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公开(公告)号:US08766431B2
公开(公告)日:2014-07-01
申请号:US13828537
申请日:2013-03-14
Applicant: Xintec Inc.
Inventor: Baw-Ching Perng , Ying-Nan Wen , Shu-Ming Chang , Ching-Yu Ni , Yun-Ji Hsieh , Wei-Ming Chen , Chia-Lun Tsai , Chia-Ming Cheng
IPC: H01L23/04
CPC classification number: H01L29/78 , H01L23/3114 , H01L23/481 , H01L23/492 , H01L24/13 , H01L24/16 , H01L29/0646 , H01L29/0653 , H01L29/0878 , H01L29/1095 , H01L29/41741 , H01L29/41766 , H01L29/7802 , H01L29/7809 , H01L2224/05001 , H01L2224/05009 , H01L2224/05022 , H01L2224/05572 , H01L2224/16 , H01L2924/00014 , H01L2924/01021 , H01L2924/13091 , H01L2224/05599 , H01L2224/05099
Abstract: A power MOSFET package includes a semiconductor substrate having opposite first and second surfaces, having a first conductivity type, and forming a drain region, a doped region extending downward from the first surface and having a second conductivity type, a source region in the doped region and having the first conductivity type, a gate overlying or buried under the first surface, wherein a gate dielectric layer is between the gate and the semiconductor substrate, a first conducting structure overlying the semiconductor substrate, having a first terminal, and electrically connecting the drain region, a second conducting structure overlying the semiconductor substrate, having a second terminal, and electrically connecting the source region, a third conducting structure overlying the semiconductor substrate, having a third terminal, and electrically connecting the gate, wherein the first, the second, and the third terminals are substantially coplanar, and a protection layer between the semiconductor substrate and the terminals.
Abstract translation: 功率MOSFET封装包括具有相反的第一和第二表面的半导体衬底,具有第一导电类型,并形成漏极区,从第一表面向下延伸并具有第二导电类型的掺杂区,掺杂区中的源极区 并且具有第一导电类型,覆盖或掩埋在第一表面下方的栅极,其中栅极电介质层位于栅极和半导体衬底之间,覆盖半导体衬底的第一导电结构,具有第一端子,并且电连接漏极 区域,覆盖半导体衬底的第二导电结构,具有第二端子,并且电连接源极区域,覆盖半导体衬底的第三导电结构,具有第三端子和电连接栅极,其中第一,第二, 并且第三端子基本上共面,并且第三端子之间的保护层 e半导体衬底和端子。
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公开(公告)号:US08716109B2
公开(公告)日:2014-05-06
申请号:US14030058
申请日:2013-09-18
Applicant: Xintec Inc.
Inventor: Ching-Yu Ni , Chang-Sheng Hsu
IPC: H01L21/00
CPC classification number: H01L21/78 , B81B7/0051 , B81C2203/0118 , H01L21/76898 , H01L23/3114 , H01L23/481 , H01L23/585 , H01L24/02 , H01L24/11 , H01L24/13 , H01L24/29 , H01L24/32 , H01L24/83 , H01L24/93 , H01L24/94 , H01L25/0657 , H01L25/16 , H01L27/14618 , H01L27/14683 , H01L2224/0231 , H01L2224/02313 , H01L2224/02371 , H01L2224/02377 , H01L2224/0239 , H01L2224/0401 , H01L2224/11002 , H01L2224/1132 , H01L2224/11334 , H01L2224/11849 , H01L2224/13022 , H01L2224/13024 , H01L2224/2732 , H01L2224/27618 , H01L2224/29082 , H01L2224/2919 , H01L2224/32225 , H01L2224/83005 , H01L2224/83191 , H01L2224/83192 , H01L2224/8385 , H01L2224/92 , H01L2224/93 , H01L2224/94 , H01L2224/95 , H01L2224/95001 , H01L2924/14 , H01L2924/1461 , H01L2224/83 , H01L2224/11 , H01L2924/3512 , H01L2924/00
Abstract: A chip package and a fabrication method thereof are provided according to an embodiment of the invention. The chip package contains a semiconductor substrate having a chip. A packaging layer is disposed over the semiconductor substrate. A spacer is disposed between the semiconductor substrate and the packaging layer, wherein a side surface consisting of the semiconductor substrate, the spacer and the packaging layer has a recess section. The method includes forming a plurality of spacers between a plurality of chips of a semiconductor wafer and a packaging layer, wherein each spacer corresponding to each chip is separated from each other and the spacer is shrunk inward from an edge of the chip to form a recess section and dicing the semiconductor wafer along a scribe line between any two adjacent chips to form a plurality of chip packages.
Abstract translation: 根据本发明的实施例提供了芯片封装及其制造方法。 芯片封装包含具有芯片的半导体衬底。 封装层设置在半导体衬底上。 间隔件设置在半导体衬底和封装层之间,其中由半导体衬底,间隔件和封装层组成的侧表面具有凹部。 该方法包括在半导体晶片的多个芯片和封装层之间形成多个间隔物,其中对应于每个芯片的每个间隔件彼此分离,并且间隔件从芯片的边缘向内收缩以形成凹部 并且沿着任何两个相邻芯片之间的划线切割半导体晶片以形成多个芯片封装。
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公开(公告)号:US08822325B2
公开(公告)日:2014-09-02
申请号:US13958398
申请日:2013-08-02
Applicant: Xintec Inc.
Inventor: Ching-Yu Ni , Chia-Ming Cheng , Nan-Chun Lin
IPC: H01L23/485 , H01L21/60
CPC classification number: H01L23/498 , H01L21/78 , H01L23/3114 , H01L23/3192 , H01L24/06 , H01L2224/05624 , H01L2224/05647 , H01L2924/01013 , H01L2924/01014 , H01L2924/01029 , H01L2924/01033 , H01L2924/01082 , H01L2924/014 , H01L2924/05042 , H01L2924/14 , H01L2924/1461 , H01L2924/15788 , H01L2924/16195 , H01L2924/16235 , H01L2924/00014 , H01L2924/00
Abstract: A chip package and a fabrication method thereof are provided according to an embodiment of the invention. The chip package includes a semiconductor substrate containing a chip and having a device area and a peripheral bonding pad area. A plurality of conductive pads is disposed at the peripheral bonding pad area and a passivation layer is formed over the semiconductor substrate to expose the conductive pads. An insulating protective layer is formed on the passivation layer at the device area. A packaging layer is disposed over the insulating protective layer to expose the conductive pads and the passivation layer at the peripheral bonding pad area. The method includes forming an insulating protective layer to cover a plurality of conductive pads during a cutting process and removing the insulating protective layer on the conductive pads through an opening of a packaging layer.
Abstract translation: 根据本发明的实施例提供了芯片封装及其制造方法。 芯片封装包括含有芯片并具有器件面积和外围焊盘区域的半导体衬底。 多个导电焊盘设置在外围接合焊盘区域处,并且钝化层形成在半导体衬底上以露出导电焊盘。 在器件区域的钝化层上形成绝缘保护层。 封装层设置在绝缘保护层上方以在外围接合焊盘区域露出导电焊盘和钝化层。 该方法包括在切割过程中形成绝缘保护层以覆盖多个导电焊盘,并且通过封装层的开口去除导电焊盘上的绝缘保护层。
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4.
公开(公告)号:US08643198B2
公开(公告)日:2014-02-04
申请号:US13741318
申请日:2013-01-14
Applicant: Xintec Inc.
Inventor: Wen-Cheng Chien , Ching-Yu Ni , Shu-Ming Chang
IPC: B05D1/36
CPC classification number: B05D1/36 , B81B2207/096 , B81C1/00301 , H01L21/56 , H01L21/6835 , H01L24/19 , H01L24/24 , H01L24/82 , H01L27/14618 , H01L31/02002 , H01L31/0203 , H01L33/486 , H01L2224/04105 , H01L2224/12105 , H01L2224/32225 , H01L2224/73267 , H01L2224/92244 , H01L2924/01078 , H01L2924/12041 , H01L2924/12042 , H01L2924/1461 , H01L2924/15153 , H01L2924/15311 , H01L2924/18162 , H01L2924/00
Abstract: An embodiment of the invention provides a method for forming an electronic device package, which includes providing a carrier substrate having an upper surface and an opposite lower surface; forming a cavity from the upper surface of the carrier substrate; disposing an electronic device having a conducting electrode in the cavity; forming a filling layer in the cavity, wherein the filling layer surround the electronic device; thinning the carrier substrate from the lower surface to a predetermined thickness; forming at least a through-hole in the electronic device or the in the carrier substrate; and forming a conducting layer over a sidewall of the through-hole, wherein the conducting layer electrically connects to the conducting electrode.
Abstract translation: 本发明的实施例提供了一种形成电子器件封装的方法,该方法包括提供具有上表面和相对下表面的载体衬底; 从所述载体基板的上表面形成空腔; 将具有导电电极的电子设备设置在空腔中; 在所述空腔中形成填充层,其中所述填充层围绕所述电子设备; 将载体基板从下表面变薄到预定厚度; 在电子设备或载体衬底中形成至少一个通孔; 以及在所述通孔的侧壁上形成导电层,其中所述导电层与所述导电电极电连接。
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公开(公告)号:US09799588B2
公开(公告)日:2017-10-24
申请号:US14341573
申请日:2014-07-25
Applicant: XINTEC INC.
Inventor: Ching-Yu Ni , Chia-Ming Cheng , Nan-Chun Lin
IPC: H01L23/498 , H01L23/31 , H01L23/00 , H01L21/78
CPC classification number: H01L23/498 , H01L21/78 , H01L23/3114 , H01L23/3192 , H01L24/06 , H01L2224/05624 , H01L2224/05647 , H01L2924/01013 , H01L2924/01014 , H01L2924/01029 , H01L2924/01033 , H01L2924/01082 , H01L2924/014 , H01L2924/05042 , H01L2924/14 , H01L2924/1461 , H01L2924/15788 , H01L2924/16195 , H01L2924/16235 , H01L2924/00014 , H01L2924/00
Abstract: A chip package and a fabrication method thereof are provided according to an embodiment of the invention. The chip package includes a semiconductor substrate containing a chip and having a device area and a peripheral bonding pad area. A plurality of conductive pads is disposed at the peripheral bonding pad area and a passivation layer is formed over the semiconductor substrate to expose the conductive pads. An insulating protective layer is formed on the passivation layer at the device area. A packaging layer is disposed over the insulating protective layer to expose the conductive pads and the passivation layer at the peripheral bonding pad area. The method includes forming an insulating protective layer to cover a plurality of conductive pads during a cutting process and removing the insulating protective layer on the conductive pads through an opening of a packaging layer.
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6.
公开(公告)号:US08552547B2
公开(公告)日:2013-10-08
申请号:US13741320
申请日:2013-01-14
Applicant: Xintec Inc.
Inventor: Wen-Cheng Chien , Ching-Yu Ni , Shu-Ming Chang
IPC: H01L23/48
CPC classification number: B05D1/36 , B81B2207/096 , B81C1/00301 , H01L21/56 , H01L21/6835 , H01L24/19 , H01L24/24 , H01L24/82 , H01L27/14618 , H01L31/02002 , H01L31/0203 , H01L33/486 , H01L2224/04105 , H01L2224/12105 , H01L2224/32225 , H01L2224/73267 , H01L2224/92244 , H01L2924/01078 , H01L2924/12041 , H01L2924/12042 , H01L2924/1461 , H01L2924/15153 , H01L2924/15311 , H01L2924/18162 , H01L2924/00
Abstract: An embodiment of the invention provides a method for forming an electronic device package, which includes providing a carrier substrate having an upper surface and an opposite lower surface; forming a cavity from the upper surface of the carrier substrate; disposing an electronic device having a conducting electrode in the cavity; forming a filling layer in the cavity, wherein the filling layer surround the electronic device; thinning the carrier substrate from the lower surface to a predetermined thickness; forming at least a through-hole in the electronic device or the in the carrier substrate; and forming a conducting layer over a sidewall of the through-hole, wherein the conducting layer electrically connects to the conducting electrode.
Abstract translation: 本发明的实施例提供了一种形成电子器件封装的方法,该方法包括提供具有上表面和相对下表面的载体衬底; 从所述载体基板的上表面形成空腔; 将具有导电电极的电子设备设置在空腔中; 在所述空腔中形成填充层,其中所述填充层围绕所述电子设备; 将载体基板从下表面变薄到预定厚度; 在电子设备或载体衬底中形成至少一个通孔; 以及在所述通孔的侧壁上形成导电层,其中所述导电层与所述导电电极电连接。
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