摘要:
A semiconductor device includes semiconductor chips differing in withstand voltage or in noise immunity, such as a multi-chip module. The semiconductor device includes first and second semiconductor chips mounted over a package substrate which has bonding pads arranged along the edges. The first semiconductor chip includes bonding pads for analog signals, and the second semiconductor chip includes bonding pads for high-voltage signals. The edges along which the bonding pads for analog signals are arranged and the edges along which the bonding pads for high-voltage signals are arranged are disposed along mutually different edges of the package substrate. Adjoining of electrodes or wirings for high voltage signals and those for analog signals over the package substrate can be easily avoided, and SI deterioration can be thereby restrained.
摘要:
In a stealth dicing process for a semiconductor device with a low dielectric constant layer, the occurrence of poor appearance such as a defective shape or discoloration in the layer is reduced or prevented as follows. A low dielectric constant layer is formed in an interlayer insulating layer formed on the main surface of a semiconductor wafer. A laser beam is focused on the inside of the wafer from the reverse side of the wafer in order to form modified regions selectively. Each modified region is formed in a way to contact, or partially get into, the low dielectric constant layer. In this formation process, the semiconductor wafer is cooled by a cooling element. This reduces or prevents discoloration of the low dielectric constant layer which might occur due to the heat of a laser beam.
摘要:
A sealing device in which a good lubricating oil film is formed along the entire circumference of a sliding surface. The sealing device (1) is fitted in an annular groove formed in either of two elements that are a housing having a shaft hole and a shaft inserted through the shaft hole, and the sealing device (1) seals an annular gap between the two elements. The sealing device (1) has a seal ring (2) sliding against the other element by relative axial movements of the two elements. In the seal ring (2), on each of axially opposite ends of a sliding surface (20) sliding against the other element, there are formed grooves (22) extending from an end surface (21) of the seal ring (2) toward the axial center of a sliding surface (20). Further, in the seal ring (2), the boundary between each groove (22) and the sliding surface (20) is formed only by lines inclined relative to the direction of sliding of the sliding surface (20), and grooves (23) are circumferentially adjacently arranged in the seal ring (2) so that regions each having the boundary formed by the inclined lines are continuous along the entire circumference of the sliding surface (20).
摘要:
A target for sputtering or a tablet for ion plating, which enables to attain high rate film-formation and a nodule-less, an oxide sintered body suitable for obtaining the same and a production method therefor, and a transparent conductive film having low absorption of blue light and low specific resistance, obtained by using the same.It is provided by an oxide sintered body having indium and gallium as an oxide, characterized in that an In2O3 phase with a bixbyite-type structure forms a major crystal phase, and a GaInO3 phase of a β-Ga2O3-type structure, or GaInO3 phase and a (Ga, In)2O3 phase is finely dispersed therein, as a crystal grain having an average particle diameter of equal to or smaller than 5 μm, and a content of gallium is equal to or higher than 10% by atom and below 35% by atom as atom number ratio of Ga/(In+Ga) or the like.
摘要翻译:用于溅射的靶或用于离子镀的片,其能够获得高速成膜和无结节,适于获得其的氧化物烧结体及其制造方法,以及具有低吸收率的透明导电膜 蓝光和低比电阻,通过使用它们获得。 由具有铟和镓作为氧化物的氧化物烧结体提供,其特征在于具有双晶型结构的In 2 O 3相形成主晶相,并且具有Ga 2 O 3型结构的GaInO 3相或GaInO 3 相和(Ga,In)2 O 3相精细分散在其中,作为平均粒径等于或小于5μm的晶粒,并且镓的含量等于或高于10原子%以下 35原子数为原子数比Ga /(In + Ga)等。
摘要:
A serial data transfer apparatus includes a transport controller that performs a process of a transport layer, a link controller that performs a process of a link layer, and a physical layer circuit that performs a process of a physical layer. The serial data transfer apparatus transmits and receives data with a destination apparatus via a serial bus. The link controller outputs idle data, which is received from the destination apparatus, to the physical layer circuit, and stops to operate of a unit responsible for generating data to transmit to the destination apparatus while outputting the idle data to the physical layer circuit. This enables to output idle data defined in the standard in an idle period of the serial data transfer apparatus and also reduce the power consumption.
摘要:
To divide a semiconductor wafer by stealth dicing, a test pad in a cutting region and an alignment target are collectively arranged along one side in a width direction of the cutting region, and a laser beam for forming a modified region is irradiated to a position away in plane from the test pad and the alignment target Am. In this manner, defects in cutting shape in a cutting process of a semiconductor wafer using stealth dicing can be reduced or prevented.
摘要:
A sintered body target for transparent conductive film fabrication is chiefly composed of Ga, In, and O; has a Ga content ranging from 49.1 at. % to 65 at. % with respect to all metallic atoms; is chiefly constructed from a β-GaInO3 phase and an In2O3 phase; provides an In2O3 phase (400)/β-GaInO3 phase (111) X-ray diffraction peak intensity ratio that is 45% or less; and has a density of 5.8 g/cm3 or more. A transparent conductive film obtained by using a sputtering technique is an amorphous oxide transparent conductive film chiefly composed of Ga, In, and O, so that a Ga content ranges from 49.1 at. % to 65 at. % with respect to all metallic atoms, a work function is 5.1 eV or more, and a refractive index for light with a wavelength of 633 nm ranges from 1.65 to 1.85.
摘要翻译:用于透明导电膜制造的烧结体靶主要由Ga,In和O组成; Ga含量范围从49.1英尺。 至65岁。 相对于所有金属原子的%; 主要由β-GaInO 3相和In 2 O 3相构成; 提供45%以下的In2O3相(400)/β-GaInO3相(111)X射线衍射峰强度比; 并且具有5.8g / cm 3以上的密度。 通过使用溅射技术获得的透明导电膜是主要由Ga,In和O组成的非晶氧化物透明导电膜,使得Ga含量范围为49.1at。 至65岁。 相对于所有金属原子,功函数为5.1eV以上,波长633nm的光的折射率为1.65〜1.85。
摘要:
A waveguide type optical control element which has an optical waveguide made of an insulating material having an electro-optic effect or a thermo-optic effect, and a control electrode provided in contact with or proximity to the optical waveguide; the optical waveguide having a propagation loss which is 1 dB/cm or less at wavelengths of from 1.3 μm to 1.6 μm. The control electrode is constituted of a conductive oxide film having a carrier electron concentration of 5.5×1020/cm3 or less and a resistivity of 9.5×10−4 Ωcm or less, and the conductive oxide film has a coefficient of extinction of light waves, of 0.240 or less at a wavelength of 1.55 μm.
摘要:
The target for the transparent conductive thin film having indium oxide as its major component and containing tungsten and/or molybdenum, obtained by forming a body of indium oxide powder, and tungsten oxide power and/or molybdenum oxide powder and then heating or sintering the formed body such that the thin film after sputtering has indium oxide as the main component and contains tungsten and/or molybdenum with an atomic ratio (W+Mo)/In of 0.0040 to 0.0470, whereby a transparent conductive thin film having excellent surface smoothness and low specific resistance of 6.0×10−4 Ω·cm or less, and whose surface smoothness and specific resistance properties do not change even when heated at 170° C. is provided.
摘要:
The object of this invention is to provide a transparent plastic substrate having better surface smoothness than prior substrates, as well as having high transparency and high gas-barrier characteristics, and to provide a flexible display element using that uses this substrate. For that purpose, a gas-barrier transparent plastic substrate is obtained such that a transparent oxide film comprising either of a tin-oxide amorphous film, or tin-oxide amorphous film containing at least one added element that is selected from among the group of silicon, germanium, aluminum, cerium and indium, at a ratio of 0.2 to 45 atomic % with respect to the total of added element and tin, is formed as gas-barrier layer on at least one surface of a plastic film base material. It is possible that the gas-barrier transparent plastic substrate be formed as bilayer where a silicon-oxide film or silicon-oxynitride film is formed on the transparent oxide film. When a transparent electrode film is further formed on it, a flexible display element can be obtained.