公开(公告)号：US08963083B2

公开(公告)日：2015-02-24

申请号：US13960393

申请日：2013-08-06

申请人： Matthias Firnkes ,  Stefan Lanio ,  Gerald Schönecker ,  Dieter Winkler

发明人： Matthias Firnkes ,  Stefan Lanio ,  Gerald Schönecker ,  Dieter Winkler

IPC分类号： H01J37/26 ,  H01J37/21 ,  H01J37/10 ,  H01J37/147

CPC分类号： H01J37/21 ,  H01J37/10 ,  H01J37/147 ,  H01J37/244 ,  H01J2237/24592

摘要： A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the first aperture opening has a concave shaped portion, particularly wherein the first aperture opening has a pincushion shape.

摘要翻译： 描述了用于检测信号光束的二次带电粒子检测装置。 该装置包括具有至少两个具有主动检测区域的检测元件的检测器装置，其中主动检测区域由间隙（G）分开，粒子光学器件被配置用于将信号光束分离成信号光束的第一部分并进入 信号光束的至少一个第二部分，并且被配置为聚焦信号光束的第一部分和信号光束的至少一个第二部分。 颗粒光学器件包括孔板和孔板中的至少第一内孔开口和孔板中的至少一个第二径向外孔开口，其中第一孔口具有凹形部分，特别地其中第一孔 开口有枕形。

公开(公告)号：US08563927B2

公开(公告)日：2013-10-22

申请号：US13196778

申请日：2011-08-02

申请人： Dieter Winkler ,  Stefan Lanio

发明人： Dieter Winkler ,  Stefan Lanio

IPC分类号： G21K7/00 ,  G01N23/04

CPC分类号： H01J37/09 ,  H01J2237/0206 ,  H01J2237/026 ,  H01J2237/28

摘要： A shielding member for a charged particle beam apparatus includes a conductive substrate; and a through hole extending through the conductive substrate. The conductive substrate is comprised of a material having a specific electrical resistivity in a range from about 106 Ωcm to about 1012 Ωcm.

摘要翻译： 带电粒子束装置的屏蔽构件包括导电基板; 以及延伸穿过导电基板的通孔。 导电衬底由具有约106Ω·cm至约1012Ω·cm范围内的特定电阻率的材料构成。

公开(公告)号：US20130118586A1

公开(公告)日：2013-05-16

申请号：US13296885

申请日：2011-11-15

申请人： Thomas JASINSKI

发明人： Thomas JASINSKI

IPC分类号： F15D1/00 ,  F16K27/00 ,  F16K31/00

CPC分类号： F16K3/188 ,  F16K51/02 ,  Y10T137/0318

摘要： A valve unit configured for a charged particle beam device having a beam path 2 is described. The valve unit includes a vacuum sealed valve housing 102 configured for a pressure difference between the inside of the valve housing and the outside of the valve housing, wherein the housing provides a beam path portion 103 for having a charged particle beam pass therethrough along the beam path, a valve positioning unit adapted for selectively providing a first movement of the valve housing such that the beam path portion is selectively moved into and out of the beam path, and at least one sealing element 122 configured for a second movement, wherein the second movement is different from the first movement.

摘要翻译： 描述了构造成具有光束路径2的带电粒子束装置的阀单元。 阀单元包括真空密封阀壳体102，该真空密封阀壳体构造用于在阀壳体的内部和阀壳体的外部之间的压力差，其中壳体提供用于使带电粒子束沿着光束通过的光束路径部分103 阀门定位单元，其适于选择性地提供阀壳体的第一运动，使得光束路径部分被选择性地移入和移出光束路径;以及至少一个构造成用于第二运动的密封元件122，其中第二 运动与第一动作不同。

公开(公告)号：US20110084219A1

公开(公告)日：2011-04-14

申请号：US12888978

申请日：2010-09-23

申请人： Pavel ADAMEC ,  Ivo LISKA ,  Gennadij GLUCHMAN ,  Milan SNABL

发明人： Pavel ADAMEC ,  Ivo LISKA ,  Gennadij GLUCHMAN ,  Milan SNABL

IPC分类号： G21K5/00

CPC分类号： H01J37/06 ,  H01J2237/022 ,  H01J2237/06316 ,  H01J2237/06341

摘要： A method of pre-treating an ultra high vacuum charged particle gun chamber by ion stimulated desorption is provided. The method includes generating a plasma for providing a plasma ion source, and applying a negative potential to at least one surface in the gun chamber, wherein the negative potential is adapted for extracting an ion flux from the plasma ion source to the at least one surface for desorbing contamination particles from the at least one surface by the ion flux impinging on the at least one surface.

摘要翻译： 提供了一种通过离子刺激解吸预处理超高真空带电粒子枪室的方法。 该方法包括产生用于提供等离子体离子源的等离子体，以及向枪室中的至少一个表面施加负电位，其中负电位适于将离子通量从等离子体离子源提取到至少一个表面 用于通过撞击在至少一个表面上的离子通量从至少一个表面解吸污染颗粒。

公开(公告)号：US07586093B2

公开(公告)日：2009-09-08

申请号：US10554572

申请日：2004-04-26

申请人： Hans-Peter Feuerbaum

发明人： Hans-Peter Feuerbaum

IPC分类号： A61N5/00 ,  G21G5/00 ,  G01N23/00 ,  G21K7/00

CPC分类号： G01N1/32 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/20 ,  H01J2237/31745

摘要： The invention refers to an apparatus (10) for inspecting a sample (12) of a specimen (14) by means of an electron beam (34) comprising a vacuum chamber (18); an ion beam device (20) for generating an ion beam (22) used for etching a sample (12) from the specimen (14) within said vacuum chamber (18); an electron beam device (30) having a scanning unit (32) for scanning the electron beam (34) across said specimen (14) within said vacuum chamber (18); said electron beam device (30) having a first detector (36) positioned to detect electrons (38) that are released from the specimen (14) in a backward direction with respect to the direction of the electron beam (34); and said electron beam device (30) having a second detector (40) positioned to detect electrons (42) that are released from the sample (12) of the specimen (14) in a forward direction with respect to the direction of the electron beam (34); and separation means (50; 52) within said vacuum chamber (18) to separate the sample (12) from the specimen (14) for the inspection of the sample (12) by means of the second detector (40). With the apparatus according to the invention, it is possible to perform a transmission inspection of a sample of a specimen, e.g. a thin slice of a semiconductor wafer, at a high throughput at comparably low costs.

摘要翻译： 本发明涉及一种用于通过包括真空室（18）的电子束（34）检查试样（14）的样品（12）的装置（10）。 用于产生用于在所述真空室（18）内从样品（14）蚀刻样品（12）的离子束（22）的离子束装置（20）; 具有扫描单元（32）的电子束装置（30），用于在所述真空室（18）内扫过所述试样（14）上的电子束（34）。 所述电子束装置（30）具有第一检测器（36），所述第一检测器（36）定位成检测相对于所述电子束（34）的方向从所述样品（14）沿相反方向释放的电子（38）。 并且所述电子束装置（30）具有第二检测器（40），所述第二检测器（40）定位成检测相对于电子束的方向从样品（14）的样品（12）向前方释放的电子（42） （34）; 以及在所述真空室（18）内的分离装置（50; 52），以将样品（12）与样品（14）分离，以便通过第二检测器（40）检查样品（12）。 利用根据本发明的装置，可以对样本的样本进行透射检查，例如， 半导体晶片的薄片，在相当低的成本下处于高产量。

公开(公告)号：US20090200484A1

公开(公告)日：2009-08-13

申请号：US12366390

申请日：2009-02-05

申请人： Juergen FROSIEN

发明人： Juergen FROSIEN

IPC分类号： H01J3/14

CPC分类号： H01J37/08 ,  H01J27/26 ,  H01J37/241 ,  H01J37/243 ,  H01J2237/002 ,  H01J2237/006 ,  H01J2237/061 ,  H01J2237/0807 ,  H01J2237/0827 ,  H01J2237/28 ,  H01J2237/317

摘要： A focused ion beam device is described. The focused ion beam device includes an ion beam column including an enclosure for housing a gas field ion source emitter with an emitter area for generating ions, an electrode for extracting ions from the gas field ion source emitter, one or more gas inlets adapted to introduce a first gas and a second gas to the emitter area, an objective lens for focusing the ion beam generated from the first gas or the second gas, a voltage supply for providing a voltage between the electrode and the gas field ion source emitter, and a controller for switching between a first voltage and a second voltage of the voltage supply for generating an ion beam of ions of the first gas or an ion beam of ions of the second gas.

摘要翻译： 描述了聚焦离子束装置。 聚焦离子束装置包括离子束柱，其包括用于容纳具有用于产生离子的发射极区域的气体场离子源发射器的外壳，用于从气体离子源发射器提取离子的电极，适于引入离子源的一个或多个气体入口 将第一气体和第二气体输送到发射器区域，用于聚焦由第一气体或第二气体产生的离子束的物镜，用于在电极和气体离子源发射器之间提供电压的电压源，以及 控制器，用于在电压源的第一电压和第二电压之间切换，用于产生第一气体的离子离子束或第二气体的离子离子束。

公开(公告)号：US07282711B2

公开(公告)日：2007-10-16

申请号：US10491939

申请日：2002-10-04

申请人： Dieter Winkler ,  Pavel Adamec ,  Achim Göhl ,  Helmut Banzhof

发明人： Dieter Winkler ,  Pavel Adamec ,  Achim Göhl ,  Helmut Banzhof

IPC分类号： H01J37/21

CPC分类号： H01J37/28 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/21 ,  H01J37/304 ,  H01J37/3174 ,  H01J2237/216 ,  H01J2237/2446 ,  H01J2237/2826 ,  H01J2237/30433 ,  H01J2237/3045

摘要： The invention provides electron multiple beam devices (1) for probing or structuring a non-transparent specimen (20) with primary electron beams (14) with an array of electron beam sources (3) to generate multiple primary electron beams (14), an electron sensor (12) with electron sensor segments (12a) to detect electrons of the primary electron beams (14) and at least one anode (7) to direct the primary electron beams (14) towards the electron sensor (12). The electron sensor (12) serves to inspect the primary electron beams (14), calibrate the positions of the primary electron beams (14) and possibly adjust final focus length (13) and currents of the primary electron beams before or after a probing or structuring the upper surface (20a) of a non-transparent specimens (20). Further, methods to inspect primary electron beams (14), to adjust final focus lengths (13) and to calibrate the multiple electron beam device (1) are provided.

摘要翻译： 本发明提供了用于用具有电子束源阵列（3）的一次电子束（14）探测或构造非透明样品（20）以产生多个一次电子束（14）的电子多光束装置（1）， 电子传感器（12），其具有用于检测一次电子束（14）的电子和至少一个阳极（7）的电子传感器段（12a），以将一次电子束（14）引向电子传感器（12）。 电子传感器（12）用于检查一次电子束（14），校准一次电子束（14）的位置，并可能在探测之前或之后校准一次电子束的最终聚焦长度（13）和电流 构造不透明样品（20）的上表面（20a）。 此外，提供了检查一次电子束（14），调整最终聚焦长度（13）和校准多个电子束装置（1）的方法。

公开(公告)号：US07274018B2

公开(公告)日：2007-09-25

申请号：US11396751

申请日：2006-04-03

申请人： Pavel Adamec ,  Ralf Degenhardt ,  Hans-Peter Feuerbaum ,  Harry Munack ,  Dieter Winkler

发明人： Pavel Adamec ,  Ralf Degenhardt ,  Hans-Peter Feuerbaum ,  Harry Munack ,  Dieter Winkler

IPC分类号： H01J37/28

CPC分类号： H01J37/285 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/0435 ,  H01J2237/049 ,  H01J2237/2855 ,  H01J2237/2857

摘要： A charged particle beam apparatus is provided which comprises a charged particle source for producing a primary beam of charged particles, aperture means for collimating said primary beam of charged particles, wherein said aperture means is adapted to switch between a collimation of said primary beam resulting in a width appropriate for serial imaging of a sample as well as a collimation of said primary beam to a width appropriate for parallel imaging of said sample, a condenser lens for condensing said primary beam of charged particles, scanning means for deflecting said primary beam of charged particles, an objective lens for focusing said condensed primary beam, a sectorized detector for detecting a secondary charged particles. Also, several different operation modes of the beam apparatus are described allowing for serial imaging as well as parallel imaging.

摘要翻译： 提供一种带电粒子束装置，其包括用于产生带电粒子的一次束的带电粒子源，用于准直所述带电粒子的一次束的孔径装置，其中所述孔口装置适于在所述主束的准直之间切换，导致 适合于样本的串行成像的宽度以及所述主光束的准直到适合于所述样品的平行成像的宽度;用于聚集所述带电粒子的一次束的聚光透镜;用于偏转所述主要束带电的扫描装置 颗粒，用于聚焦所述冷凝的主光束的物镜，用于检测次级带电粒子的扇形检测器。 此外，描述了束装置的几种不同的操作模式，允许串行成像以及平行成像。

公开(公告)号：US06936817B2

公开(公告)日：2005-08-30

申请号：US10297864

申请日：2001-01-29

申请人： Hans-Peter Feuerbaum

发明人： Hans-Peter Feuerbaum

IPC分类号： H01J37/18 ,  H01J37/256 ,  H01J37/28 ,  H01J27/00 ,  H01J37/244 ,  H01J37/317

CPC分类号： H01J37/256 ,  H01J37/18 ,  H01J37/28 ,  H01J2237/2449

摘要： The invention provides a miniaturized optical column for a charged particle beam apparatus for examining a specimen (14). The column is constituted by, among other things, a charged particle source (2) for providing a beam of charged particles (10); a lens system for guiding the beam of charged particles (10) from the source (2) onto the specimen (14); and a housing (40) which, during operation, is set on beam boost potential.

摘要翻译： 本发明提供了一种用于检查样本（14）的带电粒子束装置的小型化光学柱。 除了别的以外，该柱由用于提供带电粒子束（10）的带电粒子源（2）构成; 用于将来自所述源（2）的带电粒子束（10）引导到所述样本（14）上的透镜系统; 以及在操作期间被设置为光束增强电位的壳体（40）。

公开(公告)号：US5329125A

公开(公告)日：1994-07-12

申请号：US974267

申请日：1992-11-10

申请人： Hans-Peter Feuerbaum

发明人： Hans-Peter Feuerbaum

IPC分类号： G01N21/88 ,  G01N21/956 ,  H01J37/16 ,  H01J37/20 ,  H01J37/22 ,  H01J37/28

CPC分类号： H01J37/28 ,  H01J37/20 ,  H01J2237/0245

摘要： The invention relates to a device for corpuscular-optical examination and/or processing of material samples in which the column and the table system are rotatable relative to one another about a first axis of rotation which encloses a specific angle of inclination with a perpendicular to the object plane, the column being arranged in such a way that its optical axis forms the same angle of inclination with the first axis of rotation. A device of this type is distinguished over known constructions by a substantially simpler construction.

摘要翻译： 本发明涉及一种用于物质样品的红外光学检查和/或处理的装置，其中柱和台系统可绕第一旋转轴线相对于彼此旋转，该第一旋转轴线围绕垂直于 物镜平面以这样的方式排列，使得其光轴与第一旋转轴线形成相同的倾斜角。 这种类型的装置通过基本上更简单的结构在已知的结构上进行区分。