Dicing tape-integrated film for semiconductor back surface, and process for producing semiconductor device

    公开(公告)号:US08647956B2

    公开(公告)日:2014-02-11

    申请号:US13191697

    申请日:2011-07-27

    IPC分类号: H01L21/00 H01L21/331

    摘要: The present invention relates to a dicing tape-integrated film for semiconductor back surface, which includes: a dicing tape including a base material layer, a first pressure-sensitive adhesive layer and a second pressure-sensitive adhesive layer stacked in this order, and a film for semiconductor back surface stacked on the second pressure-sensitive adhesive layer of the dicing tape, in which a peel strength Y between the first pressure-sensitive adhesive layer and the second pressure-sensitive adhesive layer is larger than a peel strength X between the second pressure-sensitive adhesive layer and the film for semiconductor back surface, and in which the peel strength X is from 0.01 to 0.2 N/20 mm, and the peel strength Y is from 0.2 to 10 N/20 mm.