SEMICONDUCTOR PACKAGE AND METHOD OF FABRICATING THE SAME
    1.
    发明申请
    SEMICONDUCTOR PACKAGE AND METHOD OF FABRICATING THE SAME 有权
    半导体封装及其制造方法

    公开(公告)号:US20160013174A1

    公开(公告)日:2016-01-14

    申请号:US14736247

    申请日:2015-06-10

    摘要: Embodiments of the inventive concepts provide a semiconductor package and a method of fabricating the same. The method includes forming a groove to separate first semiconductor chips from each other. Forming the groove include performing a first sawing process on a bottom surface of a semiconductor substrate to cut the semiconductor substrate and a portion of a mold layer in a direction inclined with respect to the bottom surface, and performing a second sawing process to cut the mold layer in a direction substantially perpendicular to the bottom surface of the semiconductor substrate. A minimum width of the groove formed in the semiconductor substrate by the first sawing process may be greater than a width of the groove formed in the mold layer by the second sawing process.

    摘要翻译: 本发明构思的实施例提供一种半导体封装及其制造方法。 该方法包括形成沟槽以将第一半导体芯片彼此分开。 形成凹槽包括在半导体衬底的底表面上执行第一锯切工艺以在相对于底表面倾斜的方向上切割半导体衬底和模具层的一部分,并且执行第二锯切工艺以切割模具 层在基本上垂直于半导体衬底的底表面的方向上。 通过第一锯切工艺在半导体衬底中形成的槽的最小宽度可以大于通过第二锯切工艺在模具层中形成的槽的宽度。