Spin chuck for thin wafer cleaning
    84.
    发明授权
    Spin chuck for thin wafer cleaning 有权
    旋转夹头用于薄晶圆清洗

    公开(公告)号:US09153462B2

    公开(公告)日:2015-10-06

    申请号:US12964097

    申请日:2010-12-09

    CPC classification number: H01L21/67051 H01L21/68728

    Abstract: A device and system for thin wafer cleaning is disclosed. A preferred embodiment comprises a spin chuck having at least three holding clamps. A thin wafer with a wafer frame is mounted on the spin chuck through a tape layer. When the holding clamps are unlocked, there is no interference with the removal and placement of the wafer frame. On the other hand, when the holding clamps are locked, the holding clamps are brought into contact with the outer edge of the wafer frame so as to prevent the wafer frame from moving laterally. Furthermore, the shape of the holding clamps in a locked position is capable of preventing the wafer frame from moving vertically.

    Abstract translation: 公开了用于薄晶片清洁的装置和系统。 优选实施例包括具有至少三个保持夹具的旋转卡盘。 具有晶片框架的薄晶片通过带层安装在旋转卡盘上。 当保持夹具解锁时,不会干扰晶片框架的移除和放置。 另一方面,当保持夹具被锁定时,保持夹具与晶片框架的外边缘接触,以防止晶片框架横向移动。 此外,保持夹具处于锁定位置的形状能够防止晶片框架垂直移动。

    Micro-volume liquid ejection system
    87.
    发明授权
    Micro-volume liquid ejection system 有权
    微量液体喷射系统

    公开(公告)号:US08900530B2

    公开(公告)日:2014-12-02

    申请号:US11666032

    申请日:2004-11-22

    Abstract: The present invention relates to a micro-volume liquid ejection system, including an air pressure module, a micro-ejection unit which is connected with the air pressure module by a conduit, and a control circuit which is connected with the air pressure module and the micro-ejection unit respectively. The air is used as the pressure medium, resulting in improved cleaning process and reduced sample waste. The present invention includes an electric control circuit to pick up sample, eject sample and clean the conduits automatically, and enables handling of a multiplicity of samples. The present invention can be used for transferring or dispensing micro volume liquid including biological liquid on a nL and μL scale.

    Abstract translation: 微体积液体喷射系统技术领域本发明涉及一种微体积液体喷射系统,包括空气压力模块,通过导管与空气压力模块连接的微型喷射单元,以及与空气压力模块连接的控制电路, 微型喷射装置。 空气用作压力介质,从而改善清洗过程并减少样品废物。 本发明包括一个电子控制电路,用于拾取样品,抽出样品并自动清洁导管,并能够处理多个样品。 本发明可用于以nL和μL标度转移或分配包括生物液体的微量体积液体。

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