公开(公告)号：US20240315018A1

公开(公告)日：2024-09-19

申请号：US18676056

申请日：2024-05-28

Applicant: Micron Technology, Inc.

Inventor： Justin B. Dorhout ,  Kunal R. Parekh ,  Martin C. Roberts ,  Mohd Kamran Akhtar ,  Chet E. Carter ,  David Daycock

IPC: H10B41/35 ,  H01L21/033 ,  H01L21/308 ,  H01L21/311 ,  H01L21/3215 ,  H01L21/67 ,  H01L21/768 ,  H10B20/00 ,  H10B41/20 ,  H10B41/23 ,  H10B41/27 ,  H10B43/27 ,  H10B43/35

CPC classification number: H10B41/35 ,  H01L21/0337 ,  H01L21/3086 ,  H01L21/31144 ,  H01L21/3215 ,  H01L21/32155 ,  H01L21/67063 ,  H01L21/76802 ,  H10B20/383 ,  H10B41/20 ,  H10B41/23 ,  H10B41/27 ,  H10B43/27 ,  H01L2221/1063 ,  H10B43/35

Abstract: Some embodiments include an integrated assembly with a semiconductor channel material having a boundary region where a more-heavily-doped region interfaces with a less-heavily-doped region. The more-heavily-doped region and the less-heavily-doped region have the same majority carriers. The integrated assembly includes a gating structure adjacent the semiconductor channel material and having a gating region and an interconnecting region of a common and continuous material. The gating region has a length extending along a segment of the more-heavily-doped region, a segment of the less-heavily-doped region, and the boundary region. The interconnecting region extends laterally outward from the gating region on a side opposite the semiconductor channel region, and is narrower than the length of the gating region. Some embodiments include methods of forming integrated assemblies.

公开(公告)号：US11081495B2

公开(公告)日：2021-08-03

申请号：US16438334

申请日：2019-06-11

Applicant: Micron Technology, Inc.

Inventor： Justin B. Dorhout ,  David Daycock ,  Kunal R. Parekh ,  Martin C. Roberts ,  Yushi Hu

IPC: H01L29/76 ,  H01L27/115 ,  H01L27/11582 ,  H01L29/66 ,  H01L29/78

Abstract: Some embodiments include an integrated structure having a conductive material, a select device gate material over the conductive material, and vertically-stacked conductive levels over the select device gate material. Vertically-extending monolithic channel material is adjacent the select device gate material and the conductive levels. The monolithic channel material contains a lower segment adjacent the select device gate material and an upper segment adjacent the conductive levels. A first vertically-extending region is between the lower segment of the monolithic channel material and the select device gate material. The first vertically-extending region contains a first material. A second vertically-extending region is between the upper segment of the monolithic channel material and the conductive levels. The second vertically-extending region contains a material which is different in composition from the first material.

公开(公告)号：US11004494B2

公开(公告)日：2021-05-11

申请号：US16267087

申请日：2019-02-04

Applicant: Micron Technology, Inc.

Inventor： Sanh D. Tang ,  Kuo-Chen Wang ,  Martin C. Roberts ,  Diem Thy N. Tran ,  Hideki Gomi ,  Fredrick D. Fishburn ,  Srinivas Pulugurtha ,  Michel Koopmans ,  Eiji Hasunuma

IPC: G11C11/24 ,  G11C11/402 ,  H01L27/108 ,  G11C5/06 ,  G11C11/4097 ,  G11C5/02 ,  G11C8/14

Abstract: Some embodiments include an assembly having active material structures arranged in an array having rows and columns. Each of the active material structures has a first side which includes a bit contact region, and has a second side which includes a cell contact region. Each of the bit contact regions is coupled with a first redistribution pad. Each of the cell contact regions is coupled with a second redistribution pad. The first redistribution pads are coupled with bitlines, and the second redistribution pads are coupled with programmable devices. Some embodiments include methods of forming memory arrays.

公开(公告)号：US10263007B2

公开(公告)日：2019-04-16

申请号：US16002129

申请日：2018-06-07

Applicant: Micron Technology, Inc.

Inventor： Justin B. Dorhout ,  Kunal R. Parekh ,  Matthew Park ,  Joseph Neil Greeley ,  Chet E. Carter ,  Martin C. Roberts ,  Indra V. Chary ,  Vinayak Shamanna ,  Ryan Meyer ,  Paolo Tessariol

IPC: H01L21/336 ,  H01L27/11556 ,  H01L27/11519 ,  H01L27/11565 ,  H01L27/11582 ,  H01L27/11573

Abstract: An array of elevationally-extending strings of memory cells, where the memory cells individually comprise a programmable charge storage transistor, comprises a substrate comprising a first region containing memory cells and a second region not containing memory cells laterally of the first region. The first region comprises vertically-alternating tiers of insulative material and control gate material. The second region comprises vertically-alternating tiers of different composition insulating materials laterally of the first region. A channel pillar comprising semiconductive channel material extends elevationally through multiple of the vertically-alternating tiers within the first region. Tunnel insulator, programmable charge storage material, and control gate blocking insulator are between the channel pillar and the control gate material of individual of the tiers of the control gate material within the first region. Conductive vias extend elevationally through the vertically-alternating tiers in the second region. An elevationally-extending wall is laterally between the first and second regions. The wall comprises the programmable charge storage material and the semiconductive channel material. Other embodiments and aspects, including method, are disclosed.

公开(公告)号：US20190043890A1

公开(公告)日：2019-02-07

申请号：US16158039

申请日：2018-10-11

Applicant: Micron Technology, Inc.

Inventor： Justin B. Dorhout ,  Fei Wang ,  Chet E. Carter ,  Ian Laboriante ,  John D. Hopkins ,  Kunal Shrotri ,  Ryan Meyer ,  Vinayak Shamanna ,  Kunal R. Parekh ,  Martin C. Roberts ,  Matthew Park

IPC: H01L27/11582 ,  H01L23/528 ,  H01L23/532 ,  H01L27/1157

CPC classification number: H01L27/11582 ,  H01L23/528 ,  H01L23/53257 ,  H01L27/1157

Abstract: Some embodiments include an integrated structure having vertically-stacked conductive levels alternating with dielectric levels. A layer over the conductive levels includes silicon, nitrogen, and one or more of carbon, oxygen, boron and phosphorus. In some embodiments the vertically-stacked conductive levels are wordline levels within a NAND memory array. Some embodiments include an integrated structure having vertically-stacked conductive levels alternating with dielectric levels. Vertically-stacked NAND memory cells are along the conductive levels within a memory array region. A staircase region is proximate the memory array region. The staircase region has electrical contacts in one-to-one correspondence with the conductive levels. A layer is over the memory array region and over the staircase region. The layer includes silicon, nitrogen, and one or more of carbon, oxygen, boron and phosphorus.

公开(公告)号：US10157933B2

公开(公告)日：2018-12-18

申请号：US15133119

申请日：2016-04-19

Applicant: Micron Technology, Inc.

Inventor： Justin B. Dorhout ,  Fei Wang ,  Chet E. Carter ,  Ian Laboriante ,  John D. Hopkins ,  Kunal Shrotri ,  Ryan Meyer ,  Vinayak Shamanna ,  Kunal R. Parekh ,  Martin C. Roberts ,  Matthew Park

IPC: H01L29/792 ,  H01L27/11582 ,  H01L23/528 ,  H01L23/532

Abstract: Some embodiments include an integrated structure having vertically-stacked conductive levels alternating with dielectric levels. A layer over the conductive levels includes silicon, nitrogen, and one or more of carbon, oxygen, boron and phosphorus. In some embodiments the vertically-stacked conductive levels are wordline levels within a NAND memory array. Some embodiments include an integrated structure having vertically-stacked conductive levels alternating with dielectric levels. Vertically-stacked NAND memory cells are along the conductive levels within a memory array region. A staircase region is proximate the memory array region. The staircase region has electrical contacts in one-to-one correspondence with the conductive levels. A layer is over the memory array region and over the staircase region. The layer includes silicon, nitrogen, and one or more of carbon, oxygen, boron and phosphorus.

公开(公告)号：US20180047739A1

公开(公告)日：2018-02-15

申请号：US15231950

申请日：2016-08-09

Applicant: Micron Technology, Inc.

Inventor： Justin B. Dorhout ,  Kunal R. Parekh ,  Matthew Park ,  Joseph Neil Greeley ,  Chet E. Carter ,  Martin C. Roberts ,  Indra V. Chary ,  Vinayak Shamanna ,  Ryan Meyer ,  Paolo Tessariol

IPC: H01L27/115

CPC classification number: H01L27/11556 ,  H01L27/11519 ,  H01L27/11565 ,  H01L27/11573 ,  H01L27/11582

Abstract: An array of elevationally-extending strings of memory cells, where the memory cells individually comprise a programmable charge storage transistor, comprises a substrate comprising a first region containing memory cells and a second region not containing memory cells laterally of the first region. The first region comprises vertically-alternating tiers of insulative material and control gate material. The second region comprises vertically-alternating tiers of different composition insulating materials laterally of the first region. A channel pillar comprising semiconductive channel material extends elevationally through multiple of the vertically-alternating tiers within the first region. Tunnel insulator, programmable charge storage material, and control gate blocking insulator are between the channel pillar and the control gate material of individual of the tiers of the control gate material within the first region. Conductive vias extend elevationally through the vertically-alternating tiers in the second region. An elevationally-extending wall is laterally between the first and second regions. The wall comprises the programmable charge storage material and the semiconductive channel material. Other embodiments and aspects, including method, are disclosed.

公开(公告)号：US09391092B2

公开(公告)日：2016-07-12

申请号：US14929853

申请日：2015-11-02

Applicant: Micron Technology, Inc.

Inventor： John K. Zahurak ,  Sanh D. Tang ,  Lars P. Heineck ,  Martin C. Roberts ,  Wolfgang Mueller ,  Haitao Liu

IPC: H01L27/12 ,  H01L23/528 ,  H01L29/36 ,  H01L21/84 ,  H01L29/78 ,  H01L27/108 ,  H01L45/00 ,  H01L27/24 ,  H01L29/66 ,  H01L27/092

CPC classification number: H01L27/1203 ,  H01L21/84 ,  H01L23/528 ,  H01L27/092 ,  H01L27/10802 ,  H01L27/10823 ,  H01L27/10876 ,  H01L27/10894 ,  H01L27/10897 ,  H01L27/2454 ,  H01L29/36 ,  H01L29/66969 ,  H01L29/78 ,  H01L29/7827 ,  H01L29/7841 ,  H01L45/04 ,  H01L45/06 ,  H01L45/1233 ,  H01L45/14 ,  H01L45/145 ,  H01L45/146 ,  H01L45/16 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A circuit structure includes a substrate having an array region and a peripheral region. The substrate in the array and peripheral regions includes insulator material over first semiconductor material, conductive material over the insulator material, and second semiconductor material over the conductive material. The array region includes vertical circuit devices which include the second semiconductor material. The peripheral region includes horizontal circuit devices which include the second semiconductor material. The horizontal circuit devices in the peripheral region individually have a floating body which includes the second semiconductor material. The conductive material in the peripheral region is under and electrically coupled to the second semiconductor material of the floating bodies. Conductive straps in the array region are under the vertical circuit devices. The conductive straps include the conductive material and individually are electrically coupled to a plurality of the vertical circuit devices in the array region. Other implementations are disclosed.

Abstract translation: 电路结构包括具有阵列区域和周边区域的基板。 阵列和外围区域中的衬底包括在第一半导体材料上的绝缘体材料，绝缘体材料上方的导电材料和导电材料上的第二半导体材料。 阵列区域包括包括第二半导体材料的垂直电路器件。 外围区域包括包括第二半导体材料的水平电路器件。 外围区域中的水平电路器件分别具有包括第二半导体材料的浮体。 外围区域中的导电材料在浮体的第二半导体材料的下面并电耦合。 阵列区域中的导电带在垂直电路装置下方。 导电带包括导电材料，并且单独地电耦合到阵列区域中的多个垂直电路器件。 公开了其他实现。

公开(公告)号：US20160056175A1

公开(公告)日：2016-02-25

申请号：US14929853

申请日：2015-11-02

Applicant: Micron Technology, Inc.

Inventor： John K. Zahurak ,  Sanh D. Tang ,  Lars P. Heineck ,  Martin C. Roberts ,  Wolfgang Mueller ,  Haitao Liu

IPC: H01L27/12 ,  H01L23/528 ,  H01L27/24 ,  H01L29/36 ,  H01L27/108 ,  H01L29/78 ,  H01L27/092

CPC classification number: H01L27/1203 ,  H01L21/84 ,  H01L23/528 ,  H01L27/092 ,  H01L27/10802 ,  H01L27/10823 ,  H01L27/10876 ,  H01L27/10894 ,  H01L27/10897 ,  H01L27/2454 ,  H01L29/36 ,  H01L29/66969 ,  H01L29/78 ,  H01L29/7827 ,  H01L29/7841 ,  H01L45/04 ,  H01L45/06 ,  H01L45/1233 ,  H01L45/14 ,  H01L45/145 ,  H01L45/146 ,  H01L45/16 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A circuit structure includes a substrate having an array region and a peripheral region. The substrate in the array and peripheral regions includes insulator material over first semiconductor material, conductive material over the insulator material, and second semiconductor material over the conductive material. The array region includes vertical circuit devices which include the second semiconductor material. The peripheral region includes horizontal circuit devices which include the second semiconductor material. The horizontal circuit devices in the peripheral region individually have a floating body which includes the second semiconductor material. The conductive material in the peripheral region is under and electrically coupled to the second semiconductor material of the floating bodies. Conductive straps in the array region are under the vertical circuit devices. The conductive straps include the conductive material and individually are electrically coupled to a plurality of the vertical circuit devices in the array region. Other implementations are disclosed.

Abstract translation: 电路结构包括具有阵列区域和周边区域的基板。 阵列和外围区域中的衬底包括在第一半导体材料上的绝缘体材料，绝缘体材料上方的导电材料和导电材料上的第二半导体材料。 阵列区域包括包括第二半导体材料的垂直电路器件。 外围区域包括包括第二半导体材料的水平电路器件。 外围区域中的水平电路器件分别具有包括第二半导体材料的浮体。 外围区域中的导电材料在浮体的第二半导体材料的下面并电耦合。 阵列区域中的导电带在垂直电路装置下方。 导电带包括导电材料，并且单独地电耦合到阵列区域中的多个垂直电路器件。 公开了其他实现。

公开(公告)号：US12029032B2

公开(公告)日：2024-07-02

申请号：US18117989

申请日：2023-03-06

Applicant: Micron Technology, Inc.

Inventor： Justin B. Dorhout ,  Kunal R. Parekh ,  Martin C. Roberts ,  Mohd Kamran Akhtar ,  Chet E. Carter ,  David Daycock

IPC: H10B41/35 ,  H01L21/033 ,  H01L21/308 ,  H01L21/311 ,  H01L21/3215 ,  H01L21/67 ,  H01L21/768 ,  H10B20/00 ,  H10B41/20 ,  H10B41/23 ,  H10B41/27 ,  H10B43/27 ,  H10B43/35

CPC classification number: H10B41/35 ,  H01L21/0337 ,  H01L21/3086 ,  H01L21/31144 ,  H01L21/3215 ,  H01L21/32155 ,  H01L21/67063 ,  H01L21/76802 ,  H10B20/383 ,  H10B41/20 ,  H10B41/23 ,  H10B41/27 ,  H10B43/27 ,  H01L2221/1063 ,  H10B43/35

Abstract: Some embodiments include an integrated assembly with a semiconductor channel material having a boundary region where a more-heavily-doped region interfaces with a less-heavily-doped region. The more-heavily-doped region and the less-heavily-doped region have the same majority carriers. The integrated assembly includes a gating structure adjacent the semiconductor channel material and having a gating region and an interconnecting region of a common and continuous material. The gating region has a length extending along a segment of the more-heavily-doped region, a segment of the less-heavily-doped region, and the boundary region. The interconnecting region extends laterally outward from the gating region on a side opposite the semiconductor channel region, and is narrower than the length of the gating region. Some embodiments include methods of forming integrated assemblies.