Semiconductor Device and Method of Manufacture

    公开(公告)号:US20190067179A1

    公开(公告)日:2019-02-28

    申请号:US16108535

    申请日:2018-08-22

    IPC分类号: H01L23/498 H01L21/768

    摘要: A dielectric layer is formed over a substrate, an anti-reflective layer is formed over the porous dielectric layer, and a first hardmask is formed over the anti-reflective layer. A via opening and a trench opening are formed within the porous dielectric layer using the anti-reflective layer and the first hardmask as masking materials. After the formation of the trench opening and the via opening, the first hardmask is removed. An interconnect is formed within the openings, and the interconnect has a via with a profile angle of between about 70° and about 80° and a depth ratio of between about 65% and about 70%.

    THREE-STATE MEMORY DEVICE
    5.
    发明公开

    公开(公告)号:US20240365680A1

    公开(公告)日:2024-10-31

    申请号:US18764426

    申请日:2024-07-05

    发明人: Mauricio Manfrini

    摘要: The present disclosure relates to an integrated chip including a bottom electrode arranged within a dielectric layer. A memory element is directly over the bottom electrode and is arranged within the dielectric layer. A top electrode is directly over the memory element and is arranged within the dielectric layer. A conductive via is directly over the top electrode. A pair of lines that extend along opposing sidewalls of the top electrode are directly over, and intersect, an uppermost surface of the memory element. The pair of lines are directly under, and intersect, a lowermost surface of the via.