattern as an etch mask. The trench is substantially narrower than the second opening and has a sidewall that has a second inclination angle that is substantially larger than the first inclination angle.

    Abstract translation: 提供制造包括在半导体衬底上形成掩模图案的半导体器件的方法。 掩模图案限定了至少部分地暴露半导体衬底并且在衬垫氧化物层图案上包括衬垫氧化物层和氮化物层图案的第一开口。 氮化物层具有基本上大于衬垫氧化物层图案的线宽。 通过至少部分去除通过第一开口暴露的半导体衬底的一部分,形成连接到第一开口的第二开口。 第二开口具有具有第一倾斜角并且至少部分地暴露半导体衬底的侧壁。 通过使用掩模图案蚀刻通过第二开口暴露的半导体衬底的一部分来形成连接到第二开口的沟槽作为蚀刻掩模。 沟槽基本上比第二开口窄,并且具有侧壁,该侧壁的第二倾斜角度基本上大于第一倾斜角度。

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