MICRO-REFLECTRON FOR TIME-OF-FLIGHT MASS SPECTROMETER
    86.
    发明申请
    MICRO-REFLECTRON FOR TIME-OF-FLIGHT MASS SPECTROMETER 审中-公开
    用于飞行时间质谱仪的微电子

    公开(公告)号:US20140001353A1

    公开(公告)日:2014-01-02

    申请号:US14017499

    申请日:2013-09-04

    Abstract: A micro-reflectron for a time-of-flight mass spectrometer including a substrate and integrated with the volume of the substrate, means for application of a potential gradient in a volume suitable for constituting a flight zone of the ions. The means of application includes at least two polarization electrodes and a wall of at least one resistive material that can be polarized between these electrodes so as to generate a continuous potential gradient, itself providing the function of reflectron, this flight zone, these electrodes and this wall being obtained by the technology of microelectromechanical systems (MEMS) and this micro-reflectron having a thickness of less than 5 millimetres while its other dimensions are less than 10 times this thickness.

    Abstract translation: 用于包括衬底并与衬底的体积整合的飞行时间质谱仪的微反射器是在适于构成离子的飞行区域的体积中施加电位梯度的装置。 施加装置包括至少两个极化电极和至少一个电阻材料的壁,其可以在这些电极之间极化,以便产生连续的电势梯度,其本身提供反射器的功能,该飞行区域,这些电极和这些电极 通过微机电系统(MEMS)的技术获得壁,该微反射器的厚度小于5毫米,而其它尺寸小于该厚度的10倍。

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