Gas supply method in a CVD coating system for precursors with a low vapor pressure
    1.
    发明申请
    Gas supply method in a CVD coating system for precursors with a low vapor pressure 有权
    用于具有低蒸气压的前体的CVD涂覆系统中的气体供应方法

    公开(公告)号:US20050132959A1

    公开(公告)日:2005-06-23

    申请号:US11014488

    申请日:2004-12-16

    CPC分类号: C23C16/448

    摘要: A gas supply device for delivering precursors with a low vapor pressure to CVD coating systems. The gas supply device has a supply container for the precursor which is at a first temperature T1, an intermediate storage device for intermediately storing the vaporous precursor at a second temperature T2 and at a constant pressure p2, a first gas line between the supply container and the intermediate storage device and a second gas line for removing gas from the intermediate storage device. The gas supply device is developed in such a way that the first temperature T1 is higher than the second temperature T2. The lower temperature T2 of the intermediate storage device facilitates maintenance work on the same, while the precursor evaporates at a greater rate at the higher temperature T1 in the supply container. A first precursor vapor may be mixed with a gas and/or a second precursor vapor in the intermediate storage device. The partial pressure of the first precursor vapor is lower than that of the undiluted first precursor vapor at a constant overall pressure in the intermediate storage device, so that the temperature T2 of the intermediate storage device and the successive lines can be reduced.

    摘要翻译: 一种气体供应装置,用于将CVD蒸气压低的前体输送到CVD涂层系统。 气体供给装置具有用于前体的供给容器,该供应容器处于第一温度T 1,中间储存装置用于在第二温度T 2和恒定压力p 2下将气态前体中间储存在第一温度T 1之间的第一气体管线 供给容器和中间储存装置以及用于从中间储存装置除去气体的第二气体管线。 气体供给装置以第一温度T 1高于第二温度T 2的方式展开。 中间储存装置的较低温度T 2有助于维护工作,而前体在供应容器中的较高温度T 1下以更大的速率蒸发。 第一前体蒸气可以与中间存储装置中的气体和/或第二前体蒸气混合。 在中间储存装置中,在恒定的总体压力下,第一前体蒸气的分压低于未稀释的第一前体蒸汽的分压,从而可以减少中间储存装置的温度T 2和连续的管线。

    Gas supply method in a CVD coating system for precursors with a low vapor pressure
    2.
    发明授权
    Gas supply method in a CVD coating system for precursors with a low vapor pressure 有权
    用于具有低蒸气压的前体的CVD涂覆系统中的气体供应方法

    公开(公告)号:US07413767B2

    公开(公告)日:2008-08-19

    申请号:US11014488

    申请日:2004-12-16

    IPC分类号: C23C16/00

    CPC分类号: C23C16/448

    摘要: A method for producing optical functional coatings comprising niobium, tantalum, titanium or aluminum by supplying a precursor gas of low vapor pressure in a CVD coating system. A precursor selected from the group consisting of Nb, Ta, Ti, and Al compounds having a vapor pressure is maintained within a first supply container at a first temperature T1 and a first pressure p1. Precursor vapor of the precursor is supplied from the first supply container to an intermediate storage device through a first gas line which fluidly communicates the first supply container and the intermediate storage device. A carrier gas or reaction gas is supplied to the first gas line such that a mixture of the precursor with the carrier gas or the reaction gas is provided. The mixture is maintained in the intermediate storage device at a constant second pressure p2 lower than the first pressure p1 and at a second temperature T2 lower than the first temperature T1, and the mixture is supplied from the intermediate storage device through a second gas line.

    摘要翻译: 一种通过在CVD涂覆系统中提供低蒸气压的前体气体来制造包括铌,钽,钛或铝的光学功能涂层的方法。 选自具有蒸气压的Nb,Ta,Ti和Al化合物的前体的前体在第一温度T 1和第一压力p 1下保持在第一供应容器内。 前体的前体蒸气通过与第一供给容器和中间储存装置流体连通的第一气体管线从第一供给容器供给到中间储存装置。 向第一气体管线供给载气或反应气体,使得前体与载体气体或反应气体的混合物被提供。 将混合物以比第一压力p 1低的恒定的第二压力p 2和低于第一温度T 1的第二温度T 2保持在中间储存装置中,并且将混合物从中间储存装置通过 第二条天然气线。

    TRANSPARENT COLORLESS GLASS OR GLASS-CERAMIC PANEL HAVING AN OPTICALLY DENSE COLORED COATING AND METHOD OF MAKING SAME
    5.
    发明申请
    TRANSPARENT COLORLESS GLASS OR GLASS-CERAMIC PANEL HAVING AN OPTICALLY DENSE COLORED COATING AND METHOD OF MAKING SAME 审中-公开
    透明无色玻璃或具有光学透明涂料的玻璃陶瓷面板及其制造方法

    公开(公告)号:US20080199622A1

    公开(公告)日:2008-08-21

    申请号:US12026262

    申请日:2008-02-05

    IPC分类号: B05D3/02

    摘要: A transparent, colorless glass or glass-ceramic panel has a visually dense, high-temperature-stable coating having an organic/inorganic network structure containing filling material particles and a color-imparting pigment. The mechanically stable, visually dense coating has no melt-reaction zone at the surface of the panel, which is coated with the coating, so that it does not impair the panel strength. The inorganic network structure can be made from a SiO2-based sol. The coating is made by introducing the color-imparting pigment and the filling material particles into a reactive organic/inorganic network structure; applying the resulting organic/inorganic network structure containing the pigment and the filling material particles to the panel to coat the panel and then burning-in the organic/inorganic network structure with the pigment and the filling material particles under thermal conditions to form the coating with no melt-reaction zone.

    摘要翻译: 透明无色的玻璃或玻璃陶瓷面板具有视觉密实的高温稳定涂层,其具有含有填充材料颗粒和赋颜色颜料的有机/无机网状结构。 机械稳定的,目视密实的涂层在面板的表面没有熔融反应区,涂覆有涂层,从而不会损害面板强度。 无机网状结构可以由SiO 2基的溶胶制成。 通过将着色颜料和填充材料颗粒引入反应性有机/无机网络结构中来制备涂层; 将所得的含有颜料和填充材料颗粒的有机/无机网络结构施加到面板上以涂覆面板,然后在有机/无机网状结构中用颜料和填充材料颗粒在热条件下燃烧以形成具有 无熔融反应区。

    Transparent colorless glass or glass-ceramic panel having an optically dense colored coating and method of making same
    10.
    发明授权
    Transparent colorless glass or glass-ceramic panel having an optically dense colored coating and method of making same 有权
    透明无色玻璃或具有光致密着色涂层的玻璃陶瓷面板及其制造方法

    公开(公告)号:US07361405B2

    公开(公告)日:2008-04-22

    申请号:US10993741

    申请日:2004-11-19

    IPC分类号: B32B17/06

    摘要: A transparent, colorless glass or glass-ceramic panel has a visually dense, high-temperature-stable coating having an organic/inorganic network structure containing filling material particles and a color-imparting pigment. The mechanically stable, visually dense coating has no melt-reaction zone at the surface of the panel, which is coated with the coating, so that it does not impair the panel strength. The inorganic network structure can be made from a SiO2-based sol. The coating is made by introducing the color-imparting pigment and the filling material particles into a reactive organic/inorganic network structure; applying the resulting organic/inorganic network structure containing the pigment and the filling material particles to the panel to coat the panel and then burning-in the organic/inorganic network structure with the pigment and the filling material particles under thermal conditions to form the coating with no melt-reaction zone.

    摘要翻译: 透明无色的玻璃或玻璃陶瓷面板具有视觉密实的高温稳定涂层,其具有含有填充材料颗粒和赋颜色颜料的有机/无机网状结构。 机械稳定的,目视密实的涂层在面板的表面没有熔融反应区,涂覆有涂层,从而不会损害面板强度。 无机网状结构可以由SiO 2基的溶胶制成。 通过将着色颜料和填充材料颗粒引入反应性有机/无机网络结构中来制备涂层; 将所得的含有颜料和填充材料颗粒的有机/无机网络结构施加到面板上以涂覆面板,然后在有机/无机网络结构中用颜料和填充材料颗粒在热条件下燃烧以形成涂层 无熔融反应区。