公开(公告)号：US20070096313A1

公开(公告)日：2007-05-03

申请号：US11262184

申请日：2005-10-28

申请人： Chiu-Ming Chou ,  Chien-Kang Chou ,  Ching-San Lin ,  Mou-Shiung Lin ,  Hsin-Jung Lo

发明人： Chiu-Ming Chou ,  Chien-Kang Chou ,  Ching-San Lin ,  Mou-Shiung Lin ,  Hsin-Jung Lo

IPC分类号： H01L23/48 ,  H01L21/44 ,  H01L23/52 ,  H01L29/40

CPC分类号： H01L24/73 ,  H01L23/5329 ,  H01L24/05 ,  H01L24/06 ,  H01L24/11 ,  H01L24/13 ,  H01L24/48 ,  H01L24/49 ,  H01L2224/0231 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/04073 ,  H01L2224/05155 ,  H01L2224/05173 ,  H01L2224/05176 ,  H01L2224/05553 ,  H01L2224/05572 ,  H01L2224/05599 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/05664 ,  H01L2224/05669 ,  H01L2224/05673 ,  H01L2224/05676 ,  H01L2224/1147 ,  H01L2224/131 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/13164 ,  H01L2224/13169 ,  H01L2224/13173 ,  H01L2224/13176 ,  H01L2224/48463 ,  H01L2224/48477 ,  H01L2224/4943 ,  H01L2224/85051 ,  H01L2224/85399 ,  H01L2924/00013 ,  H01L2924/00014 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01022 ,  H01L2924/01024 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/01044 ,  H01L2924/01045 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/0105 ,  H01L2924/01059 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/05042 ,  H01L2924/10329 ,  H01L2924/14 ,  H01L2924/15788 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/19043 ,  H01L2224/13099 ,  H01L2224/45099 ,  H01L2924/00 ,  H01L2224/4554

摘要： The invention provides a semiconductor chip comprising an interconnecting structure over said passivation layer. The interconnecting structure comprises a first contact pad connected to a second contact pad exposed by an opening in a passivation layer. A metal bump is on the first contact pad and over multiple semiconductor devices, wherein the metal bump has more than 50 percent by weight of gold and has a height of between 8 and 50 microns

摘要翻译： 本发明提供一种包括在所述钝化层上的互连结构的半导体芯片。 互连结构包括连接到由钝化层中的开口暴露的第二接触焊盘的第一接触焊盘。 金属凸块位于第一接触焊盘上并且在多个半导体器件上，其中金属凸块具有超过50重量％的金并且具有在8和50微米之间的高度

公开(公告)号：US20060076684A1

公开(公告)日：2006-04-13

申请号：US11273105

申请日：2005-11-14

申请人： Mou-Shiung Lin ,  Jin-Yuan Lee

发明人： Mou-Shiung Lin ,  Jin-Yuan Lee

IPC分类号： H01L23/48

CPC分类号： H01L23/60 ,  H01L21/768 ,  H01L21/76801 ,  H01L21/76838 ,  H01L23/5222 ,  H01L23/5223 ,  H01L23/5227 ,  H01L23/5283 ,  H01L23/5286 ,  H01L23/5329 ,  H01L23/53295 ,  H01L23/62 ,  H01L24/05 ,  H01L27/0248 ,  H01L2924/12042 ,  H01L2924/12044 ,  H01L2924/14 ,  H01L2924/3011 ,  H01L2924/00

摘要： A new method is provided for the-creation of interconnect lines. Fine line interconnects are provided in a first layer of dielectric overlying semiconductor circuits that have been created in or on the surface of a substrate. A layer of passivation is deposited over the layer of dielectric, a thick second layer of dielectric is created over the surface of the layer of passivation. Thick and wide interconnect lines are created in the thick second layer of dielectric. The first layer of dielectric may also be eliminated, creating the wide thick interconnect network on the surface of the layer of passivation that has been deposited over the surface of a substrate.

摘要翻译： 提供了一种创建互连线路的新方法。 细线互连提供在已经在衬底的表面中或其上形成的半导体电路的第一绝缘层中。 钝化层沉积在电介质层上，在钝化层的表面上形成厚的第二层电介质。 在厚的第二层电介质中产生厚而宽的互连线。 也可以消除第一层电介质，在已​​经沉积在衬底的表面上的钝化层的表面上产生宽厚的互连网络。

公开(公告)号：US20060049524A1

公开(公告)日：2006-03-09

申请号：US10937543

申请日：2004-09-09

申请人： Mou-Shiung Lin ,  Chiu-Ming Chou ,  Chien-Kang Chou

发明人： Mou-Shiung Lin ,  Chiu-Ming Chou ,  Chien-Kang Chou

IPC分类号： H01L23/52

CPC分类号： H01L23/5329 ,  H01L23/3171 ,  H01L23/5223 ,  H01L23/5227 ,  H01L23/5228 ,  H01L24/05 ,  H01L24/13 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/05556 ,  H01L2224/13022 ,  H01L2224/131 ,  H01L2224/13144 ,  H01L2924/01019 ,  H01L2924/04953 ,  H01L2924/05042 ,  H01L2924/14 ,  H01L2924/19015 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/19043 ,  H01L2924/19104 ,  H01L2924/30105 ,  H01L2924/014 ,  H01L2924/00012

摘要： A system and method for forming post passivation metal structures is described. Metal interconnections and high quality electrical components, such as inductors, transformers, capacitors, or resistors are formed on a layer of passivation, or on a thick layer of polymer over a passivation layer.

公开(公告)号：US20060022343A1

公开(公告)日：2006-02-02

申请号：US11087955

申请日：2005-03-23

申请人： Mou-Shiung Lin ,  Chiu-Ming Chou ,  Chien-Kang Chou

发明人： Mou-Shiung Lin ,  Chiu-Ming Chou ,  Chien-Kang Chou

IPC分类号： H01L23/48

CPC分类号： H01L21/76829 ,  H01L21/76837 ,  H01L21/76838 ,  H01L21/76873 ,  H01L21/76885 ,  H01L23/5283 ,  H01L2924/0002 ,  H01L2924/00

摘要： A new interconnection scheme is described, comprising both coarse and fine line interconnection schemes in an IC chip. The coarse metal interconnection, typically formed by selective electroplating technology, is located on top of the fine line interconnection scheme. It is especially useful for long distance lines, clock, power and ground buses, and other applications such as high Q inductors and bypass lines. The fine line interconnections are more appropriate to be used for local interconnections. The combined structure of coarse and fine line interconnections forms a new interconnection scheme that not only enhances IC speed, but also lowers power consumption.

公开(公告)号：US20050277283A1

公开(公告)日：2005-12-15

申请号：US11202730

申请日：2005-08-12

申请人： Mou-Shiung Lin ,  Chiu-Ming Chou ,  Chien-Kang Chou ,  Hsin-Jung Lo

发明人： Mou-Shiung Lin ,  Chiu-Ming Chou ,  Chien-Kang Chou ,  Hsin-Jung Lo

IPC分类号： H01L21/4763 ,  H01L21/60 ,  H01L23/485 ,  H01L23/532

CPC分类号： H01L23/53238 ,  H01L23/3192 ,  H01L23/53252 ,  H01L24/03 ,  H01L24/05 ,  H01L24/11 ,  H01L24/13 ,  H01L24/48 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/05018 ,  H01L2224/056 ,  H01L2224/05639 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05664 ,  H01L2224/05669 ,  H01L2224/05673 ,  H01L2224/05676 ,  H01L2224/1147 ,  H01L2224/13099 ,  H01L2224/16 ,  H01L2224/48463 ,  H01L2924/0001 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01015 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01024 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01044 ,  H01L2924/01045 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/0105 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/04941 ,  H01L2924/04953 ,  H01L2924/05042 ,  H01L2924/10329 ,  H01L2924/1305 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/15788 ,  H01L2924/01039 ,  H01L2224/45099 ,  H01L2924/00

摘要： A method for fabricating a metallization structure comprises depositing a first metal layer; depositing a first pattern-defining layer over said first metal layer, a first opening in said first pattern-defining layer exposes said first metal layer; depositing a second metal layer over said first metal layer exposed by said first opening; depositing a second pattern-defining layer over said second metal layer, a second opening in said second pattern-defining layer exposes said second metal layer; depositing a third metal layer over said second metal layer exposed by said second opening; removing said second pattern-defining layer; removing said first pattern-defining layer; and removing said first metal layer not under said second metal layer.

摘要翻译： 一种用于制造金属化结构的方法包括沉积第一金属层; 在所述第一金属层上沉积第一图案界定层，所述第一图案限定层中的第一开口暴露所述第一金属层; 在由所述第一开口暴露的所述第一金属层上沉积第二金属层; 在所述第二金属层上沉积第二图案限定层，所述第二图案限定层中的第二开口露出所述第二金属层; 在由所述第二开口暴露的所述第二金属层上沉积第三金属层; 去除所述第二图案限定层; 去除所述第一图案限定层; 以及不在所述第二金属层下方去除所述第一金属层。

公开(公告)号：US20030199119A1

公开(公告)日：2003-10-23

申请号：US10420596

申请日：2003-04-22

申请人： MEGIC CORPORATION

发明人： Mou-Shiung Lin

IPC分类号： H01L021/66 ,  H01L023/48 ,  H01L029/40

CPC分类号： H01L25/0657 ,  G01R31/2856 ,  G01R31/2884 ,  G01R31/31905 ,  G01R31/31926 ,  G06F13/385 ,  H01L23/60 ,  H01L24/48 ,  H01L25/50 ,  H01L2224/05599 ,  H01L2224/16145 ,  H01L2224/45099 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/73207 ,  H01L2224/85399 ,  H01L2225/06513 ,  H01L2225/06527 ,  H01L2225/06596 ,  H01L2924/00014 ,  H01L2924/09701 ,  H01L2924/10253 ,  H01L2924/14 ,  H01L2924/15311 ,  H01L2924/1532 ,  H01L2924/181 ,  H01L2924/00 ,  H01L2224/45015 ,  H01L2924/207 ,  H01L2924/00012

摘要： A multiple integrated circuit chip structure provides interchip communication between integrated circuit chips of the structure with no ESD protection circuits and no input/output circuitry. The interchip communication is between internal circuits of the integrated circuit chips. The multiple integrated circuit chip structure has an interchip interface circuit to selectively connect internal circuits of the integrated circuits to test interface circuits having ESD protection circuits and input/output circuitry designed to communicate with external test systems during test and burn-in procedures. The multiple interconnected integrated circuit chip structure has a first integrated circuit chip mounted to one or more second integrated circuit chips to physically and electrically connect the integrated circuit chips to one another. The first integrated circuit chips have interchip interface circuits connected each other to selectively communicate between internal circuits of the each other integrated circuit chips or test interface circuits, connected to the internal circuits of each integrated circuit chip to provide stimulus and response to said internal circuits during testing procedures. A mode selector receives a signal external to the chip to determine whether the communication is to be with one of the other connected integrated circuit chips or in single chip mode, such as with the test interface circuits. ESD protection is added to the mode selector circuitry.

公开(公告)号：US20030071326A1

公开(公告)日：2003-04-17

申请号：US10303451

申请日：2002-11-25

申请人： MEGIC CORPORATION

发明人： Mou-Shiung Lin

IPC分类号： H01L029/00 ,  H01L021/20

CPC分类号： H01L28/10 ,  H01L21/768 ,  H01L21/76807 ,  H01L21/76838 ,  H01L23/3192 ,  H01L23/522 ,  H01L23/5222 ,  H01L23/5223 ,  H01L23/5227 ,  H01L23/5228 ,  H01L23/5286 ,  H01L23/5329 ,  H01L23/53295 ,  H01L23/60 ,  H01L23/642 ,  H01L23/645 ,  H01L23/647 ,  H01L24/03 ,  H01L24/05 ,  H01L27/0676 ,  H01L27/08 ,  H01L28/20 ,  H01L2224/0401 ,  H01L2224/05001 ,  H01L2224/0554 ,  H01L2224/13022 ,  H01L2224/16225 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01011 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01038 ,  H01L2924/01042 ,  H01L2924/01047 ,  H01L2924/0105 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01084 ,  H01L2924/014 ,  H01L2924/04941 ,  H01L2924/04953 ,  H01L2924/05042 ,  H01L2924/10253 ,  H01L2924/10329 ,  H01L2924/12042 ,  H01L2924/12044 ,  H01L2924/14 ,  H01L2924/1423 ,  H01L2924/15174 ,  H01L2924/19015 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/19043 ,  H01L2924/19104 ,  H01L2924/30105 ,  H01L2924/3011 ,  H01L2924/3025 ,  Y10S257/92 ,  H01L2924/00

摘要： The present invention extends the above referenced continuation-in-part application by in addition creating high quality electrical components, such as inductors, capacitors or resistors, on a layer of passivation or on the surface of a thick layer of polymer. In addition, the process of the invention provides a method for mounting discrete electrical components at a significant distance removed from the underlying silicon surface.

公开(公告)号：US20020064922A1

公开(公告)日：2002-05-30

申请号：US09970005

申请日：2001-10-03

申请人： MEGIC Corporation

发明人： Mou-Shiung Lin

IPC分类号： H01L021/20

CPC分类号： H01L28/10 ,  H01L21/768 ,  H01L21/76807 ,  H01L21/76838 ,  H01L23/3192 ,  H01L23/522 ,  H01L23/5222 ,  H01L23/5223 ,  H01L23/5227 ,  H01L23/5228 ,  H01L23/5286 ,  H01L23/5329 ,  H01L23/53295 ,  H01L23/60 ,  H01L23/642 ,  H01L23/645 ,  H01L23/647 ,  H01L24/03 ,  H01L24/05 ,  H01L27/0676 ,  H01L27/08 ,  H01L28/20 ,  H01L2224/0401 ,  H01L2224/05001 ,  H01L2224/0554 ,  H01L2224/13022 ,  H01L2224/16225 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01011 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01038 ,  H01L2924/01042 ,  H01L2924/01047 ,  H01L2924/0105 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01084 ,  H01L2924/014 ,  H01L2924/04941 ,  H01L2924/04953 ,  H01L2924/05042 ,  H01L2924/10253 ,  H01L2924/10329 ,  H01L2924/12042 ,  H01L2924/12044 ,  H01L2924/14 ,  H01L2924/1423 ,  H01L2924/15174 ,  H01L2924/19015 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/19043 ,  H01L2924/19104 ,  H01L2924/30105 ,  H01L2924/3011 ,  H01L2924/3025 ,  Y10S257/92 ,  H01L2924/00

摘要： The present invention extends the above referenced continuation-in-part application by in addition creating high quality electrical components, such as inductors, capacitors or resistors, on a layer of passivation or on the surface of a thick layer of polymer. In addition, the process of the invention provides a method for mounting discrete electrical components at a significant distance removed from the underlying silicon surface.

摘要翻译： 本发明通过另外在钝化层上或在聚合物厚层的表面上产生高质量的电气部件（例如电感器，电容器或电阻器）来扩展上述部分继续申请。 此外，本发明的方法提供了一种用于将离散的电气部件安装在从下面的硅表面去除的显着距离的方法。

公开(公告)号：US20060076687A1

公开(公告)日：2006-04-13

申请号：US10962963

申请日：2004-10-12

申请人： Mou-Shiung Lin ,  Chiu-Ming Chou ,  Chien-Kang Chou

发明人： Mou-Shiung Lin ,  Chiu-Ming Chou ,  Chien-Kang Chou

IPC分类号： H01L23/48 ,  H01L23/52

CPC分类号： H01L23/62 ,  H01L23/3192 ,  H01L23/5283 ,  H01L23/53238 ,  H01L23/53252 ,  H01L27/0251 ,  H01L2924/0002 ,  H01L2924/19041 ,  H01L2924/3011 ,  H01L2924/00

摘要： A new method is provided for the creation of interconnect lines. Fine line interconnects are provided in a first layer of dielectric overlying semiconductor circuits that have been created in or on the surface of a substrate. A layer of passivation is deposited over the layer of dielectric and a thick second layer of dielectric is created over the surface of the layer of passivation. Thick and wide post-passivation interconnect lines are created in the thick second layer of dielectric. The first layer of dielectric may also be eliminated, creating the wide thick passivation interconnect network on the surface of the layer of passivation that has been deposited over the surface of a substrate.

公开(公告)号：US20060068574A1

公开(公告)日：2006-03-30

申请号：US11273071

申请日：2005-11-14

申请人： Mou-Shiung Lin ,  Jin-Yuan Lee

发明人： Mou-Shiung Lin ,  Jin-Yuan Lee

IPC分类号： H01L21/20

CPC分类号： H01L23/60 ,  H01L21/768 ,  H01L21/76801 ,  H01L21/76838 ,  H01L23/5222 ,  H01L23/5223 ,  H01L23/5227 ,  H01L23/5283 ,  H01L23/5286 ,  H01L23/5329 ,  H01L23/53295 ,  H01L23/62 ,  H01L24/05 ,  H01L27/0248 ,  H01L2924/12042 ,  H01L2924/12044 ,  H01L2924/14 ,  H01L2924/3011 ,  H01L2924/00

摘要： A new method is provided for the creation of interconnect lines. Fine line interconnects are provided in a first layer of dielectric overlying semiconductor circuits that have been created in or on the surface of a substrate. A layer of passivation is deposited over the layer of dielectric, a thick second layer of dielectric is created over the surface of the layer of passivation. Thick and wide interconnect lines are created in the thick second layer of dielectric. The first layer of dielectric may also be eliminated, creating the wide thick interconnect network on the surface of the layer of passivation that has been deposited over the surface of a substrate.

摘要翻译： 提供了一种创建互连线的方法。 细线互连提供在已经在衬底的表面中或其上形成的半导体电路的第一绝缘层中。 钝化层沉积在电介质层上，在钝化层的表面上形成厚的第二层电介质。 在厚的第二层电介质中产生厚而宽的互连线。 也可以消除第一层电介质，在已​​经沉积在衬底的表面上的钝化层的表面上产生宽厚的互连网络。