公开(公告)号：US20070000838A1

公开(公告)日：2007-01-04

申请号：US11404496

申请日：2006-04-14

申请人： Chi-yuan Shih ,  Yu-Chong Tai ,  Jun Xie ,  Darron Young ,  Po-Jui Chen

发明人： Chi-yuan Shih ,  Yu-Chong Tai ,  Jun Xie ,  Darron Young ,  Po-Jui Chen

IPC分类号： B01D15/08

CPC分类号： B01D15/22 ,  G01N30/02 ,  G01N30/461 ,  G01N30/466 ,  G01N30/6095 ,  G01N30/78 ,  G01N30/96 ,  G01N2030/524 ,  Y10T29/49826 ,  B01D15/363 ,  B01D15/3804 ,  B01D15/362 ,  B01D15/34 ,  B01D15/325 ,  B01D15/361

摘要： Systems and methods for monitoring analytes in real time using integrated chromatography systems and devices. Integrated microfluidic liquid chromatography devices and systems include multiple separation columns integrated into a single substrate. Using such a device, parallel analysis of multiple samples can be performed simultaneously and/or sequential analysis of a single sample can be performed simultaneously on a single chip or substrate. The devices and systems are well suited for use in high pressure liquid chromatography (HPLC) applications. HPLC chips and devices including embedded parylene channels can be fabricated using a single mask process.

摘要翻译： 使用集成色谱系统和设备实时监测分析物的系统和方法。 集成的微流体液相色谱装置和系统包括集成到单个底物中的多个分离柱。 使用这样的器件，可以同时执行多个样本的并行分析和/或可以在单个芯片或衬底上同时执行单个样本的顺序分析。 该装置和系统非常适用于高压液相色谱（HPLC）应用。 包括嵌入式聚对二甲苯通道的HPLC芯片和器件可以使用单一掩模工艺制造。

公开(公告)号：US20060255293A1

公开(公告)日：2006-11-16

申请号：US11408809

申请日：2006-04-21

申请人： Yu-Chong Tai ,  Damien Rodger ,  Wen Li ,  Angela Tooker

发明人： Yu-Chong Tai ,  Damien Rodger ,  Wen Li ,  Angela Tooker

IPC分类号： G21G5/00 ,  C23C16/00

CPC分类号： B05D3/0254 ,  B05D1/60 ,  H01L21/312 ,  H01L21/76801 ,  H01L21/76826 ,  H01L21/76828

摘要： Systems and methods for improving the adherence of poorly-adherent parylene-to-parylene films or layers and/or altering the water and chemical permeability of the parylene layers. A device having two or more parylene layers is heated in a reduced pressure treatment chamber at a temperature above the deposition temperature of the parylene (e.g., from about room temperature to several hundreds of degrees Celsius) for an extended period of time (e.g., a few hours up to several days). The methods of the present invention have been shown to convert poorly-adherent and/or water-permeable films to optimally-adherent and/or relatively water-impermeable films.

摘要翻译： 用于改善不良的对二甲苯对聚对二甲苯薄膜或层的粘附性和/或改变聚对二甲苯层的水和化学渗透性的系统和方法。 具有两个或更多个聚对二甲苯层的装置在减压处理室中在高于聚对二甲苯的沉积温度（例如从约室温至几百摄氏度）的温度下加热一段时间（例如， 几个小时到几天）。 已经显示出本发明的方法将不良粘附和/或水渗透膜转化成最佳粘附和/或相对不透水的膜。

公开(公告)号：US20050254673A1

公开(公告)日：2005-11-17

申请号：US11179464

申请日：2005-07-13

申请人： Wen Hsuan Hsieh ,  Yu-Chong Tai

发明人： Wen Hsuan Hsieh ,  Yu-Chong Tai

IPC分类号： B81B3/00 ,  H04R19/01 ,  H04R25/00

CPC分类号： B81C1/00158 ,  B81B2201/0257 ,  B81B2203/0127 ,  H04R19/016

摘要： High performance MEMS thin film electret microphones, components and methods for making the same are disclosed. The microphones generally include a transducer diaphragm including an IC-compatible membrane support structure, a membrane layer formed on the membrane support structure, and a first electrode; a transducer back plate having a second electrode; and an electret layer formed on at least one of the transducer diaphragm or the transducer back plate. The transducer diaphragm and transducer back plate are fabricated using micromachining techniques and are generally compatible with microelectronics. The microphones generally have high open-circuit sensitivities, low noise levels, and low total harmonic distortion.

摘要翻译： 公开了用于制造高性能MEMS薄膜驻极体麦克风，组件和方法。 麦克风通常包括换能器膜片，其包括IC兼容膜支撑结构，形成在膜支撑结构上的膜层和第一电极; 传感器背板，具有第二电极; 以及形成在所述换能器隔膜或所述换能器背板中的至少一个上的驻极体层。 传感器隔膜和传感器背板使用微加工技术制造，并且通常与微电子学兼容。 麦克风通常具有高开路灵敏度，低噪音水平和低总谐波失真。

公开(公告)号：US06825539B2

公开(公告)日：2004-11-30

申请号：US10403732

申请日：2003-03-31

申请人： Yu-Chong Tai ,  Yong Xu

发明人： Yu-Chong Tai ,  Yong Xu

IPC分类号： H01L2100

CPC分类号： B81C1/00246 ,  A61B2562/028 ,  A61B2562/164 ,  B81C2203/0735 ,  G01L9/0055 ,  G01M9/065

摘要： An IC-integrated, flexible, shear-stress sensor skin is made by providing a wafer with integrated circuits and sensor elements which are fabricated in the wafer, disposing a first polymer layer on the wafer and sensor elements to provide mechanical support for the sensor elements, defining a cavity below the sensor elements to provide thermal isolation, while the sensor element remains supported by the first polymer layer, and isolating the sensor elements into a plurality of islands defined in the wafer, so that the islands, with at least one sensor element on at least one of the islands, and the integrated circuits form the IC-integrated, flexible, shear-stress sensor skin. The invention is an IC-integrated, flexible, sensor skin made according to the method.

摘要翻译： IC集成的，灵活的剪切应力传感器外壳是通过在晶片上提供集成电路和传感器元件来制造的，所述集成电路和传感器元件在晶片上制造，在晶片上设置第一聚合物层和传感器元件以为传感器元件提供机械支撑 ，在所述传感器元件下方限定一个空腔以提供热隔离，同时所述传感器元件保持由所述第一聚合物层支撑，并且将所述传感器元件隔离成限定在所述晶片中的多个岛，使得所述岛与至少一个传感器 元件在至少一个岛上，并且集成电路形成IC集成的，灵活的剪切应力传感器皮肤。 本发明是根据该方法制造的IC集成的，灵活的传感器皮肤。

公开(公告)号：US06713908B1

公开(公告)日：2004-03-30

申请号：US09281831

申请日：1999-03-30

申请人： Yu-Chong Tai ,  John A. Wright ,  Gerald Lilienthal

发明人： Yu-Chong Tai ,  John A. Wright ,  Gerald Lilienthal

IPC分类号： H02K100

CPC分类号： H01H1/0036 ,  H01H50/005 ,  Y10S310/06

摘要： A DC motor is commutated by rotating a magnetic rotor to induce a magnetic field in at least one magnetostatic relay in the motor. Each relay is activated in response to the magnetic field to deliver power to at least one corresponding winding connected to the relay. In some cases, each relay delivers power first through a corresponding primary winding and then through a corresponding secondary winding to a common node. Specific examples include a four-pole, three-phase motor in which each relay is activated four times during one rotation of the magnetic rotor.

摘要翻译： 通过旋转磁性转子以在电动机中的至少一个静磁继电器中引起磁场，使直流电动机换向。 每个继电器响应于磁场被激活以将功率传递到连接到继电器的至少一个相应的绕组。 在某些情况下，每个继电器首先通过相应的初级绕组传递功率，然后通过相应的次级绕组传递到公共节点。 具体实例包括四极三相电动机，其中每个继电器在磁转子的一个旋转期间被激活四次。

公开(公告)号：US06709604B2

公开(公告)日：2004-03-23

申请号：US09792752

申请日：2001-02-22

申请人： Yu-Chong Tai ,  Xuan-Qi Wang

发明人： Yu-Chong Tai ,  Xuan-Qi Wang

IPC分类号： C23F100

CPC分类号： F16K99/0001 ,  B81B3/001 ,  B81B2201/054 ,  B81B2203/0127 ,  B81C2201/115 ,  F15C5/00 ,  F16K15/144 ,  F16K99/0009 ,  F16K99/0034 ,  F16K99/0057 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K2099/0094 ,  Y10T137/7888 ,  Y10T137/7895

摘要： The present disclosure describes a Parylene micro check valve including a micromachined silicon valve seat with a roughened top surface to which a membrane cap is anchored by twist-up tethers. The micro check valve is found to exhibit low cracking pressure, high reverse pressure, low reverse flow leakage, and negligible membrane-induced flow resistance when used as a valve over a micro orifice through which flow liquid and gas fluids.

摘要翻译： 本公开内容描述了一种Parylene微型止回阀，其包括具有粗糙顶表面的微加工硅阀座，膜帽通过扭绞系绳锚定在该顶部表面上。 发现微型止回阀在用作流动液体和气体流体的微孔时用作阀门时，具有低开启压力，高反向压力，低逆流泄漏以及可忽略的膜引起的流动阻力。

公开(公告)号：US06698798B2

公开(公告)日：2004-03-02

申请号：US09835299

申请日：2001-04-12

申请人： Yu-Chong Tai ,  Tze-Jung Yao

发明人： Yu-Chong Tai ,  Tze-Jung Yao

IPC分类号： F16J1502

CPC分类号： B81B1/006 ,  B01J2219/00804 ,  B01L3/5027 ,  B01L3/565 ,  B01L2200/027 ,  B01L2300/0838 ,  B81B2201/058 ,  B81B2201/13 ,  F16J15/106

摘要： A micromachined O-ring is described. The O-ring can be formed for use in micromachined microfluidic devices.

摘要翻译： 描述了微加工O形环。 O形环可以形成用于微加工微流体装置。

公开(公告)号：US06639713B2

公开(公告)日：2003-10-28

申请号：US09843024

申请日：2001-04-25

申请人： Chen-Wei Chiu ,  Aramais Avakian ,  Tom Tsao ,  Fukang Jiang ,  Jeff Dickson ,  Yu-Chong Tai

发明人： Chen-Wei Chiu ,  Aramais Avakian ,  Tom Tsao ,  Fukang Jiang ,  Jeff Dickson ,  Yu-Chong Tai

IPC分类号： G02F129

CPC分类号： G02B6/3566 ,  B81B3/0051 ,  B81B2201/031 ,  B81B2201/045 ,  B81B2203/0118 ,  B81B2203/058 ,  B81C1/00214 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3584 ,  G02B6/3594

摘要： An apparatus at least partially intercepts a plurality of light beams propagating along a respective plurality of beam paths. The apparatus includes a single crystal silicon substrate and an array including a plurality of modules. Each module includes a reflector comprising single crystal silicon and a reflector surface lying in a reflector plane substantially perpendicular to the substrate surface. Each module further includes a reflector support which mounts the reflector to move substantially within the reflector plane with a displacement component along the surface normal direction of the substrate surface. Each module further includes a reflector driver responsive to electrical current to selectively move the reflector between a first position and a second position.

公开(公告)号：US06536213B2

公开(公告)日：2003-03-25

申请号：US09884499

申请日：2001-06-18

申请人： Yu-Chong Tai ,  Xing Yang ,  Charles Grosjean ,  Xuan-Qi Wang

发明人： Yu-Chong Tai ,  Xing Yang ,  Charles Grosjean ,  Xuan-Qi Wang

IPC分类号： F01B2900

CPC分类号： F15C5/00 ,  B81B3/0024 ,  B81B2201/036 ,  B81B2201/054 ,  F04B19/24 ,  F04B43/043 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0034 ,  F16K99/0036 ,  F16K99/0044 ,  F16K99/0061 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/008 ,  F16K2099/0094 ,  Y10T137/7737 ,  Y10T137/7879

摘要： A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon nitride to reduce the power. The device can be used to form a valve or a pump. Another embodiment forms a composite silicone/parylene membrane. Another feature uses a valve seat that has concentric grooves for better sealing operation.

公开(公告)号：US06526823B2

公开(公告)日：2003-03-04

申请号：US09727017

申请日：2000-11-29

申请人： Yu-Chong Tai ,  Qiao Lin ,  Shuyun Wu

发明人： Yu-Chong Tai ,  Qiao Lin ,  Shuyun Wu

IPC分类号： G01F168

CPC分类号： G01F1/6845

摘要： A sensor assembly has a substrate with a microchannel formed therein through which a fluid can flow. At least one sensor is proximate to the microchannel. The temperature of the at least one sensor or fluid may indicate the condition of the fluid, for example, the flow rate and the presence of gas bubbles and particulate substances.

摘要翻译： 传感器组件具有其中形成有微通道的基底，流体可以通过该通道流动。 至少一个传感器靠近微通道。 至少一个传感器或流体的温度可以指示流体的状态，例如流速和气泡和颗粒物质的存在。