Manufacturing process for organic chip carrier
    1.
    发明授权
    Manufacturing process for organic chip carrier 失效
    有机芯片载体制造工艺

    公开(公告)号:US5784781A

    公开(公告)日:1998-07-28

    申请号:US559214

    申请日:1995-11-16

    摘要: A manufacturing process for an organic chip carrier is disclosed which permits one to form a substantially bowl-shaped via hole in the substrate of the chip carrier, which makes it easy to deposit a conductive layer having a substantially uniform thickness on the sidewall of the via hole. In accordance with the manufacturing process, photosensitive resin 3 is provided on a substrate 1 in a thickness which is the thickness necessary for a final insulating layer plus a thickness to be removed by, for example grinding, the photosensitive resin 3. Cavities are then formed in the photosensitive resin 3 in a predetermined pattern by exposure and development. The photosensitive resin 3 formed with the cavities 8 is heat-cured. Subsequently, when the photo-cured layer 6a and a part of the heat-cured layer 3a are removed, e.g., ground off, a substantially bowl-shaped via hole 9 is formed.

    摘要翻译: 公开了一种用于有机芯片载体的制造方法,其可以在芯片载体的基板中形成基本上碗状的通孔,这使得容易将具有基本均匀厚度的导电层沉积在通孔的侧壁上 孔。 根据制造方法,感光性树脂3以通过例如研磨感光性树脂3除去最终绝缘层加上除去厚度的厚度设置在基板1上。然后形成凹部 通过曝光和显影以预定图案形成感光性树脂3。 形成有空腔8的感光性树脂3被热固化。 随后,当光固化层6a和热固化层3a的一部分被去除时,例如研磨掉,形成大致碗状的通孔9。