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    Acid generating agent for chemically amplified resist compositions
    5.
    发明授权
    Acid generating agent for chemically amplified resist compositions 有权
    用于化学放大抗蚀剂组合物的酸产生剂

    公开(公告)号：US08241831B2

    公开(公告)日：2012-08-14

    申请号：US12231814

    申请日：2008-09-05

    申请人： Sung-Do Jung ,  Jin-Ho Kim ,  Jung-Hoon Oh ,  Hyun-Soon Lim

    发明人： Sung-Do Jung ,  Jin-Ho Kim ,  Jung-Hoon Oh ,  Hyun-Soon Lim

    IPC分类号： G03F7/004 ,  C07C309/65

    CPC分类号： C07C309/68 ,  C07C329/06 ,  C07C381/12 ,  C07C2602/42 ,  G03F7/0045 ,  G03F7/0397 ,  G03F7/2041

    摘要： An acid generating agent represented by the following formula (1) or (2) is provided, which is included in chemically amplified resist compositions: wherein in the formula (1) and (2), X represents an unsubstituted or substituted alkyl group having 1 to 20 carbon atoms and selected from alkyl, haloalkyl and alkylsulfonyl, which may have at least one hydrogen atom substituted by an ether group, an ester group, a carbonyl group, an acetal group, a nitrile group, a cyano group, a hydroxyl group, a carboxyl group or an aldehyde group, or represents a perfluoroalkyl group having 1 to 4 carbon atoms; R6 represents an alkyl group having 1 to 10 carbon atoms, an alkoxy group having 1 to 10 carbon atoms, or a heteroatom selected from nitrogen, sulfur, fluorine and oxygen; m is an integer from 0 to 2; and A+ is an organic counterion.

    摘要翻译： 提供了由下列通式（1）或（2）表示的酸产生剂，其包括在化学放大型抗蚀剂组合物中：其中在式（1）和（2）中，X表示未取代或取代的具有1 20个碳原子，选自烷基，卤代烷基和烷基磺酰基，其可以具有至少一个被醚基取代的氢原子，酯基，羰基，缩醛基，腈基，氰基，羟基 ，羧基或醛基，或者表示碳原子数1〜4的全氟烷基。 R 6表示碳原子数1〜10的烷基，碳原子数1〜10的烷氧基或氮，硫，氟和氧的杂原子。 m为0〜2的整数; 而A +是一种有机的抗衡离子。

    Monomers comprising superacidic groups, and polymers therefrom
    6.
    发明申请
    Monomers comprising superacidic groups, and polymers therefrom 审中-公开
    包含超酸基团的单体及其聚合物

    公开(公告)号：US20080114183A1

    公开(公告)日：2008-05-15

    申请号：US11598947

    申请日：2006-11-14

    申请人： David Roger Moore ,  Hongyi Zhou ,  Daniel Joseph Brunelle ,  Joyce Hung ,  Hongwei Liu ,  Daniel Steiger

    发明人： David Roger Moore ,  Hongyi Zhou ,  Daniel Joseph Brunelle ,  Joyce Hung ,  Hongwei Liu ,  Daniel Steiger

    IPC分类号： C07C309/19 ,  C07C309/65

    CPC分类号： C07C309/11 ,  C07C309/10 ,  C07C309/24 ,  C07C309/68 ,  C07C317/22 ,  C07C323/66 ,  C07C2603/94 ,  C08G75/23 ,  H01M8/1025 ,  H01M2300/0082

    摘要： The invention relates generally to monomers comprising superacidic functional groups. The superacidic functional groups comprise fluorinated sulfonate moieties. Monomers provided by the present invention include dihydroxy aromatic compounds, aromatic diamines, aromatic dicarboxylic acids, aromatic diacarboxylic acid esters, aromatic dithiols, and monomers comprising mixed functionalities, for example monomers comprising an aromatic amine group and an aromatic hydroxyl group. The monomers provided by the present invention are useful in the preparation of novel polymers comprising superacidic functional groups, materials useful in membrane applications. The superacidic functional groups present in the polymer compositions impart excellent proton conductivities. In one embodiment, the present invention provides monomers which may be used to prepare polymers useful as materials for polymer electrolyte fuel cell membranes.

    摘要翻译： 本发明一般涉及包含超酸官能团的单体。 超酸性官能团包括氟化磺酸盐部分。 由本发明提供的单体包括二羟基芳族化合物，芳族二胺，芳族二羧酸，芳族二羧酸酯，芳族二硫醇和包含混合官能团的单体，例如包含芳族胺基和芳族羟基的单体。 由本发明提供的单体可用于制备包含超酸性官能团的新型聚合物，可用于膜应用的材料。 存在于聚合物组合物中的超酸性官能团赋予优异的质子电导率。 在一个实施方案中，本发明提供可用于制备用作聚合物电解质燃料电池膜材料的聚合物的单体。