Chemical-mechanical planarization composition having PVNO and associated method for use
    81.
    发明申请
    Chemical-mechanical planarization composition having PVNO and associated method for use 审中-公开
    具有PVNO的化学机械平面化组合物及其相关使用方法

    公开(公告)号:US20050079803A1

    公开(公告)日:2005-04-14

    申请号:US10683231

    申请日:2003-10-10

    CPC classification number: H01L21/3212 C09G1/02 C09K3/1463

    Abstract: A composition and associated method for chemical mechanical planarization (or other polishing) are described. The composition comprises an abrasive and a polyvinylpyridine-N-oxide polymer. The composition possesses high selectivities for metal and barrier material removal in metal CMP. The composition may further comprise an oxidizing agent in which case the composition is particularly useful in conjunction with the associated method for metal CMP applications (e.g., copper CMP).

    Abstract translation: 描述了用于化学机械平面化(或其它抛光)的组合物和相关方法。 组合物包含研磨剂和聚乙烯基吡啶-N-氧化物聚合物。 该组合物在金属CMP中具有很高的金属选择性和阻隔材料去除性。 组合物还可以包含氧化剂,在这种情况下,组合物特别适用于金属CMP应用的相关方法(例如,铜CMP)。

    Chemical-mechanical planarization composition with nitrogen containing polymer and method for use
    82.
    发明申请
    Chemical-mechanical planarization composition with nitrogen containing polymer and method for use 有权
    含氮聚合物的化学机械平面化组合物及其使用方法

    公开(公告)号:US20050079718A1

    公开(公告)日:2005-04-14

    申请号:US10683258

    申请日:2003-10-10

    CPC classification number: H01L21/3212 C09G1/02 C09K3/1409 C09K3/1463

    Abstract: A composition and associated method for chemical mechanical planarization (or other polishing) are described. The composition comprises an organometallic-modified colloidal abrasive and a nitrogen-containing polymer compound (e.g., a polyalkyleneimine, such as polyamidopolyethyleneimine). The composition possesses both high stability towards gelling and/or solids formation and high selectivity for metal removal in metal CMP. The composition may further comprise an oxidizing agent in which case the composition is particularly useful in conjunction with the associated method for metal CMP applications (e.g., copper CMP).

    Abstract translation: 描述了用于化学机械平面化(或其它抛光)的组合物和相关方法。 该组合物包含有机金属改性的胶体磨料和含氮高分子化合物(例如,聚亚烷基亚胺,如聚酰胺聚乙烯亚胺)。 该组合物具有对胶凝和/或固体形成的高稳定性以及金属CMP中金属去除的高选择性。 组合物还可以包含氧化剂,在这种情况下,组合物特别适用于金属CMP应用的相关方法(例如,铜CMP)。

    Mask design and OPC for device manufacture
    86.
    发明授权
    Mask design and OPC for device manufacture 失效
    面罩设计和OPC设备制造

    公开(公告)号:US08778605B2

    公开(公告)日:2014-07-15

    申请号:US13762083

    申请日:2013-02-07

    CPC classification number: G03F1/36 G03F1/68 G06F17/50

    Abstract: Described herein is mask design and modeling for a set of masks to be successively imaged to print a composite pattern on a substrate, such as a semiconductor wafer. Further described herein is a method of double patterning a substrate with the set of masks. Also described herein is a method of correcting a drawn pattern of one of the mask levels based on a predicted pattern contour of the other of the mask levels. Also described herein is a method of modeling a resist profile contour for a mask level in which photoresist is applied onto a inhomogeneous substrate, as well as method of predicting a resist profile of a Boolean operation of two masks.

    Abstract translation: 这里描述的是要连续成像以在诸如半导体晶片的衬底上打印复合图案的一组掩模的掩模设计和建模。 本文进一步描述的是使用该组掩模对衬底进行双重图案化的方法。 这里还描述了一种基于掩模级别中的另一个的预测图案轮廓来校正掩模级中的一个的绘制图案的方法。 本文还描述了一种对光致抗蚀剂施加到非均匀衬底上的掩模级的抗蚀剂轮廓轮廓建模方法,以及预测两个掩模的布尔运算的抗蚀剂轮廓的方法。

    Highly dilutable polishing concentrates and slurries
    87.
    发明授权
    Highly dilutable polishing concentrates and slurries 有权
    高度可稀释的抛光浓缩液和浆液

    公开(公告)号:US08404143B2

    公开(公告)日:2013-03-26

    申请号:US13402365

    申请日:2012-02-22

    CPC classification number: H01L21/30625 C09G1/02 H01L21/3212 H01L21/7684

    Abstract: The present disclosure provides a concentrate for use in chemical mechanical polishing slurries, and a method of diluting that concentrate to a point of use slurry. The concentrate comprises abrasive, complexing agent, and corrosion inhibitor, and the concentrate is diluted with water and oxidizer. These components are present in amounts such that the concentrate can be diluted at very high dilution ratios, without affecting the polishing performance.

    Abstract translation: 本公开提供了用于化学机械抛光浆料的浓缩物,以及将该浓缩物稀释到使用点浆料的方法。 浓缩物包括研磨剂,络合剂和缓蚀剂,浓缩物用水和氧化剂稀释。 这些组分的存在量使得浓缩物可以以非常高的稀释比稀释,而不影响抛光性能。

    HIGHLY DILUTABLE POLISHING CONCENTRATES AND SLURRIES
    88.
    发明申请
    HIGHLY DILUTABLE POLISHING CONCENTRATES AND SLURRIES 有权
    高灵敏度的抛光浓度和流动性

    公开(公告)号:US20120145951A1

    公开(公告)日:2012-06-14

    申请号:US13402365

    申请日:2012-02-22

    CPC classification number: H01L21/30625 C09G1/02 H01L21/3212 H01L21/7684

    Abstract: The present disclosure provides a concentrate for use in chemical mechanical polishing slurries, and a method of diluting that concentrate to a point of use slurry. The concentrate comprises abrasive, complexing agent, and corrosion inhibitor, and the concentrate is diluted with water and oxidizer. These components are present in amounts such that the concentrate can be diluted at very high dilution ratios, without affecting the polishing performance.

    Abstract translation: 本公开提供了用于化学机械抛光浆料的浓缩物,以及将该浓缩物稀释到使用点浆料的方法。 浓缩物包括研磨剂,络合剂和缓蚀剂,浓缩物用水和氧化剂稀释。 这些组分的存在量使得浓缩物可以以非常高的稀释比稀释,而不影响抛光性能。

    Mobile cantilever door-type container inspection system
    89.
    发明授权
    Mobile cantilever door-type container inspection system 有权
    移动式悬臂门式集装箱检验系统

    公开(公告)号:US07663109B2

    公开(公告)日:2010-02-16

    申请号:US11955711

    申请日:2008-03-12

    CPC classification number: G01V5/0008 G01V5/0016

    Abstract: The present invention discloses a mobile cantilever door-type container inspection system, in the art of radiation scanning imaging inspection technology. The system according to the present invention comprises a moveable scanning apparatus formed by a scanning frame and a remote control device, wherein the scanning frame comprises a radiation source and some detectors, wherein the radiation source or an apparatus cabin wherein the radiation source is disposed is connected with an L-shaped cantilever structure to form a door-type scanning frame, wherein beneath the radiation source or the apparatus cabin wherein the radiation source is disposed are provided with rollers that can reciprocatingly move on rails and are controlled by drive means. The detectors are disposed in a cross beam and a vertical beam of the cantilever structure of the door-type scanning frame. Rays of the radiation source are right in alignment with rows of detectors in the cantilever structure. The container truck to be inspected can pass through the door-like frame formed by the door-type scanning frame. Due to the cantilever structure, the inspection system is advantageous in stable operation, good-quality images, and high reliability.

    Abstract translation: 本发明公开了一种在辐射扫描成像检测技术领域的移动式悬臂门式容器检查系统。 根据本发明的系统包括由扫描框架和遥控装置形成的可移动扫描装置,其中扫描框架包括辐射源和一些检测器,其中辐射源或其中设置辐射源的装置舱是 与L形悬臂结构连接以形成门型扫描框架,其中设置放射源的辐射源或设备舱下方设置有能够在轨道上往复运动并由驱动装置控制的辊。 检测器设置在门型扫描框架的悬臂结构的横梁和垂直梁中。 辐射源的光线与悬臂结构中的检测器行对齐。 要检查的集装箱车可以通过由门型扫描架形成的门状框架。 由于悬臂结构,检测系统运行平稳,图像质量好,可靠性高。

    Mask design using library of corrections
    90.
    发明授权
    Mask design using library of corrections 失效
    面具设计使用修正库

    公开(公告)号:US07603648B2

    公开(公告)日:2009-10-13

    申请号:US11174336

    申请日:2005-06-29

    CPC classification number: G06F17/5081 G03F1/36 G06F2217/12 Y02P90/265

    Abstract: Systems, techniques, and approaches to quickly generate mask patterns, synthesize near-fields, and design masks. In one aspect, a mask may be designed by modeling the transmitted field using a library of corrections and a fast field model.

    Abstract translation: 快速生成掩模图案,合成近场和设计蒙版的系统,技术和方法。 在一个方面,可以通过使用校正库和快速场模型对所发送的场进行建模来设计掩模。

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